JPH0638400Y2 - マイクロ波プラズマ発生装置 - Google Patents

マイクロ波プラズマ発生装置

Info

Publication number
JPH0638400Y2
JPH0638400Y2 JP1487788U JP1487788U JPH0638400Y2 JP H0638400 Y2 JPH0638400 Y2 JP H0638400Y2 JP 1487788 U JP1487788 U JP 1487788U JP 1487788 U JP1487788 U JP 1487788U JP H0638400 Y2 JPH0638400 Y2 JP H0638400Y2
Authority
JP
Japan
Prior art keywords
dielectric
microwave
plasma
plasma generator
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1487788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01119200U (OSRAM
Inventor
恭一 小町
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP1487788U priority Critical patent/JPH0638400Y2/ja
Publication of JPH01119200U publication Critical patent/JPH01119200U/ja
Application granted granted Critical
Publication of JPH0638400Y2 publication Critical patent/JPH0638400Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1487788U 1988-02-06 1988-02-06 マイクロ波プラズマ発生装置 Expired - Lifetime JPH0638400Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1487788U JPH0638400Y2 (ja) 1988-02-06 1988-02-06 マイクロ波プラズマ発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1487788U JPH0638400Y2 (ja) 1988-02-06 1988-02-06 マイクロ波プラズマ発生装置

Publications (2)

Publication Number Publication Date
JPH01119200U JPH01119200U (OSRAM) 1989-08-11
JPH0638400Y2 true JPH0638400Y2 (ja) 1994-10-05

Family

ID=31226458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1487788U Expired - Lifetime JPH0638400Y2 (ja) 1988-02-06 1988-02-06 マイクロ波プラズマ発生装置

Country Status (1)

Country Link
JP (1) JPH0638400Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3727705B2 (ja) * 1996-02-15 2005-12-14 株式会社ブリヂストン マイクロ波プラズマ発生装置

Also Published As

Publication number Publication date
JPH01119200U (OSRAM) 1989-08-11

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