JPH0637445Y2 - 高圧源気体の定流量送気装置 - Google Patents
高圧源気体の定流量送気装置Info
- Publication number
- JPH0637445Y2 JPH0637445Y2 JP10002488U JP10002488U JPH0637445Y2 JP H0637445 Y2 JPH0637445 Y2 JP H0637445Y2 JP 10002488 U JP10002488 U JP 10002488U JP 10002488 U JP10002488 U JP 10002488U JP H0637445 Y2 JPH0637445 Y2 JP H0637445Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- flow rate
- air supply
- supply device
- pressure source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 5
- 238000012546 transfer Methods 0.000 claims description 2
- 230000011664 signaling Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 89
- 239000007788 liquid Substances 0.000 description 12
- 230000001276 controlling effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012770 industrial material Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Landscapes
- Electromagnetic Pumps, Or The Like (AREA)
- Pipeline Systems (AREA)
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10002488U JPH0637445Y2 (ja) | 1988-07-27 | 1988-07-27 | 高圧源気体の定流量送気装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10002488U JPH0637445Y2 (ja) | 1988-07-27 | 1988-07-27 | 高圧源気体の定流量送気装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0223713U JPH0223713U (enExample) | 1990-02-16 |
| JPH0637445Y2 true JPH0637445Y2 (ja) | 1994-09-28 |
Family
ID=31327723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10002488U Expired - Lifetime JPH0637445Y2 (ja) | 1988-07-27 | 1988-07-27 | 高圧源気体の定流量送気装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0637445Y2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2550033Y2 (ja) * | 1991-03-27 | 1997-10-08 | 三和シヤッター工業株式会社 | 駐車装置 |
-
1988
- 1988-07-27 JP JP10002488U patent/JPH0637445Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0223713U (enExample) | 1990-02-16 |
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