JPH0634791U - Ultraviolet irradiation device with rectifying plate - Google Patents

Abstract

(57) [Abstract] [Purpose] Increase the UV irradiation dose to the fluid that is used for the treatment of bacteria in the fluid by UV irradiation, oxidative decomposition of organic substances, decomposition of harmful substances, etc.
Furthermore, the processing flow rate of the fluid is increased. [Structure] A plurality of transparent cylinders containing UV lamps are arranged at intervals in the processing device, and sterilization of bacteria in the fluid, oxidative decomposition of organic substances, decomposition of harmful substances, etc. are performed by UV irradiation. In the ultraviolet irradiation device having a flow path, a plurality of rectifying plates are arranged at intervals in a plurality of transmitting cylinders, and each circulation hole of the rectifying plate is formed on the outer surface of the plurality of transmitting cylinders with a fluid. Fit with a gap that allows
An ultraviolet irradiation device additionally provided with a current plate installed inside the processing device so that the outer side of each current plate contacts the inner surface of the processing device.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a fluid ultraviolet irradiation device provided with a rectifying plate, and a fluid such as a fluid (a liquid such as water or a gas such as gas) used in semiconductor manufacturing, pharmaceutical manufacturing, etc. It is used to sterilize the waste fluid that has been used, such as bacteria, oxidative decomposition of organic substances, and oxidative decomposition of harmful substances.

[0002]

[Prior art]

 Ultraviolet irradiation equipment is used in various industrial fields to irradiate a fluid with ultraviolet rays to obtain a treated fluid that does not contain bacteria, organic substances, harmful substances, etc. Some rectifiers do not have a rectifying plate attached to them, which may cause the fluid to flow in a direction that is farther than the UV lamp, causing a flow of fluid that is not sufficiently exposed to the UV rays. Since there is a flow with a small irradiation dose, the processing result (purity, etc.) of the fluid as a whole deteriorates. Also, in this type of UV irradiation device, the fluid passes through transiently, so that the UV irradiation time is short, and because a fluid flowing in a location farther than the UV lamp is generated, the UV irradiation is unsuccessful. It had the drawback of being sufficient.

As a measure against such a problem, a stirring plate or a windmill plate for generating a turbulent flow in the fluid passage may be additionally provided. In this case, however, the fluid is in a turbulent state. Although it is slightly improved in terms of UV irradiation, the fluid flows as a layer with a certain thickness, and as a result, the existence of the fluid flowing in the direction farther than the UV lamp and the flow of the fluid cannot be eliminated, and the flow velocity of the fluid When it was slow, turbulent flow did not occur and the desired effect was often not achieved.

Further, since the stirring plate and the windmill slope do not have ultraviolet ray transparency, fluids that do not receive ultraviolet ray irradiation are generated as shadows of these fluids. The treatment results were often adversely affected. Some conventional devices also have a rectifying plate, but like the agitating plate and windmill slope described above, they do not have ultraviolet light transparency, so these are shadows and the amount of ultraviolet light irradiation of the entire fluid is large. It did not change.

[0005]

[Problems to be solved by the present invention]

 In semiconductor manufacturing, pharmaceutical manufacturing, etc., the purity of liquids such as water and gases such as gases used in manufacturing these products becomes a problem, and the ultraviolet irradiation dose for these fluids is increased to improve the purity of the processing fluid. Improvement is a challenge, or the same applies to liquids such as wastewater and gaseous fluids such as waste gas used in the manufacture of these products. An object of the present invention is to improve the processing purity of a fluid by increasing the ultraviolet irradiation amount of the fluid to be processed in the ultraviolet irradiation apparatus of the fluid, and further to cope with the increase of the processing flow rate of the fluid.

[0006]

[Means for Solving the Problems]

 The present invention relates to an ultraviolet irradiation device provided with a rectifying plate. For example, a large tank-shaped processing device is provided with a plurality of ultraviolet-transmitting transparent cylinders having ultraviolet lamps at intervals. It is an ultraviolet irradiation device that is equipped with a flow path that sterilizes bacteria in the fluid, oxidative decomposition of organic matter, decomposition of harmful substances, etc. by irradiation with ultraviolet light. When arranging the rectifying plates made of the material having the ultraviolet ray transmissivity described above at intervals, fit the respective flow holes of the rectifying plates into the outer surface of the plurality of transmission cylinders with a space for allowing the passage of fluid, and It is characterized in that it is installed in the processing device so that the outer side of each straightening plate is in contact with the inner surface of the processing device.

The present invention also relates to an ultraviolet irradiation device provided with a straightening vane, in which cleaning tools such as brushes and brushes for cleaning the transparent barrel are attached to the respective flow holes of the straightening vane, and the straightening vane is attached to the transparent barrel. It is characterized in that it moves along the inside of the processing device. Further, the present invention relates to an ultraviolet irradiation device provided with a rectifying plate, and a partition plate made of a material having an ultraviolet permeable property is provided in the processing device between the transmitting cylinder and the transmitting cylinder at a right angle to the rectifying plate. When arranging, provide notch-shaped flow ports at the end of each partition plate, and position these cut-out flow ports alternately at one end or the other end of the partition plate. By this, the process flow paths are communicated with each other through the flow ports of the partition plates to form a meandering process flow path.

[0008]

[Action]

 Since the processing flow path of the inflow part in the processing equipment is divided by a partition plate and a straightening plate is installed, when waste water is flowed into this processing flow path, the waste water will be separated from the inner circumference of the flow hole of each straightening plate. The UV lamps sequentially flow into each of the flow gaps formed between the UV lamp and the outer surface of the built-in transmission tube, and a thin film is formed by each flow gap, and the adjacent UV lamps come into contact with the built-in transmission tube in multiple stages. Then, it receives sufficient UV irradiation to efficiently oxidize and decompose the organic matter in the wastewater.

[0009]

【Example】

 The fluid UV irradiation device of the present invention will be described below by taking as an example the case of treating wastewater containing organic substances as impurities. Reference numeral 1 is a treatment device for a rectangular tank. A plurality of transmission cylinders 3 each containing an ultraviolet lamp 2 are arranged at intervals to form a processing flow path 4 for ultraviolet irradiation processing, that is, for oxidative decomposition processing of organic matter in wastewater. The transparent cylinder 3 is made of a material having ultraviolet transparency, for example, quartz glass, and a plurality of rectangular rectifying plates 5 are arranged at intervals on the plurality of transparent cylinders 3. A plurality of circulation holes 6 may be provided in each of the straightening vanes 5, and the circulation holes 6 may be fitted into the outer surfaces of the plurality of permeation cylinders 3 with a gap 7 through which waste water containing organic substances passes.

The rectifying plate 5 is made of a material having a transparency to ultraviolet rays, for example, quartz glass, similarly to the above-mentioned transmitting cylinder, and the processing device is arranged so that the outer side of each rectifying plate 5 contacts the inner surface of the processing apparatus 1. Install in 1. In addition, a rectangular partition plate 8 may be disposed in the processing device 1. In this case, the partition plate 8 is disposed between the transparent cylinders 3 and in parallel with the transparent cylinder 3. And at a right angle to each straightening vane 5. Further, a cutout-shaped flow port 9 is provided at the end of each partition plate 8, and the positions of the cutout-shaped flow ports 9 are alternately partitioned. By providing the plate 8 at one end or the other end, the process flow paths 4 may be communicated with each other through the flow ports 9 of each partition plate 8 to form the meandering process flow paths 4. The partition plate 8 is made of a material having a transparency to ultraviolet rays, for example, quartz glass, similarly to the transmission cylinder 3 and the rectifying plate 5 described above, and the outer side of each partition plate 8 is in contact with the inner surface of the processing apparatus 1. It may be mounted in the processing apparatus 1 as described above.

As the ultraviolet lamp 2 used when performing ultraviolet irradiation, a low pressure sterilization lamp having a main wavelength of 254 nm, a low pressure ozone lamp having a main wavelength of 185 nm and 254 nm, and a medium / high pressure lamp having a main wavelength of 185 nm, 254 nm and 365 nm are used. In addition, a solar lamp, a chemical lamp, a black light lamp, a metal halide lamp, a sodium lamp, and various lamps having a wavelength of 700 nm or less can be used depending on the purpose of treatment.

Quartz glass is often used as the transmissive tube 3 containing the ultraviolet lamp 2 because it is inexpensive, but in addition to quartz glass, for example, fluororesin, Teflon, etc. have high ultraviolet transmittance, and Any material can be used as long as the eluent does not flow out into the fluid

The outer shape of the straightening vane 5 is the same as the inner shape of the processing device 1, and the inner diameter of the flow hole 6 of the straightening vane 5 is set to be 2 to 40 mm larger than the outer diameter of the transmission tube 3. In other words, the flow gap 7 formed between the flow hole 6 and the outer surface of the transparent tube 3 should be 2 to 40 mm, and preferably 5 to 20 mm. The number of rectifying plates 5 to be installed varies depending on the lengths of the processing device 1 and the transmission tube 3, but it is usually 2 to 15, and preferably 5 to 10, and the rectifying plates 5 and 5 may be installed. The distance between and should be 5 to 30 cm.

As a method of mounting the flow straightening plate 5, the outer side of the flow straightening plate 5 may be attached to the inner surface of the processing device 1, or a rod (not shown) penetrating the flow straightening plate 5 or the like. May be attached to. The treatment device 1 is often made of stainless steel, but a material other than stainless steel that does not allow the eluate to flow out can be used, and the treatment device 1 is provided with a waste water inlet 10 and an outlet 11. The reason why the rectifying plate 5 is made of quartz glass is to eliminate the shadow of the rectifying plate 5 and to increase the amount of ultraviolet ray irradiation. In normal cases, it is cheaper to use quartz glass. In many cases, other than quartz glass, any material can be used as long as it has a high ultraviolet transmittance such as fluororesin, hard glass, and Teflon, and the eluate does not flow out into the fluid. The same).

The rectifying plate 5 has a structure in which each of the circulation holes 6 is provided with a transmission tube 3 having a built-in ultraviolet lamp 2 with a circulation gap 7 between them. If the diameter of each circulation hole 6 is determined so that the porosity, that is, the proportion of the circulation gap 7 in the circulation hole 6, becomes equal, the flow velocity in each flow passage 4 can be made uniform, and the processing flow rate of the fluid can be increased. It is possible to secure a sufficient amount of ultraviolet irradiation in response to the increase in

As shown in FIG. 2, a cleaning tool 12 such as a brush or a brush is attached to each flow hole 6 of the current plate 5, and a sliding plate 14 provided with a rod 13 is fixed to the current plate 5. The rectifying plate 5 may be moved along the permeation tube 3 inside the processing apparatus 1 by this rod to clean the permeation tube 3.

The partition plate 8 has one end that is in contact with the inner surface of the processing apparatus 1 and the other end that serves as a cutout-shaped distribution port 9. The position of this distribution port 9 is the right end portion of each partition plate 8. And the left end are alternately provided, and the wastewater flows through the flow port 9 by alternately changing the flow direction of the right flow and the left flow to form a continuous meandering process flow path 4. You can The number of partition plates 8 to be installed depends on the required irradiation amount of ultraviolet rays, the processing flow rate of the fluid and the lengths of the processing cylinder 1 and the transmission cylinder 3, but it is usually 2 to 12, preferably 4 to 8 The distance between the partition plates 8 may be 10 to 30 cm, and the size of the cutout-shaped flow port 9 may vary depending on the size and shape of the processing apparatus 1, the processing flow velocity of the fluid, the flow rate, and the like. In the normal case, it may be 1 to 20 cm.

Next, the operation of the ultraviolet irradiation device of the present invention will be described. When wastewater containing organic substances is introduced into the treatment channel 4 through the inflow pipe 10 of the treatment device 1, the inflow portion of the treatment device 1 Since the treatment flow path 4 is divided by the partition plate 8 and the straightening vane 5 is provided, the wastewater does not flow to other places along the inner surface of the treatment apparatus 1 and the flow hole 6 of the straightening vane 5 is It flows in the right direction toward the flow gap 7 formed between the inner circumference and the outer surface of the transmission tube 3 in which the ultraviolet lamp 2 is incorporated.

Then, the wastewater becomes a thin film in the flow gap 6 and flows sufficiently in contact with the adjacent transmission cylinder 3, while the flow straightening plate 5 and the partition plate 8 are transparent to ultraviolet light, so that they are irradiated with ultraviolet light. The wastewater is efficiently oxidatively decomposed by the ultraviolet rays that are radiated from various directions without being alienated, and the wastewater then flows to the right toward the next distribution gap 7. Since the processing flow path 4 is also divided by the partition plate 8 and the straightening plate 5 is provided, the waste water does not flow to other places, and the flow formed between the straightening plate 5 and the outer surface of the permeation tube 3 is formed. Flowing in the right direction toward the gap 7, the flow gap 6 is also efficiently oxidatively decomposed from wastewater organic matter by irradiation of ultraviolet rays that are sufficiently multifaceted, as described above. And then the wastewater is It flows toward the gap 7 to the right, performs the same efficient oxidative decomposition treatment of organic matter in the wastewater, and thereafter the wastewater sequentially flows toward the distribution gap 7 to the right, thus Oxidative decomposition of waste water is carried out in multiple stages.

Further, the fluid flows into the cutout-shaped flow port 9 of the partition plate 8 and from there, flows to the left in the process flow path 4, and the process flow path 4 in this portion also connects to the partition plate 8. Since the straightening vanes 5 are provided, the wastewater does not flow to other places, but flows leftward toward the circulation gap 7 formed between the straightening vanes 5 and the outer surface of the permeation tube 3, and again here. As in the case described above, efficient oxidative decomposition treatment of wastewater is performed, and thereafter, the wastewater flows leftward toward each circulation gap 7 to perform efficient oxidative decomposition treatment in multiple stages.

Then, the wastewater flows into the cutout-shaped flow port 9 of the next partition plate 8, and again flows to the right in the process flow path 4, and in the same manner as described above, the current plate 5 and the partition plate 5 are discharged. Multi-stage efficient oxidative decomposition treatment of wastewater according to No. 8 is repeated, and thereafter such continuous meandering multi-stage efficient wastewater oxidative decomposition treatment is repeated, and the wastewater is synergistic and dramatic. It receives the UV irradiation dose, flows out to the outside from the outflow pipe 11 of the processing apparatus as a cleaning liquid in which almost all organic substances are removed, and is stored for reuse. When the permeation tube 3 is contaminated with impurities such as organic matter of waste water, the flow regulating plate 5 is moved along the permeation tube 3 by the rod 13 attached to the sliding plate 14 fixed to the flow regulating plate 5 inside the processing apparatus 1. By moving the, the permeation tube 3 is washed with the cleaning tool 12 such as a brush or a brush attached to each flow hole 6 of the flow regulating plate 5.

[0022]

【effect】

 As described above, in the ultraviolet irradiation device of the present invention, it is possible to make the fluid into a thin film in the flow gap 6 of the straightening plate 5 and further to bring the fluid into sufficient contact with the adjacent transmission tube 3. In addition, since the rectifying plate 5 is transparent to ultraviolet rays, it is possible to efficiently perform ultraviolet ray irradiation treatment of the fluid by the ultraviolet rays that are radiated in multiple directions, without the irradiation of ultraviolet rays being blocked. By performing such efficient UV irradiation treatment of the fluid in multiple stages, the fluid receives a synergistic and dramatic UV irradiation amount, and a clean fluid containing almost no impurities can be obtained. It is possible to increase the UV irradiation dose by 1.5 to 3 times compared to the conventional equipment, and the processing purity of the fluid can be improved to 1.5 to 3 times compared to the conventional equipment. The processing flow rate of conventional equipment It can be increased with 1.5 to 3-fold compared.

In addition, when the ultraviolet irradiation apparatus of the present invention performs the ultraviolet irradiation processing of the multi-step efficient fluid that continuously meanders by the flow straightening plate 5 and the partition plate 8, the thin film fluid is moved to the close proximity. Since it is possible to make more intimate contact with the transparent tube 3 that has been formed, and because the rectifying plate 5 and the partition plate 8 are also UV-transparent, the UV irradiation is not alienated, and irradiation is more multifaceted. It is possible to perform more efficient UV irradiation treatment of fluids by using such UV rays. Furthermore, by repeating such more efficient UV irradiation treatment of fluids in multiple steps, the fluids are more synergistic. It is possible to obtain a clean fluid that does not contain any impurities by receiving a dramatic and dramatic ultraviolet irradiation dose, and it is possible to increase the irradiation dose by 1.5 to 3 times compared to conventional devices. of The processing purity can be improved to 1.5 to 3 times that of the conventional apparatus, and the processing flow rate of the fluid can be increased to 1.5 to 3 times as compared to the conventional apparatus.

Further, according to the present invention, the straightening vane 5 can be moved by the rod 13 attached to the sliding plate 14 fixed to the straightening vane 5 without disassembling the processing device 1 or performing a troublesome work. Thus, there is also an advantage that the transmission cylinder 3 contaminated with impurities such as organic substances can be washed. The fluid treated by the ultraviolet irradiation of the ultraviolet irradiation device of the present invention has a high purity, and is therefore suitable as the water required for semiconductor manufacturing, pharmaceutical manufacturing, etc., and is also used for other industrial water. can do. According to the ultraviolet irradiator of the present invention, the rectifying plate 5 and the partition plate 8 can perform very efficient ultraviolet irradiating treatment, so that the device can be made compact and the device design. Can be smart too.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of an ultraviolet irradiating device that forms a continuously meandering processing flow path by a straightening plate 5 and a partition plate 8 of the present invention and performs multi-stage efficient ultraviolet irradiation processing of a fluid.

FIG. 2 is a rectifying plate 5 arranged in the ultraviolet irradiation device of the present invention.
FIG. 9 is a perspective view showing a state in which the transparent tube 3 is cleaned by the cleaning tool 12 attached to each of the circulation holes 6.

[Explanation of symbols]

 1 Processing Tube 2 Ultraviolet Lamp 3 Transmission Tube 4 Processing Flow Path 5 Rectifying Plate 6 Distribution Hole 7 Distribution Gap 8 Partition Plate 9 Distribution Port 12 Cleaning Tool

Claims (3)

[Scope of utility model registration request] 1. A processing apparatus comprising a plurality of transparent cylinders, each having a UV lamp therein, which are arranged at intervals, and are irradiated with UV rays to sterilize bacteria in a fluid, oxidative decomposition of organic matter, decomposition of harmful substances, etc. In the ultraviolet irradiator having a flow path for performing the process of (1), a plurality of transparent cylinders are provided with rectifying plates made of a material having ultraviolet light transmissivity at intervals. On the side, each circulation hole of the current plate,
An ultraviolet irradiating device fitted with a rectifying plate mounted inside the processing device so that a fluid-passing gap is maintained and the outer side of each rectifying plate is in contact with the inner surface of the processing device. 2. A cleaning tool such as a brush or a brush for cleaning the transparent cylinder is attached to each flow hole of the straightening plate, and the straightening plate is moved in the processing device along the transparent cylinder. UV irradiator equipped with a current plate. 3. A partition plate, which is made of a material having UV transparency and is disposed between the transparent cylinders and at a right angle to the rectifying plate in the processing device, the partition plates are cut at the end portions thereof. Along with providing the notch-shaped flow port, the position of this notch-shaped flow port is alternately provided at one end or the other end of the partition plate, so that the processing flow path is formed at the flow port of each partition plate. The ultraviolet irradiation device provided with the flow straightening plate according to claim 1 or 2, wherein a meandering processing flow path is formed so as to communicate with each other.