JPH06343823A - Intake and exhaust treatment system for clean chamber - Google Patents

Abstract

PURPOSE:To improve the throughput of an active carbon organic exhaust treating device by removing moisture in exhaust gas which lowers the throughput of the active carbon organic exhaust treating device. CONSTITUTION:In organic system equipment discharging organic component contg. exhaust gas and placed in a clean chamber and an intake and exhaust treatment system for the clean chamber where the exhaust gas is treated by an active carbon organic exhaust treating device, a dehumidifying mechanism 6 placed in the poststage of a circulated air conditioner 2, an independent chamber 5 ecclosing the organic system equipment 10, an exhaust duct 8 and the active carbon organic exhaust treating device 9 are installed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room air supply / exhaust treatment system in a circulating air conditioning system for a clean space of a semiconductor manufacturing factory or the like.

[0002]

2. Description of the Related Art In a conventional clean room air supply / exhaust treatment system, a clean space is created by an air flow passing through an air conditioner and an air filter, and a production facility requiring cleanliness is placed therein. . Exhaust gas containing organic components discharged from the organic equipment of the production equipment is adsorbed by the activated carbon organic exhaust treatment device, and the adsorption capacity of activated carbon has a great influence on the exhaust treatment capacity. There is. In addition, the adsorption capacity of activated carbon has a property that the smaller the amount of water contained in the gas to be treated, the higher the adsorption capacity, and therefore the adsorption capacity of the organic equipment around the organic equipment that accounts for most of the exhaust gas discharged from the organic equipment. Moisture in the air reduces the adsorption capacity of activated carbon.

[0003]

In this conventional clean room air supply / exhaust treatment system, the organic production equipment placed in the clean space sucks in the air around it and passes it through the exhaust duct as the exhaust gas, and the activated carbon organic exhaust treatment is carried out. The exhaust gas is exhausted to the apparatus, and at this time, there is a problem that the water contained in the exhaust gas lowers the activated carbon adsorption capacity of the activated carbon organic exhaust treatment apparatus.

[0004]

In the clean room air supply / exhaust treatment system of the present invention, an organic production facility placed in a clean space is surrounded by a dedicated independent chamber, and clean air supplied into the independent chamber is supplied to the independent chamber. The dehumidification mechanism installed upstream removes water and suppresses the amount of water in the exhaust gas exhausted from the production equipment to the activated carbon organic exhaust treatment device through the exhaust duct, thereby increasing the activated carbon adsorption capacity of the activated carbon organic exhaust treatment device. It is something that is raised.

[0005]

In the activated carbon organic exhaust treatment apparatus for treating the organic exhaust gas discharged from the organic production equipment as in the present invention, the water contained in the organic exhaust gas is a factor that inhibits the adsorption of the activated carbon. It has become.
On the other hand, most of the water contained in the organic exhaust gas exists in the air around the organic production equipment. By putting the organic production equipment inside the chamber and removing the water supplied to the inside of the chamber from the air conditioning system by the air dryer installed at the upper part of the chamber, and reducing the water in the organic exhaust gas. The function is to improve the treatment capacity of the activated carbon organic exhaust treatment device.

[0006]

Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a diagram showing an embodiment of a clean room supply / exhaust treatment system of the present invention. The circulating air conditioner 2 is provided in the rear stage of the outside air conditioner 1, and the air filter units 3a, 3
b, 3c are connected to the ceiling air filter 4 and the dehumidifying mechanism 6 for the purpose of air supply. A dehumidifying mechanism 6 is provided above the independent chamber 5, and the independent chamber 5 and the dehumidifying mechanism 6 are connected through an air filter 7 for the purpose of air supply. The organic system 10 placed inside the independent chamber 5 has an exhaust duct 8
Thus, the exhaust gas is connected to the activated carbon organic exhaust treatment device 9.

Next, the operation will be described. The air processed by the outside air conditioner 1 is supplied to the circulating air conditioner 2. The air sent from the circulating air conditioner 2 passes through the air filter units 3a, 3b, 3c and the ceiling air filter 4 to be supplied as clean air, and the dehumidifying mechanism 6 provided on the upper part of the independent chamber 5. The air from which the water has been removed is supplied to the inside of the independent chamber 5 through the air filter 7. Exhaust gas from the organic facility 10 passes through the exhaust duct 8 and is treated by the activated carbon organic exhaust treatment device 9 to be released into the atmosphere.

At this time, most of the exhaust gas treated by the activated carbon organic treatment apparatus 9 is clean air from which moisture has been removed by the dehumidifying mechanism 6, so that even after passing through the organic equipment 10, the moisture in the exhaust gas remains. Since it is small, the activated carbon adsorption capacity of the activated carbon organic exhaust treatment device 9 does not decrease. Further, the treatment capacity of the activated carbon organic exhaust treatment apparatus 9 is improved in proportion to the decrease in the amount of water in the exhaust gas. According to this embodiment, the moisture content in the exhaust gas introduced into the activated carbon organic exhaust treatment apparatus 9 is reduced from 60% to 40% in relative humidity, particularly when the substance to be treated is methylene chloride.
It has an effect of improving the processing capacity of 0 to 20%.

As described above, according to the clean room air supply / exhaust treatment system of the present invention, an independent chamber surrounding the organic production facility placed in the clean space is provided, and the clean air is introduced into the independent chamber. By removing the water in the exhaust gas discharged from the organic production facility by the dehumidifying mechanism, the effect of increasing the treatment capacity of the activated carbon organic exhaust treatment apparatus can be obtained. Moreover, since the treatment capacity is improved, the activated carbon organic exhaust treatment device can be downsized.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of a clean room air supply / exhaust system of the present invention.

[Explanation of symbols]

 1 Outdoor air conditioner 2 Circulating air conditioner 3a, 3b, 3c Air filter 4 Ceiling air filter 5 Independent chamber 6 Dehumidification mechanism 7 Air filter 8 Exhaust duct 9 Activated carbon organic exhaust treatment device 10 Organic equipment

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[Procedure amendment]

[Submission date] January 7, 1994

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be amended] Claims

[Correction method] Change

[Correction content]

[Claims]

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0004

[Correction method] Change

[Correction content]

[0004]

In the clean room air supply / exhaust treatment system of the present invention, an organic production facility placed in a clean space is surrounded by a dedicated independent chamber, and clean air supplied into the independent chamber is supplied to the independent chamber. The dehumidification mechanism installed upstream removes water and suppresses the amount of water in the exhaust gas exhausted from the production equipment to the activated carbon organic exhaust treatment device through the exhaust duct, thereby increasing the activated carbon adsorption capacity of the activated carbon organic exhaust treatment device. It is something that is raised. In addition, an air filter is provided between an independent chamber that surrounds the organic equipment and a dehumidifying mechanism that is provided in the middle of an air supply system that supplies clean air to the independent chamber.

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction content]

[0009]

As described above, according to the clean room air supply / exhaust treatment system of the present invention, the independent chamber surrounding the organic production facility placed in the clean space is provided, and the clean introduced into the independent chamber. By removing the moisture in the air by the dehumidifying mechanism and lowering the moisture in the exhaust gas discharged from the organic production facility, the activated carbon organic exhaust treatment device has the effect of increasing the treatment capacity. Moreover, since the treatment capacity is improved, the activated carbon organic exhaust treatment device can be downsized.

Claims (1)

[Claims] 1. An organic facility for exhausting exhaust gas having an organic component placed in a clean room, and a clean room air supply / exhaust treatment system for treating the exhaust gas by an activated carbon organic exhaust treatment device, the organic facility is surrounded. A clean room air supply / exhaust treatment system comprising an independent chamber and a dehumidifying mechanism provided in the middle of an air supply system for supplying clean air to the independent chamber.