JPH063406A - Method and system for measurement of operational signal - Google Patents

Abstract

PURPOSE:To improve accuracy and reliability of measurement in connection with improvement of an operational signal measuring system by statistically processing all the data on voltage measurement so as to accurately decide the signal levels of higher and lower orders instead of assuming maximum-minimum values of the measured waveform as amplitude depending on the phase manually specified, in measuring the operational signal of a sample. CONSTITUTION:A measuring means 11 which obtains operational signal information Dv of a sample and an information processing means 12 which statistically processes the operational signal information Dv are provided. The information processing means 12 prepares a frequency distribution of the operational signal information Dv of a sample so as to separate the first frequency distribution related with the higher-order signal level DvH of the operational signal information Dv from the second frequency distribution related with the lower-order signal level DvL of the operational signal information Dv. Based upon the higher-order signal level DvH and the lower-order signal level DvL, related with operational signal information Dv, obtained by averaging the first and second frequency distributions, the higher-order level or lower-order level of operational signal value V or operational signal information Dv an a sample is outputted.

Description

Detailed Description of the Invention

[Table of Contents] Industrial Application Field of the Prior Art (FIG. 6) Problem to be Solved by the Invention Means for Solving the Problem (FIGS. 1 and 2) Action Example (FIGS. 3 to 5) effect

[0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an operating signal measuring apparatus and an operating signal measuring method, and more particularly to an apparatus for measuring an operating voltage waveform of a semiconductor integrated circuit device and an improvement of the method. Is.

In recent years, with the increase in speed of semiconductor integrated circuit (hereinafter referred to as LSI) devices, operation voltage waveforms are measured by a sampling method such as an electron beam tester in order to carry out LSI operation analysis, failure analysis, operation test and the like. The technology to do is becoming important.

According to this, in the analysis operation of an LSI device or the like, generally, the maximum-minimum value of the measured waveform of the sample is used as the amplitude, or the difference between the measured voltage values at two manually specified phases is measured as the amplitude. The method is adopted.

Therefore, the influence of the overshoot / undershoot of the measured waveform of the sample is unavoidable, the measured amplitude value becomes very unstable, and in the method of manually specifying the phase, The voltage amplitude value changes depending on the phase point, which hinders reliable voltage amplitude measurement.

Therefore, there is provided an apparatus and a method for statistically processing all voltage measurement data to accurately determine upper and lower signal levels and improve the measurement accuracy and reliability. Is desired.

[0007]

2. Description of the Related Art FIG. 6 is an explanatory diagram of a voltage amplitude measuring method according to a conventional example, and FIG. 6 (a) is a configuration diagram relating to the measuring process. Further, FIG. 6B shows the voltage amplitude waveform diagram thereof.

For example, an apparatus for measuring the operating voltage v [V] using the pp value (maximum minimum difference) of the measured waveform of the sample 4 as the amplitude is shown in FIG.
It is composed of an A / D converter 2 and a digital display device 3.

The function of the apparatus is that the analog voltage v [V] of the sample 4 is measured by the sampling oscilloscope 1, the analog voltage v [V] is converted into digital voltage measurement data Dv by the A / D converter 2, It is displayed on the digital display device 3. Threshold levels such as upper level and lower level related to the analog voltage value of the sample 4 are set by the threshold adjuster VR.

Further, in FIG. 6B, the amplitude is obtained from the pp value of the measured waveform, and the analog voltage v [V] of the sample 4 includes the influence of overshoot / undershoot. . Is the amplitude obtained from the voltage value of the specified phase, and is the amplitude when the slice level is set to the upper level or lower level related to the analog voltage value of the sample 4 in order to remove the influence of overshoot / undershoot. Note that is the true amplitude, and is the difference between the measured voltage values required as the true voltage amplitude of the sample 4.

[0011]

By the way, according to the conventional example, the sample 4 which operates at a high speed by the voltage sampling method such as the sampling oscilloscope 1 and the electron beam tester according to the increase in the speed and performance of the LSI device. Is measured, and its operation analysis, failure analysis, operation test, etc. are performed.

For example, in the analysis operation of an LSI device or the like, when the edge timing, which is one of the most important measurement data, is measured, and when the threshold voltage is determined, generally the pp value of the measurement waveform is measured. Is used as the amplitude, or the difference between the measured voltage values at two manually specified phases is measured as the amplitude.

Therefore, when the pp value of the measured waveform of the sample 4 is used as the amplitude, the effect of overshoot / undershoot cannot be avoided, and the measured amplitude value becomes very unstable.

When the phase is manually designated, the voltage amplitude value changes depending on the designated phase point, so that, for example, the "H" level and the "L" level of the operating voltage including the edge rising portion are changed. In the case of a waveform that is significantly biased to the lower or upper level, it becomes difficult to perform proper level separation.

A method of displaying the voltage measurement data of the sample 4 in the frequency distribution and performing statistical processing is also conceivable. However, the thresholds of the operating voltage of "H" (high) level and "L" (low) level are set. It becomes difficult to make an accurate determination. this is,
Since the voltage waveform of the sample 4 operating at high speed contains a lot of ringing, the range for statistical processing must be cut to some threshold level. For example, the threshold value must be set to an amplitude level of about ± 20% from the intermediate potential that is not affected by ringing.

As a result, there is a problem that the reliability of the voltage amplitude measurement (hereinafter also referred to as the operation signal measurement) is deteriorated and the accuracy of the voltage amplitude measurement is deteriorated. The present invention has been created in view of the problems of the conventional example, the maximum-minimum value of the measurement waveform related to the operation signal measurement of the sample as the amplitude, or without depending on the manually specified phase, An operation signal measuring device and an operation signal measuring method capable of statistically processing the voltage measurement data and accurately determining the upper signal level and the lower signal level, and improving the measurement accuracy and reliability thereof. For the purpose of providing.

[0017]

[Means for Solving the Problems] FIGS. 1 (a) and 1 (b) are
2 is a principle diagram of an operation signal measuring device according to the present invention, and FIG.
3A and 3B respectively show principle diagrams of the operation signal measuring method according to the present invention.

As shown in FIG. 1A, the operation signal measuring device of the present invention includes at least a measuring means 11 for acquiring the operation signal information Dv of the sample and an information processing means for statistically processing the operation signal information Dv. 12, the information processing means 12 has a higher signal level DvH and a lower signal level DvH.
It is characterized in that the operation signal value V of the sample and the upper or lower level relating to the operation signal information Dv are output based on the discrimination and separation processing of vL.

In the operation signal measuring device of the present invention, the information processing means 12 is, as shown in FIG.
The data creating means 12A for creating the frequency distribution of the operation signal information Dv of the sample, the first frequency distribution related to the higher signal level DvH of the operation signal information Dv and the lower signal level DvL of the operation signal information Dv A data separating means 12B for separating the second frequency distribution, a data processing means 12C for averaging the first and second frequency distributions, and a higher-order signal relating to the averaged operation signal information Dv. Level DvH
It is characterized by comprising an output means 12D for outputting the operation signal value V of the sample or the upper or lower level of the operation signal information Dv on the basis of the signal level DvL or the lower signal level DvL.

The operation signal measuring method of the present invention is shown in FIG.
As shown in the processing flowchart of FIG.
In step 1, the frequency distribution is created from the motion signal information Dv of the sample, and then the first frequency distribution relating to the higher signal level DvH of the motion signal information Dv and the motion signal information Dv Discrimination and separation processing from the second frequency distribution relating to the lower signal level DvL is performed, then averaging processing of the first and second frequency distributions subjected to the discrimination and separation processing in step P3, and then step P4 The operation signal is characterized in that the output signal of the operation signal value V of the sample or the operation signal information Dv of the upper or lower level is output based on the averaged higher signal level DvH or lower signal level DvL. Measuring method.

In the operating signal measuring method of the present invention, in the averaging process, a frequency distribution removing process for making the number of information distributions of rising signal portions of the operating signal information Dv approach "zero" infinitely in step P3A. It is characterized by including.

Further, in the operation signal measuring method of the present invention, in the averaging process, an arithmetic process is performed to remove each average value ± dispersion 3σ outside the first and second frequency distributions. To achieve.

[0023]

[Operation] According to the operation signal measuring device of the present invention, as shown in FIG.
As shown in (a), the measuring means 11 and the information processing means 1
2 is provided, and the information processing means 12 outputs the operation signal value V of the sample and the upper or lower level of the sample based on the discrimination and separation processing of the upper signal level DvH and the lower signal level DvL.

For example, when the operation signal information Dv of the sample is acquired by the measuring means 11, the operation signal information Dv is statistically processed by the information processing means 12. Here, the operation signal value V of the sample and the upper or lower levels H and L of the sample are determined by the information processing means 12 based on the discrimination and separation processing of the upper signal level DvH and the lower signal level DvL of the operation signal information Dv. Is output.

That is, as shown in FIG. 1B, when the frequency distribution of the operation signal information Dv of the sample is created by the data creating means 12A of the information processing means 12, the higher signal level of the operation signal information Dv is created. The first frequency distribution relating to DvH and the second frequency distribution relating to the lower signal level DvL of the operation signal information Dv are separated by the data separating means 12B. In addition, the first and second frequency distributions are the data processing means 12C.
Are averaged by the output means 12D, and the operation signal value V of the sample and the upper or lower level of the sample are output from the output means 12D based on the upper signal level DvH and the lower signal level DvL of the averaged operation signal information Dv. Is output.

Therefore, by performing statistical processing on all voltage measurement data of the sample, it is possible to accurately determine the upper signal level and the lower signal level of the operating signal amplitude,
With respect to the measurement of the operating signal of the sample, the maximum-minimum value of the measured waveform is not used as the amplitude as in the conventional example, and it does not depend on the phase manually specified.

As a result, it is possible to improve the reliability of the operation signal measurement and to improve the measurement accuracy of the operation signal amplitude. Further, according to the operation signal measuring method of the present invention, as shown in the processing flowchart of FIG. 2, when the frequency distribution is created from the operation signal information Dv of the sample, the higher signal level DvH is related in step P2. The first frequency distribution and the second frequency distribution relating to the lower signal level DvL of the operation signal information Dv are discriminated and separated.

Therefore, when the operating amplitude value is changed by the designated phase point, for example, the operating voltage is "H" (high) including the edge rising portion, as compared with the case where the phase is manually designated as in the conventional example. Even in the case of a waveform in which the level, “L” (low) level is significantly biased to the lower or upper level, it is possible to properly separate the levels of the first frequency distribution and the second frequency distribution.

When averaging the first and second frequency distributions in step P3, for example, in step P3A, the average value ± dispersion 3σ of the first and second frequency distributions is calculated. By performing the removal processing of the frequency distribution that makes the information distribution number of the rising signal portion of the operation signal information Dv as close as possible to "zero", the higher signal level DvH is obtained in step P4.
It is possible to accurately output the operation signal value V of the sample or the upper or lower level related to the operation signal information Dv, for example, the “H” level signal value or the “L” level signal value based on the signal level DvL or the lower signal level DvL. It will be possible.

From this, it is possible to avoid the influence of overshoot / undershoot, as compared with the case where the maximum-minimum value of the measured waveform of the sample is used as the amplitude as in the conventional example. Further, since the amplitude measurement value of the sample is stabilized, the averaging process of the voltage measurement data as in the conventional example becomes unnecessary, and the S / N (signal to noise) can be improved. Become.

As a result, it is possible to shorten the processing time for measuring the operation signal of the sample operating at high speed, and to improve the measurement accuracy of the operation signal amplitude.
Further, it is possible to improve the reliability of the operation signal measuring device.

[0032]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, each embodiment of the present invention will be described with reference to the drawings. 3 to 5 are diagrams for explaining the operation signal measuring device and the operation signal measuring method according to the embodiment of the present invention, and FIG. 3 is a configuration diagram of the voltage amplitude measuring device according to the embodiment of the present invention. FIG. 4 shows a processing flowchart of the voltage amplitude measurement.

For example, a voltage amplitude measuring device for measuring the voltage amplitude of the sample 4 as an example of the operation signal measuring device is shown in FIG.
It consists of two.

That is, the voltage waveform measuring device 21 is an embodiment of the measuring means 11 and acquires voltage measurement data as an example of the operation signal information Dv of the sample. For example, the voltage waveform measuring device 21 is composed of a sampling oscilloscope and an electron beam tester, measures the voltage v of the sample 4 while scanning the sampling phase, and outputs the A / D converted voltage measurement data Dv to the statistical processing system 22. To do.

The statistical processing system 22 is the information processing means 12.
This is an embodiment of the present invention for statistically processing the voltage measurement data Dv. For example, the statistical processing system 22 includes a histogram creation unit 22A, a data separation unit 22B, a histogram averaging unit 22C, and a subtractor 22D, and discriminates and separates the upper signal level DvH and the lower signal level DvL of the voltage amplitude of the sample 4. The voltage value V as an example of the operation signal value and the “H” level and “L” level of the sample 4 are output based on

The histogram creating section 22A is an example of the data creating means 12A, and the voltage measuring data D of the sample is obtained.
The frequency distribution of v is created. For example, the histogram creation unit 22A adds "+1" to the histogram address of the entire voltage measurement data Dv sampled by the voltage waveform measuring device 21 every time the same voltage measurement data Dv appears. This operation may be performed after the waveform measurement is completed or at the same time as the measurement.

The data separating section 22B is an embodiment of the data separating means 12B, and has a first frequency distribution relating to the higher signal level DvH of the voltage measurement data Dv and the voltage measurement data Dv.
And the second frequency distribution relating to the lower signal level DvL of. For example, the data separation unit 22B includes a voltage histogram storage memory 221, a threshold voltage determination unit 222, and a histogram separation unit 223.

The voltage histogram storage memory 221 stores voltage measurement distribution data (hereinafter simply referred to as distribution data) Dv [h] based on the histogram address. The threshold voltage determination unit 222 sets the threshold voltage Vth for the distribution data Dv [h]. Since the measured amplitude of the sample 4 is often unknown, the threshold voltage Vth is determined in real time based on the distribution data Dv [h] in the embodiment of the present invention.

The histogram separation unit 223 determines the higher signal level Dv of the distribution data Dv [h] based on the threshold voltage Vth.
The first frequency distribution relating to H 2 and the second frequency distribution relating to the lower signal level DvH of the distribution data Dv [h] are separated.

The histogram averaging unit 22C is an embodiment of the data processing means 12C, and is for averaging the first and second frequency distributions. For example, the histogram averaging unit
22C is a histogram storage memory 224, a statistic calculator 22
5 and an edge removing unit 226. The histogram storage memory 224 individually distributes distribution data Dv [h] relating to the first frequency distribution (high area) related to the higher signal level DvH and the second frequency distribution (Low area) related to the lower signal level DvL. To be stored in.

The statistic calculation unit 225 determines the higher signal level Dv.
Distribution data Dv [h] related to H and lower signal level Dv
Statistical calculation processing is performed based on the distribution data Dv [h] related to L. For example, distribution data Dv relating to both upper and lower levels
The average values DvL and DvH of [h] are output to the subtractor D, and their variances ± 3σ (DvL [3σ], DvH [3
σ]) is output to the edge removing unit 226.

The edge removing unit 226 uses the first frequency distribution (hi
gh region) and the second frequency distribution (Low region), the distribution related to the rising edge portion of the voltage amplitude of the sample 4 is removed. For example, the edge removing unit 226 repeats the removing process n times when the “H” level and the “L” level are significantly biased to the lower or upper level.

The subtractor 22D is one embodiment of the output means 12D, and is based on the upper signal level DvH and the lower signal level DvL of the averaged voltage measurement data Dv, and the operation signal value V of the sample and the sample. It outputs the upper or lower level H or L. For example, the voltage value V = DvH−DvL of the sample 4 is calculated based on the removal completion signal (subtraction start signal) S output from the edge removal unit 226, or the “H” level related to the voltage value V = 1, "L" level = 0 is output.

As described above, according to the voltage amplitude measuring apparatus according to the embodiment of the present invention, as shown in FIG. 3, the voltage waveform measuring apparatus 21, the histogram creating section 22A, the data separating section 22B, and the histogram averaging are performed. A statistical processing system 22 comprising a section 22C and a subtractor 22D is provided, and the statistical processing system 22 performs the operation signal value V of the sample based on the discriminating and separating processing of the upper signal level DvH and the lower signal level DvL.
Or outputs the upper or lower level H or L of the sample.

For example, when the voltage measurement data Dv of the sample is acquired by the voltage waveform measuring device 21, the voltage measurement data Dv is statistically processed by the statistical processing system 22. Here, the statistical processing system 22 determines the operation signal value V of the sample based on the discrimination and separation processing of the upper signal level DvH and the lower signal level DvL of the voltage measurement data Dv.
And the upper or lower levels H and L of the sample are output.

That is, as shown in FIG. 3, when the frequency distribution of the voltage measurement data Dv of the sample 4 is created by the histogram creating unit 22A of the statistical processing system 22, the higher signal level DvH of the voltage measurement data Dv is set. The first frequency distribution and the lower signal level D of the voltage measurement data Dv
The second frequency distribution related to vL is separated by the data separation unit 22B. The first and second frequency distributions are averaged by the histogram averaging unit 22C, and the sample 4 is sampled based on the higher signal level DvH and the lower signal level DvL related to the averaged voltage measurement data Dv. The operation signal value V, the “H” level signal value and the “L” level signal value of the sample 4 are output from the subtractor 22D.

Therefore, the total voltage measurement data Dv of the sample 4 is obtained.
It is possible to accurately determine the high-order signal level DvH and the low-order signal level DvL of the voltage signal amplitude by performing the statistical processing of 1. The minimum value is no longer used as the amplitude and the phase does not depend on the manually specified phase.

As a result, it is possible to improve the reliability of the voltage signal measurement and to improve the measurement accuracy of the voltage signal amplitude. Next, a voltage amplitude measuring method according to an embodiment of the present invention will be described while supplementing the operation of the device.

FIG. 4 is a processing flowchart of the voltage amplitude measurement according to the embodiment of the present invention, and FIG. 5 is a supplementary explanatory view thereof. For example, in the case of measuring the voltage amplitude of the sample 4 based on statistical processing, first, in FIG.
In step P1, the measurement process of the voltage waveform of the sample 4 is performed. At this time, the voltage v of the sample 4 is measured by the voltage waveform measuring device 21 such as a sampling oscilloscope or an electron beam tester while scanning the sampling phase, and the A / D converted voltage measurement data Dv is sent to the statistical processing system 22. Is output.

Next, in step P2, a frequency distribution is created from the voltage measurement data Dv of the sample 4. Here, the histogram creation unit 22A of the statistical processing system 22 adds "+1" to the histogram address of the entire voltage measurement data Dv each time the same voltage measurement data Dv appears.

FIG. 5 shows a voltage amplitude waveform diagram of the sample 4 and a frequency (frequency) distribution of the voltage measurement data Dv of the sample 4. In FIG. 5, the vertical axis represents the voltage v [V] and the horizontal axis represents the phase ωt [rad]. Further, the frequency distribution is composed of a first frequency distribution (high area) related to the higher signal level DvH and a second frequency distribution (Low area) related to the lower signal level DvL.

Further, in step P3, the discrimination and separation processing of the first frequency distribution relating to the higher signal level DvH of the voltage measurement data Dv and the second frequency distribution relating to the lower signal level DvH of the voltage measurement data Dv. do. Here, the first frequency distribution relating to the higher signal level DvH of the voltage measurement data Dv and the voltage measurement data D by the data separation unit 22B.
The second frequency distribution relating to the signal level DvL lower than v is separated. For example, the voltage measurement distribution data (distribution data) Dv [h] is read from the voltage histogram storage memory 221 based on the histogram address.

Further, the threshold voltage determination unit 222 sets the threshold voltage Vth for the distribution data Dv [h]. The threshold voltage Vth may be given from the beginning as in the conventional example, but since the measurement amplitude of the sample 4 is often unknown, the threshold voltage Vth is real-time based on the distribution data Dv [h] in the embodiment of the present invention. Make a decision. For example, various algorithms have been proposed for calculating the threshold voltage Vth (binarization method) at this time, but any method may be used. In the embodiment of the present invention, a certain threshold voltage Vth is assumed. Then, two intra-class dispersions of “H” level and “L” level and inter-class dispersion are calculated, and the threshold voltage Vth that gives the best class separation is selected.

As a result, the histogram separation unit 223 causes the first frequency distribution of the higher signal level DvH of the distribution data Dv [h] and the lower signal level of the distribution data Dv [h] to be calculated based on the threshold voltage Vth. The second frequency distribution for DvH is separated.

Next, in steps P4 to P6, the averaging process of the first and second frequency distributions is performed. This is effective in the case where the “H” level and the “L” level of the voltage amplitude of the sample 4 are significantly biased to the lower or upper level, and the removal processing is repeated n times.

That is, in step P4, the mean value and variance (3σ) of the upper signal level DvH of the voltage measurement data Dv and the lower signal level DvL thereof relating to the first and second frequency distributions are calculated. At this time, the histogram averaging unit 22C averages the first and second frequency distributions. For example, from the histogram storage memory 224 of the histogram averaging unit 22C, the distribution related to the first frequency distribution (high area) related to the higher signal level DvH and the second frequency distribution (Low area) related to the lower signal level DvL. Data D
v [h] is read out individually.

Also, based on the distribution data Dv [h] relating to the higher signal level DvH and the distribution data Dv [h] relating to the lower signal level DvL, the statistic calculation unit 225 calculates the distribution data relating to both upper and lower levels. Average value of Dv [h] Dv
L and DvH are statistically calculated and output to the subtractor D. Further, the average value ± 3σ (DvL [3σ],
DvH [3σ]) is output to the edge removing unit 226.

Further, in step P5, a process of removing values outside the respective average values ± dispersion 3σ of the first and second frequency distributions is performed.
Here, the first frequency distribution (high
Region) and the second frequency distribution (Low region), the distribution related to the rising edge portion of the voltage amplitude of the sample 4 is removed.

Then, in step P6, it is determined that the number of removals = 0. At this time, if the information distribution number of the rising signal portion of the voltage measurement data Dv approaches "0" infinitely (YES), the process proceeds to step P7. If it does not approach "0" infinitely (NO), the process returns to step P4 to calculate each average value and variance (3σ) of the voltage measurement data Dv related to the first and second frequency distributions. And
The removal process is continued in step P5.

Therefore, when the number of information distributions approaches "0" infinitely (YES), the sample 4 is determined based on the upper signal level DvH and the lower signal level DvH in step P7.
Output processing of the upper or lower levels H and L related to the voltage amplitude value V and the voltage measurement data Dv. At this time, the higher signal level DvH related to the averaged voltage measurement data Dv
The voltage value V = DvH-DvL of the sample 4 is calculated by the subtractor 22D based on the lower signal level DvL and the subtraction start signal S. Also, the "H" level signal value and the "L" level signal value related to the voltage value V are output to the removal completion signal.

As described above, according to the voltage amplitude measuring method according to the embodiment of the present invention, when the frequency distribution is created from the voltage measurement data Dv of the sample 4 as shown in the processing flowchart of FIG. In step P2, the first frequency distribution relating to the higher signal level DvH and the voltage measurement data D
The second frequency distribution relating to the signal level DvH lower than v is discriminated and separated.

Therefore, when the operating amplitude value is changed by the designated phase point as compared with the case where the phase is manually designated as in the conventional example, for example, "H" level of the operating voltage including the edge rising portion, " Even in the case of a waveform in which the “L” level is significantly biased to the lower or upper level, it is possible to properly separate the levels of the first frequency distribution and the second frequency distribution.

When averaging the first and second frequency distributions in step P3, for example, by calculating the average value ± dispersion 3σ of the first and second frequency distributions in step P3A, By performing the removal process of the frequency distribution that makes the number of information distributions of the rising signal portion of the voltage measurement data Dv as close as possible to “zero”, the higher signal level Dv is obtained in step P4.
It is possible to accurately output the “H” level and “L” level related to the voltage amplitude value V of the sample 4 and the voltage measurement data Dv based on H and the lower signal level DvH.

From this, it is possible to avoid the influence of overshoot / undershoot, as compared with the case where the maximum-minimum value of the measured waveform of the sample 4 is used as the amplitude as in the conventional example. Further, since the amplitude measurement value of the sample 4 can be stabilized, the averaging process of the voltage measurement data as in the conventional example becomes unnecessary, and the S / N (signal to noise) can be improved. Become.

This shortens the processing time for measuring the voltage amplitude of the sample 4 operating at high speed, and
It is possible to improve the measurement accuracy of the voltage amplitude amplitude. In addition, the reliability of the voltage amplitude measuring device can be improved.

In the embodiment of the present invention, the case where the operation signal has the voltage amplitude has been described, but the same effect can be obtained in the case of other operation signals such as the current amplitude and the power amplitude. It is also possible to apply the operation signal measuring device to a judgment circuit for judging the "H" level and "L" level of an unknown analog signal.

[0067]

As described above, according to the operation signal measuring apparatus of the present invention, the measuring means and the information processing means are provided, and the information processing means discriminates and separates the upper signal level and the lower signal level. Based on the above, the operation signal value of the sample and the upper or lower level of the sample are output.

Therefore, in relation to the measurement of the operation signal of the sample, the maximum-minimum value of the measured waveform is used as the amplitude as in the conventional example,
By performing statistical processing of all voltage measurement data of the sample without depending on the phase manually specified, it becomes possible to accurately determine the upper signal level and the lower signal level of the operating signal amplitude. As a result, the measured amplitude value of the sample is stabilized, and the averaging process of the voltage measurement data as in the conventional example is not required, and the S / N (signal-to-noise) thereof can be improved. Become.

Further, according to the operation signal measuring method of the present invention, when the frequency distribution is created from the operation signal information of the sample, the first frequency distribution relating to the higher signal level and the lower order of the operation signal information are generated. The second frequency distribution relating to the signal level of is subjected to discrimination and separation processing.

Therefore, as compared with the case where the phase is manually specified as in the conventional example, in the case where the "H" level and "L" level of the operating voltage including the edge rising portion are significantly biased to the lower or upper level. Even in this case, it is possible to properly separate the levels of the first frequency distribution and the second frequency distribution.

When averaging the first and second frequency distributions, the average value ± dispersion 3σ of the first and second frequency distributions.
Is calculated, and a frequency distribution elimination process is performed to bring the number of information distributions in the rising signal portion of the operation signal information as close as possible to “zero”.

Therefore, the influence of overshoot / undershoot can be avoided as compared with the case where the maximum-minimum value of the measured waveform of the sample is used as the amplitude as in the conventional example. From this, it becomes possible to accurately output the operation signal value of the sample or the higher or lower level related to the operation signal information based on the higher signal level or the lower signal level.

As a result, it is possible to shorten the processing time for measuring the operation signal of the sample operating at high speed and to improve the measurement accuracy of the operation signal amplitude.
This largely contributes to the provision of a highly reliable operation signal measuring device.

[Brief description of drawings]

FIG. 1 is a principle diagram of an operation signal measuring device according to the present invention.

FIG. 2 is a principle diagram of an operation signal measuring method according to the present invention.

FIG. 3 is a configuration diagram of a voltage amplitude measuring apparatus according to an embodiment of the present invention.

FIG. 4 is a processing flowchart of voltage amplitude measurement according to the embodiment of the present invention.

FIG. 5 is a supplementary explanatory diagram of the flowchart according to the embodiment of the present invention.

FIG. 6 is an explanatory diagram of a voltage amplitude measuring method according to a conventional example.

[Explanation of symbols]

 11 ... Measuring means, 12 ... Information processing means, 12A ... Data creating means, 12B ... Data separating means, 12C ... Data processing means, 12D ... Output means, Dv ... Operation signal information (voltage measurement data), DvH ... Higher level signal Level, DvL ... Lower signal level, V ... Operating signal value (voltage amplitude value), v ... Operating signal (voltage), "H", "L" ... Upper and lower levels.

Claims (5)

[Claims] 1. At least operation signal information (D
v) and a data processing means (12) for statistically processing the operation signal information (Dv), the data processing means (12) having a higher signal level (DvH). And an operation signal measuring device which outputs an operation signal value (V) of the sample or an operation signal information (Dv) upper or lower level based on the discriminating and separating processing of the lower and the lower signal level (DvL). 2. The operation signal measuring device according to claim 1, wherein the information processing means (12) creates a frequency distribution of the operation signal information (Dv) of the sample.
And the higher signal level (Dv) of the operation signal information (Dv).
vH) first frequency distribution and the operation signal information (Dv)
Data separating means (12B) for separating the second frequency distribution relating to the lower signal level (DvL) of the
Data processing means (12C) for averaging the frequency distribution of
And a higher signal level (DvH) and a lower signal level (DvL) related to the averaged operation signal information (Dv)
An operation signal measuring device comprising an output means (12D) for outputting an operation signal value (V) of a sample or an upper or lower level related to the operation signal information (Dv) based on the above. 3. A frequency distribution creation process is performed from the motion signal information (Dv) of the sample, and a first frequency distribution relating to the higher signal level (DvH) of the motion signal information (Dv) is created based on the creation process. Discrimination and separation processing from the second frequency distribution relating to the lower signal level (DvL) of the operation signal information (Dv) is performed, and averaging processing of the first and second frequency distributions subjected to the discrimination and separation processing is performed. , Upper or lower level output processing relating to the operation signal value (V) or operation signal information (Dv) of the sample based on the averaged higher signal level (DvH) or lower signal level (DvL) A method for measuring an operation signal, comprising: 4. The operating signal measuring method according to claim 3, wherein, during the averaging process, the frequency distribution is removed so that the number of information distributions of rising signal portions of the operating signal information (Dv) approaches “zero” as much as possible. A method for measuring an operation signal, which comprises processing. 5. The operation signal measuring device according to claim 3, wherein, in the averaging process, an arithmetic process is performed to remove each average value ± variance 3σ range of the first and second frequency distributions. Measuring method of operating signal.