JPH06338299A - Dielectric barrier discharge lamp and treatment method using the lamp - Google Patents
Dielectric barrier discharge lamp and treatment method using the lampInfo
- Publication number
- JPH06338299A JPH06338299A JP14668793A JP14668793A JPH06338299A JP H06338299 A JPH06338299 A JP H06338299A JP 14668793 A JP14668793 A JP 14668793A JP 14668793 A JP14668793 A JP 14668793A JP H06338299 A JPH06338299 A JP H06338299A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric barrier
- barrier discharge
- discharge
- discharge lamp
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Discharge Lamps And Accessories Thereof (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば、光化学反応用
の紫外線光源として使用される放電ランプの一種で、誘
電体バリヤ放電によってエキシマ分子を形成し、該エキ
シマ分子から放射される光を利用するいわゆる誘電体バ
リヤ放電ランプの改良と、該誘電体バリヤ放電ランプを
使用した処理方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is, for example, a kind of discharge lamp used as an ultraviolet light source for photochemical reaction, which forms excimer molecules by dielectric barrier discharge and utilizes the light emitted from the excimer molecules. To a so-called dielectric barrier discharge lamp and a processing method using the dielectric barrier discharge lamp.
【０００２】[0002]
【従来の技術】本発明に関連した技術としては、例え
ば、日本国公開特許公報平２─７３５３号があり、そこ
には、放電容器にエキシマ分子を形成する放電用ガスを
充填し、誘電体バリヤ放電（別名オゾナイザ放電あるい
は無声放電。電気学会発行改定新版「放電ハンドブッ
ク」平成１年６月再版７刷発行第２６３ページ参照）に
よってエキシマ分子を形成せしめ、該エキシマ分子から
放射される光を取り出す放射器、すなわち誘電体バリヤ
放電ランプについて記載されている。また、該誘電体バ
リヤ放電の放電路に平行して設けられた光取りだし窓部
材を有する誘電体バリヤ放電ランプ装置については、米
国特許第２９４３２２５号に記載されている。2. Description of the Related Art As a technique related to the present invention, there is, for example, Japanese Patent Laid-Open Publication No. 2-7353, in which a discharge vessel is filled with a discharge gas for forming excimer molecules, and a dielectric is used. Barrier discharge (also known as ozonizer discharge or silent discharge. See the revised edition “Discharge Handbook” published by The Institute of Electrical Engineers of Japan, June 2001, Reprint 7th edition, page 263) forms excimer molecules, and the light emitted from the excimer molecules is extracted. A radiator, or dielectric barrier discharge lamp, is described. A dielectric barrier discharge lamp device having a light extraction window member provided in parallel with the discharge path of the dielectric barrier discharge is described in US Pat. No. 2,943,225.
【０００３】上記のような誘電体バリヤ放電ランプは、
従来の低圧水銀放電ランプや高圧アーク放電ランプには
無い種々の特長を有しているため有用である。さらに、
放電路に平行して設けられた光取りだし窓部材を有する
ため、誘電体バリヤ放電ランプの光取りだし窓部材に垂
直な方向の寸法を大きくすることによって、放射輝度を
増大させることが出来るという特長も有している。しか
し、上記のような誘電体バリヤ放電ランプは、光出力の
安定性および光の取り出し効率が必ずしも十分ではない
という問題があった。The dielectric barrier discharge lamp as described above is
It is useful because it has various features that conventional low-pressure mercury discharge lamps and high-pressure arc discharge lamps do not have. further,
Since there is a light extraction window member provided in parallel with the discharge path, the radiance can be increased by increasing the size of the dielectric barrier discharge lamp in the direction perpendicular to the light extraction window member. Have However, the above-mentioned dielectric barrier discharge lamp has a problem that stability of light output and light extraction efficiency are not always sufficient.
【０００４】[0004]
【発明が解決しようとする課題】本発明の課題は、光出
力が安定で、放射輝度の高い誘電体バリヤ放電ランプを
提供することであり、さらに、該誘電体バリヤ放電ラン
プを使用した処理方法を提供することである。SUMMARY OF THE INVENTION An object of the present invention is to provide a dielectric barrier discharge lamp having a stable light output and high radiance, and a treatment method using the dielectric barrier discharge lamp. Is to provide.
【０００５】[0005]
【課題を解決するための手段】上記本発明の目的は、放
電容器に誘電体バリヤ放電によってエキシマ分子を形成
する放電用ガスが充填され、該放電容器の一部は該誘電
体バリヤ放電の誘電体を兼ねており、該誘電体バリヤ放
電の放電路に平行して設けられた光取りだし窓部材を有
する誘電体バリヤ放電ランプにおいて、該光取りだし窓
部材の放電路に平行な長さＨが該誘電体バリヤ放電の放
電路長Ｌを越えるように構成することによって達成でき
る。DISCLOSURE OF THE INVENTION It is an object of the present invention to fill a discharge vessel with a discharge gas that forms excimer molecules by a dielectric barrier discharge, and a part of the discharge vessel is a dielectric barrier discharge dielectric. In a dielectric barrier discharge lamp that also serves as a body and has a light extraction window member provided in parallel with the discharge path of the dielectric barrier discharge, a length H parallel to the discharge path of the light extraction window member is This can be achieved by configuring so as to exceed the discharge path length L of the dielectric barrier discharge.
【０００６】[0006]
【作用】誘電体バリヤ放電は、該「放電ハンドブック」
に記載されているように、プラズマの直径が非常に小さ
く、かつ、放電の持続時間が非常に短い微小な放電プラ
ズマ（以後これをマイクロプラズマと記す）の多数の集
まりである。我々は、放電路に平行して設けられた光取
りだし窓を有する誘電体バリヤ放電ランプの光出力の安
定性および発光効率について詳細に検討した結果、光出
力の時間的なゆらぎおよび発光効率が光取りだし窓部材
の構成によって大幅に変わることを実験的に発見した。[Function] Dielectric barrier discharge is described in the "Discharge Handbook"
As described in (1), it is a large collection of minute discharge plasmas (hereinafter referred to as microplasma) having a very small plasma diameter and a very short discharge duration. We investigated in detail the stability and luminous efficiency of the light output of a dielectric barrier discharge lamp having a light extraction window provided in parallel with the discharge path. We have experimentally discovered that the configuration of the take-out window member greatly changes.
【０００７】以下、図２の概略図を使用して説明する。
すなわち、誘電体２，３、側板６、放電路に平行に設け
られた光取りだし窓部材１からなる放電容器に、誘電体
バリヤ放電によってエキシマ分子を形成する放電用ガス
を充填し、交流電源２２によって電極４，５に電圧を印
加すると、マイクロプラズマ２０ａ，２０ｂ，２０ｃ，
２０ｄが安定に発生する。また、同時に、光取り出し窓
部材１の表面に沿って沿面放電プラズマ７が不規則に発
生する。このために、光出力が不安定になる。さらに、
光取り出し窓部材１から得られる放射輝度に対しては、
マイクロプラズマ２０ａ，２０ｂ，２０ｃ，２０ｄの陽
光柱の他に、誘電体２，３の表面に発生している沿面放
電状プラズマ２１ａ，２１ｂ，２１ｃ，２１ｄからの放
射光が大きく寄与しており、従って、該光取りだし窓部
材の放電路に平行な長さが該誘電体バリヤ放電の放電路
長よりも小さくなると、発光効率が極端に低下する事が
判明した。A description will be given below with reference to the schematic view of FIG.
That is, the discharge vessel including the dielectrics 2 and 3, the side plate 6, and the light extraction window member 1 provided in parallel with the discharge path is filled with a discharge gas that forms excimer molecules by the dielectric barrier discharge, and the AC power supply 22 is used. When a voltage is applied to the electrodes 4 and 5 by the microplasma 20a, 20b, 20c,
20d is stably generated. At the same time, creeping discharge plasma 7 is irregularly generated along the surface of the light extraction window member 1. Therefore, the light output becomes unstable. further,
For the radiance obtained from the light extraction window member 1,
In addition to the positive columns of the microplasmas 20a, 20b, 20c, and 20d, the radiated light from the surface discharge plasmas 21a, 21b, 21c, and 21d generated on the surfaces of the dielectrics 2 and 3 greatly contributes, Therefore, it was found that when the length of the light extraction window member parallel to the discharge path is shorter than the discharge path length of the dielectric barrier discharge, the luminous efficiency is extremely lowered.
【０００８】図３に示したように、該誘電体バリヤ放電
の放電路に平行して設けられた光取りだし窓部材１を有
する誘電体バリヤ放電ランプにおいて、該光取りだし窓
部材１の放電路に平行な長さＨが該誘電体バリヤ放電の
放電路長Ｌを越えるように構成すると、窪み２３が形成
され、その結果、沿面放電の放電路長が長くなり、か
つ、窪み２３を形成する管壁部分には誘電体バリヤ放電
ランプからの放射光が照射されにくいので、沿面放電７
が発生しにくくなる。さらに、該光取りだし窓部材１の
放電路に平行な長さＨが該誘電体バリヤ放電の放電路長
Ｌを越えるように構成することにより、誘電体２，３の
表面に発生している沿面放電状プラズマ２１ａ，２１
ｂ，２１ｃ，２１ｄからの放射光を効率よく取り出すこ
とが出来、従って高効率が得られる。ＨをＬで割った値
を１．２以上にすると、光放射の安定化および効率改善
の効果がよりいっそう発揮される。As shown in FIG. 3, in a dielectric barrier discharge lamp having a light extraction window member 1 provided in parallel with the discharge path of the dielectric barrier discharge, the discharge path of the light extraction window member 1 is When the parallel length H exceeds the discharge path length L of the dielectric barrier discharge, the recess 23 is formed, and as a result, the discharge path length of the creeping discharge becomes long and the tube forming the recess 23 is formed. It is difficult to irradiate the wall with radiation from the dielectric barrier discharge lamp.
Is less likely to occur. Further, the length H parallel to the discharge path of the light extraction window member 1 is configured to exceed the discharge path length L of the dielectric barrier discharge, so that the creeping surface generated on the surfaces of the dielectrics 2 and 3 is formed. Discharge plasma 21a, 21
The emitted light from b, 21c, and 21d can be efficiently extracted, and thus high efficiency can be obtained. When the value obtained by dividing H by L is 1.2 or more, the effects of stabilizing light emission and improving efficiency are further exhibited.
【０００９】本発明の該誘電体バリヤ放電ランプを使用
すると、本発明の該誘電体バリヤ放電ランプは高輝度の
帯状の照射面を形成できるので、線状の被処理物を該帯
状の照射面に一致させて配置することにより、線状物の
処理を高速で、高効率で行うことが出来る。ここで言う
処理は、光を利用した洗浄、エッチング、表面改質、塗
料の硬化および消毒殺菌などである。When the dielectric barrier discharge lamp of the present invention is used, the dielectric barrier discharge lamp of the present invention can form a high-luminance band-shaped irradiation surface, so that a linear object to be processed can be applied to the band-shaped irradiation surface. By arranging them in line with each other, it is possible to process the linear objects at high speed and with high efficiency. The processing mentioned here includes cleaning using light, etching, surface modification, curing of paint, disinfection and sterilization.
【００１０】光を利用して処理を行う場合、光の利用効
率などから、被処理物と光源を出来るだけ接近させるこ
とが望ましい。平板状の被処理物の表面を処理する場
合、平面状の発光面を有するような大きな発光面の光源
を使用すると、被処理物の表面と光源との距離を光源の
発光表面全体に渡って一定に保つことは一般的に困難で
あり、すなわち、平面と平面間の距離を一定にすること
は一般的に困難であり、従って、被処理物の表面におけ
る照射量が不均一になり、均一な処理が不可能である。
本発明の該誘電体バリヤ放電ランプの光取り出し窓部材
は幅の狭い帯状をしており、高輝度の帯状の照射面を形
成できるので、本発明の該誘電体バリヤ放電ランプを使
用した場合には、平面と帯間の距離を一定に保てばよ
く、被処理物の表面の帯状の部分を均一に照射すること
が出来る。本発明の該誘電体バリヤ放電ランプを使用
し、平板状の被処理物あるいは該誘電体バリヤ放電ラン
プを窓部材の巾方向に相対的に移動させることにより、
平板状の被処理物の表面を均一に処理できる。特に、被
処理物がフィルム状で広い面積に渡って平らな平面を保
つのが困難な場合には、本発明の誘電体バリヤ放電ラン
プの使用が一層有利になる。When processing is performed using light, it is desirable to bring the object to be processed and the light source as close as possible from the viewpoint of light utilization efficiency. When processing the surface of a flat object to be processed, if a light source with a large light emitting surface such as a flat light emitting surface is used, the distance between the surface of the object to be processed and the light source is spread over the entire light emitting surface of the light source. It is generally difficult to keep constant, that is, it is generally difficult to keep the distance between the planes constant, so that the irradiation dose on the surface of the object to be treated becomes non-uniform and uniform. Processing is impossible.
Since the light extraction window member of the dielectric barrier discharge lamp of the present invention has a narrow band shape and can form a high-luminance band-shaped irradiation surface, when the dielectric barrier discharge lamp of the present invention is used, In this case, the distance between the plane and the band may be kept constant, and the band-shaped portion on the surface of the object to be processed can be uniformly irradiated. By using the dielectric barrier discharge lamp of the present invention and moving the flat object or the dielectric barrier discharge lamp relatively in the width direction of the window member,
The surface of the flat object can be uniformly treated. The use of the dielectric barrier discharge lamp of the present invention becomes more advantageous especially when the object to be treated is a film and it is difficult to maintain a flat surface over a large area.
【００１１】[0011]
【実施例】本発明の第１の実施例である同軸円筒形誘電
体バリヤ放電ランプの概略図を図１に示す。放電容器８
は全長約３００ｍｍの石英ガラス製で外径２４ｍｍの内
側管９、内径約３４ｍｍの外側管１０を同軸に配置して
中空円筒状にしたものである。外側管１０の外面および
内側管９の内径部側の表面にはアルミニウムの蒸着によ
って形成した光反射膜を兼ねた電極１１，１２が設けら
れている。放電容器８の一端には、合成石英ガラスから
成る環状の光取り出し窓部材１が、外側管１０および内
側管９に溶着して設けられている。光取り出し窓部材１
の放電路に平行な長さＨの値を、該誘電体バリヤ放電の
放電路長Ｌ、すなわち、外側管１０の内面と内側管９の
外径部側の表面との距離Ｌの値５ｍｍを越えるように
６．５ｍｍとした。放電容器８の他端の外面には、光反
射膜１３が設けられている。放電用ガスとして放電空間
１５に４００Ｔｏｒｒのキセノンを封入し、電源２２に
よって電極１１，１２に電圧を印加した結果、安定な誘
電体バリヤ放電が発生し、かつ、発光効率も２０％改善
された。1 is a schematic view of a coaxial cylindrical dielectric barrier discharge lamp according to a first embodiment of the present invention. Discharge vessel 8
Is a hollow cylinder in which an inner tube 9 having an outer diameter of 24 mm and an outer tube 10 having an inner diameter of 34 mm are coaxially arranged and made of quartz glass having an overall length of about 300 mm. Electrodes 11 and 12, which also function as light reflecting films, are formed on the outer surface of the outer tube 10 and the inner surface of the inner tube 9 by vapor deposition of aluminum. An annular light extraction window member 1 made of synthetic quartz glass is provided on one end of the discharge vessel 8 by welding to an outer tube 10 and an inner tube 9. Light extraction window member 1
The value of the length H parallel to the discharge path is defined as the discharge path length L of the dielectric barrier discharge, that is, the value L of the distance L between the inner surface of the outer tube 10 and the outer diameter side surface of the inner tube 9 is 5 mm. It was set to 6.5 mm so as to exceed. A light reflection film 13 is provided on the outer surface of the other end of the discharge container 8. As a result of applying 400 Torr of xenon in the discharge space 15 as a discharge gas and applying a voltage to the electrodes 11 and 12 by the power source 22, stable dielectric barrier discharge occurred and the luminous efficiency was improved by 20%.
【００１２】本発明の第２の実施例の概略図を図４に示
す。長辺２５０ｍｍ、短辺８０ｍｍの長方形合成石英ガ
ラス板２枚を誘電体２，３とし、該誘電体２，３の内部
側の表面間の距離を８ｍｍにして対向させ、周辺部に光
取り出し窓部材１と側板６をもうけて放電容器を形成し
た。光取り出し窓部材１は、誘電体２，３の一つの長辺
部に設けられ、放電路に平行な長さＨを、該誘電体バリ
ヤ放電の放電路長Ｌ、すなわち、誘電体２，３の内表面
間の距離８ｍｍを越えるように１０ｍｍとした。誘電体
２，３の内表面には、ＭｇＦ2 とＬａＦ3 を交互に２５
層積層して１７２ｎｍの紫外線を反射する多層誘電体反
射膜１４を設けた。また、光取り出し窓部材１と対向す
る側板６の放電路に平行な長さも、該誘電体バリヤ放電
の放電路長Ｌを越えるように１０ｍｍとした。側板６の
外側に設けた反射膜１３による光の反射量は、上記の側
板６のＨの値をＬの値より大きく構成することによって
増大した。放電用ガスとしてキセノンを３００Ｔｏｒｒ
封入し、電源２２によって電極４，５に電圧を印加した
結果、安定な誘電体バリヤ放電が発生し、光出力は十分
に安定であり、発光効率も２５％改善された。A schematic diagram of the second embodiment of the present invention is shown in FIG. Two rectangular synthetic quartz glass plates having a long side of 250 mm and a short side of 80 mm are used as dielectrics 2 and 3, and the distance between the inner surfaces of the dielectrics 2 and 3 is set to 8 mm so as to face each other, and a light extraction window is provided in the peripheral portion. The member 1 and the side plate 6 were provided to form a discharge vessel. The light extraction window member 1 is provided on one long side of the dielectrics 2 and 3 and has a length H parallel to the discharge path as a discharge path length L of the dielectric barrier discharge, that is, the dielectrics 2 and 3. The distance was 10 mm so that the distance between the inner surfaces of 8 mm and 8 mm was exceeded. 25 MgF 2 and 25 LaF 3 are alternately deposited on the inner surfaces of the dielectrics 2 and 3.
A multilayer dielectric reflection film 14 that reflects ultraviolet rays of 172 nm is provided by stacking layers. Further, the length of the side plate 6 facing the light extraction window member 1 parallel to the discharge path is also set to 10 mm so as to exceed the discharge path length L of the dielectric barrier discharge. The amount of light reflected by the reflective film 13 provided outside the side plate 6 was increased by setting the value of H of the side plate 6 to be larger than the value of L. 300 Torr of xenon as discharge gas
As a result of encapsulation and applying a voltage to the electrodes 4 and 5 by the power source 22, stable dielectric barrier discharge was generated, the light output was sufficiently stable, and the luminous efficiency was improved by 25%.
【００１３】本発明の第３の実施例は本発明の誘電体バ
リヤ放電ランプを使用した洗浄方法で、概略図を図５に
示す。実施例２に示した平板状の誘電体バリヤ放電ラン
プと同一の誘電体バリヤ放電ランプ５１の光取り出し窓
部材と平行して、被洗浄物である光ファイバー５０が酸
素を含む雰囲気中に設置されている。５２は光反射板で
ある。誘電体バリヤ放電ランプ５１の光取り出し窓部材
から波長１７２ｎｍとその付近の紫外線が帯状に放射さ
れ、光ファイバー５０の表面に集中して照射される。そ
の結果、光ファイバー５０の表面付近で活性な酸素原子
が生成され、通常の機構によって光ファイバー５０の表
面が洗浄される。本発明の誘電体バリヤ放電ランプの照
射面が直帯状であること、高輝度の紫外線が得られるこ
とから、高い光利用率で、高速で洗浄を行うことが出来
る。The third embodiment of the present invention is a cleaning method using the dielectric barrier discharge lamp of the present invention, and a schematic view is shown in FIG. In parallel with the light extraction window member of the same dielectric barrier discharge lamp 51 as the flat dielectric barrier discharge lamp shown in the second embodiment, the optical fiber 50 as the object to be cleaned is installed in the atmosphere containing oxygen. There is. 52 is a light reflection plate. Ultraviolet rays having a wavelength of 172 nm and its vicinity are radiated as a band from the light extraction window member of the dielectric barrier discharge lamp 51, and are focused on the surface of the optical fiber 50. As a result, active oxygen atoms are generated near the surface of the optical fiber 50, and the surface of the optical fiber 50 is cleaned by a normal mechanism. Since the irradiation surface of the dielectric barrier discharge lamp of the present invention is in the form of a straight band and ultraviolet rays of high brightness can be obtained, cleaning can be performed at high speed with high light utilization rate.
【００１４】本発明の第４の実施例は、第２の実施例に
おける構造の誘電体バリヤ放電ランプの放電ガスをキセ
ノンと塩素の混合ガスにし、光ファイバー５０の表面に
光硬化性の樹脂をコーティングし、該光硬化性の樹脂の
硬化を行うものである。キセノンと塩素からなるエキシ
マ分子から放射された３０２ｎｍとその付近の紫外線
が、光ファイバー５０の表面の光硬化性樹脂に高輝度で
照射され、光硬化性樹脂は効率よく硬化される。第３，
４の実施例においては一個の誘電体バリヤ放電ランプを
使用したが、複数個の誘電体バリヤ放電ランプを使用し
て異なった方向から紫外線を照射することにより、円周
方向の均一性が改善され、かつ、高速で処理することが
出来る。In the fourth embodiment of the present invention, the discharge gas of the dielectric barrier discharge lamp having the structure of the second embodiment is a mixed gas of xenon and chlorine, and the surface of the optical fiber 50 is coated with a photocurable resin. Then, the photocurable resin is cured. The photocurable resin on the surface of the optical fiber 50 is irradiated with high brightness at 302 nm and ultraviolet rays in the vicinity thereof emitted from the excimer molecule composed of xenon and chlorine, and the photocurable resin is efficiently cured. Third,
In the fourth embodiment, one dielectric barrier discharge lamp was used, but by using a plurality of dielectric barrier discharge lamps and irradiating ultraviolet rays from different directions, the uniformity in the circumferential direction is improved. And, it can be processed at high speed.
【００１５】本発明の第５の実施例である表面改質方法
の概略図を図６に示す。実施例２に示した平板状の誘電
体バリヤ放電ランプと同一の誘電体バリヤ放電ランプ５
１の光取り出し窓部材１と平行して、ローラ６１が設け
られており、被表面改質物であるポリエチレンフィルム
６２が酸素を含む雰囲気中に設置されている。誘電体バ
リヤ放電ランプ５１の光取り出し窓部材から、ローラ６
１に密着しているポリエチレンフィルム６２の表面に波
長１７２ｎｍとその付近の紫外線が集中して照射され
る。その結果、ポリエチレンフィルムの表面が通常の機
構によって改質される。本発明の誘電体バリヤ放電ラン
プの照射面が直帯状であることからポリエチレンフィル
ムの表面と誘電体バリヤ放電ランプとの距離を一定にし
やすいこと、高輝度の紫外線が得られることから、均一
に、かつ、高速で表面改質を行うことが出来る。FIG. 6 shows a schematic view of a surface modification method which is a fifth embodiment of the present invention. A dielectric barrier discharge lamp 5 identical to the flat dielectric barrier discharge lamp shown in Example 2
A roller 61 is provided in parallel with the first light extraction window member 1, and a polyethylene film 62, which is a surface-modified product, is installed in an atmosphere containing oxygen. From the light extraction window member of the dielectric barrier discharge lamp 51 to the roller 6
The wavelength of 172 nm and the ultraviolet rays in the vicinity thereof are concentrated and applied to the surface of the polyethylene film 62 that is in close contact with 1. As a result, the surface of the polyethylene film is modified by the usual mechanism. Since the irradiation surface of the dielectric barrier discharge lamp of the present invention is a straight band, it is easy to make the distance between the surface of the polyethylene film and the dielectric barrier discharge lamp constant, and since high-intensity ultraviolet rays can be obtained, uniformly, In addition, the surface can be modified at high speed.
【００１６】[0016]
【発明の効果】上記したように、本発明によれば、高効
率で、かつ光出力が安定である誘電体バリヤ放電ランプ
を提供できる。さらに、本発明の誘電体バリヤ放電ラン
プを使用することにより、平板状、フィルム状および帯
状の被処理物を、均一で高速に処理することが可能にな
る。As described above, according to the present invention, it is possible to provide a dielectric barrier discharge lamp with high efficiency and stable light output. Furthermore, by using the dielectric barrier discharge lamp of the present invention, it becomes possible to treat flat, film-shaped, and strip-shaped objects uniformly and at high speed.
【図１】本発明の誘電体バリヤ放電ランプの実施例の説
明図である。FIG. 1 is an explanatory view of an embodiment of a dielectric barrier discharge lamp of the present invention.
【図２】マイクロプラズマの説明図である。FIG. 2 is an explanatory diagram of microplasma.
【図３】窓部材の説明図である。FIG. 3 is an explanatory diagram of a window member.
【図４】本発明の誘電体バリヤ放電ランプの他の実施例
の説明図である。FIG. 4 is an explanatory view of another embodiment of the dielectric barrier discharge lamp of the present invention.
【図５】本発明の誘電体バリヤ放電ランプを使用した洗
浄方法の説明図である。FIG. 5 is an explanatory view of a cleaning method using the dielectric barrier discharge lamp of the present invention.
【図６】本発明の誘電体バリヤ放電ランプを使用した表
面改質方法の説明図である。FIG. 6 is an explanatory diagram of a surface modification method using the dielectric barrier discharge lamp of the present invention.
１ 光取り出し窓部材 ２，３，９，１０ 誘電体 ４，５，１１，１２ 電極 １３ 光反射膜 ５０ 光ファイバー ５１ 誘電体バリヤ放電ランプ ５２ 光反射板 ６２ ポリエチレンフィルム 1 Light Extracting Window Member 2, 3, 9, 10 Dielectric 4, 5, 11, 12 Electrode 13 Light Reflecting Film 50 Optical Fiber 51 Dielectric Barrier Discharge Lamp 52 Light Reflecting Plate 62 Polyethylene Film
Claims (5)
シマ分子を形成する放電用ガスが充填され、該放電容器
の一部は該誘電体バリヤ放電の誘電体を兼ねており、該
誘電体バリヤ放電の放電路に平行して設けられた光取り
だし窓部材を有する誘電体バリヤ放電ランプにおいて、
該光取りだし窓部材の放電路に平行な長さＨが該誘電体
バリヤ放電の放電路長Ｌを越える事を特徴とする誘電体
バリヤ放電ランプ。1. A discharge vessel is filled with a discharge gas that forms excimer molecules by dielectric barrier discharge, and a part of the discharge vessel also serves as a dielectric of the dielectric barrier discharge. In a dielectric barrier discharge lamp having a light extraction window member provided in parallel with the discharge path of
A dielectric barrier discharge lamp characterized in that a length H parallel to the discharge path of the light extraction window member exceeds a discharge path length L of the dielectric barrier discharge.
請求項１に記載の誘電体バリヤ放電ランプ。2. The dielectric barrier discharge lamp according to claim 1, wherein the discharge vessel has a flat plate shape.
を使用したことを特徴とする線状物の処理方法。3. A method of treating a linear object, wherein the dielectric barrier discharge lamp according to claim 2 is used.
を使用したことを特徴とする平板状物の処理方法。4. A method of treating a flat article, which uses the dielectric barrier discharge lamp according to claim 2.
を使用したことを特徴とするフィルム状物の処理方法。5. A method for treating a film-like material, wherein the dielectric barrier discharge lamp according to claim 2 is used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14668793A JP3147592B2 (en) | 1993-05-27 | 1993-05-27 | Dielectric barrier discharge lamp and processing method using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14668793A JP3147592B2 (en) | 1993-05-27 | 1993-05-27 | Dielectric barrier discharge lamp and processing method using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06338299A true JPH06338299A (en) | 1994-12-06 |
| JP3147592B2 JP3147592B2 (en) | 2001-03-19 |
Family
ID=15413311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14668793A Expired - Fee Related JP3147592B2 (en) | 1993-05-27 | 1993-05-27 | Dielectric barrier discharge lamp and processing method using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3147592B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006260934A (en) * | 2005-03-17 | 2006-09-28 | Tohoku Univ | Ultraviolet-beam generating device and phosphor characteristics estimation system |
| JP2010027268A (en) * | 2008-07-16 | 2010-02-04 | Ushio Inc | Excimer lamp |
| KR102356145B1 (en) * | 2021-03-16 | 2022-02-08 | (주)펨토사이언스 | Plasma Electrode Structure |
-
1993
- 1993-05-27 JP JP14668793A patent/JP3147592B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006260934A (en) * | 2005-03-17 | 2006-09-28 | Tohoku Univ | Ultraviolet-beam generating device and phosphor characteristics estimation system |
| JP4528969B2 (en) * | 2005-03-17 | 2010-08-25 | 国立大学法人東北大学 | Ultraviolet beam generator and phosphor characteristic evaluation system |
| JP2010027268A (en) * | 2008-07-16 | 2010-02-04 | Ushio Inc | Excimer lamp |
| KR102356145B1 (en) * | 2021-03-16 | 2022-02-08 | (주)펨토사이언스 | Plasma Electrode Structure |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3147592B2 (en) | 2001-03-19 |
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