JPH0633322U - Introduction terminal - Google Patents

Abstract

(57) [Summary] [Purpose] When introducing a high voltage into a vacuum vessel,
(EN) Provided is an introduction terminal capable of reducing a protrusion amount from a partition wall at a voltage introduction point, downsizing the device, facilitating handling, and improving safety. In a terminal including an inner conductor and an outer insulator for maintaining insulation between the inner conductor and a partition wall, a part or all of the inner conductor is formed of a high resistivity material.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an input terminal used in a device such as a high voltage application device, an electron beam application device, or an ion beam application device that needs to make an electrical connection through a partition.

[0002]

[Prior art]

 In general, the above-mentioned lead-in terminal has a structure in which the inner conductor for electrical connection is surrounded by an outer insulator, and this outer insulator keeps the insulation between the inner conductor and the partition wall. ing.

In such an introduction terminal, conventionally, a good conductor such as copper has been generally used as an internal conductor. Such an introduction terminal has a small loss at the terminal and is suitable for power transmission and current transmission, and is widely used as a vacuum introduction terminal into a vacuum container and an output terminal of a high-voltage power supply device.

[0004]

[Problems to be solved by the device]

 By the way, in an electron beam application device or the like, in order to apply a potential to the electric field lens, for example, only a high voltage may be introduced into the vacuum container over many times. In such a case, it is general to insert a high resistance in series immediately in front of the vacuum container in order to protect the power supply device and the like from an accidental discharge phenomenon in the vacuum container. In that case, as illustrated in FIG. 3, it is necessary to fix the introduction terminal T to the wall W of the vacuum container and to connect the high resistor R to the rear end of the introduction terminal T.

In such a conventional structure using the introduction terminal T, when introducing a voltage of, for example, about 30 kV, the length of the introduction terminal T on the atmosphere side is a pleated outer insulator as shown in FIG. Even if it is used, about 100 mm is required, and the resistor R is also required to have a length equal to or longer than that. Therefore, the total length L of the introduction terminal T and the resistor R on the atmosphere side is equal to The size is considerably longer than the size, which not only hinders downsizing of the entire device, but also poses a problem in terms of handling and safety.

The present invention has been made in view of the above points, and when introducing a high voltage into a vacuum container or the like, it is possible to reduce the protrusion margin from the partition wall at the voltage introduction point, and thus the size of the apparatus is reduced. The purpose is to provide lead-in terminals that can be made easier and easier to handle.

[0007]

[Means for Solving the Problems]

 In order to achieve the above object, the introduction terminal of the present invention is a terminal provided with an inner conductor and an outer insulator for maintaining insulation between the inner conductor and a partition, and a part or all of the inner conductor is provided. Is characterized by being formed of a high resistivity material.

[0008]

[Action]

 The two circuit elements, the original lead-in terminal and the high resistance, are physically integrated into one circuit element. In other words, the lead-in terminal itself also serves as a high resistor, and the length of the high resistor can shorten the margin of protrusion from the partition wall at the voltage introduction point.

[0009]

【Example】

 1 is a front view of an embodiment of the present invention, and FIG. 2 is a central sectional view thereof. The inner conductor 1 is formed of a high resistivity material 1a such as ceramic at the central portion thereof, and good conductors 1b and 1c such as copper are fixed to both ends of the inner conductor 1 to facilitate electric connection. It has a structure.

An outer insulator 2 is fixed to the inner conductor 1 at one end thereof so as to surround the inner conductor 1. The outer insulator 2 is the same as the conventional lead-in terminal, and the flange 3 for fixing to the wall W of the vacuum container or the like is fixed to the outer periphery of the other end portion. The airtightness between them is maintained.

The above-described embodiment of the present invention is suitable for applications in which a voltage of about several tens kV is introduced into an electron lens of an electron beam apparatus or the like, and when the voltage to be introduced is, for example, 30 kV, In the state of being attached to the wall W, the projection margin L to the atmosphere side is about 100 mm, which is 200 mm or more as described above when the conventional introduction terminal and high resistor are used. Less than half the protrusion margin.

In the above embodiment, the structure in which the good conductors 1b and 1c are arranged at both ends of the internal conductor 1 has been shown as an example in which electrical connection to the lead-in terminal is made as easy as the conventional one. The present invention is not particularly limited to this structure, and all of the inner conductor 1 may be formed of the high resistance material 1a. Further, as the material of the high resistivity material 1a, it is needless to say that any known high resistivity material such as cement can be used in addition to ceramics.

[0013]

[Effect of device]

 As described above, according to the present invention, a part or all of the internal conductor of the introduction terminal is made of a high resistance material. It is not necessary to connect a high resistor in series to the lead-in terminal, and the amount of protrusion from the bulkhead at the voltage feed-in point can be reduced by that much. Achieved and improved in terms of safety.

[Brief description of drawings]

FIG. 1 is a front view of an embodiment of the present invention.

FIG. 2 is a central sectional view thereof

FIG. 3 is an explanatory diagram of a configuration example at a voltage introduction point when a high voltage is introduced into a vacuum container using a conventional introduction terminal.

[Explanation of symbols]

 1 Inner conductor 1a High resistance material 1b, 1c Good conductor 2 External insulator 3 Flange W Bulkhead

Claims (1)

[Scope of utility model registration request] 1. A terminal provided with an internal conductor and an external insulator for maintaining insulation between the internal conductor and the partition for making an electrical connection through the partition, wherein a part of the internal conductor is provided. Alternatively, the introduction terminal is characterized in that it is entirely formed of a high resistivity material.