JPH06331659A - Pulse current monitor - Google Patents

Abstract

PURPOSE:To accurately measure a current taking the form of a high-speed pulse. CONSTITUTION:When a pulse-form beam of charged particles passes through a beam duct 5, it produces magnetic flux in a core 9. This magnetic flux causes current through a conductor 2, and the current is taken out from a connector 3 whereby the current passing through the beam duct 5 can be measured without contact. The core 9 is manufactured by winding into a toroidal shape an alloy tape made of fine crystal grains made of an iron or cobalt alloy. The waveform of the highspeed pulse and the current value can be measured at high accuracy and the rate of aged deterioration is reduced.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pulse current monitor used for measuring a current waveform and a current value of a pulsed current such as a pulsed charged particle beam.

[0002]

2. Description of the Related Art FIG. 7 is a front sectional view taken along a plane perpendicular to a beam of a conventional pulse current monitor.
1 is a ring-shaped core made of ferrite or amorphous (amorphous), 2 is a conductor wire made of copper wire wound around the core 1, 3 is a monitor output connector connected to the conductor wire 2, 4 is the core A container 5 for accommodating 1 is a beam duct through which the charged particle beam passes through the core 1 in the axial direction.

FIG. 8 is a schematic perspective view for explaining the operation. 6 is a pulsed charged particle beam passing through the beam duct 5, 7 is a detection resistor connected to the conductor 2, and 8 is a resistor. Is the output pulse waveform.

Next, the operation will be described. When the pulsed charged particle beam 6 passes through the beam duct 5 shown in FIG. 7 as shown in FIG. 8, a magnetic flux is generated in the core 1, and this magnetic flux induces a current in the conductor 2. By extracting this current from the connector 3 of FIG. 7, terminating it with the resistor 7 of FIG. 8 and converting it into the output pulse waveform 8, the waveform and current value of the passing beam can be measured.

[0005]

Since the conventional pulse current monitor is constructed as described above, the high frequency characteristics of the magnetic material using ferrite, amorphous, etc. of the core 1 are not sufficient. However, there is a problem that the waveform of the charged particle beam 6 cannot be measured. Further, since amorphous is non-crystalline, it is unstable with respect to temperature and its magnetic characteristics are deteriorated, so that there is a problem that the waveform of the charged particle beam 6 cannot be measured.

The present invention has been made to solve the above problems, and an object thereof is to obtain a pulse current monitor capable of accurately measuring the waveform and current value of a charged particle beam in a high-speed pulse form.

[0007]

A pulse current monitor according to a first aspect of the present invention uses a core made of an iron alloy or a cobalt alloy.

A pulse current monitor according to a second aspect of the present invention uses a core formed by winding an alloy tape made of an iron alloy or a cobalt alloy in a toroidal shape.

A pulse current monitor according to a third aspect of the present invention uses the iron alloy or cobalt alloy composed of fine crystal grains.

[0010]

The pulse current monitor according to the invention of claim 1 is
Since the iron alloy or the cobalt alloy has a high magnetic permeability, it is possible to reduce the number of turns of the conductive wire wound around the core to reduce the leakage inductance and the stray capacitance, thereby improving the high speed response.

In the pulse current monitor according to the invention of claim 2, since the alloy tape is used, the loss due to the eddy current for the high speed pulse is small.

In the pulse current monitor according to the third aspect of the present invention, since the iron alloy or cobalt alloy composed of fine crystal grains is quickly magnetized with respect to the high speed pulse, the pulse current waveform is faithfully reproduced.

[0013]

【Example】

Example 1. An embodiment of the present invention will be described below with reference to the drawings. 1 to 6, parts corresponding to those in FIGS. 7 and 8 are denoted by the same reference numerals, and overlapping description will be omitted. In FIGS. 1 and 2, 9 is a ring-shaped core made of an iron alloy or a cobalt alloy according to the present invention, around which a conductor wire 2 is wound, and a beam duct (current path) penetrating in the axial direction as a current path. 5 are provided. 1
Reference numeral 0 is a screw for fixing the core 2 to the container 4. Figure 2
In the figure, 11 is a ceramic duct for performing vacuum insulation on the beam duct 5 and for transmitting magnetic flux by the beam to the core 9.

FIG. 3 is a side sectional view, a front view, and a partially enlarged view showing the internal structure of the core 9, 12 is a ring-shaped insulating case, 13 is an alloy wound in the insulating case 12 in a toroidal shape. Tape-shaped insulating film 13
An alloy layer 13b of iron alloy or cobalt alloy, which is composed of fine crystal grains of several μm or less, is provided on a.

Next, the operation will be described. Since the core 9 configured as described above uses an iron alloy or a cobalt alloy as a base material, it has a high magnetic permeability and the number of windings of the conductive wire 2 wound around the core 9 can be reduced. Therefore, the leakage inductance and the stray capacitance can be reduced, and the response to the high speed pulse can be improved.

Further, since the alloy layer 13b of the alloy tape 13 is a fine crystal grain, quick magnetization characteristics can be obtained for a high speed pulse. Therefore, the pulse current waveform can be faithfully reproduced and the change over time is less than that of the conventional amorphous material. It should be noted that the crystal grains of the alloy layer 13b are finer if they are several μm or less, but actually, those having a grain size of about 2 to 3 μm are used.

Further, since the thin alloy tape 13 is used, the loss due to the eddy current can be reduced with respect to the high speed pulse.

Example 2. In the first embodiment, the alloy tape 13 is wound in a toroidal shape, and the insulating case 12
The alloy tape 1 was stored in the
The same effect can be obtained by molding 3 by winding the toroidal shape 3 with a resin such as epoxy.

Example 3. Further, as shown in FIG. 4, the same effect can be obtained by fixing the alloy tape 13 wound in a toroidal shape with the insulating tape 14.

Embodiment 4 In FIG. 5, 15 is a pulse generator, 16 is a load, 17 is a pulse generator 15 and a load 16
A cable serving as a current path for connecting and through the core 9 and 18 is a pulse current flowing through the cable 17. In the first embodiment described above, the measurement of the high-speed pulse of the charged particle beam was described. However, as shown in FIG. Can be measured.

Example 5. In FIG. 6, 19 is a load connected to one end of the conductor 2, and 20 is a signal source connected to the other end of the conductor 2. When noise is placed on the conductor 2 as a cable for transmitting a signal from the signal source 20 to the load 19, by using the core 9 as shown in FIG. 6, it can be used as a device for removing noise.

[0022]

As described above, according to the invention of claim 1, since the core is made of the iron alloy or the cobalt alloy,
The magnetic permeability of the core can be increased to reduce the number of turns of the conductive wire, which reduces leakage inductance and stray capacitance, and has the effect of improving the response to high-speed pulses.

According to the second aspect of the present invention, since the core formed by winding the alloy tape using the iron alloy or the cobalt alloy in a toroidal shape is used, the eddy current is small and it is possible to cope with the high speed pulse. There is.

According to the third aspect of the present invention, since fine crystal grains are used for the iron alloy or the cobalt alloy, it is possible to rapidly magnetize the high speed pulse.
There is an effect that the high-speed pulse current can be faithfully reproduced.

[Brief description of drawings]

FIG. 1 is a front sectional view showing a pulse current monitor according to a first embodiment of the present invention.

FIG. 2 is a side sectional view showing the pulse current monitor.

FIG. 3 is a side sectional view, a front view, and an enlarged view of a main part showing an internal structure of a core used in the pulse current monitor.

FIG. 4 is a front view showing a core used in a pulse current monitor according to a third embodiment of the present invention.

FIG. 5 is a configuration diagram showing a pulse current monitor according to a fourth embodiment of the present invention.

FIG. 6 is a configuration diagram showing an application side according to a fifth embodiment of the present invention.

FIG. 7 is a front sectional view showing a conventional pulse current monitor.

FIG. 8 is a schematic perspective view of the pulse current monitor.

[Explanation of symbols]

 2 conductor 5 beam duct (current passage) 9 core 13 alloy tape 13a insulating film 13b alloy layer 17 cable (current passage)

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[Procedure amendment]

[Submission date] October 20, 1993

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] Claim 2

[Correction method] Change

[Correction content]

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0014

[Correction method] Change

[Correction content]

FIG. 3 is a side sectional view, a front view, and a partially enlarged view showing the internal structure of the core 9, 12 is a ring-shaped insulating case, 13 is an alloy wound in the insulating case 12 in a toroidal shape. a tape, on the alloy layer 13b of an iron alloy or a cobalt alloy consisting of several μm or less fine grain
Is provided with an insulating coating 13a .

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0016

[Correction method] Change

[Correction content]

Further, since the alloy layer 13b of the alloy tape 13 is a fine crystal grain, quick magnetization characteristics can be obtained for a high speed pulse. Therefore, the pulse current waveform can be faithfully reproduced and the change over time is less than that of the conventional amorphous material. The crystal grains of the alloy layer 13b, the better fine if the number μm or less, but actually 2~3μm about than
The ones below are used.

Claims (3)

[Claims] 1. A core made of an iron alloy or a cobalt alloy and having a ring shape, a current passage for passing a pulsed current such as a charged particle beam through the core in the axial direction, and the current wound around the core. A pulse current monitor comprising: a conducting wire through which an induced current due to a magnetic flux generated in the core by a pulsed current flowing through the passage flows. 2. A core formed in a ring shape by winding an alloy tape formed by providing an alloy layer made of an iron alloy or a cobalt alloy on an insulating coating in a toroidal shape, and penetrating the core in the axial direction. A pulse current monitor having a current passage through which a pulsed current such as a charged particle beam flows and a conducting wire that is wound around the core and through which a current induced by a magnetic flux generated in the core due to the pulsed current flows through the current passage. 3. The pulse current monitor according to claim 1, wherein the iron alloy or the cobalt alloy is composed of fine crystal grains.