JPH06331534A - Measuring apparatus of mechanical characteristic of thin film - Google Patents
Measuring apparatus of mechanical characteristic of thin filmInfo
- Publication number
- JPH06331534A JPH06331534A JP5123999A JP12399993A JPH06331534A JP H06331534 A JPH06331534 A JP H06331534A JP 5123999 A JP5123999 A JP 5123999A JP 12399993 A JP12399993 A JP 12399993A JP H06331534 A JPH06331534 A JP H06331534A
- Authority
- JP
- Japan
- Prior art keywords
- test piece
- indenter
- thin film
- electromagnetic waves
- driver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は薄膜の機械的特性測定装
置に関し、特に密着力または付着力を測定する装置に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film mechanical property measuring device, and more particularly to a device for measuring adhesion or adhesion.
【０００２】[0002]
【従来の技術】従来の薄膜の機械的特性測定装置は図２
に示す様に、基板上に薄膜が形成されている試験片１を
用い、試験片１の下部に位置し試験片１を傾斜させる傾
斜機構２を備えた荷重変換器３と、試験片１の上方に位
置し試験片１に押し込み変形を与えると同時に試料片１
の内部に発生するクラックによるアコースティックエミ
ッション（ＡＥ）を検知する検知器とを兼ねた圧子４
と、圧子４を垂直方向に駆動する駆動器５と、駆動器５
と連動して圧子４の押し込み量を測定する変位計６とを
有している。（例えば特開昭６４−３１０３６号公報参
照）。2. Description of the Related Art A conventional thin film mechanical property measuring apparatus is shown in FIG.
As shown in FIG. 2, a load transducer 3 provided with a tilting mechanism 2 which is located below the test piece 1 and tilts the test piece 1 is used. The test piece 1 is located at the upper position and is deformed by being pushed into it.
Indenter 4 which also functions as a detector for detecting acoustic emission (AE) due to cracks generated inside
And a driver 5 for driving the indenter 4 in the vertical direction, and a driver 5
And a displacement gauge 6 that measures the amount of pushing of the indenter 4 in conjunction with. (See, for example, JP-A 64-31036).
【０００３】次に従来装置の動作について説明する。基
板上に薄膜を被覆した試験片１は、荷重変換器３として
用いられている電子天秤の試料皿上に置いた傾斜機構２
の上に載せられている。先端を球状に加工したＰＺＴ
（チタン酸ジルコン酸鉛圧電セラミック）ＡＥ変換子、
または先端部のみルビー・セラミック・超硬等で加工し
接着したＰＺＴ−ＡＥ変換子からなる圧子４は、駆動器
５である圧電アクチュエータの先端に取り付けられてお
り、試験片１に押し込み変形を与えると同時に基板ある
いは薄膜内部、もしくは基板と薄膜との界面での破壊に
伴うＡＥ信号を検知する。圧子４に取り付けられた変位
計６は光強度型変位計を用いており、試験片１に対する
圧子４の押し込み量を測定する。ＡＥ信号の発生数・振
幅を測定することにより膜の剥離を検出し、その時の押
し込み荷重と押し込み深さから付着力を求める。Next, the operation of the conventional device will be described. A test piece 1 in which a thin film is coated on a substrate is a tilting mechanism 2 placed on a sample pan of an electronic balance used as a load converter 3.
It is on the top of. PZT with a spherical tip
(Lead zirconate titanate piezoelectric ceramic) AE converter,
Alternatively, an indenter 4 made of a PZT-AE transducer, whose tip is processed by ruby, ceramic, cemented carbide, etc. and bonded, is attached to the tip of a piezoelectric actuator that is a driver 5, and pushes and deforms the test piece 1. At the same time, the AE signal associated with the destruction inside the substrate or the thin film or at the interface between the substrate and the thin film is detected. The displacement meter 6 attached to the indenter 4 uses a light intensity type displacement meter, and measures the amount of pushing of the indenter 4 with respect to the test piece 1. The peeling of the film is detected by measuring the number and amplitude of AE signals generated, and the adhesive force is obtained from the pushing load and the pushing depth at that time.
【０００４】[0004]
【発明が解決しようとする課題】この従来の薄膜の機械
的特性測定装置では、測定操作の自動化制御のためにパ
ーソナルコンピュータ１０及びＣＲＴディスプレイ１１
を使用しているため、これら周辺機器の電磁波等によ
り、圧子が検知したＡＥ信号にノイズが混入し、剥離現
象により発生するＡＥ信号が正確に測定できないという
問題点があった。また装置の外部にある設備から発生す
る電磁波により内部の鉄等の金属が振動し、また剥離現
象を検出するためのＡＥ信号の中に混入してしまい正確
に剥離現象が検出できないというような問題点があっ
た。In this conventional thin film mechanical property measuring apparatus, a personal computer 10 and a CRT display 11 are provided for automatic control of the measuring operation.
However, there is a problem in that the AE signal detected by the indenter is mixed with noise due to the electromagnetic waves of these peripheral devices and the AE signal generated by the peeling phenomenon cannot be accurately measured. In addition, the electromagnetic waves generated from equipment outside the device vibrates the metal such as iron inside and also mixes in the AE signal for detecting the peeling phenomenon, so that the peeling phenomenon cannot be accurately detected. There was a point.
【０００５】[0005]
【課題を解決するための手段】本発明の薄膜の機械的特
性測定装置は、基板上に薄膜が形成されている試験片を
用い、試験片の下部に位置し試験片を傾斜させる傾斜機
構を備えた荷重変換器と、試験片の上方に位置し試験片
に押し込み変形を与えると同時に試験片内部に発生する
クラックの伝播状態を検知する検知器とを兼ねた圧子
と、圧子を垂直方向に駆動する駆動器と、圧子の押し込
み量を測定する変位計と、前記の試験片、傾斜機構、荷
重変換器、圧子、駆動器及び変位計の全てを覆う導電性
の有る磁性体でできたカバーとを備えている。Means for Solving the Problems A thin film mechanical property measuring apparatus according to the present invention uses a test piece having a thin film formed on a substrate, and has a tilting mechanism which is located below the test piece and tilts the test piece. A load transducer equipped with the indenter, which is located above the test piece and applies deformation to the test piece at the same time as a detector that detects the propagation state of cracks generated inside the test piece, and the indenter in the vertical direction. A cover made of a conductive magnetic material that covers all of the above-mentioned test piece, tilting mechanism, load converter, indenter, driver and displacement gauge, and the drive unit to be driven, the displacement gauge to measure the pushing amount of the indenter. It has and.
【０００６】[0006]
【作用】試験片、傾斜機構、荷重変換器、圧子、駆動器
及び変位計から構成される測定部全体を導電性・磁性体
カバーで覆うことで、外周辺部からの電磁波をシールド
し、圧子で検出するＡＥ信号にノイズが混入するのを防
止できる。[Function] By covering the entire measuring section consisting of the test piece, tilting mechanism, load converter, indenter, driver and displacement gauge with the conductive / magnetic material cover, electromagnetic waves from the outer peripheral part are shielded and the indenter It is possible to prevent noise from being mixed in the AE signal detected by.
【０００７】[0007]
【実施例】次に本発明の実施例について図面を参照して
説明する。図１は本発明の実施例の構成を示す構成図で
ある。Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a configuration diagram showing the configuration of an embodiment of the present invention.
【０００８】同図において、１は基板上に薄膜が形成さ
れている試験片、２は試験片１を載せて傾斜させる傾斜
機構、３は傾斜機構２を載せた荷重変換器であり、電子
天秤で構成されている。４は先端を球状に加工したＰＺ
Ｔ−ＡＥ変換子、または先端のみルビー、セラミック、
超硬等で加工し接着したＰＺＴ−ＡＥ変換子からなる圧
子である。５は圧子４を取付けたブロック８を垂直方向
に動かす駆動器、６はブロック８に取付けられた光強度
型変位計で、試験片１に対する圧子４の押し込み量を測
定するものである。７は導電性を有する磁性体でできた
別体ないしは除振台に起伏自在に取付けられたシールド
カバーで、試験片１、傾斜機構２、荷重変換器３、圧子
４、駆動器５及び変位計６から成る測定部全体を覆うも
のである。１０は薄膜の機械的特性の測定操作の自動化
のためのパーソナルコンピュータ、１１は測定データ等
を表示するＣＲＴディスプレイである。In the figure, 1 is a test piece in which a thin film is formed on a substrate, 2 is a tilting mechanism for mounting the test piece 1 and tilting, 3 is a load converter on which the tilting mechanism 2 is mounted, and an electronic balance. It is composed of. 4 is a PZ with a spherical tip
T-AE converter or ruby only tip, ceramic,
It is an indenter made of a PZT-AE converter which is processed by cemented carbide and adhered. Reference numeral 5 is a driver for moving the block 8 to which the indenter 4 is attached in the vertical direction, and 6 is a light intensity type displacement gauge attached to the block 8 for measuring the amount of pushing of the indenter 4 with respect to the test piece 1. Reference numeral 7 denotes a shield cover which is attached to a separate body made of a magnetic material having conductivity or a vibration isolation table so as to be able to rise and fall freely, and includes a test piece 1, a tilt mechanism 2, a load converter 3, an indenter 4, a driver 5 and a displacement meter. It covers the entire measuring section consisting of 6. Reference numeral 10 is a personal computer for automating the measurement operation of the mechanical properties of the thin film, and 11 is a CRT display for displaying measurement data and the like.
【０００９】基板上に薄膜を被覆した試験片１は、荷重
変換器３として用いられている電子天秤の試料皿の傾斜
機構２の上に載せられている。先端を球状に加工したＰ
ＺＴ−ＡＥ変換子、または先端のみルビー・セラミック
・超硬等で加工し接着したＰＺＴ−ＡＥ変換子からなる
圧子４はブロック８に取付けられており、ブロック８は
駆動器５である圧電アクチュエータの先端に取付けられ
ている。圧子４で試験片１に押し込み変形を与えると同
時に基板あるいは薄膜内部もしくは基板と薄膜との界面
での破壊に伴うＡＥ信号を検知する。ブロック８に取付
けられた変位計６は光強度型変位計を用いており、試験
片１に対する圧子４の押し込み量を測定する。これらの
測定操作についてはコンピュータ１０によって自動的に
制御され、測定結果等がディスプレイ１１に表示され
る。A test piece 1 having a substrate coated with a thin film is placed on a tilting mechanism 2 of a sample pan of an electronic balance used as a load converter 3. P with a spherical tip
An indenter 4 made of a ZT-AE converter or a PZT-AE converter having only the tip processed by ruby, ceramic, cemented carbide or the like and adhered is attached to a block 8, and the block 8 is a driver 5 of a piezoelectric actuator. It is attached to the tip. The indenter 4 presses the test piece 1 to deform it, and at the same time, detects an AE signal due to destruction at the inside of the substrate or the thin film or the interface between the substrate and the thin film. The displacement meter 6 attached to the block 8 uses a light intensity type displacement meter and measures the amount of pushing of the indenter 4 with respect to the test piece 1. These measurement operations are automatically controlled by the computer 10, and the measurement results and the like are displayed on the display 11.
【００１０】ところで、駆動器５の制御や荷重変換器３
及び変位計６の測定値を処理するために用いられている
パーソナルコンピュータ、ＣＲＴディスプレイの電磁波
や隣接する設備の発生する電磁波は、測定部全体を覆う
導電性のある磁性体の鉄またはフェライトでできたカバ
ー７により、測定装置内部の金属が振動することがなく
なり、かつ圧子４であるＡＥ変換子で検出したＡＥ信号
中にノイズを与えることがなくなる。By the way, the control of the driver 5 and the load converter 3
The electromagnetic waves of the personal computer and CRT display used for processing the measured values of the displacement meter 6 and the electromagnetic waves generated by the adjacent equipment can be iron or ferrite, which is a conductive magnetic material that covers the entire measurement unit. The cover 7 prevents the metal inside the measuring device from vibrating, and prevents noise from being added to the AE signal detected by the AE converter that is the indenter 4.
【００１１】[0011]
【発明の効果】以上説明したように本発明は、測定部全
体を覆う導電性の磁性体である鉄やフェライトのカバー
を備えたので、パーソナルコンピュータ、ＣＲＴディス
プレイの電磁波や隣接する設備の発生する電磁波によっ
て測定装置内部の金属が振動することがなくなり、かつ
圧子であるＡＥ変換子のＡＥ信号にノイズを与えること
がなくなるという効果を有する。As described above, the present invention is provided with the cover of iron or ferrite, which is a conductive magnetic material that covers the entire measuring portion, so that the electromagnetic waves of the personal computer and the CRT display and the adjacent equipment are generated. It is possible to prevent the metal inside the measuring device from vibrating due to the electromagnetic wave and to prevent the AE signal of the AE converter, which is the indenter, from giving noise.
【図１】本発明の実施例の構成を示す構成図FIG. 1 is a configuration diagram showing a configuration of an embodiment of the present invention.
【図２】従来の薄膜の機械的特性測定装置の実施例の構
成を示す構成図FIG. 2 is a configuration diagram showing a configuration of an example of a conventional thin film mechanical property measuring apparatus.
１ 試験片 ２ 傾斜機構 ３ 荷重変換器 ４ 圧子 ５ 駆動器 ６ 変位計 ７ シールドカバー ８ ブロック ９ 変位計表示部 １０ パーソナルコンピュータ １１ ＣＲＴディスプレイ １２ 除振台 1 Test piece 2 Tilt mechanism 3 Load converter 4 Indenter 5 Driver 6 Displacement meter 7 Shield cover 8 Block 9 Displacement meter display section 10 Personal computer 11 CRT display 12 Vibration isolation table
Claims (1)
用い、前記試験片の下部に位置し前記試験片を傾斜させ
る傾斜機構を備えた荷重変換器と、前記試験片の上方に
位置し前記試験片に押し込み変形を与えると同時に前記
試験片内部に発生するクラックの伝播状態を検知する検
知器とを兼ねた圧子と、前記圧子を垂直方向に駆動する
駆動器と、前記圧子の押し込み量を測定する変位計と、
前記試験片、前記傾斜機構、前記荷重変換器、前記圧
子、前記駆動器及び前記変位計の全てを覆う導電性の有
る磁性体でできたカバーとを有することを特徴とする薄
膜の機械的特性測定装置。1. A load transducer, which uses a test piece having a thin film formed on a substrate, is provided below the test piece, and has a tilting mechanism for tilting the test piece, and above the test piece. The indenter also acts as a detector that detects the propagation state of cracks that occur inside the test piece at the same time that the test piece is pressed and deformed, a driver that drives the indenter in the vertical direction, and the indentation of the indenter. A displacement meter that measures the amount,
Mechanical characteristics of a thin film, characterized in that it has a cover made of a magnetic material having conductivity, which covers all of the test piece, the tilting mechanism, the load converter, the indenter, the driver and the displacement meter. measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5123999A JPH06331534A (en) | 1993-05-26 | 1993-05-26 | Measuring apparatus of mechanical characteristic of thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5123999A JPH06331534A (en) | 1993-05-26 | 1993-05-26 | Measuring apparatus of mechanical characteristic of thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06331534A true JPH06331534A (en) | 1994-12-02 |
Family
ID=14874539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5123999A Pending JPH06331534A (en) | 1993-05-26 | 1993-05-26 | Measuring apparatus of mechanical characteristic of thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06331534A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005201803A (en) * | 2004-01-16 | 2005-07-28 | Mitsutoyo Corp | Method for evaluating adhesion force of thin film and hardness tester |
| JP2007147512A (en) * | 2005-11-29 | 2007-06-14 | Mitsubishi Motors Corp | Quality inspection device |
| TWI382175B (en) * | 2006-12-22 | 2013-01-11 | Hon Hai Prec Ind Co Ltd | Method and apparatus for testing adhesion |
| WO2020170665A1 (en) * | 2019-02-20 | 2020-08-27 | 三菱重工機械システム株式会社 | Carriage for automobile crash simulation test, automobile crash simulation test device, and automobile crash simulation test method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6431036A (en) * | 1987-07-27 | 1989-02-01 | Nec Corp | Close adhesion strength measuring apparatus |
| JPH01133030A (en) * | 1987-11-18 | 1989-05-25 | Matsushita Electric Ind Co Ltd | Acoustooptic element |
| JPH0579814A (en) * | 1991-03-15 | 1993-03-30 | Nikon Corp | Scanning-probe type microscope |
-
1993
- 1993-05-26 JP JP5123999A patent/JPH06331534A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6431036A (en) * | 1987-07-27 | 1989-02-01 | Nec Corp | Close adhesion strength measuring apparatus |
| JPH01133030A (en) * | 1987-11-18 | 1989-05-25 | Matsushita Electric Ind Co Ltd | Acoustooptic element |
| JPH0579814A (en) * | 1991-03-15 | 1993-03-30 | Nikon Corp | Scanning-probe type microscope |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005201803A (en) * | 2004-01-16 | 2005-07-28 | Mitsutoyo Corp | Method for evaluating adhesion force of thin film and hardness tester |
| JP2007147512A (en) * | 2005-11-29 | 2007-06-14 | Mitsubishi Motors Corp | Quality inspection device |
| JP4512548B2 (en) * | 2005-11-29 | 2010-07-28 | 三菱自動車工業株式会社 | Quality inspection equipment |
| TWI382175B (en) * | 2006-12-22 | 2013-01-11 | Hon Hai Prec Ind Co Ltd | Method and apparatus for testing adhesion |
| WO2020170665A1 (en) * | 2019-02-20 | 2020-08-27 | 三菱重工機械システム株式会社 | Carriage for automobile crash simulation test, automobile crash simulation test device, and automobile crash simulation test method |
| JP2020134343A (en) * | 2019-02-20 | 2020-08-31 | 三菱重工機械システム株式会社 | Truck for automobile collision simulation test, automobile collision simulation test device, and automobile collision simulation test method |
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