JPH06323841A - Position detector - Google Patents
Position detectorInfo
- Publication number
- JPH06323841A JPH06323841A JP11350493A JP11350493A JPH06323841A JP H06323841 A JPH06323841 A JP H06323841A JP 11350493 A JP11350493 A JP 11350493A JP 11350493 A JP11350493 A JP 11350493A JP H06323841 A JPH06323841 A JP H06323841A
- Authority
- JP
- Japan
- Prior art keywords
- elastic strip
- base
- slider
- elastic
- linear guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Manipulator (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、産業ロボット等に設
けられる移動体の位置を検出する位置検出装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position detecting device for detecting the position of a moving body provided on an industrial robot or the like.
【０００２】[0002]
【従来の技術】図７は、従来の位置検出装置を示す概念
的斜視図である。図において、(1)は基台、(2)は基台
(1)の長手に沿って設けられた直線案内体、(3)は直線案
内体(2)に摺動可能に係合されて移動するスライダ、(4)
は基台(1)に設けられて直線案内体(2)と平行に配置され
たラック、(5)はスライダ(3)に設けられてラック(4)と
噛み合うピニオン、(6)スライダ(3)に設けられてピニオ
ン(5)の回転角度に応じた出力を発生するロータリーエ
ンコーダ、(7)はロータリーエンコーダ(6)に接続されて
ロータリーエンコーダ(6)の出力によりスライダ(3)の位
置を算出する信号処理装置である。2. Description of the Related Art FIG. 7 is a conceptual perspective view showing a conventional position detecting device. In the figure, (1) is the base, (2) is the base
(1) A linear guide provided along the longitudinal direction, (3) a slider that is slidably engaged with the linear guide (2) to move, (4)
Is a rack provided on the base (1) and arranged in parallel with the linear guide (2), (5) is a pinion provided on the slider (3) and meshes with the rack (4), (6) a slider (3) ) Is a rotary encoder that generates an output according to the rotation angle of the pinion (5), (7) is connected to the rotary encoder (6), and the output of the rotary encoder (6) controls the position of the slider (3). It is a signal processing device for calculating.
【０００３】従来の位置検出装置は上記のように構成さ
れ、スライダ(3)が図示が省略してあるが駆動機構によ
って駆動され、直線案内体(2)に案内されて移動するこ
とにより、ピニオン(5)がスライダ(3)の移動量に応じて
回転する。このピニオン(5)の回転角度によるロータリ
ーエンコーダ(6)の出力によって信号処理装置(7)が動作
してスライダ(3)の位置、すなわち、移動量が算出され
るようるなっている。なお、スライダ(3)の相対的な移
動量を測定する場合は、ロータリーエンコーダ(6)と信
号処理装置(7)がインクリメンタル式とされる。また、
定めた位置からの絶対的な位置を測定する場合は、ロー
タリーエンコーダ(6)と信号処理装置(7)がアブソリュー
ト式とされる。The conventional position detecting device is constructed as described above, and the slider (3) is driven by a drive mechanism (not shown), and is moved by being guided by the linear guide body (2) to move the pinion. (5) rotates according to the amount of movement of the slider (3). The signal processing device (7) operates by the output of the rotary encoder (6) according to the rotation angle of the pinion (5), and the position of the slider (3), that is, the movement amount is calculated. When measuring the relative movement amount of the slider (3), the rotary encoder (6) and the signal processing device (7) are of an incremental type. Also,
When measuring the absolute position from the defined position, the rotary encoder (6) and the signal processing device (7) are of an absolute type.
【０００４】[0004]
【発明が解決しようとする課題】上記のような従来の位
置検出装置では、ラック(4)の歯切り加工精度、スライ
ダ(3)の移動量をロータリーエンコーダ(6)の回転角度に
変換するピニオン(5)の歯切り加工精度、及びラック(4)
とスライダ(3)の移動平行度が測定精度に影響する。こ
のため、高精度の測定のために関連部材の高精度の加
工、組付けが必要となる。したがって、長距離の測長の
場合に測定精度を維持するためには、広範囲にわたって
関連部材の高精度の加工、組付けを実現しなければなら
ず、製作が容易でなく費用が嵩むという問題点があっ
た。また、ラック(4)とピニオン(5)の間には、構造上バ
ックラッシを要するため、測定が１方向に１回のみでな
い場合、測定値にバックラッシ分の誤差が生じることに
なる。In the conventional position detecting apparatus as described above, the pinion for converting the gear cutting accuracy of the rack (4) and the movement amount of the slider (3) into the rotation angle of the rotary encoder (6). Gear cutting accuracy of (5) and rack (4)
And the parallelism of movement of the slider (3) affects the measurement accuracy. Therefore, it is necessary to process and assemble the related members with high accuracy in order to measure with high accuracy. Therefore, in order to maintain the measurement accuracy in the case of long-distance measurement, it is necessary to realize high-precision processing and assembly of related members over a wide range, which is not easy to manufacture and costly. was there. Further, since backlash is structurally required between the rack (4) and the pinion (5), if the measurement is not performed only once in one direction, a backlash error will occur in the measured value.
【０００５】この発明は、かかる問題点を解消するため
になされたものであり、スライダの移動経路に沿って張
設された弾性条体の振動を介して動作し、誤差が少なく
容易に製作できる位置検出装置を得ることを目的とす
る。The present invention has been made to solve the above problems, and operates by vibrating an elastic strip stretched along the moving path of the slider, and can be easily manufactured with few errors. The purpose is to obtain a position detection device.
【０００６】[0006]
【課題を解決するための手段】この発明の請求項１記載
の発明に係る位置検出装置においては、基台に設けられ
た直線案内体と、この直線案内体に案内されて移動する
スライダと、長手が直線案内体に沿って配置されて両端
がそれぞれ基台に固定されて張設された横断面一定の弾
性条体と、基台に設けられ弾性条体の長手中間部に対向
して配置されこの弾性条体を加振する非接触形の加振器
と、スライダに設けられて加振器の加振により弾性条体
に発生する振動変位を測定する非接触形の測定器と、加
振器により弾性条体に作用する力及び測定器の出力が入
力されて弾性体の運動方程式により基台の端部寄りに設
定された原点とスライダの関係位置を算出する信号処理
装置とが設けられる。In the position detecting apparatus according to the invention described in claim 1 of the present invention, a linear guide body provided on the base, and a slider which is moved by being guided by the linear guide body. An elastic strip having a constant cross-section, the longitudinal length of which is arranged along a linear guide body and both ends of which are fixed to the base, and which is arranged to face the intermediate longitudinal portion of the elastic strip provided on the base. A non-contact type vibrator for vibrating the elastic strip, a non-contact type measuring device provided on the slider for measuring the vibration displacement generated in the elastic strip by the vibration of the exciter, A signal processing device for calculating the relational position between the origin and the slider set near the end of the base according to the equation of motion of the elastic body by inputting the force acting on the elastic body by the shaker and the output of the measuring device is provided. To be
【０００７】また、この発明の請求項２記載の発明に係
る位置検出装置においては、基台に設けられた直線案内
体と、この直線案内体に案内されて移動するスライダ
と、長手が直線案内体に沿って配置されて両端がそれぞ
れ基台に固定されて張設された横断面一定の弾性条体
と、基台に設けられ弾性条体の長手中間部に対向して配
置されこの弾性条体を加振し、弾性条体に加振方向と同
じ方向に変位する固有振動モードの固有振動数で正弦波
状に変化し振幅が常に一定の力を加え弾性条体に加振方
向と同じ方向に変位する固有振動モードを発生させる非
接触形の加振器と、スライダに設けられて加振器の加振
により弾性条体に発生する位置のみに依存する振動変位
の振幅を測定する非接触形の測定器と、加振器により弾
性条体に作用する力及び測定器の出力が入力され弾性体
の運動方程式により周波数領域の弾性条体の基準モード
関数を解き基台の端部寄りに設定された原点とスライダ
の関係位置を算出する信号処理装置とが設けられる。In the position detecting device according to the second aspect of the present invention, a linear guide body provided on the base, a slider guided by the linear guide body to move, and a longitudinal guide line. An elastic strip which is arranged along the body and has both ends fixed to the base and stretched, and an elastic strip which is provided on the base and faces the longitudinal middle portion of the elastic strip. The body vibrates, and the elastic body is displaced in the same direction as the direction of vibration. It changes sinusoidally at the natural frequency of the natural vibration mode and a constant amplitude force is applied to the elastic body in the same direction as the vibration direction. Non-contact type vibration generator that generates natural vibration mode that displaces in a non-contact manner -Shaped measuring instrument and the force exerted on the elastic strip by the vibrator. The signal processing device is input, and a signal processing device that solves the standard mode function of the elastic striation in the frequency domain by the equation of motion of the elastic body and calculates the relational position between the origin and the slider set near the end of the base is provided. To be
【０００８】また、この発明の請求項３記載の発明に係
る位置検出装置においては、基台に設けられた直線案内
体と、この直線案内体に案内されて移動するスライダ
と、長手が直線案内体に沿って配置されて両端がそれぞ
れ基台に固定されて張設された横断面一定の弾性条体
と、基台に設けられ弾性条体の長手中間部に対向して配
置されこの弾性条体を加振し、弾性条体に加振方向と同
じ方向に変位する固有振動モードの固有振動数で正弦波
状に変化し振幅が常に一定の力を加え弾性条体に加振方
向と同じ方向に変位する固有振動モードを発生させる非
接触形の加振器と、スライダに設けられて加振器の加振
により弾性条体に発生する位置のみに依存する振動変位
の振幅を測定する非接触形の測定器と、加振器により弾
性条体に作用する力及び測定器の出力が入力され弾性体
の運動方程式により周波数領域の弾性条体の基準モード
関数を解くと共に、加振器の加振力の周波数と振幅に依
存する弾性条体の固有振動モードを、加振周波数を別の
固有振動数に変更して弾性条体の振動モードを変化さ
せ、弾性条体の固有振動モードに依存する測定分解能及
び測定範囲を変更して基台の端部寄りに設定された原点
とスライダの関係位置を算出する信号処理装置とが設け
られる。In the position detecting device according to the third aspect of the present invention, the linear guide body provided on the base, the slider guided by the linear guide body, and the longitudinal guide line. An elastic strip which is arranged along the body and has both ends fixed to the base and stretched, and an elastic strip which is provided on the base and faces the longitudinal middle portion of the elastic strip. The body vibrates, and the elastic body is displaced in the same direction as the direction of vibration. It changes sinusoidally at the natural frequency of the natural vibration mode and a constant amplitude force is applied to the elastic body in the same direction as the vibration direction. Non-contact type vibration generator that generates natural vibration mode that displaces in a non-contact manner -Shaped measuring instrument and the force exerted on the elastic strip by the vibrator. The output of the measuring instrument is input and the standard mode function of the elastic strip in the frequency domain is solved by the equation of motion of the elastic body, and the natural vibration mode of the elastic strip that depends on the frequency and amplitude of the exciting force of the exciter is The vibration frequency is changed to another natural frequency to change the vibration mode of the elastic strip, and the measurement resolution and measurement range depending on the natural vibration mode of the elastic strip are changed and set near the end of the base. And a signal processing device for calculating a relational position between the origin and the slider.
【０００９】また、この発明の請求項４記載の発明に係
る位置検出装置においては、基台に設けられた直線案内
体と、この直線案内体に案内されて移動するスライダ
と、長手が直線案内体に沿って配置されて一端に無反射
端が形成され基台に張設された横断面一定の弾性条体
と、基台に設けられ弾性条体の反無反射端寄りに対向し
て配置されこの弾性条体を加振し、加振方向と同じ方向
に変位して加振端から無反射端へ向かう進行波を発生さ
せる非接触形の加振器と、スライダに設けられて加振器
の加振により弾性条体に発生する加振端側からの距離に
依存する弾性条体の振動の位相を測定する非接触形の測
定器と、この測定器の測定値の変化と加振器により発生
する加振力との位相差を処理して基台の端部寄りに設定
された原点とスライダの関係位置を算出する信号処理装
置とが設けられる。Further, in the position detecting device according to a fourth aspect of the present invention, a linear guide body provided on the base, a slider guided by the linear guide body to move, and a longitudinal guide line. An elastic strip with a constant cross-section that is placed along the body and has a non-reflective end formed on one end and is stretched on the base, and is placed opposite to the anti-reflective end of the elastic strip provided on the base. This elastic strip is vibrated and displaced in the same direction as the vibrating direction to generate a traveling wave from the vibrating end to the non-reflective end. A non-contact type measuring instrument that measures the phase of the vibration of the elastic strip depending on the distance from the excitation end side that is generated in the elastic strip by the excitation of the measuring instrument Origin and slider set near the end of the base by processing the phase difference with the excitation force generated by the A signal processing device for calculating the relationship between the position is provided.
【００１０】また、この発明の請求項５記載の発明に係
る位置検出装置においては、基台に設けられた直線案内
体と、この直線案内体に案内されて移動するスライダ
と、長手が直線案内体に沿って配置されて両端がそれぞ
れ基台に固定されて張設された横断面一定の弾性条体
と、基台に設けられ弾性条体の長手中間部に対向して配
置されこの弾性条体を加振する非接触形の加振器と、ス
ライダに設けられて弾性条体の長手に沿い弾性条体に発
生する振動の１波長よりも短い所定間隔で複数個が配置
され加振器の加振により弾性条体に発生する振動変位を
測定する非接触形の測定器と、加振器により弾性条体に
作用する力並びにそれぞれの測定器の出力及びこれらの
出力の差が入力されて弾性体の運動方程式により基台の
端部寄りに設定された原点とスライダの関係位置を算出
する信号処理装置とが設けられる。According to the fifth aspect of the present invention, in the position detecting device, the linear guide body provided on the base, the slider guided by the linear guide body, and the longitudinal guide line. An elastic strip which is arranged along the body and has both ends fixed to the base and stretched, and an elastic strip which is provided on the base and faces the longitudinal middle portion of the elastic strip. A non-contact type vibrator for vibrating the body, and a plurality of vibrators provided on the slider and arranged at a predetermined interval shorter than one wavelength of vibration generated in the elastic stripe along the length of the elastic stripe. The non-contact type measuring instrument that measures the vibration displacement generated in the elastic strip by the vibration of the instrument, the force acting on the elastic strip by the exciter, the output of each measuring instrument and the difference between these outputs are input. Was set near the end of the base according to the equation of motion of the elastic body. A signal processing unit is provided for calculating the relationship between the position of the point and the slider.
【００１１】また、この発明の請求項６記載の発明に係
る位置検出装置においては、基台に設けられた直線案内
体と、この直線案内体に案内されて移動するスライダ
と、長手が直線案内体に沿って配置されて両端がそれぞ
れ基台に固定されて張設され、互いに離れて平行に配置
された複数の横断面一定の弾性条体と、基台に設けられ
それぞれの弾性条体の長手中間部に対向してそれぞれ配
置され対向した上記弾性条体を加振し、弾性条体に加振
方向と同じ方向に変位する固有振動モードの固有振動数
で正弦波状に変化し振幅が常に一定の力を加え弾性条体
に加振方向と同じ方向に変位する固有振動モードを発生
させる複数の非接触形の加振器と、スライダに設けられ
てそれぞれの弾性条体に対向してそれぞれ配置され、加
振器の加振により弾性条体に発生する位置のみに依存す
る振動変位の振幅を測定する複数の非接触形の測定器
と、それぞれの加振器によりそれぞれの弾性条体に作用
する力及びそれぞれの測定器の出力により加振器の加振
力と同じ方向の変位において互いに異なる固有振動モー
ドを発生させてそれぞれの信号を処理し、弾性条体全長
にわたって１意に弾性体の運動方程式を解き基台の端部
寄りに設定された原点とスライダの関係位置を算出する
信号処理装置とが設けられる。According to the sixth aspect of the present invention, in the position detecting device, a linear guide body provided on the base, a slider guided by the linear guide body to move, and a longitudinal guide line. A plurality of elastic strips arranged along the body, fixed at both ends to the base and stretched, and arranged in parallel apart from each other, and a plurality of elastic strips provided on the base. The elastic strips arranged facing each other in the longitudinal middle part are vibrated, and the elastic strips are displaced in the same direction as the excitation direction. A plurality of non-contact type vibrators that generate a natural vibration mode that applies a constant force to the elastic strips and displaces in the same direction as the excitation direction, and is provided on the slider to face each elastic strip. It is placed and the bullet is excited by the vibration of the shaker By a plurality of non-contact type measuring instruments that measure the amplitude of vibration displacement that depends only on the position generated in the strip, and the force acting on each elastic strip by each vibrator and the output of each measuring instrument By generating different natural vibration modes in the displacement in the same direction as the excitation force of the exciter and processing the respective signals, the equation of motion of the elastic body is uniquely solved over the entire length of the elastic strut, and it approaches the end of the base. And a signal processing device for calculating a relational position between the origin and the slider.
【００１２】[0012]
【作用】上記のように構成されたこの発明の請求項１記
載の発明の位置検出装置では、張設されて加振された弾
性条体の変位が測定され、弾性体の運動方程式にもとず
く信号処理装置の動作によりスライダの位置が算出され
る。In the position detecting device of the invention according to claim 1 of the present invention configured as described above, the displacement of the stretched and vibrated elastic strip is measured, and the displacement is based on the equation of motion of the elastic strip. The position of the slider is calculated by the operation of the drop signal processing device.
【００１３】また、上記のように構成されたこの発明の
請求項２記載の発明の位置検出装置では、張設されて加
振された弾性条体の変位が測定され、弾性体の運動方程
式により周波数領域の弾性条体の基準モード関数を解く
信号処理装置の動作によりスライダの位置が算出され
る。Further, in the position detecting device of the invention according to claim 2 of the present invention configured as described above, the displacement of the elastic strip that is stretched and vibrated is measured, and the equation of motion of the elastic body is used. The position of the slider is calculated by the operation of the signal processing device that solves the standard mode function of the elastic body in the frequency domain.
【００１４】また、上記のように構成されたこの発明の
請求項３記載の発明の位置検出装置では、張設されて加
振された弾性条体の変位が測定される。そして、加振器
の加振力の周波数と振幅に依存する弾性条体の固有振動
モードを、加振周波数を別の固有振動数に変更して弾性
条体の振動モードを変化させ、弾性条体の固有振動モー
ドに依存する測定分解能及び測定範囲が変更される。こ
れにより、弾性体の運動方程式により周波数領域の弾性
条体の基準モード関数を解く信号処理装置の動作により
スライダの位置が算出される。Further, in the position detecting device of the invention according to claim 3 of the present invention configured as described above, the displacement of the elastic strip stretched and vibrated is measured. Then, the natural vibration mode of the elastic strip, which depends on the frequency and amplitude of the excitation force of the exciter, is changed to another natural frequency by changing the excitation frequency to change the vibration mode of the elastic strip. The measurement resolution and the measurement range depending on the natural vibration mode of the body are changed. Thus, the position of the slider is calculated by the operation of the signal processing device that solves the standard mode function of the elastic strip in the frequency domain by the equation of motion of the elastic body.
【００１５】また、上記のように構成されたこの発明の
請求項４記載の発明の位置検出装置では、弾性条体の反
無反射端寄りで弾性条体を加振して加振方向と同じ方向
に変位して加振端から無反射端へ向かう進行波が発生さ
れる。そして、弾性条体に発生する加振端側からの距離
に依存する弾性条体の振動の位相が測定される。この測
定値の変化と加振器により発生する加振力との位相差を
処理する信号処理装置の動作によりスライダの位置が算
出される。Further, in the position detecting device of the invention according to claim 4 of the present invention configured as described above, the elastic strip is vibrated near the anti-reflective end of the elastic strip, and the same direction as the vibrating direction is applied. A traveling wave that is displaced in the direction and goes from the excitation end to the non-reflection end is generated. Then, the phase of the vibration of the elastic strip depending on the distance from the excitation end side generated in the elastic strip is measured. The position of the slider is calculated by the operation of the signal processing device that processes the phase difference between the change in the measured value and the exciting force generated by the exciter.
【００１６】また、上記のように構成されたこの発明の
請求項５記載の発明の位置検出装置では、張設されて加
振された弾性条体の変位が弾性条体の長手に沿い所定間
隔で配置された複数個の測定器によって測定され、弾性
体の運動方程式にもとずく信号処理装置の動作によりス
ライダの位置が算出される。Further, in the position detecting device of the present invention according to claim 5 of the present invention configured as described above, the displacement of the stretched and vibrated elastic strip is at predetermined intervals along the length of the elastic strip. The position of the slider is calculated by the operation of the signal processing device based on the equation of motion of the elastic body.
【００１７】また、上記のように構成されたこの発明の
請求項６記載の発明の位置検出装置では、張設されて加
振された複数の弾性条体それぞれの変位が測定され、加
振力と同じ方向の変位において互いに異なる固有振動モ
ードを発生させてそれぞれの信号を処理し、弾性条体全
長にわたって１意に弾性体の運動方程式を解く信号処理
装置の動作によりスライダの位置が算出される。Further, in the position detecting device of the invention according to claim 6 of the present invention configured as described above, the displacement of each of the plurality of elastic strips stretched and vibrated is measured, and the vibrating force is measured. The position of the slider is calculated by the operation of the signal processing device that generates different natural vibration modes in the displacement in the same direction, processes the respective signals, and uniquely solves the equation of motion of the elastic body over the entire length of the elastic body. .
【００１８】[0018]
実施例１．図１は、この発明の一実施例を示す概念的斜
視図である。図において、(1)は基台、(2)は基台(1)の
長手に沿って設けられた直線案内体、(3)は直線案内体
(2)に摺動可能に係合されて移動するスライダ、(8)は鋼
線からなり長手が直線案内体(3)に沿って配置されて両
端がそれぞれ基台(1)の長手端部に固定されて張設され
た横断面一定の弾性条体、(9)は基台(1)に設けられ弾性
条体(8)の長手中間部に対向して配置され弾性条体(8)を
加振する非接触形の加振器で、磁力により弾性条体(8)
をそれの長手に直交する方向に、定常の周波数、力で加
振する。Example 1. FIG. 1 is a conceptual perspective view showing an embodiment of the present invention. In the figure, (1) is a base, (2) is a linear guide provided along the length of the base (1), and (3) is a linear guide.
A slider that is slidably engaged with (2) and moves, and (8) is made of steel wire and is arranged along the linear guide body (3) with both ends at the longitudinal ends of the base (1). An elastic strip having a constant cross-section fixed and stretched on the elastic strip (9) is provided on the base (1) and is arranged so as to face the longitudinal middle portion of the elastic strip (8). A non-contact type vibrator that excites
Is oscillated with a constant frequency and force in the direction orthogonal to its longitudinal direction.
【００１９】(10)はスライダ(3)に設けられて加振器(9)
の加振により弾性条体(8)に発生する加振力と同方向の
振動変位を測定する渦電流式からなる非接触形の測定
器、(7)は加振器(9)により弾性条体(8)に作用する力及
び測定器(10)の出力が入力されて弾性体の運動方程式に
より基台(1)の端部寄りに設定された原点Ｏ(11)とスラ
イダ(3)の関係位置を算出する信号処理装置である。(10) is provided on the slider (3) and is provided with an exciter (9)
Eddy current type non-contact type measuring instrument for measuring the vibration displacement in the same direction as the exciting force generated in the elastic strip (8) by the vibration of (7) The force acting on the body (8) and the output of the measuring device (10) are input, and the origin O (11) and slider (3) set near the end of the base (1) are set by the equation of motion of the elastic body. It is a signal processing device which calculates a relative position.
【００２０】上記のように構成された信号処理装置の基
本的な動作原理は、弾性条体(8)に生じる振動を基準と
してスライダ(3)の位置を測定するものである。なお、
弾性条体(8)は鋼線の弦の横振動を基準としたが、一般
には、直線状の弾性体であれば棒状弾性体の捩じり振
動、はり状弾性体の曲げ振動、縦振動のいずれでも測定
の基準とすることができる。図１の実施例の動作原理を
さらに詳しく述べる。すなわち、鋼線の弾性条体(8)の
長手方向に直交した変位による振動を表す運動方程式は
次の(1)式のようになる。The basic operating principle of the signal processing device constructed as described above is to measure the position of the slider (3) with reference to the vibration generated in the elastic strip (8). In addition,
The elastic strip (8) is based on the transverse vibration of the steel wire string, but generally, if it is a linear elastic body, the torsional vibration of a rod-shaped elastic body, the bending vibration of a beam-shaped elastic body, the longitudinal vibration Any of the above can be used as a reference for measurement. The operation principle of the embodiment shown in FIG. 1 will be described in more detail. That is, the equation of motion representing the vibration due to the displacement of the elastic strip (8) of the steel wire orthogonal to the longitudinal direction is as shown in the following equation (1).
【００２１】[0021]
【数１】 ∂は偏微分記号[Equation 1] ∂ is a partial differential symbol
【００２２】ここで、弾性条体(8)の図１の左端を原点
Ｏ(11)とし、弾性条体(8)の図１における長手方向右方
をｘ(12)方向、すなわち、正方向とする。また、弾性条
体(8)の長手直交方向の変位をｙ、時刻をｔ、弾性条体
(8)に働く張力をＴ、弾性条体(8)の単位当たりの質量を
Ａ、加振力をＦ（ｘ，ｔ)としている。(1)式によれば、
弾性条体(8)の変位ｙは、時刻ｔが既知であるなら原点
Ｏ(11)からの距離ｘ(12)に依存することがわかる。加振
力Ｆ（ｘ，ｔ)、時刻ｔがわかっていて、変位ｙを測定
によって求められれば、測定を行った位置ｘは(1)式を
解けば求められるものである。なお、(1)式を解く演算
は信号処理装置(7)で行われる。Here, the left end of the elastic strip (8) in FIG. 1 is the origin O (11), and the right side in the longitudinal direction of the elastic strip (8) in FIG. 1 is the x (12) direction, that is, the forward direction. And Also, the displacement in the direction perpendicular to the longitudinal direction of the elastic strip (8) is y, the time is t, the elastic strip is
The tension acting on (8) is T, the mass per unit of the elastic strip (8) is A, and the exciting force is F (x, t). According to equation (1),
It can be seen that the displacement y of the elastic strip (8) depends on the distance x (12) from the origin O (11) if the time t is known. If the excitation force F (x, t) and the time t are known and the displacement y can be obtained by measurement, the measured position x can be obtained by solving the equation (1). The calculation for solving the equation (1) is performed by the signal processing device (7).
【００２３】このように、スライダ(3)の移動経路に沿
って張設された弾性条体(8)の振動を介してスライダ(3)
の位置が検出されるので、図７におけるラック(4)の歯
切り加工精度、スライダ(3)の移動量をロータリーエン
コーダ(6)の回転角度に変換するピニオン(5)の歯切り加
工精度、及びラック(4)とスライダ(3)の移動平行度精度
を高くすることによって測定精度を向上させる煩雑な手
数が解消される。このため、高精度の測定のために関連
部材の高精度の加工、組付けを要せず、また、ラック
(4)とピニオン(5)の間のバックラッシによる誤差の発生
が解消される。したがって、高い測定精度が得られ、少
ない費用によって容易に製作することができる。Thus, the slider (3) is oscillated by the vibration of the elastic strip (8) stretched along the moving path of the slider (3).
Since the position is detected, the gear cutting accuracy of the rack (4) in FIG. 7, the gear cutting accuracy of the pinion (5) that converts the movement amount of the slider (3) into the rotation angle of the rotary encoder (6), Also, by increasing the accuracy of the parallelism of movement of the rack (4) and the slider (3), the troublesome work of improving the measurement accuracy is eliminated. Therefore, high-precision measurement does not require high-precision machining and assembly of related members, and the rack
The occurrence of error due to backlash between (4) and pinion (5) is eliminated. Therefore, high measurement accuracy can be obtained, and it can be easily manufactured at a low cost.
【００２４】実施例２．図２は、この発明の他の実施例
を示す概念的斜視図である。図において、(1)は基台、
(2)は基台(1)の長手に沿って設けられた直線案内体、
(3)は直線案内体(2)に摺動可能に係合されて移動するス
ライダ、(8)は長さｌの弦状鋼製弾性体の両端を固定端
として形成され、長手が直線案内体(3)に沿って配置さ
れて両端がそれぞれ基台(1)の長手端部に配置されて張
設された横断面一定の弾性条体、(9)は基台(1)に設けら
れ弾性条体(8)の長手中間部に対向して配置され、弾性
条体(8)の横振動の固有振動数で常に一定の振幅で弾性
条体(8)を加振する非接触形の加振器である。Example 2. FIG. 2 is a conceptual perspective view showing another embodiment of the present invention. In the figure, (1) is the base,
(2) is a linear guide provided along the length of the base (1),
(3) is a slider which is slidably engaged with the linear guide body (2) to move, and (8) is formed by using both ends of a chordal steel elastic body of length 1 as fixed ends, and the longitudinal direction is a linear guide. Elastic strips arranged along the body (3) and having both ends arranged at the longitudinal ends of the base (1) and stretched, and (9) provided on the base (1). A non-contact type which is arranged so as to face the longitudinal middle portion of the elastic strip (8) and which constantly vibrates the elastic strip (8) with a constant amplitude at the natural frequency of the lateral vibration of the elastic strip (8). It is a shaker.
【００２５】(10)はスライダ(3)に設けられて加振器(9)
の加振により弾性条体(8)に発生する固有モードの振幅
を基準に測定する渦電流式からなる非接触形の測定器、
(7)は加振器(9)により弾性条体(8)に作用する力及び測
定器(10)の出力が入力されて弾性体の運動方程式により
基台(1)の端部寄りに設定された原点Ｏ(11)とスライダ
(3)の関係位置を算出する信号処理装置である。(10) is provided on the slider (3) and is provided with an exciter (9)
A non-contact type measuring instrument consisting of an eddy current type that measures with reference to the amplitude of the eigenmode generated in the elastic strip (8) by the vibration of
(7) is set near the end of the base (1) according to the equation of motion of the elastic body by inputting the force acting on the elastic strip (8) by the vibrator (9) and the output of the measuring instrument (10). Origin O (11) and slider
It is a signal processing device for calculating the relative position of (3).
【００２６】上記のように構成された信号処理装置にお
いて、振動形態を固有モードとすることでスライダ(3)
の位置に依存する弾性条体(8)の振幅のみを測定の対象
とすればよい。すなわち、加振器(9)でｎ次のモードの
みを加振したときの弾性条体(8)の振幅ａnを表す式は次
の(2)式のようになる。In the signal processing device configured as described above, the slider (3) is provided by setting the vibration mode to the eigenmode.
Only the amplitude of the elastic strip (8) depending on the position of should be measured. That is, the equation expressing the amplitude a n of the elastic strip (8) when only the nth mode is excited by the exciter (9) is as shown in the following equation (2).
【００２７】[0027]
【数２】 Ａnは定数、ｎ＝１、２、３、・・・・[Equation 2] A n is a constant, n = 1, 2, 3, ...
【００２８】ここで、振幅ａnを測定器(10)によって測
定することにより、測定を行った位置ｘは(2)式を解け
ば求められる。なお、(1)式を解く演算は信号処理装置
(7)で行われる。加振器(9)による加振力が常に一定であ
れば、定数Ａnは一定である。なお、図２中、弾性条体
(8)に沿って描いた曲線は弾性条体(8)の固有振動モード
を示している。Here, by measuring the amplitude a n by the measuring device (10), the measured position x can be obtained by solving the equation (2). The calculation to solve equation (1) is a signal processing device.
It will be held in (7). If the exciting force by the exciter (9) is always constant, the constant A n is constant. In Fig. 2, elastic strips
The curve drawn along (8) shows the natural vibration mode of the elastic strip (8).
【００２９】このように図２の実施例においても、スラ
イダ(3)の移動経路に沿って張設された弾性条体(8)の振
動を介してスライダ(3)の位置が検出される。したがっ
て、詳細な説明を省略するが図２実施例においても図１
の実施例と同様な作用が得られることは明白である。As described above, also in the embodiment of FIG. 2, the position of the slider (3) is detected through the vibration of the elastic strip (8) stretched along the movement path of the slider (3). Therefore, although detailed description is omitted, in FIG.
It is obvious that the same effect as that of the embodiment can be obtained.
【００３０】実施例３．図３も、この発明の他の実施例
を示す概念的斜視図である。図において、(1)は基台、
(2)は基台(1)の長手に沿って設けられた直線案内体、
(3)は直線案内体(2)に摺動可能に係合されて移動するス
ライダ、(8)は長さｌの弦状鋼製弾性体の両端を固定端
として形成され、長手が直線案内体(3)に沿って配置さ
れて両端がそれぞれ基台(1)の長手端部に配置されて張
設された横断面一定の弾性条体、(9)は基台(1)に設けら
れ弾性条体(8)の長手中間部に対向して配置され、弾性
条体(8)の横振動の固有振動数で常に一定の振幅で弾性
条体(8)を加振する非接触形の加振器である。Example 3. FIG. 3 is also a conceptual perspective view showing another embodiment of the present invention. In the figure, (1) is the base,
(2) is a linear guide provided along the length of the base (1),
(3) is a slider which is slidably engaged with the linear guide body (2) to move, and (8) is formed by using both ends of a chordal steel elastic body of length 1 as fixed ends, and the longitudinal direction is a linear guide. Elastic strips arranged along the body (3) and having both ends arranged at the longitudinal ends of the base (1) and stretched, and (9) provided on the base (1). A non-contact type which is arranged so as to face the longitudinal middle portion of the elastic strip (8) and which constantly vibrates the elastic strip (8) with a constant amplitude at the natural frequency of the lateral vibration of the elastic strip (8). It is a shaker.
【００３１】(10)はスライダ(3)に設けられて加振器(9)
の加振により弾性条体(8)に発生する固有モードの振幅
を基準に測定する渦電流式からなる非接触形の測定器、
(7)は加振器(9)により弾性条体(8)に作用する力及び測
定器(10)の出力が入力されて弾性体の運動方程式により
基台(1)の端部寄りに設定された原点Ｏ(11)とスライダ
(3)の関係位置を算出する信号処理装置である。(10) is provided on the slider (3) and is provided with an exciter (9)
A non-contact type measuring instrument consisting of an eddy current type that measures with reference to the amplitude of the eigenmode generated in the elastic strip (8) by the vibration of
(7) is set near the end of the base (1) according to the equation of motion of the elastic body by inputting the force acting on the elastic strip (8) by the vibrator (9) and the output of the measuring instrument (10). Origin O (11) and slider
It is a signal processing device for calculating the relative position of (3).
【００３２】上記のように構成された信号処理装置にお
いて、図２の弾性条体(8)に加振する固有振動モードを
変更することにより測定時の分解能を可変とする例を示
している。すなわち、振動モードが異なることにより弾
性条体(8)の単位長さ当たりの振幅の変化量が変わるた
め、加振器(9)の加振周波数を別の固有振動数に変更す
るのみで、位置検出装置の他の部分は変更することなく
弾性条体(8)の振動を介してスライダ(3)の位置を検出す
ることができる。In the signal processing device configured as described above, an example is shown in which the resolution during measurement is made variable by changing the natural vibration mode applied to the elastic strip (8) in FIG. That is, because the amount of change in the amplitude per unit length of the elastic strip (8) changes due to the different vibration modes, simply changing the vibration frequency of the vibrator (9) to another natural frequency, The position of the slider (3) can be detected through the vibration of the elastic strip (8) without changing the other parts of the position detecting device.
【００３３】なお、図３中、弾性条体(8)に沿って描い
た曲線は変更後の弾性条体(8)の固有振動モードを示し
ている。このように図３の実施例においても、スライダ
(3)の移動経路に沿って張設された弾性条体(8)の振動を
介してスライダ(3)の位置が検出される。したがって、
詳細な説明を省略するが図３実施例においても図１の実
施例と同様な作用が得られることは明白である。In FIG. 3, the curve drawn along the elastic strip (8) shows the natural vibration mode of the elastic strip (8) after the change. Thus, even in the embodiment of FIG. 3, the slider
The position of the slider (3) is detected through the vibration of the elastic strip (8) stretched along the movement path of (3). Therefore,
Although detailed description is omitted, it is obvious that the same operation as that of the embodiment of FIG. 1 can be obtained in the embodiment of FIG.
【００３４】実施例４．図４も、この発明の他の実施例
を示す概念的斜視図である。図において、(1)は基台、
(2)は基台(1)の長手に沿って設けられた直線案内体、
(3)は直線案内体(2)に摺動可能に係合されて移動するス
ライダ、(8)は長さ１の弦状鋼製弾性体の両端を固定端
として形成され、長手が直線案内体(3)に沿って配置さ
れて両端がそれぞれ基台(1)の長手端部に配置されて張
設された横断面一定の弾性条体、(9)は基台(1)に設けら
れ弾性条体(8)の長手中間部に対向して配置され、弾性
条体(8)の横振動の固有振動数で常に一定の振幅で弾性
条体(8)を加振する非接触形の加振器である。Example 4. FIG. 4 is also a conceptual perspective view showing another embodiment of the present invention. In the figure, (1) is the base,
(2) is a linear guide provided along the length of the base (1),
(3) is a slider which is slidably engaged with the linear guide body (2) to move, and (8) is formed by using both ends of the elastic body made of chordal steel of length 1 as fixed ends, and the longitudinal direction is the linear guide body. Elastic strips arranged along the body (3) and having both ends arranged at the longitudinal ends of the base (1) and stretched, and (9) provided on the base (1). A non-contact type which is arranged so as to face the longitudinal middle portion of the elastic strip (8) and which constantly vibrates the elastic strip (8) with a constant amplitude at the natural frequency of the lateral vibration of the elastic strip (8). It is a shaker.
【００３５】(10)はスライダ(3)に設けられて加振器(9)
の加振により弾性条体(8)に発生する固有モードの振幅
を基準に測定する渦電流式からなる非接触形の第２測定
器、(101)はスライダ(3)に設けられた第１測定器(10)と
同様な第２測定器で、第１測定器(10)から図４に示すｘ
方向に離れ、弾性条体(8)に発生する振動の１波長より
も短い所定位置に配置されている。(7)は加振器(9)によ
り弾性条体(8)に作用する力、第１測定器(10)及び第２
測定器(101)の出力が入力されて弾性体の運動方程式に
より基台(1)の端部寄りに設定された原点Ｏ(11)とスラ
イダ(3)の関係位置を算出する信号処理装置である。(10) is provided on the slider (3) and is provided with an exciter (9)
The non-contact type second measuring device of the eddy current type, which measures with reference to the amplitude of the eigenmode generated in the elastic strip (8) by the vibration of (1), It is a second measuring device similar to the measuring device (10), and x shown in FIG. 4 from the first measuring device (10).
It is arranged in a predetermined position shorter than one wavelength of the vibration generated in the elastic strip (8), apart from each other in the direction. (7) is the force acting on the elastic strip (8) by the vibrator (9), the first measuring device (10) and the second measuring device.
A signal processing device for inputting the output of the measuring instrument (101) and calculating the relational position between the origin O (11) and the slider (3) set near the end of the base (1) according to the equation of motion of the elastic body. is there.
【００３６】このように図４の実施例においても、スラ
イダ(3)の移動経路に沿って張設された弾性条体(8)の振
動を介してスライダ(3)の位置が検出される。したがっ
て、詳細な説明を省略するが図４実施例においても図１
の実施例と同様な作用が得られることは明白である。ま
た、図４の実施例において相互間隔が予め判っている第
１測定器(10)及び第２測定器(101)の測定値の差をとる
ことにより図４におけるｘ方向の差分値が得られる。こ
れによって、第１測定器(10)から得られる測定値と合わ
せて(1)式を解くことにより測長の精度を向上させるこ
とができる。As described above, also in the embodiment of FIG. 4, the position of the slider (3) is detected through the vibration of the elastic strip (8) stretched along the movement path of the slider (3). Therefore, although detailed description is omitted, in FIG.
It is obvious that the same effect as that of the embodiment can be obtained. Further, the difference value in the x direction in FIG. 4 can be obtained by taking the difference between the measured values of the first measuring device 10 and the second measuring device 101 whose mutual intervals are known in advance in the embodiment of FIG. . As a result, the accuracy of length measurement can be improved by solving the equation (1) together with the measurement value obtained from the first measuring device (10).
【００３７】実施例５．図５も、この発明の他の実施例
を示す概念的斜視図である。図において、(1)は基台、
(2)は基台(1)の長手に沿って設けられた直線案内体、
(3)は直線案内体(2)に摺動可能に係合されて移動するス
ライダ、(8)は鋼線からなり長手が直線案内体(3)に沿っ
て配置されて一端が基台(1)の一方の長手端部に固定さ
れ、他端が基台(1)の他方の長手端部に無反射端(13)を
介して保持されて張設された横断面一定の弾性条体、
(9)は基台(1)に設けられ弾性条体(8)の反無反射端(13)
側に対向して配置され弾性条体(8)を加振する非接触形
の加振器で、磁力により弾性条体(8)をそれの長手に直
交する方向に、定常の周波数、力で加振して１方向の進
行波を発生させる。Example 5. FIG. 5 is also a conceptual perspective view showing another embodiment of the present invention. In the figure, (1) is the base,
(2) is a linear guide provided along the length of the base (1),
(3) is a slider that is slidably engaged with the linear guide body (2) to move, and (8) is made of steel wire and is arranged along the linear guide body (3) with its longitudinal end having a base ( 1) An elastic strip having a constant cross section, which is fixed to one longitudinal end of the base, and the other end of which is held and stretched by the other longitudinal end of the base (1) via a non-reflective end (13). ,
(9) is an anti-reflective end (13) of the elastic strip (8) provided on the base (1)
Is a non-contact type vibrator that is arranged to face each other and vibrates the elastic strip (8) .The magnetic strip causes the elastic strip (8) to move in a direction orthogonal to its longitudinal direction at a constant frequency and force. Excited to generate a traveling wave in one direction.
【００３８】(10)はスライダ(3)に設けられて加振器(9)
の加振により弾性条体(8)に発生する加振力と同方向の
振動変位を測定する渦電流式からなる非接触形の測定
器、(7)は加振器(9)により弾性条体(8)に作用する力及
び測定器(10)の出力が入力されて弾性体の運動方程式に
より基台(1)の端部寄りに設定された原点Ｏ(11)とスラ
イダ(3)の関係位置を算出する信号処理装置である。(10) is provided on the slider (3) and is attached to the vibrator (9)
Eddy current type non-contact type measuring instrument for measuring the vibration displacement in the same direction as the exciting force generated in the elastic strip (8) by the vibration of (7) The force acting on the body (8) and the output of the measuring device (10) are input, and the origin O (11) and slider (3) set near the end of the base (1) are set by the equation of motion of the elastic body. It is a signal processing device which calculates a relative position.
【００３９】上記のように構成された信号処理装置にお
いて、加振器(9)の加振力と測定器(10)で測定する変位
の位相差はｘ方向の位置に依存するため、この位相差を
測定して信号処理装置(7)により処理し、スライダ(3)と
基台(1)の関係位置を求める。すなわち、進行波の位相
速度ｃは次の(3)式によって表される。In the signal processing device configured as described above, the phase difference between the vibration force of the vibration exciter (9) and the displacement measured by the measuring device (10) depends on the position in the x direction. The phase difference is measured and processed by the signal processing device (7) to obtain the relative position of the slider (3) and the base (1). That is, the phase velocity c of the traveling wave is expressed by the following equation (3).
【００４０】[0040]
【数３】 [Equation 3]
【００４１】したがって、加振力に対する測定点の位相
差がＤと測定された場合の測定点の位置ｘは次の(4)式
によって表される。Therefore, the position x of the measurement point when the phase difference of the measurement point with respect to the excitation force is measured as D is expressed by the following equation (4).
【００４２】[0042]
【数４】 ｆは加振力周波数、ｎ＝１、２、３、・・・・[Equation 4] f is the excitation force frequency, n = 1, 2, 3, ...
【００４３】そして、信号処理装置(7)によって(4)式を
解き位置ｘを求める。このように図５の実施例において
も、スライダ(3)の移動経路に沿って張設された弾性条
体(8)の振動を介してスライダ(3)の位置が検出される。
したがって、詳細な説明を省略するが図５実施例におい
ても図１の実施例と同様な作用が得られることは明白で
ある。Then, the signal processing device (7) solves the equation (4) to obtain the position x. As described above, also in the embodiment of FIG. 5, the position of the slider (3) is detected through the vibration of the elastic strip (8) stretched along the movement path of the slider (3).
Therefore, although detailed description is omitted, it is apparent that the same operation as that of the embodiment of FIG. 1 can be obtained in the embodiment of FIG.
【００４４】実施例６．図６も、この発明の他の実施例
を示す概念的斜視図である。図において、(1)は基台、
(2)は基台(1)の長手に沿って設けられた直線案内体、
(3)は直線案内体(2)に摺動可能に係合されて移動するス
ライダ、(8)は鋼線からなり長手が直線案内体(2)に沿っ
て配置されて両端がそれぞれ基台(1)の長手端部に固定
されて張設された横断面一定の第１弾性条体、(81)は第
１弾性条体(8)と同様な第２弾性条体で、第１弾性条体
(8)から基台(1)面に沿う方向に離れ、かつ第１弾性条体
(8)と平行に設けられいる。Example 6. FIG. 6 is also a conceptual perspective view showing another embodiment of the present invention. In the figure, (1) is the base,
(2) is a linear guide provided along the length of the base (1),
(3) is a slider that is slidably engaged with the linear guide body (2) to move, and (8) is made of steel wire, and its length is arranged along the linear guide body (2) and both ends are bases. (1) a first elastic strip having a constant transverse cross section fixed and stretched at the longitudinal end, (81) a second elastic strip similar to the first elastic strip (8), Article
Separated from (8) in the direction along the surface of the base (1), and the first elastic strip
It is provided in parallel with (8).
【００４５】(9)は基台(1)に設けられ第１弾性条体(8)
の長手中間部に対向して配置され第１弾性条体(8)を加
振する非接触形の第１加振器で、磁力により第１弾性条
体(8)をそれの長手に直交する方向に、定常の周波数、
力で加振する。(91)は第１加振器(9)と同様な第２加振
器であり、第２弾性条体(81)に対向して設けられてい
る。(9) is the first elastic strip (8) provided on the base (1)
A first non-contact type vibrator which is arranged so as to face the longitudinal middle portion of the first vibrator and vibrates the first elastic strip (8), and the first elastic strip (8) is orthogonal to its longitudinal direction by magnetic force. Direction, steady frequency,
Excite with force. Reference numeral (91) is a second vibrator similar to the first vibrator (9), and is provided so as to face the second elastic strip (81).
【００４６】(10)はスライダ(3)に設けられて加振器(9)
の加振により第１弾性条体(8)に発生する固有モードの
振幅を基準に測定する渦電流式からなる非接触形の第１
測定器、(101)はスライダ(3)に設けられた第１測定器(1
0)と同様な第２測定器で、第２弾性条体(81)に対向して
配置されている。(7)は第１加振器(9)により第１弾性条
体(8)に作用する力及び第１測定器(10)の出力、並びに
第２加振器(91)により第２弾性条体(81)に作用する力及
び第２測定器(101)の出力が入力されて弾性体の運動方
程式により基台(1)の端部寄りに設定された原点Ｏ(11)
とスライダ(3)の関係位置を算出する信号処理装置であ
る。(10) is provided on the slider (3) and is provided with an exciter (9)
The first non-contact type consisting of an eddy current type, which is measured based on the amplitude of the eigenmode generated in the first elastic strip (8) by the vibration of the
Measuring device, (101) is the first measuring device (1
It is a second measuring device similar to that of (0) and is arranged so as to face the second elastic strip (81). (7) is the force acting on the first elastic strip (8) by the first vibrator (9) and the output of the first measuring instrument (10), and the second elastic strip by the second vibrator (91). The force acting on the body (81) and the output of the second measuring device (101) are input, and the origin O (11) is set near the end of the base (1) according to the equation of motion of the elastic body.
And a signal processing device for calculating a relative position between the slider and the slider.
【００４７】上記のように構成された信号処理装置にお
いて、第１加振器(9)により第１弾性条体(8)を周波数ｆ
nで加振し、ｎ次のモードで振動させる。また、第２弾
性条体(81)を周波数ｆn+1=で加振し、ｎ＋１=次のモー
ドで振動させる。そして、第１弾性条体(8)及び第２弾
性条体(81)の振動は第１測定器(10)及び第２測定器(10
1)により測定され、信号処理装置(7)で処理され位置を
求めることができる。すなわち、実施例２〜実施例５で
は測長がすべて弾性条体(8)に発生する振動の１波長分
のみが有効であったが、図６の実施例では、求められる
位置ｘは第１弾性条体(8)及び第２弾性条体(81)の全長
にわたり１意に求められる。ここに、第１測定器(10)の
測定値をａn、第２測定器(101)の測定値をａn+1とする
と、位置ｘは次の(5)(6)式を解くことによって求めるこ
とができる。In the signal processing device constructed as described above, the first vibrator (9) is used to move the first elastic strip (8) to the frequency f.
It vibrated at n, it is vibrated at the n-th order mode. Further, the second elastic strip (81) is vibrated at the frequency f n + 1 = and n + 1 = the next mode. The vibrations of the first elastic strip (8) and the second elastic strip (81) are measured by the first measuring instrument (10) and the second measuring instrument (10).
The position can be obtained by the measurement by 1) and processed by the signal processing device (7). That is, in the examples 2 to 5, the length measurement was effective only for one wavelength of the vibration generated in the elastic strip (8), but in the example of FIG. 6, the obtained position x is the first position. It is required for the entire length of the elastic strip (8) and the second elastic strip (81). Here, the measurement value a n of the first measuring device (10), the second measuring device the measured values of (101) and a n + 1, the position x is the following (5) (6) solving the equation Can be sought by.
【００４８】[0048]
【数５】 Ａn、Ａn+1は定数、ｎ＝１、２、３、・・・・[Equation 5] A n and A n + 1 are constants, n = 1, 2, 3, ...
【００４９】このように図６の実施例においても、スラ
イダ（３）の移動経路に沿って張設された第１弾性条体
(8)、第２弾性条体(81)の振動を介してスライダ(3)の位
置が検出される。したがって、詳細な説明を省略するが
図６実施例においても図１の実施例と同様な作用が得ら
れることは明白である。As described above, also in the embodiment of FIG. 6, the first elastic strip stretched along the movement path of the slider (3).
(8) The position of the slider (3) is detected through the vibration of the second elastic strip (81). Therefore, although detailed description is omitted, it is obvious that the same operation as that of the embodiment of FIG. 1 can be obtained in the embodiment of FIG.
【００５０】[0050]
【発明の効果】この発明の請求項１記載の発明は以上説
明したように、基台に設けられた直線案内体と、この直
線案内体に案内されて移動するスライダと、長手が直線
案内体に沿って配置されて両端がそれぞれ基台に固定さ
れて張設された横断面一定の弾性条体と、基台に設けら
れ弾性条体の長手中間部に対向して配置されこの弾性条
体を加振する非接触形の加振器と、スライダに設けられ
て加振器の加振により弾性条体に発生する振動変位を測
定する非接触形の測定器と、加振器により弾性条体に作
用する力及び測定器の出力が入力されて弾性体の運動方
程式により基台の端部寄りに設定された原点とスライダ
の関係位置を算出する信号処理装置とを設けたものであ
る。As described above, according to the first aspect of the present invention, the linear guide body provided on the base, the slider guided by the linear guide body to move, and the longitudinal linear guide body. An elastic strip having a constant cross-section, which is arranged along the base and has both ends fixed to the base and is stretched, and the elastic strip provided on the base so as to face the longitudinal middle portion of the elastic strip. A non-contact type vibrator that vibrates the body, a non-contact type measuring device that is provided on the slider and measures the vibration displacement generated in the elastic body due to the vibration of the vibrator, and the elastic body A signal processing device is provided which receives the force acting on the body and the output of the measuring device and calculates the relational position between the origin and the slider set near the end of the base according to the equation of motion of the elastic body.
【００５１】これによって、張設されて加振された弾性
条体の変位による信号処理装置の動作によりスライダの
位置が算出される。したがって、高精度の測定のための
関連部材の高精度の加工、組付けを要せず、また、歯車
機構におけるバックラッシによる誤差の発生が解消さ
れ、高い測定精度が得られると共に、製作費を低減する
効果がある。As a result, the position of the slider is calculated by the operation of the signal processing device due to the displacement of the elastic strip that is stretched and vibrated. Therefore, it is not necessary to perform high-precision processing and assembly of related members for high-precision measurement, and the occurrence of errors due to backlash in the gear mechanism is eliminated, high measurement accuracy is obtained, and manufacturing costs are reduced. Has the effect of
【００５２】また、この発明の請求項２記載の発明は以
上説明したように、基台に設けられた直線案内体と、こ
の直線案内体に案内されて移動するスライダと、長手が
直線案内体に沿って配置されて両端がそれぞれ基台に固
定されて張設された横断面一定の弾性条体と、基台に設
けられ弾性条体の長手中間部に対向して配置されこの弾
性条体を加振し、弾性条体に加振方向と同じ方向に変位
する固有振動モードの固有振動数で正弦波状に変化し振
幅が常に一定の力を加え弾性条体に加振方向と同じ方向
に変位する固有振動モードを発生させる非接触形の加振
器と、スライダに設けられて加振器の加振により弾性条
体に発生する位置のみに依存する振動変位の振幅を測定
する非接触形の測定器と、加振器により弾性条体に作用
する力及び測定器の出力が入力され弾性体の運動方程式
により周波数領域の弾性条体の基準モード関数を解き基
台の端部寄りに設定された原点とスライダの関係位置を
算出する信号処理装置とを設けたものである。As described above, the invention according to claim 2 of the present invention is such that the linear guide body provided on the base, the slider which is guided and moved by the linear guide body, and the linear guide body whose length is long. An elastic strip having a constant cross-section, which is arranged along the base and has both ends fixed to the base and is stretched, and the elastic strip provided on the base so as to face the longitudinal middle portion of the elastic strip. Is applied to the elastic strip, which changes in a sinusoidal shape at the natural frequency of the natural vibration mode that displaces in the same direction as the excitation direction, and a constant amplitude is applied to the elastic strip in the same direction as the excitation direction. A non-contact type exciter that generates a displacing natural vibration mode and a non-contact type that is provided on a slider and that measures the amplitude of vibration displacement that depends only on the position generated in the elastic strip by the vibration of the exciter Measuring instrument and force acting on the elastic strip by the vibrator and measuring instrument An output is input, and a signal processing device that solves the standard mode function of the elastic striation in the frequency domain by the equation of motion of the elastic body and calculates the relational position between the origin and the slider set near the end of the base is provided. is there.
【００５３】これによって、張設されて加振された弾性
条体の変位が測定され、弾性体の運動方程式により周波
数領域の弾性条体の基準モード関数を解く信号処理装置
の動作によりスライダの位置が算出される。したがっ
て、高精度の測定のための関連部材の高精度の加工、組
付けを要せず、また、歯車機構におけるバックラッシに
よる誤差の発生が解消され、高い測定精度が得られると
共に、製作費を低減する効果がある。Thus, the displacement of the stretched and vibrated elastic strip is measured, and the position of the slider is moved by the operation of the signal processing device that solves the standard mode function of the elastic strip in the frequency domain by the equation of motion of the elastic body. Is calculated. Therefore, it is not necessary to perform high-precision processing and assembly of related members for high-precision measurement, and the occurrence of errors due to backlash in the gear mechanism is eliminated, high measurement accuracy is obtained, and manufacturing costs are reduced. Has the effect of
【００５４】また、この発明の請求項３記載の発明は以
上説明したように、基台に設けられた直線案内体と、こ
の直線案内体に案内されて移動するスライダと、長手が
直線案内体に沿って配置されて両端がそれぞれ基台に固
定されて張設された横断面一定の弾性条体と、基台に設
けられ弾性条体の長手中間部に対向して配置されこの弾
性条体を加振し、弾性条体に加振方向と同じ方向に変位
する固有振動モードの固有振動数で正弦波状に変化し振
幅が常に一定の力を加え弾性条体に加振方向と同じ方向
に変位する固有振動モードを発生させる非接触形の加振
器と、スライダに設けられて加振器の加振により弾性条
体に発生する位置のみに依存する振動変位の振幅を測定
する非接触形の測定器と、加振器により弾性条体に作用
する力及び測定器の出力が入力され弾性体の運動方程式
により周波数領域の弾性条体の基準モード関数を解くと
共に、加振器の加振力の周波数と振幅に依存する弾性条
体の固有振動モードを、加振周波数を別の固有振動数に
変更して弾性条体の振動モードを変化させ、弾性条体の
固有振動モードに依存する測定分解能及び測定範囲を変
更し、基台の端部寄りに設定された原点とスライダの関
係位置を算出する信号処理装置とを設けたものである。Further, as described above, the invention according to claim 3 of the present invention is such that the linear guide body provided on the base, the slider guided by the linear guide body, and the longitudinal linear guide body. An elastic strip having a constant cross-section, which is arranged along the base and has both ends fixed to the base and is stretched, and the elastic strip provided on the base so as to face the longitudinal middle portion of the elastic strip. Is applied to the elastic strip, which changes in a sinusoidal shape at the natural frequency of the natural vibration mode that displaces in the same direction as the excitation direction, and a force whose amplitude is always constant is applied to the elastic strip in the same direction as the excitation direction. A non-contact type exciter that generates a displacing natural vibration mode and a non-contact type that is provided on a slider and that measures the amplitude of vibration displacement that depends only on the position generated in the elastic strip by the vibration of the exciter Measuring instrument and force acting on the elastic strip by the vibrator and measuring instrument The output is input and the standard mode function of the elastic strip in the frequency domain is solved by the equation of motion of the elastic strip, and the natural vibration mode of the elastic strip that depends on the frequency and amplitude of the excitation force of the exciter To a different natural frequency to change the vibration mode of the elastic stripe, change the measurement resolution and the measurement range depending on the natural vibration mode of the elastic stripe, and set the origin set near the end of the base. And a signal processing device for calculating the relative position of the slider.
【００５５】これによって、張設されて加振された弾性
条体の変位が測定される。そして、加振器の加振力の周
波数と振幅に依存する弾性条体の固有振動モードを、加
振周波数を別の固有振動数に変更して弾性条体の振動モ
ードを変化させ、弾性条体の固有振動モードに依存する
測定分解能及び測定範囲が変更される。これにより、弾
性体の運動方程式により周波数領域の弾性条体の基準モ
ード関数を解く信号処理装置の動作によりスライダの位
置が算出される。したがって、高精度の測定のための関
連部材の高精度の加工、組付けを要せず、また、歯車機
構におけるバックラッシによる誤差の発生が解消され、
高い測定精度が得られると共に、製作費を低減する効果
がある。As a result, the displacement of the stretched and vibrated elastic strip is measured. Then, the natural vibration mode of the elastic strip, which depends on the frequency and amplitude of the excitation force of the exciter, is changed to another natural frequency by changing the excitation frequency to change the vibration mode of the elastic strip. The measurement resolution and the measurement range depending on the natural vibration mode of the body are changed. Thus, the position of the slider is calculated by the operation of the signal processing device that solves the standard mode function of the elastic strip in the frequency domain by the equation of motion of the elastic body. Therefore, highly accurate processing and assembling of related members for highly accurate measurement are not required, and the occurrence of an error due to backlash in the gear mechanism is eliminated,
High measurement accuracy can be obtained and manufacturing cost can be reduced.
【００５６】また、この発明の請求項４記載の発明は以
上説明したように、基台に設けられた直線案内体と、こ
の直線案内体に案内されて移動するスライダと、長手が
直線案内体に沿って配置されて一端に無反射端が形成さ
れ基台に張設された横断面一定の弾性条体と、基台に設
けられ弾性条体の反無反射端寄りに対向して配置されこ
の弾性条体を加振し、加振方向と同じ方向に変位して加
振端から無反射端へ向かう進行波を発生させる非接触形
の加振器と、スライダに設けられて加振器の加振により
弾性条体に発生する加振端側からの距離に依存する弾性
条体の振動の位相を測定する非接触形の測定器と、この
測定器の測定値の変化と加振器により発生する加振力と
の位相差を処理して基台の端部寄りに設定された原点と
スライダの関係位置を算出する信号処理装置とを設けた
ものである。As described above, in the invention according to claim 4 of the present invention, the linear guide body provided on the base, the slider guided by the linear guide body to move, and the linear guide body having the longitudinal direction are provided. And an elastic strip having a constant cross-section stretched on the base and having a non-reflective end formed at one end, and the elastic strip provided on the base and arranged opposite to the anti-reflective end of the elastic strip. A non-contact type exciter that excites this elastic strip and displaces it in the same direction as the excitation direction to generate a traveling wave from the excitation end to the non-reflection end, and an exciter provided on the slider. Non-contact type measuring instrument that measures the phase of the vibration of the elastic strip that depends on the distance from the excitation end side that is generated in the elastic strip by the excitation of the The relationship between the origin and the slider set near the end of the base is processed by processing the phase difference with the excitation force generated by It is provided with a signal processing unit for calculating a.
【００５７】これによって、弾性条体の反無反射端寄り
弾性条体を加振して加振方向と同じ方向に変位して加振
端から無反射端へ向かう進行波が発生される。そして、
弾性条体に発生する加振端側からの距離に依存する弾性
条体の振動の位相が測定される。この測定値の変化と加
振器により発生する加振力との位相差を処理する信号処
理装置の動作によりスライダの位置が算出される。した
がって、高精度の測定のための関連部材の高精度の加
工、組付けを要せず、また、歯車機構におけるバックラ
ッシによる誤差の発生が解消され、高い測定精度が得ら
れると共に、製作費を低減する効果がある。As a result, the elastic strip near the anti-reflective end of the elastic strip is vibrated and displaced in the same direction as the exciting direction, and a traveling wave traveling from the vibrating end to the non-reflective end is generated. And
The phase of vibration of the elastic strip, which depends on the distance from the excitation end generated in the elastic strip, is measured. The position of the slider is calculated by the operation of the signal processing device that processes the phase difference between the change in the measured value and the exciting force generated by the exciter. Therefore, it is not necessary to perform high-precision processing and assembly of related members for high-precision measurement, and the occurrence of errors due to backlash in the gear mechanism is eliminated, high measurement accuracy is obtained, and manufacturing costs are reduced. Has the effect of
【００５８】また、この発明の請求項５記載の発明は以
上説明したように、基台に設けられた直線案内体と、こ
の直線案内体に案内されて移動するスライダと、長手が
直線案内体に沿って配置されて両端がそれぞれ基台に固
定されて張設された横断面一定の弾性条体と、基台に設
けられ弾性条体の長手中間部に対向して配置されこの弾
性条体を加振する非接触形の加振器と、スライダに設け
られて弾性条体の長手に沿い弾性条体に発生する振動の
１波長よりも短い所定間隔で複数個が配置され加振器の
加振により弾性条体に発生する振動変位を測定する非接
触形の測定器と、加振器により弾性条体に作用する力並
びにそれぞれの測定器の出力及びこれらの出力の差が入
力されて弾性体の運動方程式により基台の端部寄りに設
定された原点とスライダの関係位置を算出する信号処理
装置とを設けたものである。Further, as described above, in the invention according to claim 5 of the present invention, the linear guide body provided on the base, the slider which is guided by the linear guide body to move, and the longitudinal linear guide body. An elastic strip having a constant cross-section, which is arranged along the base and has both ends fixed to the base and is stretched, and the elastic strip provided on the base so as to face the longitudinal middle portion of the elastic strip. And a plurality of non-contact type vibrators that are provided on the slider and are arranged along the length of the elastic strip at a predetermined interval shorter than one wavelength of vibration generated in the elastic strip. A non-contact type measuring instrument that measures the vibration displacement generated in the elastic strip by vibration, the force acting on the elastic strip by the exciter, the output of each measuring instrument and the difference between these outputs are input. Based on the equation of motion of the elastic body, the origin and slide set near the end of the base It is provided with a signal processing device for calculating the relationship between the position of Ida.
【００５９】これによって、張設されて加振された弾性
条体の変位が弾性条体の長手に沿い所定間隔で配置され
た複数個の測定器によって測定され、弾性体の運動方程
式にもとずく信号処理装置の動作によりスライダの位置
が算出される。したがって、高精度の測定のための関連
部材の高精度の加工、組付けを要せず、また、歯車機構
におけるバックラッシによる誤差の発生が解消され、高
い測定精度が得られると共に、製作費を低減する効果が
ある。Thus, the displacement of the stretched and vibrated elastic strip is measured by a plurality of measuring devices arranged at a predetermined interval along the length of the elastic strip, and is based on the equation of motion of the elastic strip. The position of the slider is calculated by the operation of the drop signal processing device. Therefore, it is not necessary to perform high-precision processing and assembly of related members for high-precision measurement, and the occurrence of errors due to backlash in the gear mechanism is eliminated, high measurement accuracy is obtained, and manufacturing costs are reduced. Has the effect of
【００６０】また、この発明の請求項６記載の発明は以
上説明したように、基台に設けられた直線案内体と、こ
の直線案内体に案内されて移動するスライダと、長手が
直線案内体に沿って配置されて両端がそれぞれ基台に固
定されて張設され、互いに離れて平行に配置された複数
の横断面一定の弾性条体と、基台に設けられそれぞれの
弾性条体の長手中間部に対向してそれぞれ配置され対向
した弾性条体を加振し、弾性条体に加振方向と同じ方向
に変位する固有振動モードの固有振動数で正弦波状に変
化し振幅が常に一定の力を加え弾性条体に加振方向と同
じ方向に変位する固有振動モードを発生させる複数の非
接触形の加振器と、スライダに設けられてそれぞれの弾
性条体に対向してそれぞれ配置され、加振器の加振によ
り弾性条体に発生する位置のみに依存する振動変位の振
幅を測定する複数の非接触形の測定器と、それぞれの加
振器によりそれぞれの弾性条体に作用する力及びそれぞ
れの測定器の出力により加振器の加振力と同じ方向の変
位において互いに異なる固有振動モードを発生させてそ
れぞれの信号を処理し、弾性条体全長にわたって１意に
弾性体の運動方程式を解き基台の端部寄りに設定された
原点とスライダの関係位置を算出する信号処理装置とを
設けたものである。Further, as described above, in the invention according to claim 6 of the present invention, the linear guide body provided on the base, the slider guided by the linear guide body to move, and the longitudinal linear guide body. A plurality of elastic strips having a constant cross section and arranged in parallel with each other, and both ends of which are fixed to the base and stretched, and the lengths of the elastic strips provided on the base. The elastic strips arranged facing each other in the middle part are vibrated and the elastic strips are displaced in the same direction as the excitation direction. The natural frequency of the natural vibration mode changes sinusoidally and the amplitude is always constant. A plurality of non-contact type vibrators that generate a natural vibration mode that applies a force to the elastic strips and displaces in the same direction as the excitation direction, and are provided on the slider and are respectively arranged facing each elastic strip. Occurs in the elastic strip due to the vibration of the vibrator The non-contact type measuring instrument that measures the amplitude of the vibration displacement that depends only on the position of the vibrating element, the force acting on each elastic strip by each exciter, and the output of each measuring instrument. By generating different natural vibration modes in the displacement in the same direction as the excitation force and processing the respective signals, the equation of motion of the elastic body was uniquely solved over the entire length of the elastic striation, and it was set near the end of the base. A signal processing device for calculating the relational position between the origin and the slider is provided.
【００６１】これによって、張設されて加振された複数
の弾性条体それぞれの変位が測定され、加振力と同じ方
向の変位において互いに異なる固有振動モードを発生さ
せてそれぞれの信号を処理し、弾性条体全長にわたって
１意に弾性体の運動方程式を解く信号処理装置の動作に
よりスライダの位置が算出される。したがって、高精度
の測定のための関連部材の高精度の加工、組付けを要せ
ず、また、歯車機構におけるバックラッシによる誤差の
発生が解消され、高い測定精度が得られると共に、製作
費を低減する効果がある。Thus, the displacement of each of the plurality of elastic strips stretched and vibrated is measured, and different natural vibration modes are generated in the displacement in the same direction as the exciting force to process the respective signals. The position of the slider is calculated by the operation of the signal processing device that uniquely solves the equation of motion of the elastic body over the entire length of the elastic body. Therefore, it is not necessary to perform high-precision processing and assembly of related members for high-precision measurement, and the occurrence of errors due to backlash in the gear mechanism is eliminated, high measurement accuracy is obtained, and manufacturing costs are reduced. Has the effect of
【図１】この発明の実施例１を示す概念的斜視図。FIG. 1 is a conceptual perspective view showing a first embodiment of the present invention.
【図２】この発明の実施例２を示す概念的斜視図。FIG. 2 is a conceptual perspective view showing a second embodiment of the present invention.
【図３】この発明の実施例３を示す概念的斜視図。FIG. 3 is a conceptual perspective view showing a third embodiment of the present invention.
【図４】この発明の実施例４を示す概念的斜視図。FIG. 4 is a conceptual perspective view showing a fourth embodiment of the present invention.
【図５】この発明の実施例５を示す概念的斜視図。FIG. 5 is a conceptual perspective view showing a fifth embodiment of the present invention.
【図６】この発明の実施例６を示す概念的斜視図。FIG. 6 is a conceptual perspective view showing a sixth embodiment of the present invention.
【図７】従来の位置検出装置を示す概念的斜視図。FIG. 7 is a conceptual perspective view showing a conventional position detecting device.
１ 基台 ２ 直線案内体 ３ スライダ ７ 信号処理装置 ８ 弾性条体、第１弾性条体 ８１ 第２弾性条体 ９ 加振器、第１加振器 ９１ 第２加振器 １０ 測定器、第１測定器 １０１ 第２測定器 １１ 原点 １３ 無反射端 1 base 2 linear guide 3 slider 7 signal processor 8 elastic strip, first elastic strip 81 second elastic strip 9 exciter, first exciter 91 second exciter 10 measuring instrument, first 1 measuring device 101 2nd measuring device 11 origin 13 non-reflective end
Claims (6)
線案内体に案内されて移動するスライダと、長手が上記
直線案内体に沿って配置されて両端がそれぞれ上記基台
に固定されて張設された横断面一定の弾性条体と、上記
基台に設けられ上記弾性条体の長手中間部に対向して配
置されこの弾性条体を加振する非接触形の加振器と、上
記スライダに設けられて上記加振器の加振により上記弾
性条体に発生する振動変位を測定する非接触形の測定器
と、上記加振器により上記弾性条体に作用する力及び上
記測定器の出力が入力されて弾性体の運動方程式により
上記基台の端部寄りに設定された原点と上記スライダの
関係位置を算出する信号処理装置とを備えた位置検出装
置。1. A linear guide body provided on a base, a slider which is moved by being guided by the linear guide, and a longitudinally arranged along the linear guide, both ends of which are fixed to the base, respectively. An elastic strip having a constant horizontal cross section and a non-contact type exciter that is provided on the base and faces the longitudinal intermediate portion of the elastic strip to vibrate the elastic strip. A non-contact type measuring device provided on the slider for measuring a vibration displacement generated in the elastic strip by the vibration of the exciter; and a force acting on the elastic strip by the exciter, and A position detection device comprising: a signal processing device that receives an output of a measuring device and calculates a relational position between the origin and the slider set near the end of the base according to the equation of motion of the elastic body.
線案内体に案内されて移動するスライダと、長手が上記
直線案内体に沿って配置されて両端がそれぞれ上記基台
に固定されて張設された横断面一定の弾性条体と、上記
基台に設けられ上記弾性条体の長手中間部に対向して配
置されこの弾性条体を加振し、上記弾性条体に加振方向
と同じ方向に変位する固有振動モードの固有振動数で正
弦波状に変化し振幅が常に一定の力を加え上記弾性条体
に上記加振方向と同じ方向に変位する固有振動モードを
発生させる非接触形の加振器と、上記スライダに設けら
れて上記加振器の加振により上記弾性条体に発生する位
置のみに依存する振動変位の振幅を測定する非接触形の
測定器と、上記加振器により上記弾性条体に作用する力
及び上記測定器の出力が入力され弾性体の運動方程式に
より周波数領域の上記弾性条体の基準モード関数を解き
上記基台の端部寄りに設定された原点と上記スライダの
関係位置を算出する信号処理装置とを備えた位置検出装
置。2. A linear guide provided on the base, a slider which is moved by being guided by the linear guide, and a longitudinally arranged along the linear guide, both ends of which are fixed to the base, respectively. And the elastic strip having a constant horizontal cross section, which is provided on the base and is disposed so as to oppose the longitudinal intermediate portion of the elastic strip, and vibrates the elastic strip to vibrate the elastic strip. The natural frequency of the natural vibration mode that displaces in the same direction as that of the sine wave changes sinusoidally and a force with a constant amplitude is always applied. A contact-type vibrator, a non-contact-type measuring device provided on the slider for measuring the amplitude of a vibration displacement dependent only on the position generated in the elastic strip by the vibration of the vibrator, The force acting on the elastic strip by the vibrator and the output of the measuring instrument A signal processing device for calculating the relational position between the origin and the origin set near the end of the base by solving the standard mode function of the elastic strip in the frequency domain based on the equation of motion of the elastic body when a force is input. Position detector.
線案内体に案内されて移動するスライダと、長手が上記
直線案内体に沿って配置されて両端がそれぞれ上記基台
に固定されて張設された横断面一定の弾性条体と、上記
基台に設けられ上記弾性条体の長手中間部に対向して配
置されこの弾性条体を加振し、上記弾性条体に加振方向
と同じ方向に変位する固有振動モードの固有振動数で正
弦波状に変化し振幅が常に一定の力を加え上記弾性条体
に上記加振方向と同じ方向に変位する固有振動モードを
発生させる非接触形の加振器と、上記スライダに設けら
れて上記加振器の加振により上記弾性条体に発生する位
置のみに依存する振動変位の振幅を測定する非接触形の
測定器と、上記加振器により上記弾性条体に作用する力
及び上記測定器の出力が入力され弾性体の運動方程式に
より周波数領域の上記弾性条体の基準モード関数を解く
と共に、上記加振器の加振力の周波数と振幅に依存する
上記弾性条体の固有振動モードを、加振周波数を別の固
有振動数に変更して上記弾性条体の振動モードを変化さ
せ、上記弾性条体の固有振動モードに依存する測定分解
能及び測定範囲を変更して上記基台の端部寄りに設定さ
れた原点と上記スライダの関係位置を算出する信号処理
装置とを備えた位置検出装置。3. A linear guide body provided on the base, a slider which is guided and moved by the linear guide, and a longitudinally arranged along the linear guide, both ends of which are fixed to the base, respectively. And the elastic strip having a constant horizontal cross section, which is provided on the base and is disposed so as to oppose the longitudinal intermediate portion of the elastic strip, and vibrates the elastic strip to vibrate the elastic strip. The natural frequency of the natural vibration mode that displaces in the same direction as that of the sine wave changes sinusoidally and a force with a constant amplitude is always applied. A contact-type vibrator, a non-contact-type measuring device provided on the slider for measuring the amplitude of a vibration displacement dependent only on the position generated in the elastic strip by the vibration of the vibrator, The force acting on the elastic strip by the vibrator and the output of the measuring instrument A force is input and the standard mode function of the elastic strip in the frequency domain is solved by the equation of motion of the elastic body, and the natural vibration mode of the elastic strip that depends on the frequency and amplitude of the exciting force of the exciter is calculated. The vibration frequency is changed to another natural frequency to change the vibration mode of the elastic strip, and the measurement resolution and the measurement range depending on the natural vibration mode of the elastic strip are changed to change the end part of the base. A position detecting device including a signal processing device that calculates a relational position between the origin and a slider that are set closer to each other.
線案内体に案内されて移動するスライダと、長手が上記
直線案内体に沿って配置されて一端に無反射端が形成さ
れ上記基台に張設された横断面一定の弾性条体と、上記
基台に設けられ上記弾性条体の反上記無反射端寄りに対
向して配置されこの弾性条体を加振し、加振方向と同じ
方向に変位して加振端から上記無反射端へ向かう進行波
を発生させる非接触形の加振器と、上記スライダに設け
られて上記加振器の加振により上記弾性条体に発生する
加振端側からの距離に依存する上記弾性条体の振動の位
相を測定する非接触形の測定器と、この測定器の測定値
の変化と上記加振器により発生する加振力との位相差を
処理して上記基台の端部寄りに設定された原点と上記ス
ライダの関係位置を算出する信号処理装置とを備えた位
置検出装置。4. A linear guide body provided on a base, a slider that is guided and moved by the linear guide body, and a longitudinal direction is arranged along the linear guide body, and a non-reflection end is formed at one end. An elastic strip having a constant cross-section stretched on the base, and an elastic strip provided on the base opposite to the non-reflective end of the elastic strip and facing the non-reflective end. A non-contact type exciter that generates a traveling wave from the vibrating end to the non-reflective end by displacing in the same direction, and the elastic strip provided by the vibrating device provided on the slider. A non-contact type measuring instrument that measures the phase of the vibration of the elastic strip depending on the distance from the excitation end that occurs in the, and the change in the measured value of this measuring instrument and the excitation generated by the exciter. By processing the phase difference with the force, the relational position between the origin and the slider set near the end of the base is set. A position detection device including a signal processing device for calculating.
線案内体に案内されて移動するスライダと、長手が上記
直線案内体に沿って配置されて両端がそれぞれ上記基台
に固定されて張設された横断面一定の弾性条体と、上記
基台に設けられ上記弾性条体の長手中間部に対向して配
置されこの弾性条体を加振する非接触形の加振器と、上
記スライダに設けられて上記弾性条体の長手に沿い上記
弾性条体に発生する振動の１波長よりも短い所定間隔で
複数個が配置され上記加振器の加振により上記弾性条体
に発生する振動変位を測定する非接触形の測定器と、上
記加振器により上記弾性条体に作用する力並びにそれぞ
れの上記測定器の出力及びこれらの出力の差が入力され
て弾性体の運動方程式により上記基台の端部寄りに設定
された原点と上記スライダの関係位置を算出する信号処
理装置とを備えた位置検出装置。5. A linear guide body provided on the base, a slider which is guided and moved by the linear guide, and a longitudinal direction arranged along the linear guide, both ends of which are fixed to the base, respectively. An elastic strip having a constant horizontal cross section and a non-contact type exciter that is provided on the base and faces the longitudinal intermediate portion of the elastic strip to vibrate the elastic strip. , A plurality of sliders are provided along the length of the elastic strip at a predetermined interval shorter than one wavelength of vibration generated in the elastic strip. A non-contact type measuring device for measuring the generated vibration displacement, the force acting on the elastic strip by the vibrator, the output of each of the measuring devices, and the difference between these outputs are input to move the elastic body. The origin set near the end of the above base by the equation and the above A position detecting device comprising: a signal processing device that calculates a relative position of a rider.
線案内体に案内されて移動するスライダと、長手が上記
直線案内体に沿って配置されて両端がそれぞれ上記基台
に固定されて張設され、互いに離れて平行に配置された
複数の横断面一定の弾性条体と、上記基台に設けられそ
れぞれの上記弾性条体の長手中間部に対向してそれぞれ
配置され対向した上記弾性条体を加振し、上記弾性条体
に加振方向と同じ方向に変位する固有振動モードの固有
振動数で正弦波状に変化し振幅が常に一定の力を加え上
記弾性条体に上記加振方向と同じ方向に変位する固有振
動モードを発生させる複数の非接触形の加振器と、上記
スライダに設けられてそれぞれの上記弾性条体に対向し
てそれぞれ配置され、上記加振器の加振により上記弾性
条体に発生する位置のみに依存する振動変位の振幅を測
定する複数の非接触形の測定器と、それぞれの上記加振
器によりそれぞれの上記弾性条体に作用する力及びそれ
ぞれの上記測定器の出力により上記加振器の加振力と同
じ方向の変位において互いに異なる固有振動モードを発
生させてそれぞれの信号を処理し、上記弾性条体全長に
わたって１意に弾性体の運動方程式を解き上記基台の端
部寄りに設定された原点と上記スライダの関係位置を算
出する信号処理装置とを備えた位置検出装置。6. A linear guide body provided on a base, a slider which is moved by being guided by the linear guide, and a longitudinal direction arranged along the linear guide, both ends of which are fixed to the base, respectively. A plurality of elastic strips having a constant cross-section and arranged in parallel with each other and spaced apart from each other, and the elastic strips provided on the base and arranged opposite to the longitudinal intermediate portions of the elastic strips, respectively. When the elastic strip is vibrated, a force with a constant amplitude is applied to the elastic strip, which changes in a sinusoidal manner at the natural frequency of the natural vibration mode that is displaced in the same direction as the excitation direction. A plurality of non-contact type vibration exciters that generate natural vibration modes that are displaced in the same direction as the vibration direction, and are arranged on the slider so as to face the elastic strips, respectively. Position generated in the elastic strip by vibration A plurality of non-contact type measuring instruments for measuring the amplitude of vibration displacement depending only on the vibration displacement, the force acting on the elastic strips by the respective exciters, and the excitation by the outputs of the respective measuring instruments. Generated by generating different natural vibration modes in the displacement in the same direction as the excitation force of the vessel and processing the respective signals, and by uniquely solving the equation of motion of the elastic body over the entire length of the elastic body and moving it toward the end of the base. A position detection device including a signal processing device that calculates a relational position between the origin and the slider.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05113504A JP3134591B2 (en) | 1993-05-17 | 1993-05-17 | Position detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05113504A JP3134591B2 (en) | 1993-05-17 | 1993-05-17 | Position detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06323841A true JPH06323841A (en) | 1994-11-25 |
| JP3134591B2 JP3134591B2 (en) | 2001-02-13 |
Family
ID=14614008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05113504A Expired - Fee Related JP3134591B2 (en) | 1993-05-17 | 1993-05-17 | Position detection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3134591B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007261401A (en) * | 2006-03-28 | 2007-10-11 | Akebono Brake Ind Co Ltd | Device and method for pantagraph position detection |
| CN110962136A (en) * | 2018-09-28 | 2020-04-07 | 精工爱普生株式会社 | Control device and robot system |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102153468B1 (en) * | 2019-11-08 | 2020-09-08 | 박종웅 | Position-detecting sensor unit capable of adjusting location |
-
1993
- 1993-05-17 JP JP05113504A patent/JP3134591B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007261401A (en) * | 2006-03-28 | 2007-10-11 | Akebono Brake Ind Co Ltd | Device and method for pantagraph position detection |
| CN110962136A (en) * | 2018-09-28 | 2020-04-07 | 精工爱普生株式会社 | Control device and robot system |
| CN110962136B (en) * | 2018-09-28 | 2022-10-28 | 精工爱普生株式会社 | Control device and robot system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3134591B2 (en) | 2001-02-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6321598B1 (en) | Angular velocity sensor device having oscillators | |
| US5069075A (en) | Mass flow meter working on the coriolis principle | |
| US4733569A (en) | Mass flow meter | |
| Vyshnevsky et al. | A novel, single-mode piezoceramic plate actuator for ultrasonic linear motors | |
| JP6931487B2 (en) | Displacement detector | |
| JPH08327650A (en) | Rotation-rate sensor | |
| JP2000329681A (en) | Self-exciation and self-detection-type probe and scanning probe device | |
| JP3565588B2 (en) | Vibration type measuring instrument | |
| KR20070049253A (en) | In-flow determination of left and right eigenvectors in a coriolis flowmeter | |
| JP3547527B2 (en) | Mass flow meter | |
| US4570346A (en) | Length or angle measuring device | |
| JP3134591B2 (en) | Position detection device | |
| Shanmugavalli et al. | Smart Coriolis mass flowmeter | |
| US4763512A (en) | Rheometer | |
| US5637804A (en) | Mass flowmeter | |
| US4802364A (en) | Angular rate sensor | |
| JPS58118905A (en) | Method and device for measuring length of segment or arc | |
| CN1242241C (en) | Large-scale nano detection optical system | |
| EP1060364A1 (en) | Free standing coriolis driver | |
| USRE34006E (en) | Angular rate sensor | |
| JPH0712612A (en) | Coliolis type massflowmeter | |
| JPH05332832A (en) | Etalon drive mechanism | |
| SU1270582A1 (en) | Method of measuring velocity and attenuation of acoustic waves in material | |
| JPS5936209B2 (en) | Displacement position detection device | |
| RU2104557C1 (en) | Vibration-type angular-velocity transducer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |