JPH06323362A - Vibration resistant device - Google Patents

Abstract

PURPOSE:To eliminate extremely low frequency vibration or extremely small amplitude vibration as well from an installation floor, and control also vibration from machinery itself on a vibration resistant table floor plate. CONSTITUTION:A vibration resistant table floor plate 1 is supported in a noncontact state on the vibration resistant installation floor by an actuator, and the vibration of the floor plate 1 is detected by vibration sensors 4. A controller for driving the actuator to control vibration actively is provided, and electromagnets are provide at the nodes 7 of primary mode of elasticity on the floor plate 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention shuts off the vibration of the installation floor in order to prevent the yield and measurement accuracy of products from being adversely affected by the vibration from the installation floor in semiconductor manufacturing equipment, electron microscopes, etc. Further, the present invention relates to a vibration isolation device for damping the vibration of the device itself.

[0002]

2. Description of the Related Art In a conventional vibration isolator, as shown in FIG. 4 and FIG.
It was supported on the installation floor 5.

[0003]

SUMMARY OF THE INVENTION In a conventional vibration isolator using a vibration isolating rubber or an air spring, the vibration from the vibration of the installation floor is cut to some extent with respect to a semiconductor manufacturing apparatus on a floor board, an electron microscope, or the like. However, it is not possible to isolate vibrations of very low frequency or very small amplitude. Further, it is not possible to suppress the vibration from the mechanical device itself on the vibration isolation table floor plate.

The present invention also eliminates very low low frequency vibrations or very small amplitude vibrations from the installation floor,
An object of the present invention is to provide a vibration isolation device that can also suppress vibrations from the mechanical device itself on the vibration isolation table floor plate.

[0005]

According to the present invention, an anti-vibration table floor plate is supported on an anti-vibration table floor by an actuator in a non-contact manner, the vibration of the anti-vibration table plate is detected, and the actuator is driven. A controller that actively damps vibrations is provided, and the actuator is provided at a node of the elastic primary mode of the vibration isolation base floor plate.

The actuator comprises an electromagnet,
A plurality of elastic primary mode nodes are preferably provided on the cross node when the node is in a cross shape.

The vibration sensor is preferably provided at or near the point of action of the force of the electromagnet.

[0008]

In the vibration isolator constructed as described above, the anti-vibration base floor plate is supported by the electromagnet on the installation floor in a non-contact manner. Vibrations with small amplitude are also blocked. Further, vibrations from the mechanical device itself or the floor on the vibration isolation table floor plate are damped by the controller driving the electromagnet based on the signal from the vibration sensor. At this time, since the electromagnet is provided at the node of the elastic first-order mode of the floor plate, the floor plate is not excited by the electromagnet.

[0009]

Embodiments of the present invention will be described below with reference to the drawings.

In FIGS. 1 and 2, the vibration isolation floor plate 1 is
It is placed in a free state on the four electromagnets 2 ... Which are actuators and supported by the installation floor 5. A vibration sensor 4 ... Is provided between the anti-vibration base plate 1 and the electromagnet 2, and is connected to the controller 3 via a cable L together with the electromagnet 2 ... And electromagnet 2
.. are provided on the node 7 of the elastic primary mode, which shows the details of the vibration isolation base plate 1 in FIG. This joint 7 has been determined in advance and is orthogonal in the example shown, but the floorboard 1
Depending on the shape, there may be oblique crossing.

With the above construction, the floor plate 1 has an electromagnet 2
.. are supported in a non-contact manner and are insulated from the vibration of the installation floor 5 in the horizontal direction. Further, the vibration from the mechanical device itself on the floor board 1 or from the floor is detected by the vibration sensor 4.
And the controller 3 drives the electromagnets 2 ... Based on the detection signal to actively suppress the vibration.
At this time, the floor plate 1 is excited by the electromagnets 2 ... However, since the electromagnets 2 ... Are provided in the node 7 of the elastic primary mode of the floor plate 1, the floor plate 1 is hardly excited. As a result, the deterioration of the vibration isolation characteristic is suppressed.

[0012]

EFFECTS OF THE INVENTION Since the present invention is constructed as described above, it is also possible to isolate very low and low frequency vibrations or very small amplitude vibrations from the installation floor, and the vibration isolation floor plate. Vibrations from the above mechanical device can also be damped. As a result, the product yield and the measurement and observation accuracy can be improved.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of the present invention.

FIG. 2 is a view on arrow A in FIG.

FIG. 3 is a drawing showing an example of an elastic primary mode of a vibration isolation floor plate.

FIG. 4 is a side view showing a conventional device.

FIG. 5 is a view on arrow B of FIG.

[Explanation of symbols]

 1 ... Vibration isolation table floor plate 2 ... Electromagnet 3 ... Controller 4 ... Vibration sensor 5 ... Vibration isolation table installation floor 6 ... Anti-vibration rubber or air spring 7 ... Elastic primary mode Section

Claims (1)

[Claims] 1. A controller for supporting a vibration isolation floor plate by an actuator in a non-contact manner on a vibration isolation platform installation floor, detecting vibration of the vibration isolation floor plate, and driving the actuator to actively suppress the vibration. An anti-vibration device, characterized in that the actuator is provided at a node of the elastic primary mode of the anti-vibration base floor plate.