JPH06320724A - Ink jet recorder - Google Patents

Abstract

PURPOSE:To provide an ink jet recorder which can be manufactured easily and eject ink without a minimal crosstalk phenomenon in spite of cost reduction. CONSTITUTION:An ink chamber consists of a piezoelectric member 17, with projecting parts 17a, engaged with a non-piezoelectric member 18 with recessed parts 18a which fit into the projecting parts 17a. Ink is ejected by compression of the ink chamber 29 due to the displacement of the projecting parts 17a following the application of a voltage to individual electrodes 32 and a common electrode 33 formed on the piezoelectric member 17.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-nozzle type ink jet recording apparatus in which an ink chamber is formed between a piezoelectric member having a plurality of convex portions and a non-piezoelectric member having a concave portion fitted with the convex portions. Regarding

[0002]

2. Description of the Related Art As an example of a conventional ink jet recording apparatus, as shown in FIG. 31, a piezoelectric plate 51 is used.
A concave portion 52 is formed inside one of the concave portions 52, and a convex portion 53 is provided on the bottom surface of the concave portion 52 so as to form one wide groove a and two deep grooves b.
And the cover plate 54 is attached to one surface of the piezoelectric plate 51.
Is formed as an ink chamber, electrodes 55 and 56 are provided on the other surface of the piezoelectric plate 51 and the tip end surface of the convex portion 53, and a voltage is applied between the electrodes 55 and 56 to form the piezoelectric plate. There is a configuration in which the convex portion 53 of 51 is deformed to eject ink from the nozzle hole. (See US Pat. Nos. 4,819,614 and 4,752,788).

[0003]

However, as is apparent from FIG. 31, in the above-mentioned conventional device, it is necessary to form a groove having a complicated cross-sectional shape inside the piezoelectric plate 51, and the manufacturing cost thereof is unnecessarily expensive. In addition, especially when the density is increased, the width of the two grooves b becomes a value of several μm, so that there is a problem that processing is substantially difficult.

Further, since the partition wall forming the ink chamber is composed of the piezoelectric member, the electric field between the electrodes 55 and 56 spills around and vibrates the partition wall to displace the volume of the adjacent ink chamber. There are also problems that the ink is ejected to cause crosstalk, and the periphery of the nozzle is contaminated, which causes a change in the ink ejection direction. Even if the wraparound of the electric field can be reduced, the partition portion integrally formed with the convex portion 53 is inadvertently deformed to the lateral side due to the displacement of the convex portion 53, so that the correct ink can be obtained. Hinder the flight,
There was a problem that it lacked high-speed responsiveness.

The present invention has been proposed in view of the above problems, and an object thereof is an ink jet which can be manufactured more easily than conventional ones, can reduce the cost thereof, and can eject ink with less crosstalk. To provide a recording device.

[0006]

In order to achieve the above object, the present invention has a plurality of convex portions, at least a portion of which is a piezoelectric member, and a plurality of convex portions in the piezoelectric member. A non-piezoelectric member made of a non-piezoelectric material having a plurality of concave portions fitted to each other, and an ink chamber is formed between the tip surface of each convex portion and the bottom surface of each concave portion facing each other; An electric field applying unit that applies an electric field to the piezoelectric member so as to eject from the hole, and an ink supply unit that communicates with the ink chamber are provided, and ink in the ink chamber is ejected from the nozzle hole by displacement of the piezoelectric body. In this case, it is preferable that an individual electrode is provided on the tip surface of each of the convex portions and a common electrode is provided on one surface of the piezoelectric member facing the convex electrode. And displace the piezoelectric body. Parallel to the direction of the electric field to be applied to the,
Moreover, it is desirable that this direction intersects with the ink ejection direction.

Further, the plurality of convex portions of the piezoelectric member and the plurality of concave portions of the non-piezoelectric member are movably fitted to each other.

[0008]

According to the above construction, when an electric field is applied to the piezoelectric member, only the convex portion of the piezoelectric member is locally deformed by the vibration of the voltage effect, and only the predetermined ink chamber volume is compressed by this deforming operation. Since the ink is ejected from a predetermined nozzle hole, a phenomenon such as crosstalk can be significantly suppressed.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An ink jet recording apparatus of the present invention will be described based on the embodiments of the drawings. FIG. 1 is a schematic configuration diagram showing an embodiment of an inkjet recording apparatus. The inkjet recording apparatus is roughly classified into a main body, a paper feed drive system 1, a main engine controller 2, a controller 3, a cleaning / recovery mechanism 4, an interface 5, a driver unit 6, a line head unit 7, The operation unit 8, a paper discharge tray 9, a body 10, and a recording paper cassette 11 are provided, and the line head unit 7 has four multi-nozzle heads of yellow, magenta, cyan, and black. Equipped with 13.

The multi-nozzle head 13 has a base plate 15 made of, for example, alumina, a terminal plate 16 made of, for example, alumina, and a multi-nozzle head 13 shown in FIG.
As shown in FIG. 3, a piezoelectric member 17 having a convex portion 17a made of, for example, PZT piezoelectric ceramics is provided, and a concave portion 18 fitted with the convex portion 17a is provided on the piezoelectric member 17.
A non-piezoelectric member 18 having a is provided.

Incidentally, it can be used as the piezoelectric member of the present invention.
The piezoelectric materials that can be used include the following. Piezoelectric crystal
Then, crystal SiO₂・ Rochelle salt (NaKC_FourH_Four
O₆・ 4H ₂O), ethylenediamine tartrate (ED
T. C₆H₁₄N₂O₆), Potassium tartrate (DKT.K
₂C_FourH_FourO₆・ 1/2 H₂O), diammonium phosphate
Mu (ADP: NH_FourH₂PO_Four), Perovskite system
CaTiO as crystal₃, BaTiO₃, PLZT, Tan
NaxWO as Gusten Bronze type crystal₃, Niobate
Barium sodium (Ba₂NaNb_FiveO₁₅),niobium
Potassium lead (Pb₂KNb_FiveO₁₅), Lithium niobate
(LiNbO₃), Lithium tantalate (LiTaO
₃). In addition, sodium chlorate (NaCll₃), Tourmaline,
Sphalerite (ZnS), lithium sulfate (LiSO_FourH
₂O), lithium metagallate (LiGaO) ₂), Yo
Lithium arsenate (LiIO₃), Glycine sulfate (TG
S), bismuth germanate (Bi₁₂GeO₂₀), Ge
Lithium rumanate (LiGeO₃), Titanic acid
Barium / Germanium (Ba₂Ge₂TiO₈) Etc.
Crystalline / piezoelectric semiconductors include wurtzite BeO, ZnO,
CdS, CdSe, AlN. As piezoelectric ceramics
Is barium titanate (BaTiO 3₃), Titaniu
Lead zirconate formate (PbTiO 3₃・ PbZr
O₃), Lead titanate (PbTiO 3 ₃), Niobate
Lead urate ((Ba-Pb) Nb₂O₆).

Alternatively, the powder of the piezoelectric crystal, the piezoelectric semiconductor, or the piezoelectric ceramic material may be dispersed and molded in plastics. The piezoelectric polymer, polyvinylidene fluoride PVDF (-CH ₂ -CF ₂ -) copolymer, vinylidene cyanide and vinyl acetate _n · polyvinylidene fluoride / PZT-rubber / PZT-trifluoroethylene and vinylidene fluoride Examples of the copolymer include vinylidene and poly (vinylidene).

After these are polarized, they are used as piezoelectric members.
Processed and used, or processed as a piezoelectric member and polarized
It may be used after processing. Also used as a non-piezoelectric member
The materials that can be used are as follows. Ceramics
As Al₂O₃, SiC, C, BaTiO₃, BiO
₃・ 3SnO₂, Pb (Zr_X, Ti_1-x) O₃, Zn
O, SiO₂, (1-x) Pb (Zr_x, Ti_1-x) O
₃+ (X) La₂O₃, Zn_1-xMn_xFe₂O₃, Γ
-Fe₂O₃, SrO ・ 6Fe₂O₃, La_1-xCa_x
CrO₃, SnO₂, Transition metal oxides, ZnO-Bi₂
O₃, Semiconducting BaTiO₃, Β-Al₂O₃, Stabilization
Luconia, LaB₆, B_FourC, diamond, TiN,
TiC, Si₃N_Four, Y₂O₂S: Eu, PLZT, T
hO₂, -CaO / nSiO₂, Ca_Five(F, Cl) P
₃O₁₂, TiO₂, K₂O ・ nAl₂O₃， With glasses
And elemental glass = Si, Se, Te, As, hydrogen bond
Russ = HPO₃, H₃PO_Four, SiO₂, B₂O₂, P
₂O_Five, GeO₂, As₂O₃・ Oxide glass = SbO
₃, Bi₂O₃, P₂O₃, V₂O_Five, Sb₂O_Five, A
s₂O₃, SO₃, ZrO₂・ Fluoride glass = BeF
₂・ Chloride glass = ZnCl ₂・ Sulfide glass = GeS
₂, As₂S₃, Carbonate glass = K₂CO₃, MgCO
₃・ Nitrate glass = NaNO₃, KNO₃, AgNO₃
・ Sulfate glass = Na ₂S₂O₃・ H₂O, Tl₂SO
_Four, Alum, silicate glass = SiO_2,Silica Alka
Regulus = Na₂O-CaO-SiO_2,Potash Lime Gala
S = K₂O-CaO-SiO₂, Soda lime glass = N
a₂l-CaO-SiO_2,Lead glass_,Barium glass
Borosilicate glass.

As plastics, saturated polyester resin, polyamide resin, acrylic resin, ethylene-vinyl acetate resin, ion-crosslinked olefin copolymer (ionomer), styrene-butadiene block copolymer, polyacetal, polycarbonate, vinyl chloride-vinyl acetate. Heat-promising resin such as copolymer, cellulose ester, polyimide, styrene resin; heat of epoxy resin, urethane resin, nylons, silicone resin, phenol resin, melamine resin, xylene resin, alkyd resin, thermosetting acrylic resin, etc. Curable resin: a photoconductive resin such as polyvinyl carpazole, polyvinyl pyrene, polyvinyl anthracene, and polyvinylol, which can be used alone or in combination.

In addition, engineering plastics such as liquid crystal polymers. It may be a mixture of plastics, powder and whiskers. Photosensitive resin, thick film photoresist resin, etc. can be used. When bakelite / fluorine-based resin, glass / epoxy resin (glass filler is mixed in epoxy) and the side surface in contact with the ink chamber is coated with an insulating film, all metals can be used.

These materials are formed into a plate shape and then processed as a non-piezoelectric member, or they are molded into the shape of a non-piezoelectric member from the beginning by utilizing patterning, pattern etching, photocuring or the like. May be. A nozzle plate 19 having nozzle holes 19a made of, for example, a polyimide film is formed on the front surfaces of the piezoelectric member 17 and the non-piezoelectric member 18.
However, an ink lid 20 made of epoxy resin is provided on the upper surface of the non-piezoelectric member 18, and blocking plates 21 made of epoxy resin are provided on both side surfaces of the piezoelectric member 17 and the non-piezoelectric member 18. .

The ink supply port 2 is formed in the ink lid 20.
4 is provided. Many terminals 22 are provided on the terminal board 16,
A large number of conductors 23 connected to each terminal 22 are integrally formed by metal vapor deposition. Therefore, as shown in FIGS. 4 and 5, a large number of convex portions 17a are formed along the depth direction at predetermined intervals in the width direction except for the rear end portion of the piezoelectric member 17, and each convex portion 17a is formed. It fits in a recess 18 a formed in the non-piezoelectric member 18.

The piezoelectric member 17 and the non-piezoelectric member 18 are
For example, only the both ends of the non-piezoelectric member 18 are adhered to each other by an epoxy adhesive, and a space forming an ink chamber 29 is formed between the tip end surface of the convex portion 17a and the bottom surface of the concave portion 18a. There is. The nozzle plate 19 is adhered to the piezoelectric member 17 and the non-piezoelectric member 18 with an epoxy adhesive, and the nozzle plate 19 has a tapered nozzle hole 19a communicating with the ink chamber 29 by an excimer laser. It is formed for each ink chamber 29.

An individual electrode 32 is provided on the upper surface of each convex portion 17a of the piezoelectric member 17, and a common electrode 33 is provided on the opposite surface. That is, the polarization direction of the piezoelectric member 17 and the direction of the electric field formed on the individual electrode 32 and the common electrode 33 are parallel to each other, and the parallel direction and the ink ejection direction intersect. The individual electrode 32 and the common electrode 33 are connected to the output end of the driver unit 6 shown in FIG. 1 via the conductor 23 of the terminal plate 16 and the terminal 22 at the rear end of the protrusion 17a. The non-piezoelectric member 18 is formed with an ink supply slit 35 communicating with all the ink chambers 29, and the ink supply slit 35 is covered with the ink lid 20 and the closing plate 21 shown in FIG.

The nozzle plate 19 has, for example, a thickness of 2
A polyimide film (Kapton, Toray) of about 5 to 200 μm can be used, and the diameter of the nozzle hole 19a is, for example, about 10 to 100 μm. The depth of the non-piezoelectric member 18 is, for example, about 2 to 50 mm, and the width of the convex portion 17a of the piezoelectric member 17 is, for example, about 20 to 150 μm. The pitch of the convex portions 17a is, for example, about 42.3-2.
It is about 54 μm (pixel density: 600 to 100 dpi).

The main part manufacturing process of the thus constructed multi-nozzle head 13 will be described with reference to FIGS. 6 to 12. First, as shown in FIG. 6, an Au / Ni film by electroless plating is formed on the upper and lower surfaces of the PZT piezoelectric plate that will be the piezoelectric member 17,
Or sputtered film of AU / (Ni ₁ Cr) is 10 μm-
The electrode layers 32 and 33 are formed to a thickness of 0.1 μm.

Next, as shown in FIG. 7, a plurality of convex portions 17a are formed at predetermined intervals using an automatic dicing saw. After that, as shown in FIG. 8, an insulating protective film 17c made of amorphous carbon is formed to a thickness of 0.5 μm on the surface opposite to the convex portion 17a, that is, the bottom surface. (However, if the ink resistance is high, the formation of the protective film 17c may be omitted.) On the other hand, the non-piezoelectric member 18 is, as shown in FIG. Then, the ink supply slit 35 is formed by using a dicing saw as shown in FIG.

Next, as shown in FIG. 11, a concave portion 18a which becomes the ink chamber 29 orthogonal to the slit 35 is cut on the opposite surface of the ink supply slit 35 with a dicing saw. (In this case, the piezoelectric member 17 is formed in such a size that it can be fitted to the convex portion 17a of the piezoelectric member 17.) Then, as shown in FIG. 12, the piezoelectric member 17 is arranged on the base plate 15 and the convex portion 17a is made of non-piezoelectric material. Recess 18 of member 18
A is fitted and an ink chamber 29 is formed between the two parts 17a and 18a.

Then, as shown in FIG. 12, the piezoelectric member 1
7 and the epoxy adhesive 1 on the front surface of the non-piezoelectric member 18.
8b, the nozzle plate 19 with the nozzle hole 19a facing the ink chamber 29 is bonded, while the ink supply slit 35
The ink lid 20 is fixed on the upper side, and both members 17,
Closure plates 21 are fixedly adhered to both side surfaces of 18. Next, the operation of the embodiment configured as described above will be described.

First, in accordance with the image signal, the driver unit 6
When a pulse voltage is applied between the individual electrode 32 and the common electrode 33 by the, the individual electrode 32 and the common electrode 3 as shown in FIG.
An electric field in the direction of arrow A is formed between the three. At this time, since the piezoelectric member 17 is polarized in the direction of the arrow P, the convex portion 17a of the piezoelectric member 17 is deformed in the thickness direction vibration mode to be in a state as indicated by the dotted line. Therefore, the volume of the ink chamber 29 between the tip surface of the convex portion 17a and the bottom surface of the concave portion 18a is reduced, the ink in the ink chamber 29 is pressurized, and the ink is ejected from the nozzle hole 19a, thereby recording paper (not shown). No)). At this time, the surface of the convex portion 17a has a convex shape as shown by the dotted line, but since the entire piezoelectric member 17 is fitted with the non-piezoelectric member 18 with a gap, the deformation due to this vibration is absorbed and the vibration is suppressed. It plays a role in not transmitting to other ink chambers.

When the voltage between the individual electrode 32 and the common electrode 33 becomes zero, the convex portion 17a of the piezoelectric member 17 returns to the solid line state and the volume of the ink chamber 29 increases, so that the ink is supplied through the ink supply slit 35. Ink is supplied to the chamber 29 and is ready for the next flight of ink. The above operation is sequentially or simultaneously performed for each ink chamber 29 according to the image signal, so that an image for one line is drawn, and this is continued in synchronism with the movement of the recording paper. The corresponding image is drawn on the recording paper.

In this case, by changing the waveform of the pulse signal applied to each individual electrode 32 to that shown in FIGS. 13a-1 to 13a-7, the following results can be obtained and used effectively. That is, in the case where a pulse is applied and the volume of the ink chamber 29 is rapidly reduced to cause the ink to fly, FIG.
Pulse is a general pulse. However, with this pulse, when the ink is ejected by the normal operation as shown in FIG. 13a, the piezo convex portion 17a suddenly returns from the dotted line to the solid line state, so that the volume of the ink chamber 29 suddenly increases and bubbles form from the nozzle portion. When mixed, the ink pressure may be absorbed during the next pulse application to prevent flying. The pulse shown in FIG. 13a-2 is a pulse which is slowly returned to the solid line state in order to prevent the bubble generation.

That is, in order to prevent a sudden volume change of the convex portion 17a after the ink has been ejected, the voltage is gradually decreased instead of abruptly dropping the pulse as shown in FIG. 13a-1. FIGS. 13a-3 and 13a-4 show the reverse ink jetting method, which is a method of increasing the ink chamber 29 once, filling it with ink, and then returning it abruptly to reduce the volume of the ink chamber 29 and fly the ink. is there. The reason why the rising edge of the pulse is inclined in FIG. 13a-4 is shown in FIG.
Same as 3.

FIGS. 13a-5 and 13a-6 show a method of applying a sub pulse after the main pulse. Especially when ink is ejected at a high frequency (high-speed printing), satellite noise is likely to occur. 13a-5 or 13a
In the ink chamber 29 before the satellite is generated as in -6.
Is slightly increased by the sub-pulse to forcibly suck the trailing portion of the ink column into the ink chamber 29 to prevent satellites.

13a-1 to 13a-6 and FIGS. 13e-1 to 13g-1 which will be described later are all of a type in which a voltage is applied to and driven by the individual electrode 32 according to image information. -7 is a type in which a DC voltage is applied to the common electrode 33 side and the individual electrode 32 side is grounded according to image information to form an electric field for driving. This method requires a simple switching circuit for image control, so the driver IC is simple and the cost is low.

In FIG. 13e-1, the bias voltage applied to the individual electrode 32 of the piezo protrusion 17a is constantly increased. Therefore, ink can be ejected at a low voltage and the driver cost can be reduced. 13f-1 and 13g.
-1 makes it possible to favorably run out of ink by adding an AC-like component to the pulse waveform corresponding to the image information for one time.

Particularly in the case of printing a large number of sheets, the conventional pulse causes the ink to run out so that the ink is scattered and the inconveniences such as stains and changes in the ink flying direction become conspicuous. Image noise can be prevented by using the waveform of FIG. 13g-1.
As a modification of the above-described embodiment, as shown in FIGS. 14 and 15, the piezoelectric member 17 and the non-piezoelectric member 18 are configured to fit without a gap in the vicinity of the front surface of the multi-nozzle head 13. A nozzle 31 may be formed by forming a small groove 31 '. Further, a small groove 31 may be formed in the convex portion 17a of the piezoelectric member to serve as a nozzle hole. In this case, the nozzle plate 19 shown in FIGS. 3 and 12 becomes unnecessary, which has the advantage of cost reduction.

Further, as shown in FIG. 16, the tip surface of the convex portion 17a of the piezoelectric member 17 and the bottom surface of the concave portion 18a of the non-piezoelectric member 18 may be formed as concave surfaces, in which case the generation of bubbles can be suppressed. Therefore, the ink flying efficiency is improved and the drive voltage can be lowered. As a second embodiment, as shown in FIG. 17, the convex portions 17a of the piezoelectric member 17 are formed in a laminated shape, and the individual electrodes 32 are formed on the upper surface and the common electrode 33 is formed on the lower surface.
May be provided.

In this case, since the portion acting as the piezoelectric body is only the upper region of the convex surface 17a, it is difficult for the vibration due to the applied voltage to propagate to the other ink chamber 29, and the crosstalk can be eliminated. The manufacturing process of this embodiment is as shown in FIGS. 18 to 20, on the insulating rigid plate X, the upper and lower electrodes 32,
The PZT thin layer plate X1 formed by the green sheet method is bonded to the non-piezoelectric member 18 with the PZT thin layer plate X1 and cut with a dicing saw, and the projection 1 is fitted to the recess 18a of the non-piezoelectric member 18.
7a is formed, and the individual electrode 32 is formed on the upper surface of the convex portion 17a.

Further, as a modified example of this embodiment, as shown in FIG. 21, for example, a coating solution in which PZT piezoelectric powder is dispersed in a solvent on an alumina plate X2 is applied by patterning by screen printing and then baked to form piezoelectric protrusions 17a. And forming the partition walls X4 by etching a thick film photoresist on the plate X3 by pattern exposure as the non-piezoelectric member 18 to form the ink chamber 29. In this case, cutting with a dicing saw is performed. Since it can be omitted, the cost can be reduced accordingly. In addition, as a third embodiment, as shown in FIG. 22, a convex portion 17a may be provided on the alumina plate X2 in which a PZT piezoelectric layer formed by a green sheet method and an electrode layer are laminated.

In this case, the amount of displacement due to the applied voltage can be increased in proportion to the number of stacked layers. 17 to 2
The common electrode 33 of the embodiment shown in FIG. 1 is provided on the lower surface of the individual electrode 32 in one-to-one correspondence in a comb shape and is shared in one place outside the area where the ink chamber 29 is formed. A voltage is applied only between the common electrode 32 and the common electrode 33, and the electric field does not wrap around to other parts, so that vibration can be effectively generated.

As a fourth embodiment, as shown in FIG. 23, the convex portion 17a of the piezoelectric member 17 may be trapezoidal as shown in the drawing. In this case, the non-piezoelectric member 18 can be easily fitted. Easy to assemble. Further, as a fifth embodiment, as shown in FIG. 24, PZT powder is molded by firing, and then silver palladium paste or palladium paste is applied by printing and baking to form the electrode 32 to form the piezoelectric member 17. Alternatively, the non-piezoelectric member 18 may be injection-molded with a resin (industrial plastic) material,
In this case, R can be easily formed at the corners of the recess 18a, the contact area with the valley of the piezoelectric member 17 is reduced, and it is possible to advantageously deal with the eccentric fitting of both members 17 and 18, while The action of R can suppress the generation of bubbles in the ink chamber 29.

Further, as a sixth embodiment, as shown in FIG. 25, the convex portion 17a of the piezoelectric member 17 and the concave portion 18a of the non-piezoelectric member 18 may be made to face each other in a zigzag manner as shown in the drawing. In this case, the partition wall strength of the non-piezoelectric member 18 can be made rigid while the amount of the ink chamber 29 can be increased, and the rod interval can be reduced. Further, as a seventh embodiment, as shown in FIG. 26, the convex portions 17a of the piezoelectric members 17 provided on the upper and lower sides are alternately opposed to each other, and the concave portion 18a fitted to the convex portions 17a is formed into a resin material. The non-piezoelectric member 18 may be sandwiched and the ink chambers 29 may be arranged side by side. In this case, the non-piezoelectric member 18 is made of resin, and the partition walls of the ink chamber 29 are convex to the piezoelectric member 17. Part 1
The ink chambers 29 adjacent to each other due to being out of the 7a area
Does not affect the displacement.

Further, as an embodiment for fixing the fitted state of the piezoelectric member 17 and the non-piezoelectric member 18, as shown in FIG. 27, the outer surfaces of the both members 17, 18 may be integrally molded with a resin molding M. Well, in this case, the fixing means can be rationalized and the cost can be reduced. Further, as shown in FIG. 28, a panel heater H made of a ceramic heater is provided on the lower surface of the multi-nozzle head 13 so that the surface tension and the viscosity of the ink are always kept constant without being affected by the temperature of the outside air. It is possible to obtain stable ink flight.

The shape of the nozzle hole 19a formed in the nozzle plate 19 used in each of the above embodiments may be selectively selected from the shapes shown in FIGS. . Further, as an example of means for fixing the fitting state of the piezoelectric member 17 and the non-piezoelectric member 18 without adhesion, the both members 17 and 18 having the concave and convex portions fitted on the base plate 15 as shown in FIG. The support 15a is mounted on the plate 15, and the support 15a is erected on the plate 15
An arm 15b is provided on the base plate 1 so as to be vertically movable so as to be vertically movable. One end of the arm 15b is brought into contact with the upper surface of the non-piezoelectric member 18 and the other surface of the base plate 1
5, the compression ammunition 15c is interposed between
The non-piezoelectric member 18 can be pressed against and fixed to the piezoelectric member 17 via the arm 15b by the extension biasing force of 5c.

In this case, the compatibility of the multi-nozzle head 13 can be simplified. In addition, the first shown in FIG.
In the embodiment, the adhesive 18b for fixing the piezoelectric member 17 and the non-piezoelectric member 18 to each other is the multi-nozzle head 13
May be provided only at both ends in the width direction of the ink. Even in such a case, the distance between the piezoelectric member 17 and the non-piezoelectric member 18 is sufficiently small so that the pressure in the ink chamber 29 does not decrease and the piezoelectric member 17 When the convex portion 17a vibrates, the strain of the portion other than the convex portion 17a is absorbed and slipped at this interval, and the ink can be ejected at high speed without crosstalk.

In the above embodiment, the non-piezoelectric member 18 is provided with the ink supply slit 35 and the ink is supplied to the ink chamber 29 through the hole 24 of the ink lid 20, but the ink is supplied to the ink chamber 29. Various configurations are well known in the art and, for example, a configuration in which ink is supplied from the side of the closing plate 21 by an ink supply tube can be arbitrarily selected.

[0043]

As described above, the present invention has a piezoelectric member having a plurality of convex portions and a plurality of concave portions into which the plurality of convex portions of the piezoelectric member are fitted, and A non-piezoelectric member formed so that an ink chamber is formed between the tip surface of each of the concave portions and the bottom surface of each concave portion, a nozzle hole communicating with the ink chamber, and the tip surface of each convex portion and the facing surface thereof. Since each provided electrode and the ink supply means for supplying ink to the ink chamber, an individual electrode provided on the tip surface of the convex portion,
Since the convex portion of the piezoelectric body is deformed in the thickness vibration mode by the common electrode provided on the opposite surface of the convex portion, the distance between both electrodes can be shortened and the voltage applied to the electrode can be lowered. Therefore, the cost of the driver unit for deforming the convex portion can be reduced, and the manufacturing cost can be significantly reduced.
Further, since it is not necessary to process the piezoelectric member into a complicated cross-sectional shape, it has an excellent effect that the manufacturing cost can be reduced and the ink can be ejected with less crosstalk.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing an embodiment of an inkjet recording apparatus of the present invention.

FIG. 2 is a plan view of a multi-nozzle head.

FIG. 3 is a perspective view showing a first embodiment.

FIG. 4 is a sectional view in the width direction of a main part of the first embodiment.

FIG. 5 is a sectional view in the depth direction of the main part of the first embodiment.

FIG. 6 is a perspective view illustrating a manufacturing process of the first embodiment.

FIG. 7 is a perspective view illustrating the manufacturing process of the first embodiment.

FIG. 8 is a perspective view illustrating the manufacturing process of the first embodiment.

FIG. 9 is a perspective view illustrating the manufacturing process of the first embodiment.

FIG. 10 is a perspective view illustrating the manufacturing process of the first embodiment.

FIG. 11 is a perspective view illustrating the manufacturing process of the first embodiment.

FIG. 12 is a perspective view illustrating the manufacturing process of the first embodiment.

FIG. 13 is a diagram illustrating a relationship between a pulse waveform of an applied voltage and a displacement state of a piezoelectric body.

FIG. 14 is a widthwise partial front view showing a modification of the first embodiment.

15 is a partial cross-sectional view in the depth direction of FIG.

FIG. 16 is a widthwise partial sectional view showing a modification of the first embodiment.

FIG. 17 is a widthwise partial cross-sectional view of a second embodiment.

FIG. 18 is a perspective view illustrating the manufacturing process of the second embodiment.

FIG. 19 is a perspective view illustrating the manufacturing process of the second embodiment.

FIG. 20 is a perspective view illustrating the manufacturing process of the second embodiment.

FIG. 21 is a widthwise partial sectional view showing a modification of the second embodiment.

FIG. 22 is a widthwise partial cross-sectional view showing a third embodiment.

FIG. 23 is a widthwise partial cross-sectional view showing a fourth embodiment.

FIG. 24 is a partial cross-sectional view in the width direction showing a fifth embodiment.

FIG. 25 is a partial cross sectional view in the width direction showing a sixth embodiment.

FIG. 26 is a partial cross sectional view in the width direction showing a seventh embodiment.

FIG. 27 is a perspective view showing a modified example of the first embodiment.

FIG. 28 is a perspective view showing a modified example of the first embodiment.

FIG. 29 is a diagram showing a shape of a nozzle hole.

FIG. 30 is a schematic view showing a fixing means of the embodiment.

FIG. 31 is a widthwise partial sectional view showing a conventional example.

[Explanation of symbols]

 17 ... Piezoelectric member 17a ... Convex portion 18 ... Non-piezoelectric member 18a ... Recessed portion 19a ... Nozzle hole 29 ... Ink chamber 32 ... Individual electrode 33 ... Common electrode

Claims (4)

[Claims] 1. A piezoelectric member having a plurality of protrusions, at least a part of which is a piezoelectric body, and a plurality of recesses fitted to the respective protrusions of the piezoelectric member, A non-piezoelectric member made of a non-piezoelectric material in which an ink chamber is formed between the tip surface of each convex portion and the bottom surface of each concave portion, and image information is transmitted to the piezoelectric member so that ink in the ink chamber is ejected from the nozzle holes. Ink jet recording, characterized by comprising an electric field applying means for applying a corresponding electric field and an ink supplying means communicating with the ink chamber, wherein ink in the ink chamber is ejected from a nozzle hole by displacement of a piezoelectric body. apparatus. 2. The ink jet recording apparatus according to claim 1, wherein an individual electrode is provided on a tip surface of each of the convex portions, and a common electrode is provided on one surface of the piezoelectric member facing the individual electrode. 3. The polarization direction of the piezoelectric body and the electric field direction applied to displace the piezoelectric body are parallel to each other, and this direction and the ink ejection direction intersect with each other. Item 2. The inkjet recording device according to item 1. 4. The ink jet recording apparatus according to claim 1, wherein the plurality of convex portions of the piezoelectric member and the plurality of concave portions of the non-piezoelectric member are movably fitted to each other.