JPH06316440A - Solution composition for forming thin transparent zinc oxide film - Google Patents

Solution composition for forming thin transparent zinc oxide film

Info

Publication number
JPH06316440A
JPH06316440A JP40701690A JP40701690A JPH06316440A JP H06316440 A JPH06316440 A JP H06316440A JP 40701690 A JP40701690 A JP 40701690A JP 40701690 A JP40701690 A JP 40701690A JP H06316440 A JPH06316440 A JP H06316440A
Authority
JP
Japan
Prior art keywords
zinc
solution composition
zinc oxide
oxide film
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP40701690A
Other languages
Japanese (ja)
Other versions
JPH07115888B2 (en
Inventor
Gohe Yoshida
吉田五兵衛
Masao Kobayashi
小林正夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HONJIYOU CHEM KK
HONSHU CHEM KK
Original Assignee
HONJIYOU CHEM KK
HONSHU CHEM KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HONJIYOU CHEM KK, HONSHU CHEM KK filed Critical HONJIYOU CHEM KK
Priority to JP2407016A priority Critical patent/JPH07115888B2/en
Publication of JPH06316440A publication Critical patent/JPH06316440A/en
Publication of JPH07115888B2 publication Critical patent/JPH07115888B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Surface Treatment Of Glass (AREA)

Abstract

PURPOSE:To provide a soln. compsn. for forming a thin transparent zinc oxide film on a substrate of glass, ceramics, etc. CONSTITUTION:At least one kind of zinc compd. selected among zinc salts of 3-7C fatty acids such as n-zinc valerate and n-zinc caproate and zinc chelate compds. of 5-8C diketones such as acetylacetonatozinc is dissolved in an org. solvent to obtain the objective soln. compsn.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ガラスやセラミツクス
等からなる基盤上に透光性酸化亜鉛薄膜を形成するため
の溶液組成物に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solution composition for forming a light-transmitting zinc oxide thin film on a substrate made of glass, ceramics or the like.

【0002】[0002]

【従来の技術】透光性酸化亜鉛薄膜は、極めて鋭敏な紫
外線遮断機能を有しているので、近年のエコロジーやバ
イオロジーの分野の技術の発展に伴つて、生物学的な見
地から照明、温室、微生物関係のガラスの表面処理等に
おいて注目されている。従来、酸化亜鉛薄膜を形成する
方法としては、予め加熱した基盤に酢酸亜鉛の水溶液を
噴霧するスプレー法(J. Material Science, 22 (1987)
1379-1384)、真空中、直接に基盤上に成膜するスパツタ
法(Jpn. J. Appl. Phys., 24, L781(1985))、亜鉛化
合物を含む有機溶媒を塗布した後、焼成する塗付法 (J.
Mate-rials Science Letters, 9 (1990) 127-129)等が
知られている。
2. Description of the Related Art Since a translucent zinc oxide thin film has an extremely sensitive ultraviolet ray blocking function, with the recent development of the technology in the fields of ecology and biology, lighting from a biological point of view, Attention has been paid to the surface treatment of glass for greenhouses and microorganisms. Conventionally, as a method of forming a zinc oxide thin film, a spray method of spraying an aqueous solution of zinc acetate on a preheated substrate (J. Material Science, 22 (1987)
1379-1384), a sputtering method in which a film is directly formed on a substrate in a vacuum (Jpn. J. Appl. Phys., 24, L781 (1985)), and an organic solvent containing a zinc compound is applied, followed by baking. Appendix (J.
Mate-rials Science Letters, 9 (1990) 127-129) and the like are known.

【0003】これらのうち、第1の方法は、高温に加熱
した基盤に高温下で酢酸亜鉛の水溶液をスプレーで吹き
付けるために、均一な薄膜を得るためには、自ら基盤の
形状に制約を受ける。第2の方法は、真空下での処理を
必要とするので、適用し得る基盤の大きさに制限がある
と共に、装置が高価であり、しかも、量産性に劣る。第
3の方法は、費用が低廉で、量産性に富む方法といえ
る。しかし、この方法において用いられる2−エチルヘ
キサン酸亜鉛のブタノール溶液は、市販されている周知
の金属石ケンの一つであるが、ガラス基盤等に塗布後、
乾燥器等で溶媒を揮散させるときに、溶液の濃度とは関
係なく、その化合物自体のもつ表面張力で収縮するの
で、均一な薄膜を得るのが極めて困難である。
Of these methods, the first method sprays an aqueous solution of zinc acetate at a high temperature onto a substrate heated to a high temperature, and therefore, in order to obtain a uniform thin film, the shape of the substrate is restricted. . The second method requires a treatment under vacuum, so that the size of the applicable substrate is limited, the apparatus is expensive, and the mass productivity is poor. It can be said that the third method is inexpensive and has high mass productivity. However, the butanol solution of zinc 2-ethylhexanoate used in this method is one of the well-known metal soaps that are commercially available.
When the solvent is volatilized with a dryer or the like, the compound contracts due to the surface tension of the compound itself, regardless of the concentration of the solution, so it is extremely difficult to obtain a uniform thin film.

【0004】[0004]

【発明が解決しようとする課題】本発明は、従来の透光
性酸化亜鉛薄膜を得るための方法における上記した問題
を解決するためになされたものであつて、上記第3の方
法である基布法の改良にかかり、透光性酸化亜鉛の均一
な薄膜を基盤上に容易に且つ低廉に形成することができ
る溶液組成物を提供することを目的とする。
The present invention has been made to solve the above-mentioned problems in the conventional method for obtaining a translucent zinc oxide thin film, and is the third method. It is an object of the present invention to provide a solution composition which can be easily and inexpensively formed on a substrate by forming a uniform thin film of translucent zinc oxide by improving the cloth method.

【0005】[0005]

【課題を解決するための手段】本発明による透光性酸化
亜鉛薄膜を形成するための溶液組成物は、炭素数3〜7
の脂肪酸の亜鉛塩又は炭素数5〜8のジケトンの亜鉛キ
レート化合物よりなる群から選ばれる少なくとも1種の
亜鉛化合物を有機溶剤に溶解してなることを特徴とす
る。
A solution composition for forming a translucent zinc oxide thin film according to the present invention has 3 to 7 carbon atoms.
And at least one zinc compound selected from the group consisting of a zinc salt of a fatty acid or a zinc chelate compound of a diketone having 5 to 8 carbon atoms is dissolved in an organic solvent.

【0006】本発明による溶液組成物においては、亜鉛
化合物として、炭素数3〜7の脂肪酸の亜鉛塩又は炭素
数5〜8のジケトンの亜鉛キレート化合物が用いられ
る。炭素数3〜7の脂肪酸の亜鉛塩としては、例えば、
n−吉草酸亜鉛やn−カプロン酸亜鉛を好ましい例とし
て挙げることができ、また、炭素数5〜8のジケトンの
亜鉛キレート化合物としては、例えば、亜鉛アセチルア
セトネートを好ましい例として挙げることができる。こ
れら亜鉛化合物は、単独で、又は混合物として用いるこ
とができる。
In the solution composition of the present invention, a zinc salt of a fatty acid having 3 to 7 carbon atoms or a zinc chelate compound of a diketone having 5 to 8 carbon atoms is used as the zinc compound. Examples of the zinc salt of a fatty acid having 3 to 7 carbon atoms include, for example,
Preferred examples include n-zinc valerate and n-caproate, and examples of the zinc chelate compound of a diketone having 5 to 8 carbon atoms include zinc acetylacetonate. . These zinc compounds can be used alone or as a mixture.

【0007】本発明による溶液組成物は、上記亜鉛化合
物を濃度1重量%以上にて溶解含有していることが好ま
しく、特に、5重量%以上にて解含有していることが好
ましい。このような溶液組成物を得るための有機溶媒と
しては、上記亜鉛化合物を好ましくは濃度1重量%以上
の濃度にて溶解する能力があり、且つ、ガラスやセラミ
ツクス等からなる基盤への付着性があればよく、例え
ば、n−ブタノール、ジメチルホルムアミド、アセチル
アセトン、エチルセルソルブ等のような比較的沸点の高
いアルコール、エステル、ケトン等が好ましく用いられ
る。
The solution composition according to the present invention preferably contains the above zinc compound in a concentration of 1% by weight or more, and particularly preferably contains 5% by weight or more of the zinc compound. As an organic solvent for obtaining such a solution composition, it is possible to dissolve the above zinc compound at a concentration of preferably 1% by weight or more, and the adhesiveness to a substrate made of glass, ceramics or the like. It suffices that it be present, and for example, alcohols, esters, ketones and the like having relatively high boiling points such as n-butanol, dimethylformamide, acetylacetone, ethyl cellosolve and the like are preferably used.

【0008】本発明によれば、このような溶液組成物を
基盤上に塗布し、焼成すれば、均一な透光性酸化亜鉛薄
膜を得ることができる。焼成温度は、通常、300〜6
00℃の範囲が好適であるが、特に、これに限定される
ものではない。
According to the present invention, a uniform translucent zinc oxide thin film can be obtained by applying such a solution composition on a substrate and baking it. The firing temperature is usually 300 to 6
The range of 00 ° C. is preferable, but the range is not particularly limited thereto.

【0009】[0009]

【実施例】以下に実施例を挙げて本発明を説明するが、
本発明はこれら実施例により何ら限定されるものではな
い。 実施例1 n−吉草酸亜鉛10重量%及びアセチルアセトン90重
量%からなる溶液を調製し、これをガラス基盤に塗付し
た後、室温で30分、更に、110℃で30分乾燥し、
次いで、550℃で30分焼成して、透明な酸化亜鉛薄
膜を得た。この薄膜の透過率を図1に示すように、すぐ
れた紫外線遮断効果を有する。 実施例2 n−カプロン酸亜鉛5重量%及びn−ブタノール95重
量%からなる溶液を調製し、これをガラス基盤に塗付し
た後、室温で30分、更に、110℃で30分乾燥し、
次いで、550℃で30分焼成して、実施例1と同様
に、すぐれた紫外線遮断効果を有する透明な酸化亜鉛薄
膜を得た。 実施例3 亜鉛アセチルアセトネート5重量%、アセチルアセトン
47.5重量%及び酢酸エチル47.5重量%からなる溶液
を調製し、これをガラス基盤に塗付した後、室温で30
分、更に、110℃で30分乾燥し、次いで、550℃
で30分焼成して、実施例1と同様に、すぐれた紫外線
遮断効果を有する透明な酸化亜鉛薄膜を得た。
The present invention will be described below with reference to examples.
The present invention is not limited to these examples. Example 1 A solution consisting of 10% by weight of n-zinc valerate and 90% by weight of acetylacetone was prepared and applied on a glass substrate, and then dried at room temperature for 30 minutes and further at 110 ° C. for 30 minutes,
Then, it was baked at 550 ° C. for 30 minutes to obtain a transparent zinc oxide thin film. As shown in FIG. 1, the transmittance of this thin film has an excellent ultraviolet blocking effect. Example 2 A solution consisting of 5% by weight of n-zinc caproate and 95% by weight of n-butanol was prepared, applied on a glass substrate, and then dried at room temperature for 30 minutes and further at 110 ° C. for 30 minutes,
Then, it was baked at 550 ° C. for 30 minutes to obtain a transparent zinc oxide thin film having an excellent ultraviolet blocking effect as in Example 1. Example 3 A solution consisting of 5% by weight of zinc acetylacetonate, 47.5% by weight of acetylacetone and 47.5% by weight of ethyl acetate was prepared, and applied on a glass substrate, then at room temperature for 30 minutes.
Min, then dry at 110 ° C for 30 minutes, then 550 ° C
After baking for 30 minutes in the same manner as in Example 1, a transparent zinc oxide thin film having an excellent ultraviolet blocking effect was obtained.

【0010】[0010]

【発明の効果】以上のように、本発明による組成物は、
亜鉛化合物として炭素数3〜7の脂肪酸の亜鉛塩又は炭
素数5〜8のジケトンの亜鉛キレート化合物を含み、こ
れらは、その溶液をガラス基盤等に塗布した後、加熱し
て、溶媒を揮散させるときに、その化合物自体のもつ表
面張力で収縮することがないので、均一で焼成遮断性に
すぐれる透光性酸化亜鉛薄膜を得ることができる。
As described above, the composition according to the present invention is
As the zinc compound, a zinc salt of a fatty acid having 3 to 7 carbon atoms or a zinc chelate compound of a diketone having 5 to 8 carbon atoms is contained, and these are heated to vaporize the solvent after applying the solution to a glass substrate or the like. At that time, since the compound itself does not contract due to the surface tension, it is possible to obtain a translucent zinc oxide thin film which is uniform and has excellent firing barrier properties.

【図面の簡単な説明】[Brief description of drawings]

【図1】は、本発明による透光性酸化亜鉛薄膜の透過率
を示すグラフである。
FIG. 1 is a graph showing the transmittance of a translucent zinc oxide thin film according to the present invention.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】炭素数3〜7の脂肪酸の亜鉛塩又は炭素数
5〜8のジケトンの亜鉛キレート化合物よりなる群から
選ばれる少なくとも1種の亜鉛化合物を有機溶剤に溶解
してなることを特徴とする透光性酸化亜鉛薄膜を形成す
るための溶液組成物。
1. A method comprising dissolving at least one zinc compound selected from the group consisting of a zinc salt of a fatty acid having 3 to 7 carbon atoms or a zinc chelate compound of a diketone having 5 to 8 carbon atoms in an organic solvent. A solution composition for forming a translucent zinc oxide thin film.
【請求項2】亜鉛塩がn−吉草酸亜鉛であることを特徴
とする請求項1記載の溶液組成物。
2. The solution composition according to claim 1, wherein the zinc salt is zinc n-valerate.
【請求項3】亜鉛塩がn−カプロン酸亜鉛であることを
特徴とする請求項1記載の溶液組成物。
3. The solution composition according to claim 1, wherein the zinc salt is zinc n-caproate.
【請求項4】亜鉛キレート化合物が亜鉛アセチルアセト
ネートであることを特徴とする請求項1記載の溶液組成
物。
4. The solution composition according to claim 1, wherein the zinc chelate compound is zinc acetylacetonate.
【請求項5】亜鉛化合物の濃度が1重量%以上であるこ
とを特徴とする請求項1記載の溶液組成物。
5. The solution composition according to claim 1, wherein the concentration of the zinc compound is 1% by weight or more.
JP2407016A 1990-12-26 1990-12-26 Solution composition for forming translucent zinc oxide thin film Expired - Lifetime JPH07115888B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2407016A JPH07115888B2 (en) 1990-12-26 1990-12-26 Solution composition for forming translucent zinc oxide thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2407016A JPH07115888B2 (en) 1990-12-26 1990-12-26 Solution composition for forming translucent zinc oxide thin film

Publications (2)

Publication Number Publication Date
JPH06316440A true JPH06316440A (en) 1994-11-15
JPH07115888B2 JPH07115888B2 (en) 1995-12-13

Family

ID=18516640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2407016A Expired - Lifetime JPH07115888B2 (en) 1990-12-26 1990-12-26 Solution composition for forming translucent zinc oxide thin film

Country Status (1)

Country Link
JP (1) JPH07115888B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004256377A (en) * 2003-02-27 2004-09-16 Nippon Shokubai Co Ltd Method of manufacturing metal oxide film
WO2005121401A1 (en) * 2004-06-14 2005-12-22 Adeka Corporation Thin film-forming material and method for producing thin film
JP2020172479A (en) * 2019-04-15 2020-10-22 日油株式会社 Carboxylic acid zinc salt composition and carboxylic acid zinc solution containing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0248403A (en) * 1988-08-10 1990-02-19 Catalysts & Chem Ind Co Ltd Coating liquid for forming transparent ceramic coating film, substrate having transparent ceramic coating film and production thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0248403A (en) * 1988-08-10 1990-02-19 Catalysts & Chem Ind Co Ltd Coating liquid for forming transparent ceramic coating film, substrate having transparent ceramic coating film and production thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004256377A (en) * 2003-02-27 2004-09-16 Nippon Shokubai Co Ltd Method of manufacturing metal oxide film
WO2005121401A1 (en) * 2004-06-14 2005-12-22 Adeka Corporation Thin film-forming material and method for producing thin film
US7335783B2 (en) 2004-06-14 2008-02-26 Adeka Corporation Thin film-forming material and method for producing thin film
JP2020172479A (en) * 2019-04-15 2020-10-22 日油株式会社 Carboxylic acid zinc salt composition and carboxylic acid zinc solution containing the same

Also Published As

Publication number Publication date
JPH07115888B2 (en) 1995-12-13

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