JPH0631577A - Tool slide device - Google Patents

Tool slide device

Info

Publication number
JPH0631577A
JPH0631577A JP4215687A JP21568792A JPH0631577A JP H0631577 A JPH0631577 A JP H0631577A JP 4215687 A JP4215687 A JP 4215687A JP 21568792 A JP21568792 A JP 21568792A JP H0631577 A JPH0631577 A JP H0631577A
Authority
JP
Japan
Prior art keywords
tool
ram
sensor target
linear motor
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4215687A
Other languages
Japanese (ja)
Inventor
Toshihiro Takahashi
俊博 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyoda Koki KK
Original Assignee
Toyoda Koki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Koki KK filed Critical Toyoda Koki KK
Priority to JP4215687A priority Critical patent/JPH0631577A/en
Publication of JPH0631577A publication Critical patent/JPH0631577A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/28Electric drives
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/09Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
    • B23Q17/0952Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining
    • B23Q17/0966Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining by measuring a force on parts of the machine other than a motor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Sensing Apparatuses (AREA)

Abstract

PURPOSE:To prevent the contact of a sensor target with a displacement sensor and the strain deformation of a diaphragm by suppressing the large inclination of the sensor target for detecting the position of a tool when a large load is applied on the cutting edge of a tool, as for a tool feeding device consisting of a voice coil type linear motor and a piezoelectric actuator. CONSTITUTION:A tool 20 is held through a diaphragm 18 at the top edge of a ram 16 which is advance/retreat-driven in the axis line direction by a linear motor, and a piezoelectric actuator 30 which advances and retreats the tool 20 is built in at the top edge part of the ram 16, and a sensor target 22a is installed integrally with the diaphragm 18, and two displacement sensors 22a and 23b for detecting the inclination quantity of the sensor target 22a are arranged at two positions nipping the center point on the too edge surface of the ram 16. The difference of the output signals of two displacement sensors is compared by an upper limit comparator 42 or a lower limit comparator 43, and when the difference exceeds a set value, the linear motor 10 is stopped.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、工作物を非真円形状に
創成する工作機械の工具送り装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tool feeding device for a machine tool for creating a work in a non-round shape.

【0002】[0002]

【従来の技術】工作物を非真円形状に創成する工作機械
の工具送り装置として、軸線方向に進退移動する進退駆
動部材を備えたボイスコイル型リニヤモータ(VCM)
と、前記進退駆動部材と同一軸心線で結合されたラム
と、このラムの先端にダイヤフラムを介して保持された
工具と、前記ラムの先端部に内蔵され前記工具をダイヤ
フラムを介して進退移動する圧電アクチュエータ(PZ
T)と、前記工具と同心で前記ダイヤフラムと一体的に
設けられたセンサターゲットと、前記ラムの先端面に前
記センサターゲットと対面し、かつセンサターゲットの
中心点を挟んだ2位置に配置され前記センサターゲット
の工具進退方向位置を検出する2つの変位センサとから
構成された工具送り装置が知られている。
2. Description of the Related Art A voice coil type linear motor (VCM) having an advancing / retreating drive member for advancing / retreating in an axial direction is used as a tool feeding device of a machine tool for creating a workpiece in a non-round shape.
A ram connected to the advancing / retreating drive member by the same axis, a tool held at the tip of the ram via a diaphragm, and a tool built in at the tip of the ram to move the tool forward / backward through the diaphragm. Piezoelectric actuator (PZ
T), a sensor target which is concentric with the tool and is provided integrally with the diaphragm, and is arranged at two positions facing the sensor target on the tip end surface of the ram and sandwiching the center point of the sensor target. A tool feeding device including two displacement sensors that detect the tool advancing / retreating position of a sensor target is known.

【0003】上記の工具送り装置は、非真円プロフィル
データと変異センサからの工具進退方向位置とに基づい
て、前記リニヤモータ並びに圧電アクチュエータに入力
される信号に応じてラムと工具をそれぞれ進退移動し、
この両者の作動が合成されて非真円プロフィルデータに
即して工具の半径方向の刃具先端位置を制御し、非真円
形状を創成するものである。
The above-mentioned tool feeding device moves the ram and the tool forward and backward respectively according to the signals input to the linear motor and the piezoelectric actuator based on the non-roundness profile data and the position of the tool forward and backward from the displacement sensor. ,
The operations of these two are combined to control the tip position of the tool in the radial direction of the tool in accordance with the non-roundness profile data to create a non-roundness shape.

【0004】[0004]

【発明が解決しようとする課題】上記の工具送り装置で
は、工作物への工具の切り込みが深すぎたり、工作物の
回転が振れ回った状態で切削を行うと、切削抵抗により
工具の刃先に大きな負荷がかかり、センサターゲットが
大きく傾き、センサターゲットが変位センサに当る恐れ
があり、また、ダイヤフラムが歪んでしまう恐れがあ
る。
SUMMARY OF THE INVENTION In the above tool feeding device, when cutting is performed in a state where the depth of the tool is cut into the workpiece or the rotation of the workpiece swings, the cutting edge causes the cutting edge of the tool to move. A large load may be applied, the sensor target may be greatly tilted, the sensor target may hit the displacement sensor, and the diaphragm may be distorted.

【0005】本発明の目的は、センサターゲットの傾き
がある角度を超えたときに、工具に大きな負荷がかかっ
たと判定してリニヤモータの駆動を停止し、上記従来の
問題を解消した工具送り装置を提供することである。
An object of the present invention is to provide a tool feeding device which solves the above-mentioned conventional problems by determining that a large load is applied to a tool when the inclination of the sensor target exceeds a certain angle and stopping the drive of the linear motor. Is to provide.

【0006】[0006]

【課題を解決するための手段】上記の目的を達成する本
発明の特徴とする構成は、リニヤモータによって軸線方
向に進退駆動するラムと、このラムの先端にダイヤフラ
ムを介して保持された工具と、前記ラムの先端部に内蔵
され前記工具を進退移動する圧電アクチュエータと、前
記工具と同心で前記ダイヤフラムと一体的に設けられた
センサターゲットと、前記ラムの先端面に前記センサタ
ーゲットと対面し、かつセンサターゲットの中心点を挟
んだ2位置に配置され前記センサターゲットの傾き量を
検出する2つの変位センサと、この2つの変位センサの
出力信号の差を予め設定した上限設定値又は下限設定値
と比較する上限比較器又は下限比較器と、この上限比較
器又は下限比較器で比較した2つの変位センサの出力信
号の差が上限又は下限設定値を超えたときに前記リニヤ
モータ又は前記圧電アクチュエータを駆動停止する数値
制御装置とを備えたものである。
SUMMARY OF THE INVENTION A feature of the present invention that achieves the above object is to provide a ram that is axially moved forward and backward by a linear motor, and a tool that is held at the tip of the ram via a diaphragm. A piezoelectric actuator built in the tip of the ram for moving the tool forward and backward, a sensor target concentric with the tool and integrally provided with the diaphragm, a tip surface of the ram facing the sensor target, and Two displacement sensors arranged at two positions sandwiching the center point of the sensor target to detect the amount of inclination of the sensor target, and an upper limit setting value or a lower limit setting value in which the difference between the output signals of the two displacement sensors is preset. The difference between the output signals of the upper limit comparator or the lower limit comparator to be compared with the output signals of the two displacement sensors compared by the upper limit comparator or the lower limit comparator is the upper limit or the lower limit comparator. In which the linear motor or the piezoelectric actuator and a numerical control device for driving stop when it exceeds the limit set value.

【0007】[0007]

【作用】上記の構成により、圧電アクチュエータのフィ
ードバック用の2つの変位センサの出力信号の差を求
め、この差が予め設定した上限又は下限設定値を超えた
ときに数値制御装置の指令によってリニヤモータを駆動
停止制御し、リニヤモータをフリーにして切削抵抗によ
り工具が工作物から逃げるようにし、センサターゲット
の大きな傾き動作を抑止する。
With the above construction, the difference between the output signals of the two displacement sensors for feedback of the piezoelectric actuator is obtained, and when the difference exceeds the preset upper or lower limit set value, the linear motor is operated by the command of the numerical controller. Drive stop control is performed to free the linear motor so that the cutting resistance causes the tool to escape from the workpiece, and a large tilting motion of the sensor target is suppressed.

【0008】[0008]

【実施例】以下本発明の実施例を図面に基づいて説明す
る。図1において、10はボイスコイル型のリニヤモー
タ(VCM)である。このリニヤモータ10はモータハ
ウジング内にセンタポール11と、このセンタポール1
1の外周面に軸線方向に進退移動可能に遊嵌された進退
駆動部材13と、磁石12とを備えている。前記進退駆
動部材13は、その外周面にコイル14を備えたコイル
アッシイであり、前記磁石12は前記コイル14と対向
するようモータハウジング内に固設されている。
Embodiments of the present invention will be described below with reference to the drawings. In FIG. 1, 10 is a voice coil type linear motor (VCM). The linear motor 10 includes a center pole 11 in a motor housing and a center pole 1
A magnet 12 is provided with an advancing / retreating drive member 13 that is loosely fitted to the outer peripheral surface of No. 1 so as to be advancing / retreating in the axial direction. The advancing / retreating drive member 13 is a coil assembly having a coil 14 on the outer peripheral surface thereof, and the magnet 12 is fixedly installed in the motor housing so as to face the coil 14.

【0009】15はガイド本体であり、前記リニヤモー
タ10の前方に設置されている。このガイド本体15に
は角軸のラム16が静圧軸受17によって前記リニヤモ
ータ10の進退駆動部材13と同一軸心線上で進退軸動
可能に案内され、かつその後端は前記リニヤモータ10
の進退駆動部材13と結合されている。
Reference numeral 15 is a guide body, which is installed in front of the linear motor 10. A ram 16 having an angular axis is guided to the guide body 15 by a hydrostatic bearing 17 so as to be movable back and forth on the same axis as the forward / backward drive member 13 of the linear motor 10, and the rear end thereof is the linear motor 10.
Is connected to the advancing / retreating drive member 13.

【0010】前記ラム16の先端には図2でも示すよう
に、ダイヤフラム18がスペーサ21を介して固設さ
れ、このダイヤフラム18にはバイトホルダ19を介し
てバイト20(工具)が保持されている。
As shown in FIG. 2, a diaphragm 18 is fixedly mounted on the tip of the ram 16 via a spacer 21, and a tool 20 is held on the diaphragm 18 via a tool holder 19. .

【0011】さらに、前記ラム16の先端部には圧電ア
クチュエータ30(PZT)が内蔵されている。この圧
電アクチュエータ30と前記ダイヤフラム18との間に
は、圧電アクチュエータ30によって前記バイト20を
ダイヤフラム18を介して進退駆動する作動部材22が
介装されている。
Further, a piezoelectric actuator 30 (PZT) is built in the tip of the ram 16. Between the piezoelectric actuator 30 and the diaphragm 18, an actuating member 22 for driving the cutting tool 20 to move forward and backward through the diaphragm 18 by the piezoelectric actuator 30 is interposed.

【0012】この作動部材22にはフランジ状のセンサ
ターゲット22aが形成されており、作動部材22は前
記センサターゲット22aを介して前記ダイヤフラム1
8に一体的に取り付けられ、ダイヤフラム18の付勢力
によって常に圧電アクチュエータ30に当接している。
作動部材22を圧電アクチュエータ30に押し付ける力
は前記スペーサ21を変えることによって自由に変えら
れる。
A flange-shaped sensor target 22a is formed on the operating member 22, and the operating member 22 is connected to the diaphragm 1 via the sensor target 22a.
8 is integrally attached to the piezoelectric actuator 30 and is always in contact with the piezoelectric actuator 30 by the urging force of the diaphragm 18.
The force pressing the actuating member 22 against the piezoelectric actuator 30 can be freely changed by changing the spacer 21.

【0013】前記したラム16、圧電アクチュエータ3
0及びバイト20は全て進退駆動部材13と同一軸心線
0上に配置されている。
The ram 16 and the piezoelectric actuator 3 described above
0 and the cutting tool 20 are all arranged on the same axis 0 as the advancing / retreating drive member 13.

【0014】また、前記ラム16の先端面には前記セン
サターゲット22aの中心点、すなわち、ラム16の軸
心線0を挾んだ等分の2位置に2つの変位センサ23
a、2b(ギャップセンサ)が設けられ、前記作動部材
22に形成されているセンサターゲット22aの面と対
面している。
On the tip surface of the ram 16, two displacement sensors 23 are arranged at the center point of the sensor target 22a, that is, in two equal positions across the axis 0 of the ram 16.
a and 2b (gap sensors) are provided and face the surface of the sensor target 22a formed on the actuating member 22.

【0015】24はラム16の進退軸動量センサであ
り、ラム16側にゲージ25が固設され、ガイド本体1
5側にゲージ25の読み取りヘッド26が固定されてい
る。
Reference numeral 24 denotes a forward / backward movement amount sensor of the ram 16, which has a gauge 25 fixedly mounted on the ram 16 side.
The reading head 26 of the gauge 25 is fixed to the 5 side.

【0016】前記リニヤモータ10は、電源47とリレ
ー回路48及びVCM駆動回路49を介して接続されて
いる。また、前記VCM駆動回路49は、前記ラム16
の進退移動量センサ24と偏差回路50を介して接続さ
れている。
The linear motor 10 is connected to a power source 47 via a relay circuit 48 and a VCM drive circuit 49. Further, the VCM drive circuit 49 is configured to operate the ram 16
The forward / backward movement amount sensor 24 is connected via the deviation circuit 50.

【0017】40は数値制御装置である。この数値制御
装置40は、前記リレー回路48と偏差回路50に接続
しており、また、工作物Wを回転する主軸52に接続し
ている主軸駆動回路51にも接続され、リニヤモータ1
0並びに主軸52の作動を制御する。
Reference numeral 40 is a numerical controller. The numerical control device 40 is connected to the relay circuit 48 and the deviation circuit 50, and is also connected to a spindle drive circuit 51 connected to a spindle 52 that rotates a workpiece W.
0 and the operation of the spindle 52 are controlled.

【0018】また、前記数値制御装置40は前記圧電ア
クチュエータ30と偏差回路45及びPZT駆動回路4
6を介して接続され、圧電アクチュエータ30の作動を
制御する。
The numerical controller 40 includes the piezoelectric actuator 30, the deviation circuit 45, and the PZT drive circuit 4.
6 and controls the operation of the piezoelectric actuator 30.

【0019】前記圧電アクチュエータ30の制御系路の
偏差回路45には、前記2つの変位センサ23a、23
bのそれぞれの信号a、bを平均化してバイト20の実
際の進退方向位置cを求める第1演算回路53が接続さ
れている。
In the deviation circuit 45 of the control system path of the piezoelectric actuator 30, the two displacement sensors 23a and 23a are provided.
A first arithmetic circuit 53 for averaging the respective signals a and b of b to obtain the actual forward / backward position c of the bite 20 is connected.

【0020】さらに、前記2つの変位センサ23a、2
3bのそれぞれの信号a、bの差によりセンサターゲッ
ト22aの傾き量dを求める第2演算回路54を備え、
この第2演算回路54は前記センサターゲット22aの
傾き量dを上限設定値41と比較する上限比較器42
と、下限設定値44と比較する下限比較器43を介して
前記数値制御装置40に接続されている。
Further, the two displacement sensors 23a, 2
And a second arithmetic circuit 54 for obtaining the inclination amount d of the sensor target 22a from the difference between the respective signals a and b of 3b.
The second arithmetic circuit 54 includes an upper limit comparator 42 that compares the inclination amount d of the sensor target 22a with an upper limit set value 41.
And a lower limit comparator 43 which compares the lower limit set value 44 with the numerical control device 40.

【0021】本発明は上記の通りの構造であるから、数
値制御装置40における圧電アクチュエータ30の指令
値用メモリに記憶した高周波成分からなる非真円プロフ
ィルデータに基づいて、実際に圧電アクチュエータ30
を作動させ、またリニヤモータ10の指令値用メモリに
記憶した低周波成分からなる非真円プロフィルデータに
基づいて、実際にリニヤモータ10を作動させる試し切
削動作を行い、このときに得られる応答値が目標値と同
じになるように指令値を作成し、この指令値を前記指令
値用メモリに記憶させる。
Since the present invention has the above-described structure, the piezoelectric actuator 30 is actually used based on the non-roundness profile data composed of the high frequency components stored in the command value memory of the piezoelectric actuator 30 in the numerical controller 40.
Is performed, and a trial cutting operation for actually operating the linear motor 10 is performed based on the non-roundness profile data composed of low-frequency components stored in the command value memory of the linear motor 10, and the response value obtained at this time is A command value is created so as to be the same as the target value, and this command value is stored in the command value memory.

【0022】そして、工作物Wを回転する主軸52の回
転に基づいて出力される同期信号により、指令値用メモ
リに記憶される高周波でストロークの小さなデータに基
づく指令値を出力し、圧電アクチュエータ30の変位セ
ンサ23a、23bからフィードバックされるバイト2
0の進退方向位置cの信号との偏差である位置偏差信号
を出力し圧電アクチュエータ30を制御する。
Then, the synchronizing signal output based on the rotation of the spindle 52 that rotates the workpiece W outputs a command value based on high-frequency, short-stroke data stored in the command value memory, and the piezoelectric actuator 30. Bite 2 fed back from the displacement sensors 23a, 23b of
The piezoelectric actuator 30 is controlled by outputting a position deviation signal which is a deviation from the signal of the position c of 0 in the forward / backward direction.

【0023】また、主軸52の回転に基づく同期信号に
より、指令値用メモリに記憶される低周波でストローク
の大きいデータに基づく指令値を出力し、リニヤモータ
10の進退軸動量センサ24からフィードバックされる
位置信号との偏差である位置偏差信号を出力してリニヤ
モータ10を制御する。
A synchronizing signal based on the rotation of the main shaft 52 outputs a command value based on low frequency and large stroke data stored in the command value memory, and is fed back from the forward / backward movement amount sensor 24 of the linear motor 10. The linear deviation motor 10 is controlled by outputting a position deviation signal which is a deviation from the position signal.

【0024】上記圧電アクチュエータ30及びリニヤモ
ータ10が、それぞれの指令値により制御されると共
に、両者の作動が合成されて非真円プロフィルデータに
即してバイト20の半径方向の刃先位置を制御して、非
真円形状を切削加工する。
The piezoelectric actuator 30 and the linear motor 10 are controlled by their respective command values, and their operations are combined to control the blade edge position of the cutting tool 20 in the radial direction in accordance with the non-round profile data. , Cutting non-round shape.

【0025】そこで、本発明では、2つの変位センサ2
3a、23bからフィードバックされるそれぞれの信号
a、bを第2演算回路54で2つの信号a、b差により
センサターゲット22aの傾き量dを求め、この傾き量
dを上限比較器42で上限設定値41と、又は下限比較
器43で下限設定値44と比較する。
Therefore, in the present invention, the two displacement sensors 2
The second arithmetic circuit 54 calculates the inclination amount d of the sensor target 22a from the respective signals a and b fed back from 3a and 23b by the difference between the two signals a and b, and the inclination amount d is set to the upper limit by the upper limit comparator 42. The value 41 or the lower limit comparator 43 is compared with the lower limit set value 44.

【0026】この上限比較器42又は下限比較器43で
比較した結果、傾き量dが上限設定値41以上又は下限
設定値44以下のときには、センサターゲット22aの
傾き量dが許容角度を超えてバイト20に大きな負荷が
かかったと判断して、数値制御装置40に異常信号を送
信する。
As a result of comparison by the upper limit comparator 42 or the lower limit comparator 43, when the inclination amount d is equal to or more than the upper limit setting value 41 or less than or equal to the lower limit setting value 44, the inclination amount d of the sensor target 22a exceeds the allowable angle, When it is determined that the large load is applied to 20, the abnormal signal is transmitted to the numerical control device 40.

【0027】これに基づいて数値制御装置40は、リレ
ー回路48にリレーオフ信号を発信し、VCM駆動回路
49への電源をオフしてリニヤモータ10のサーボを落
としリニヤモータ10をフリーの状態する。これによ
り、切削抵抗でバイト20が工作物Wから逃げ、センサ
ターゲット22aの傾きはダイヤフラム18によって正
規の姿勢に復帰し、センサターゲット22aが変位セン
サ23a、23bに当接することを防止する。
Based on this, the numerical controller 40 sends a relay off signal to the relay circuit 48 to turn off the power supply to the VCM drive circuit 49 to turn off the servo of the linear motor 10 and put the linear motor 10 into a free state. As a result, the cutting tool causes the cutting tool 20 to escape from the workpiece W, the inclination of the sensor target 22a is returned to the normal posture by the diaphragm 18, and the sensor target 22a is prevented from contacting the displacement sensors 23a and 23b.

【0028】また、数値制御装置40は、前記リニヤモ
ータ10の駆動停止制御と同時に主軸駆動回路51にも
主軸52の駆動停止の制御信号を発信し、工作物Wの回
転を停止する。
The numerical controller 40 also sends a control signal for stopping the drive of the spindle 52 to the spindle drive circuit 51 at the same time as the drive stop control of the linear motor 10 to stop the rotation of the workpiece W.

【0029】尚、上述した実施例は、上限比較器42と
下限比較器43を設けた例について述べたが、他の変形
例として、信号a、bの差の絶対値を第2演算回路で算
出できるようにすれば、上限比較器42だけ設けて、信
号a、bの差の絶対値と上限設定値とで比較することが
できる。
The above embodiment has been described with respect to the example in which the upper limit comparator 42 and the lower limit comparator 43 are provided, but as another modification, the absolute value of the difference between the signals a and b is calculated by the second arithmetic circuit. If it can be calculated, only the upper limit comparator 42 is provided and the absolute value of the difference between the signals a and b can be compared with the upper limit set value.

【0030】さらに、上述した例は、VCM駆動回路4
9への電源をオフする例について述べたが、PZT駆動
回路46への電源をオフしてバイト20をダイヤフラム
18の弾性復帰によって工作物Wから逃がしても良い。
Further, in the above-mentioned example, the VCM drive circuit 4
Although the example of turning off the power to 9 has been described, the power to the PZT drive circuit 46 may be turned off to allow the cutting tool 20 to escape from the workpiece W by elastic return of the diaphragm 18.

【0031】[0031]

【発明の効果】以上のように本発明は、リニヤモータに
よって軸線方向に進退駆動するラムと、このラムの先端
にダイヤフラムを介して保持された工具と、前記ラムの
先端部に内蔵され前記工具を進退移動する圧電アクチュ
エータと、前記工具と同心で前記ダイヤフラムと一体的
に設けられたセンサターゲットと、前記ラムの先端面に
前記センサターゲットと対面し、かつセンサターゲット
の中心点を挟んだ2位置に配置され前記センサターゲッ
トの傾き量を検出する2つの変位センサと、この2つの
変位センサの出力信号の差を予め設定した上限又は下限
設定値と比較する上限比較器又は下限比較器と、この上
限比較器又は下限比較器で比較した2つの変位センサの
出力信号の差が上限設定値又は下限設定値を超えたとき
に前記リニヤモータを駆動停止する数値制御装置とを備
えた構成であるから、切削抵抗により工具の刃先に大き
な負荷がかかつたときには、直ちにこれを検出してリニ
ヤモータのサーボを落としたり、圧電アクチュエータへ
の電圧供給を停止して工具を工作物から逃がすため、セ
ンサターゲットの大きな傾きが抑止され、変位センサの
破損並びにダイヤフラムの歪み変形を防止することがで
きる。
As described above, according to the present invention, a ram that is axially driven forward and backward by a linear motor, a tool held at the tip of the ram via a diaphragm, and a tool built in the tip of the ram. A piezoelectric actuator that moves back and forth, a sensor target that is concentric with the tool and that is integrally provided with the diaphragm, and a tip end surface of the ram that faces the sensor target, and is located at two positions sandwiching the center point of the sensor target. Two displacement sensors arranged to detect the amount of inclination of the sensor target, an upper limit comparator or a lower limit comparator for comparing the difference between the output signals of the two displacement sensors with a preset upper limit or lower limit set value, and this upper limit When the difference between the output signals of the two displacement sensors compared by the comparator or the lower limit comparator exceeds the upper limit setting value or the lower limit setting value, the linear mode With a numerical control device that stops driving, when a large load is applied to the cutting edge of the tool due to cutting resistance, this is immediately detected and the servo of the linear motor is dropped or the voltage is supplied to the piezoelectric actuator. Since the tool is stopped and the tool is released from the workpiece, a large inclination of the sensor target is suppressed, and damage to the displacement sensor and strain deformation of the diaphragm can be prevented.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明装置の断面図FIG. 1 is a sectional view of the device of the present invention.

【図2】図1のA矢視部の拡大図FIG. 2 is an enlarged view of an arrow A portion of FIG.

【符号の説明】[Explanation of symbols]

10 リニヤモータ 11 センタポール 13 進退駆動部材 15 ガイド体 16 ラム 18 ダイヤフラム 20 バイト 22a センサターゲット 23a 変位センサ 23b 変位センサ 30 圧電アクチュエータ 40 数値制御装置 42 上限比較器 43 下限比較器 46 PZT駆動回路 47 電源 48 リレー回路 49 VCM駆動回路 51 主軸駆動回路 52 主軸 53 第1演算回路 54 第2演算回路 10 linear motor 11 center pole 13 advancing / retreating driving member 15 guide body 16 ram 18 diaphragm 20 bytes 22a sensor target 23a displacement sensor 23b displacement sensor 30 piezoelectric actuator 40 numerical control device 42 upper limit comparator 43 lower limit comparator 46 PZT drive circuit 47 power supply 48 relay Circuit 49 VCM drive circuit 51 Spindle drive circuit 52 Spindle 53 First arithmetic circuit 54 Second arithmetic circuit

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 リニヤモータによって軸線方向に進退駆
動するラムと、このラムの先端にダイヤフラムを介して
保持された工具と、前記ラムの先端部に内蔵され前記工
具を進退移動する圧電アクチュエータと、前記工具と同
心で前記ダイヤフラムと一体的に設けられたセンサター
ゲットと、前記ラムの先端面に前記センサターゲットと
対面し、かつセンサターゲットの中心点を挟んだ2位置
に配置され前記センサターゲットの傾き量を検出する2
つの変位センサと、この2つの変位センサの出力信号の
差を予め設定した上限又は下限設定値と比較する上限比
較器又は下限比較器と、この上限比較器又は下限比較器
で比較した2つの変位センサの出力信号の差が上限設定
値又は下限設定値を超えたときに前記リニヤモータ又は
前記圧電アクチュエータを駆動停止する数値制御装置と
を備えたことを特徴とする工具送り装置。
1. A ram that is driven to move back and forth in the axial direction by a linear motor, a tool held at the tip of the ram via a diaphragm, a piezoelectric actuator built in the tip of the ram for moving the tool forward and backward, A sensor target which is concentric with the tool and is provided integrally with the diaphragm, and an inclination amount of the sensor target which is arranged at two positions facing the sensor target on the tip surface of the ram and sandwiching the center point of the sensor target. To detect 2
Two displacement sensors, an upper limit comparator or a lower limit comparator for comparing the difference between the output signals of the two displacement sensors with a preset upper limit or lower limit set value, and two displacements compared by the upper limit comparator or the lower limit comparator A tool feeding device, comprising: a numerical control device that stops driving the linear motor or the piezoelectric actuator when a difference between output signals of the sensors exceeds an upper limit setting value or a lower limit setting value.
JP4215687A 1992-07-22 1992-07-22 Tool slide device Pending JPH0631577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4215687A JPH0631577A (en) 1992-07-22 1992-07-22 Tool slide device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4215687A JPH0631577A (en) 1992-07-22 1992-07-22 Tool slide device

Publications (1)

Publication Number Publication Date
JPH0631577A true JPH0631577A (en) 1994-02-08

Family

ID=16676496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4215687A Pending JPH0631577A (en) 1992-07-22 1992-07-22 Tool slide device

Country Status (1)

Country Link
JP (1) JPH0631577A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5916929B1 (en) * 2015-06-18 2016-05-11 株式会社滝澤鉄工所 Non-circular processing equipment
JP2019107752A (en) * 2017-12-20 2019-07-04 株式会社荏原製作所 Polishing head and polishing device
JP2023503704A (en) * 2020-05-22 2023-01-31 浙江大学 Electromagnetic driven high-speed tool servo system with flexible hinge combination mechanism

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5916929B1 (en) * 2015-06-18 2016-05-11 株式会社滝澤鉄工所 Non-circular processing equipment
JP2019107752A (en) * 2017-12-20 2019-07-04 株式会社荏原製作所 Polishing head and polishing device
JP2023503704A (en) * 2020-05-22 2023-01-31 浙江大学 Electromagnetic driven high-speed tool servo system with flexible hinge combination mechanism

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