JPH0631151A - Minute flow rate mixer - Google Patents

Abstract

PURPOSE:To surely mix fluids even if the amts. of fluids introduced into a mixing chamber are changed by making the volume in the mixing chamber adjustable with a diaphragm. CONSTITUTION:The other ends of the fluid inlet passages 3, 4 and 5 respectively communicating with fluid inlets 3a, 4b and 5c are opened in a mixing chamber 11 formed by an annular thin spacer 7 provided on the upper surface 2b of a main block 2 and a diaphragm 10, and the other end of a fluid outlet passage 6 communicating with a fluid outlet 6d is communicated with an opening 8 provided on a spacer 7. The diaphragm 10 is pressed by a presser 14 to adjust the opening degree of the openings 3e, 4e and 5e of the fluid inlet passages 3, 4 and 5 and to adjust the volume of the fluid passage in the mixing chamber 11, hence the fluids A, B and C introduced through the inlet passages 3, 4 and 5 are mixed in the chamber 11, and the mixed fluid D is discharged through the fluid outlet passage 6.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a minute flow rate mixing device for mixing a small amount of fluid such as liquid or gas.

[0002]

2. Description of the Related Art As a means for mixing fluids, there is, for example, one shown in FIG. That is, FIG.
Is to mix the fluid 52 flowing in the conduit 51 with the fluid 54 flowing in the narrower conduit 53. In the same figure (B), several kinds of fluid 55 are caused to flow in the same conduit 56. A portion 57 of the pipe 56 is made thin so that the fluid is in a turbulent state so that the several types of liquid 55 are mixed. FIG. 58
(D) shows that several kinds of fluids are caused to flow through a pipe line 60 in which a spiral body 59 is provided and mixed.

[0003]

However, in any of the above means, when mixing a very small amount of fluid having a flow rate per minute of 1 ml or less, for example, the pipe lines 51, 5 are used.
As 6, 58 and 60, those having an extremely small inner diameter must be used. Further, in order for the plurality of fluids to be sufficiently mixed, it is necessary to make the lengths of the pipe lines 51, 56, 58 and 60 sufficiently large. Once the shapes of the pipes 51, 56, 58, 60 are determined, the fluid to be applied and the flow rate thereof are limited, which is not versatile.

The present invention has been made in consideration of the above-mentioned matters, and an object thereof is a compact micro flow rate mixing device which is excellent in versatility and can reliably mix fluids of arbitrary flow rates. To provide.

[0005]

In order to achieve the above object, a micro flow rate mixing device according to the present invention has a plurality of fluid inlets and one fluid outlet formed in a main body block. The other end side of the fluid introduction flow path connected to each of the fluid introduction flow paths connected to the fluid discharge port while opening into the mixing chamber formed by the annular thin spacer and the diaphragm provided in the main body block. The opening of each opening of the fluid introduction flow path is adjusted by communicating the end side with the opening provided in the spacer and pressing the diaphragm by the pressing drive section, and the fluid flow path section in the mixing chamber By adjusting the volume of the fluid, the fluid introduced through the fluid introduction flow channel is mixed in the mixing chamber, and the mixed fluid resulting from this mixing is discharged through the fluid discharge flow channel. It is configured.

[0006]

In the minute flow rate mixing device having the above construction, the diaphragm adjusts the volume in the mixing chamber. Therefore, even if the amount of fluid introduced into the mixing chamber changes, the fluids are surely mixed.

[0007]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 4 show an example of the minute flow rate mixing device 1 according to the present invention, and in FIGS. 1 to 3, 2 is made of a material having good thermal conductivity and corrosion resistance, such as stainless steel, for example. It is a rectangular parallelepiped body block.

Four flow paths 3, 4, 5, 6 are formed in the main body block 2. That is, the flow path 3,
Flow paths (hereinafter, referred to as “4” and “5”) for introducing fluids A, B, and C to be mixed with each other into a mixing chamber 11 described below
Reference numerals 6 and 6 denote first, second and third fluid introduction flow paths, respectively, and a mixed fluid discharge flow path for discharging the fluid D mixed in the mixing chamber 11.

More specifically, the first fluid introduction channel 3 is
The main body block 2 has a fluid introduction port 3a on one side surface 2a, and the other end is formed so as to open on the upper surface 2e. The second fluid introduction channel 4 has a fluid introduction port 4b on a side surface 2b (a front surface in the illustrated example) orthogonal to the side surface 2a and the upper surface 2e, and the other end is formed so as to open on the upper surface 2e. There is. In addition, the third fluid introduction flow path 5
Has a fluid introduction port 5c on the rear surface 2c corresponding to the front surface 2b, and is formed so that the other end opens on the upper surface 2e. Further, the mixed fluid outlet channel 6 has a mixed fluid outlet port 6c on the side surface 2d orthogonal to the side surface 2a and the upper surface 2e.
And the other end is formed so as to open at the upper surface 2e.

All of the channels 3 to 6 are formed in an L shape, the inner diameters of the channels 3 to 5 are the same, for example, about 1 to 2 mm, and that of the channel 6 is, for example, 3 mm. ~
It is set to about 5 mm. And as shown in FIG. 2 in particular, the flow path 3 in the upper surface 2e of the main body block 2
The openings 3e to 5e of 5 to 5 are formed so as to have a smaller diameter than the channels 3 to 5, and the opening positions are close to each other and are located inside the inner portion 7b of the spacer 7 provided on the upper surface 2e. ing. The opening 6e is formed so as to be slightly away from the openings 3e to 5e and communicate with the hole 8 formed in the spacer 7.

The spacer 7 is made of a corrosion-resistant metal, and is formed in an annular thin shape (thickness of 20 μm, for example). Then, a hole 8 is formed in the spacer 7 on the inner side 7
b for communicating with b (for example, a width of 100 μ
m, and the length is 0.5 mm). Although not shown, a seal fluororesin sealing sheet is provided on the outer peripheral portion of the spacer 7.

A diaphragm 10 is mounted on the upper surface 2e of the main body block 2 via the spacer 7 and is made of a material having good heat resistance and corrosion resistance, and has a thin portion 10b around the shaft portion 10a. , And this thin portion 10b
A thick portion 10c is provided on the periphery of the shaft, and is configured to be distorted (displaced) when a downward pressing force acts on the shaft portion 10a. The diaphragm 10, the spacer 7, and the upper surface 2e form a mixing chamber 11.

Reference numeral 12 is a valve block provided so as to cover the diaphragm 10, and a shaft portion 10a of the diaphragm 10 is accommodated in an internal space 12a thereof, and a spring for constantly urging the diaphragm 10 upward. 13 are provided.

In this embodiment, such a diaphragm 10 is mixed in a mixing chamber 1 for mixing the fluids A, B and C.
1 is used as a constituent member and a valve for adjusting the flow rates of the fluids A, B, C flowing into the mixing chamber 11 and for shutting off. Therefore, in order to perform the shutoff more reliably, the flat surface of the diaphragm 10 is coated with a fluororesin to improve its sealing property.

In the diaphragm 10 having the above-described structure, a part of the lower surface of the diaphragm 10 abuts on the spacer 7 so that the shaft portion 10a faces upward, and the main body block is placed in the mixing chamber 11 formed on the lower surface side. The opening 3e formed in the upper surface 2e of
6e is included, and the lower surface 10d of the shaft portion 10a has openings 3e to 5
It is provided so as to correspond to e. That is, the openings 3e to 5e of the fluid introduction flow paths 3 to 5 and the openings 6e of the mixed fluid discharge flow path 6 communicate with each other in the mixing chamber 11. Then, the diaphragm 10 is pressed by the pressing drive unit 14 described later, and the lower surface 10d thereof has openings 3e through.
By adjusting the opening degree of 5e, the pressure at the time of introducing the fluids A, B, and C into the mixing chamber 11 can be adjusted. Further, by completely closing the openings 3e to 5e by the lower surface 10d, the fluid A, The introduction of B and C can be stopped.

Reference numeral 14 is a pressing drive unit for pressing the diaphragm 10 downward to distort it.
A piezo stack 16 formed by stacking a plurality of piezoelectric elements is provided in a housing 15 provided upright on the valve block 12, and a pressing portion 16a of the piezo stack 16 is applied to an upper portion of a shaft portion 10a of the diaphragm 10. I have contacted you.
In addition, 17, 18, 19, and 20 are the fluid inlets 3
a, 4b, 5c, and a mixed fluid outlet 6d, respectively.

FIG. 4 shows an example in which the minute flow rate mixing device 1 having the above-mentioned structure is incorporated in, for example, a material supply line of a semiconductor manufacturing apparatus. In FIG. 4, reference numerals 21, 22, 23 denote mass flow controllers 24, 25, 26, respectively. The liquid material supply line provided is connected to the joints 17 to 19.
Further, 27 is a mixed liquid transfer line, 28 is a vaporizer for evaporating the liquid material supplied to the mixed liquid transfer line 27, 2
Reference numeral 9 is a vacuum chamber, and 30 is a suction pump.

Next, the operation of the minute flow rate mixing device 1 will be described. Now, it is assumed that the minute flow rate mixing device 1 is incorporated in the material supply line as shown in FIG. As described above, the diaphragm 10 is constantly urged upward by the urging force of the spring 13, and in this state, the lower surface 10d of the diaphragm 10 has the first, second, and third fluid introduction flow paths 3, 4 , 5 downstream side opening 3e
5e is open.

Therefore, in this state, the liquid materials A, B, C controlled by the mass flow controllers 24, 25, 26 respectively flow into the minute flow rate mixing device 1 and are further introduced into the mixing chamber 11. The liquid materials A, B, and C introduced into the mixing chamber 11 flow through the inner portion 7b of the spacer 7 toward the opening 6e, reach the opening 6e through the slit 9, but pass through the mixing chamber 11 and the slit 9. At this time, they are mixed with each other to form a mixed liquid material D. The mixed liquid material D is discharged to the outside of the minute flow rate mixing device 1 through the opening 6e and the mixed fluid discharge flow path 6.

At this time, when a predetermined DC voltage is applied to the piezo stack 16 to distort the diaphragm 10 downward, the openings 3e to 5e are narrowed and the mixing chamber 1 is opened.
The pressure in 1 is increased, back pressure can be applied to the mass flow controllers 24, 25, 26 on the upstream side of the micro flow rate mixing device 1, and cavitation can be suppressed.

Further, when a large voltage is applied to the piezo stack 16 and the diaphragm 10 is sufficiently distorted downward, the openings 3e to 5e are closed by the lower surface 10d of the diaphragm 10 and a so-called liquid shutoff state is established. . Therefore, the liquid materials A, B and C are not introduced into the mixing chamber 11.

As described above, in the minute flow rate mixing apparatus 1 according to the above-described embodiment, by pressing the diaphragm with the piezo stack 16, the openings 3 of the fluid introduction flow paths 3 to 5 are formed.
The opening degree of e-5e is adjusted and the pressure in the mixing chamber 11 is adjusted. In addition, the liquid material A introduced into the mixing chamber 11,
The flow rates of B and C are the liquid material supply lines 21, 22, and 23.
Mass flow controllers 24, 25, 26 provided in
The liquid material A,
It is possible to obtain a mixed liquid material D having various mixing ratios of B and C.

It should be noted that by using the above minute flow rate mixing device 1, 3
When a mixed liquid D obtained by mixing the liquids A, B, and C of various kinds at an arbitrary flow rate was measured using an ultraviolet-visible light spectrophotometer, it was confirmed that a stable mixed state was obtained. Furthermore, the flow rate of the mixed liquid D is 0.1 ml / mi.
Even if the flow rates of the liquids A, B, and C are extremely small, as described by n, the diaphragm 10 is distorted downward,
It was also confirmed that a stable mixed state was achieved by reducing the volume of the mixing chamber 11.

The present invention is not limited to the above-mentioned embodiment, and for example, an electromagnetic type or a thermal type may be used as the pressing drive section 14. And each flow path 3-6
Need not be L-shaped, and may be straight. Moreover, the number of the fluid introduction channels 3 to 5 may be two, and may be four or more. And, needless to say, the present invention may be used to mix a plurality of gases.

[0025]

As described above, according to the minute flow rate mixing apparatus of the present invention, a plurality of fluids can be mixed stably and uniformly regardless of the mixing ratio. Further, since the minute flow rate mixing device is small, it can be suitably incorporated in various fluid supply lines and the like.

[Brief description of drawings]

FIG. 1 is a sectional perspective view showing an example of a minute flow rate mixing device according to the present invention.

FIG. 2 is a vertical cross-sectional view of the minute flow rate mixing device.

FIG. 3 is a diagram showing a planar configuration of a main body block of the micro flow rate mixing device.

FIG. 4 is a configuration diagram of a material supply line incorporating the minute flow rate mixing device.

5 (A), (B), (C), and (D) are diagrams for explaining a conventional minute flow rate mixing method.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Micro flow rate mixing device, 2 ... Main body block, 2e ... Upper surface, 3,4,5, ... Fluid introduction flow path, 3a, 4b, 5c ... Fluid introduction port, 3e, 4e, 5e ... Opening, 6 ... Fluid discharge flow Channel, 6d ... Fluid outlet, 7 ... Spacer, 8 ... Opening, 10
... diaphragm, 11 ... mixing chamber, 14 ... pressing drive unit,
A, B, C ... fluid, D ... mixed fluid.

Claims (1)

[Claims] 1. A plurality of fluid inlets and one fluid outlet are formed in the main body block, and the other end side of the fluid inlet passages respectively connected to the fluid inlets is provided in the main body block with an annular shape. In addition, the opening is formed in a mixing chamber formed by a thin spacer and a diaphragm, and the other end side of the fluid discharge flow path communicating with the fluid discharge port is communicated with the opening provided in the spacer, and the diaphragm is pressed by the pressing drive unit. By adjusting the opening degree of each opening of the fluid introduction flow path, and by adjusting the volume of the fluid flow path section in the mixing chamber, the fluid introduced through the fluid introduction flow path is A minute flow rate mixing device, characterized in that the mixed fluid is mixed in a mixing chamber and the mixed fluid produced by the mixing is discharged through the fluid discharge flow path.