JPH06305817A - Ferrodielectric piezoelectric porcelain composition - Google Patents

Ferrodielectric piezoelectric porcelain composition

Info

Publication number
JPH06305817A
JPH06305817A JP5102402A JP10240293A JPH06305817A JP H06305817 A JPH06305817 A JP H06305817A JP 5102402 A JP5102402 A JP 5102402A JP 10240293 A JP10240293 A JP 10240293A JP H06305817 A JPH06305817 A JP H06305817A
Authority
JP
Japan
Prior art keywords
ferrodielectric
piezoelectric ceramic
porcelain composition
piezoelectric porcelain
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5102402A
Other languages
Japanese (ja)
Other versions
JP2921724B2 (en
Inventor
Masakazu Hirose
正和 廣瀬
Masaharu Kanbara
正治 神原
Fumi Yamane
文 山根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP5102402A priority Critical patent/JP2921724B2/en
Publication of JPH06305817A publication Critical patent/JPH06305817A/en
Application granted granted Critical
Publication of JP2921724B2 publication Critical patent/JP2921724B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)

Abstract

PURPOSE:To obtain a ferrodielectric piezoelectric porcelain composition capable of being used at high temperature and not requiring a correction circuit. CONSTITUTION:The characteristic of this bismuth lamellar ferrodielectric piezoelectric porcelain composition is to have the general formula: PbxBi3-xTi1-xNb1+xO9 wherein (x) is 0.3-0.75. The amount of Cr2O3 added for enlarging an electromechanical coupling factor in the thick vertical direction is controlled to <=0.5%.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はセンサー用強誘電性圧電
磁器組成物特に、高キュリー点を有する強誘電性圧電磁
器組成物に係るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ferroelectric piezoelectric ceramic composition for sensors, and more particularly to a ferroelectric piezoelectric ceramic composition having a high Curie point.

【0002】[0002]

【従来の技術】あらゆる分野でエレクトロニクス化が著
しい今日、自動車にも種々のエレクトロニクス装置が用
いられている。中でも自動車の心臓部であるエンジンは
燃料供給系を初めとしてエレクトロニクス化による制御
が進んでいる。このエンジンの制御を行うためにはエン
ジンの状態を検出する必要があり、そのために各種のセ
ンサが採用されており、エンジンのシリンダ内の圧力を
検出するために圧電体を利用した気筒内圧センサが使用
されている。
2. Description of the Related Art Nowadays, various electronic devices are used in automobiles as electronics are remarkably used in various fields. Above all, the engine, which is the heart of an automobile, is being controlled electronically, starting with the fuel supply system. In order to control this engine, it is necessary to detect the state of the engine, and various sensors have been adopted for that purpose, and a cylinder pressure sensor that uses a piezoelectric body to detect the pressure in the cylinder of the engine is It is used.

【0003】この気筒内圧センサは、設置場所がエンジ
ンのシリンダ内であることから高温環境下で使用され
る。そのため、高温において使用可能なことすなわちキ
ュリー点が高いこと及び高温においても電気的特性の変
化が少ないことさらに静電容量温度特性(CTC)が小
さいことが要求される。
This cylinder internal pressure sensor is used in a high temperature environment because it is installed in the cylinder of the engine. Therefore, it is required to be usable at high temperature, that is, to have a high Curie point, to have little change in electrical characteristics even at high temperature, and to have small capacitance temperature characteristic (CTC).

【0004】従来、気筒内圧センサに使用する圧電材料
として、チタン酸ジルコン酸鉛(Pb(Zr,Ti)O
3=PZT)あるいはチタン酸鉛(PbTiO3=PT)
が使用されている。しかしこれらの圧電材料は静電容量
の温度係数が大きいため、センサーとして使用する場合
には補正回路を用いて補正する必要がある。
Conventionally, lead zirconate titanate (Pb (Zr, Ti) O has been used as a piezoelectric material used for an in-cylinder pressure sensor.
3 = PZT) or lead titanate (PbTiO 3 = PT)
Is used. However, since these piezoelectric materials have a large temperature coefficient of capacitance, when they are used as sensors, it is necessary to correct them using a correction circuit.

【0005】一方、特公昭54−18395号公報ある
いは特公昭54−18394号公報に記載されているよ
うにビスマス層状強誘電体は、高キュリー点を有する圧
電材料として知られている。ビスマス層状強誘電体の中
で、主成分(Pb0.99Sr0.01)Bi2Nb29に0.1
5wt%のMnCO3を加えたものがあり、そのキュリ
ー点は590℃と高い。しかし、−40℃〜+180℃
における静電容量温度係数(CTC)が約1420ppm
/℃と大きいため、補正回路なしでセンサーとして使用
することは困難である。
On the other hand, a bismuth layered ferroelectric substance is known as a piezoelectric material having a high Curie point as described in JP-B-54-18395 or JP-B-54-18394. Among the bismuth layered ferroelectrics, the main component (Pb 0.99 Sr 0.01 ) Bi 2 Nb 2 O 9 is 0.1
Some have added 5 wt% MnCO 3 , and their Curie point is as high as 590 ° C. However, -40 ℃ ~ +180 ℃
Temperature coefficient of capacitance (CTC) at about 1420ppm
Since it is as large as / ° C, it is difficult to use it as a sensor without a correction circuit.

【0006】[0006]

【発明が解決しようとする課題】本願においては、上記
従来の圧電セラミック材料によっては解決することがで
きない高温時に使用することができかつ補正回路を必要
としない強誘電性圧電磁器組成物を提供することを発明
の課題とする。
DISCLOSURE OF THE INVENTION In the present application, there is provided a ferroelectric piezoelectric ceramic composition which can be used at a high temperature which cannot be solved by the conventional piezoelectric ceramic materials and which does not require a correction circuit. This is the subject of the invention.

【0007】[0007]

【課題を解決するための手段】上記発明の課題を解決す
るために本願においては、「一般式PbxBi3-xTi
1-xNb1+x9で表現される強誘電性圧電磁器組成物で
あって、xが0.3≦x≦0.75の範囲にあることを特
徴とする強誘電性圧電磁器組成物」であることを構成と
する発明を提供する。
In order to solve the above-mentioned problems of the invention, in the present application, the "general formula Pb x Bi 3-x Ti
A ferroelectric piezoelectric ceramic composition represented by 1-x Nb 1 + x O 9 , wherein x is in a range of 0.3 ≦ x ≦ 0.75. An invention is provided that is configured as "a thing."

【0008】[0008]

【作用】上記構成を有する本願発明に係る圧電セラミッ
ク材料は、従来の圧電セラミック材料のキュリー点が5
90程度であるのに対し、600〜900℃程度であ
る。また、従来の圧電セラミック材料の静電容量温度係
数が1420ppm/℃であるのに対し、本願発明に係る
圧電セラミック材料の静電容量温度係数は496〜12
68ppm/℃と小さい。そして、誘電損失tanδも従
来の圧電セラミック材料が1.3%であるのに対し、本
願発明に係る圧電セラミック材料の1.0%以下であ
る。
The piezoelectric ceramic material according to the present invention having the above structure has a Curie point of 5 compared with the conventional piezoelectric ceramic material.
While it is about 90, it is about 600 to 900 ° C. Further, while the temperature coefficient of capacitance of the conventional piezoelectric ceramic material is 1420 ppm / ° C., the temperature coefficient of capacitance of the piezoelectric ceramic material according to the present invention is 496-12.
It is as small as 68ppm / ℃. The dielectric loss tan δ is 1.3% in the conventional piezoelectric ceramic material, while it is 1.0% or less in the piezoelectric ceramic material according to the present invention.

【0009】なお、CTCは180℃における靜電容量
と−40℃における靜電容量との差を25℃でにおける
靜電容量及び180℃と−40℃との温度差220で割
ることによって求めた。 CTC(-40℃〜+180℃)={〔C180℃−C-40℃〕/
〔C25℃・(180−(−40)〕} ここで、 C180℃:180℃における靜電容量 C-40℃:−40℃における靜電容量 C25℃ :25℃における靜電容量 である。
The CTC was obtained by dividing the difference between the electrostatic capacity at 180 ° C and the electrostatic capacity at -40 ° C by the electrostatic capacity at 25 ° C and the temperature difference 220 between 180 ° C and -40 ° C. CTC (-40 ℃ to + 180 ℃) = {[C180 ℃ -C-40 ℃] /
[C25 ° C. (180 − (− 40)]} where C180 ° C .: electrostatic capacity at 180 ° C. C-40 ° C .: electrostatic capacity at −40 ° C. C25 ° C .: electrostatic capacity at 25 ° C.

【0010】[0010]

【実施例】本発明の実施例を説明する。図1に本発明に
係る圧電セラミック材料の製造工程図を示す。本発明に
係る圧電セラミック材料は全てPb,Bi,Ti,N
b,Crの酸化物すなわちPbO,Bi23,Ti
2,Nb25,Cr23を出発原料としており、次に
示す各工程を経て製造される。
EXAMPLES Examples of the present invention will be described. FIG. 1 shows a manufacturing process diagram of the piezoelectric ceramic material according to the present invention. The piezoelectric ceramic materials according to the present invention are all Pb, Bi, Ti, N
b, Cr oxides, ie PbO, Bi 2 O 3 , Ti
O 2 , Nb 2 O 5 , and Cr 2 O 3 are used as starting materials, and are manufactured through the following steps.

【0011】(1)秤量・混合・乾燥 原料はすべて酸化物(PbO,Bi23,TiO2,N
2 5,Cr23)を使用し、各原料を所定の組成に
なるように秤量し、ボールミルで所定時間湿式混合し、
乾燥する。
(1) Weighing / mixing / drying All raw materials are oxides (PbO, Bi 2 O 3 , TiO 2 , N
b 2 O 5 , Cr 2 O 3 ), each raw material is weighed so as to have a predetermined composition, and wet-mixed for a predetermined time with a ball mill,
dry.

【0012】(2)仮焼成 乾燥後、780℃から850℃の温度で2時間仮焼成す
る。
(2) Pre-baking After drying, pre-baking is performed at a temperature of 780 ° C. to 850 ° C. for 2 hours.

【0013】(3)粗粉砕・粉砕・乾燥 仮焼成物を粗粉砕し、ボールミルで所定時間湿式粉砕
し、乾燥する。
(3) Coarse crushing / crushing / drying The calcined product is roughly crushed, wet-crushed in a ball mill for a predetermined time, and dried.

【0014】(4)造粒・成形 乾燥後、有機バインダを加えて造粒し,196〜392
MPaの圧力で直径16.5mm、厚さ1mmの円板に加圧成
形する。
(4) Granulation and molding After drying, an organic binder is added to granulate, and 196 to 392.
It is pressure-molded at a pressure of MPa into a disk having a diameter of 16.5 mm and a thickness of 1 mm.

【0015】(5)焼成 成形された円板を1030℃〜1100℃で2時間焼成
する。
(5) Firing The formed disc is fired at 1030 ° C to 1100 ° C for 2 hours.

【0016】(6)平面研磨・電極形成・分極 得られた焼結体を厚さ0.6mmまで平面研磨した後、A
g電極を両面に設け、250℃のオイル中で直流電界5
MV/mを15分間印加して分極する。
(6) Plane polishing / electrode formation / polarization The obtained sintered body was plane-polished to a thickness of 0.6 mm, and then A
A g electrode is provided on both sides, and a DC electric field of 5 ° C is applied in oil at 250 ° C.
MV / m is applied for 15 minutes to polarize.

【0017】上記した工程で製造した圧電素子を横河ヒ
ューレットパッカード株式会社製インピーダンスアナラ
イザ型番HP4194Aにより共振周波数fr、反共振
周波数fa、静電容量Cd、誘電体損失tanδを測定
し、厚み縦方向電気機械結合係数kt、比誘電率εdを算
出した。
The resonance frequency f r , the anti-resonance frequency f a , the electrostatic capacitance C d , and the dielectric loss tan δ of the piezoelectric element manufactured in the above steps were measured with an impedance analyzer model HP4194A manufactured by Yokogawa Hewlett-Packard Co., and the thickness was measured. The longitudinal electromechanical coupling coefficient k t and the relative dielectric constant ε d were calculated.

【0018】PbxBi3-xTi1-xNb1+x9で表され
るビスマス層状強誘電体のxの値を変化させたときの諸
特性を表1に示す。なお、表1には比較のために従来の
圧電体組成物の諸特性の例も示した。
Table 1 shows various characteristics when the value of x of the bismuth layered ferroelectric substance represented by Pb x Bi 3-x Ti 1-x Nb 1 + x O 9 is changed. For comparison, Table 1 also shows examples of various characteristics of the conventional piezoelectric composition.

【表1】 [Table 1]

【0019】この表に記載されたデータに基づいて、キ
ュリー点Tcは従来例と同等以上の600℃以上、静電
容量温度係数CTCは1300ppm/℃以下、誘電体損
失tanδは1.3%以下の試料を良好と判定し、その
他の試料は不良と判定した。その結果、試料2,3,
4,5,6,7,8,9,10,11は良好と判定さ
れ、試料12,13,14は不良と判定された。ただ
し、厚みたて方向電気機械結合係数ktが3%と小さい
試料1は気筒内圧センサーとして使用することができな
いため、不良と判定した。この表から、0.3≦x≦0.
75の範囲のものが本発明の目的を達成するといえる。
Based on the data shown in this table, the Curie point T c is 600 ° C. or higher, which is equal to or higher than that of the conventional example, the capacitance temperature coefficient CTC is 1300 ppm / ° C. or lower, and the dielectric loss tan δ is 1.3%. The following samples were judged to be good, and the other samples were judged to be bad. As a result, samples 2, 3,
4,5,6,7,8,9,10,11 were judged to be good, and samples 12,13,14 were judged to be bad. However, Sample 1 having a small thickness electro-mechanical coupling coefficient k t of 3% cannot be used as an in-cylinder pressure sensor, and was therefore determined to be defective. From this table, 0.3≤x≤0.
It can be said that the range of 75 achieves the object of the present invention.

【0020】次に、x=0.3,0.5,0.75とした
それぞれの試料にCr23を0.05〜1.0wt%添加
したときの特性を表3,表4,表5に示す。Cr23
添加することの目的は、キュリーTc点を低下させるこ
となく厚み縦方向電気機械結合係数Ktを大きくするこ
とである。
Next, the characteristics when Cr 2 O 3 is added in an amount of 0.05 to 1.0 wt% to each of the samples with x = 0.3, 0.5, 0.75 are shown in Table 3, Table 4, and Table 4. It shows in Table 5. The purpose of adding Cr 2 O 3 is to increase the thickness longitudinal electromechanical coupling coefficient K t without lowering the Curie T c point.

【0021】表2に掲げるのはx=0.3としたPb0.3
Bi2.7Ti0.7Nb1.39に+Cr23を添加した場合
の、表3に掲げるのはx=0.5としたPb0.5Bi2.5
Ti0.5Nb1.59にCr23を添加した場合の、表4
に掲げるのはx=0.75としたPb0.75Bi2.25Ti
0.25Nb1.759にCr23を添加した場合の特性であ
る。
Table 2 shows Pb 0.3 with x = 0.3.
When + Cr 2 O 3 is added to Bi 2.7 Ti 0.7 Nb 1.3 O 9 , Pb 0.5 Bi 2.5 when x = 0.5 is shown in Table 3.
Table 4 in the case of adding Cr 2 O 3 to Ti 0.5 Nb 1.5 O 9
Is Pb 0.75 Bi 2.25 Ti with x = 0.75.
This is the characteristic when Cr 2 O 3 is added to 0.25 Nb 1.75 O 9 .

【表2】 [Table 2]

【0022】[0022]

【表3】 [Table 3]

【0023】[0023]

【表4】 [Table 4]

【0024】これらの表に示されたように、Cr23
0.5wt%を越えた試料21,22,28,29,3
5,36は焼成密度ρsが低下し、絶縁抵抗値が低くな
り分極処理を施すことができなかった。したがって、圧
電材料として使用するためには、Cr23の添加量は
0.5wt%以下でなければならない。
As shown in these tables, the samples 21, 22, 28, 29, 3 in which Cr 2 O 3 exceeds 0.5 wt%.
In Nos. 5 and 36, the firing density ρ s decreased, the insulation resistance value decreased, and the polarization treatment could not be performed. Therefore, in order to use it as a piezoelectric material, the amount of Cr 2 O 3 added must be 0.5 wt% or less.

【0025】[0025]

【発明の効果】以上説明したことから明らかなように、
特許請求の範囲の請求項1に記載された強誘電性圧電磁
器組成物は、高いキュリー点を有しているため気筒内圧
センサのような高温環境下で使用した場合に有用であ
る。また、静電容量温度係数が小さいため使用する際に
補正回路を必要としないだけでなく、誘電損失tanδ
も小さい。また、請求項2に記載された強誘電性圧電磁
器組成物は大きな厚み縦方向電気機械結合係数Ktを有
しているため、さらに有用である。
As is apparent from the above description,
The ferroelectric piezoelectric ceramic composition according to claim 1 of the present invention has a high Curie point, and is therefore useful when used in a high temperature environment such as an in-cylinder pressure sensor. Moreover, since the temperature coefficient of capacitance is small, not only a correction circuit is not required when used, but also the dielectric loss tan δ.
Is also small. Further, the ferroelectric piezoelectric ceramic composition according to claim 2 has a large thickness longitudinal electromechanical coupling coefficient K t , and is therefore more useful.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る圧電セラミック材料の製造工程
図。
FIG. 1 is a manufacturing process diagram of a piezoelectric ceramic material according to the present invention.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 一般式がPbxBi3-xTi1-xNb1+x
9で表現され、xが0.3≦x≦0.75の範囲にあるこ
とを特徴とする強誘電性圧電磁器組成物。
1. The general formula is Pb x Bi 3-x Ti 1-x Nb 1 + x O.
A ferroelectric piezoelectric ceramic composition represented by 9 , wherein x is in the range of 0.3 ≦ x ≦ 0.75.
【請求項2】 さらに0.5wt%以下のCr23が添加
されたことを特徴とする請求項1記載の強誘電性圧電磁
器組成物。
2. A ferroelectric piezoelectric ceramic composition according to claim 1, further comprising 0.5 wt% or less of Cr 2 O 3 .
JP5102402A 1993-04-28 1993-04-28 Ferroelectric piezoelectric ceramic composition Expired - Fee Related JP2921724B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5102402A JP2921724B2 (en) 1993-04-28 1993-04-28 Ferroelectric piezoelectric ceramic composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5102402A JP2921724B2 (en) 1993-04-28 1993-04-28 Ferroelectric piezoelectric ceramic composition

Publications (2)

Publication Number Publication Date
JPH06305817A true JPH06305817A (en) 1994-11-01
JP2921724B2 JP2921724B2 (en) 1999-07-19

Family

ID=14326458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5102402A Expired - Fee Related JP2921724B2 (en) 1993-04-28 1993-04-28 Ferroelectric piezoelectric ceramic composition

Country Status (1)

Country Link
JP (1) JP2921724B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6241908B1 (en) 1998-08-21 2001-06-05 Tdk Corporation Piezoelectric ceramics
WO2004077565A1 (en) * 2003-02-27 2004-09-10 Tdk Corporation Thin-film capacitative element and electronic circuit or electronic equipment including the same
KR100683599B1 (en) * 2004-12-27 2007-02-16 세이코 엡슨 가부시키가이샤 Ferroelectric Film, Method of Manufacturing Ferroelectric Film, Ferroelectric Capacitor, and Ferroelectric Memory

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6241908B1 (en) 1998-08-21 2001-06-05 Tdk Corporation Piezoelectric ceramics
WO2004077565A1 (en) * 2003-02-27 2004-09-10 Tdk Corporation Thin-film capacitative element and electronic circuit or electronic equipment including the same
KR100683599B1 (en) * 2004-12-27 2007-02-16 세이코 엡슨 가부시키가이샤 Ferroelectric Film, Method of Manufacturing Ferroelectric Film, Ferroelectric Capacitor, and Ferroelectric Memory

Also Published As

Publication number Publication date
JP2921724B2 (en) 1999-07-19

Similar Documents

Publication Publication Date Title
JP4510966B2 (en) Piezoelectric ceramics
KR101235434B1 (en) Piezoelectric ceramic composition and piezoelectric element made by using the same
JP2006105964A (en) Piezoelectric sensor
WO2006093043A1 (en) Multilayer piezoelectric element
JP3198906B2 (en) Piezoelectric porcelain composition
JP2921724B2 (en) Ferroelectric piezoelectric ceramic composition
US6280650B1 (en) Piezoelectric ceramic composition, buzzer and actuator using the same
JP3827915B2 (en) Piezoelectric material and manufacturing method thereof
JPH11217262A (en) Piezoelectric porcelain composition
EP0698587B1 (en) Piezoelectric porcelain
JP2964265B2 (en) Piezoelectric porcelain composition
JP3181003B2 (en) Piezoelectric ceramic composition
JPH0745124A (en) Piezoelectric porcelain composition
JPH07187776A (en) Piezoelectric porcelain composition
JPH11322420A (en) Piezoelectric porcelain composition and its production
JP3250928B2 (en) Piezoelectric ceramic composition
JP3228648B2 (en) Piezoelectric ceramic composition
JP2924531B2 (en) Piezoelectric material
JPH0338892A (en) Piezoelectric porcelain composition
Fielding et al. Field-induced piezoelectric materials for 100 kHz-10 MHz transducer applications
KR19980082650A (en) Piezoelectric Ceramic Compositions for High Frequency
JPH11100264A (en) Piezoelectric ceramic composition and its production
JPH0478582B2 (en)
JPH0517220A (en) Piezoelectric porcelain composition
Unruan et al. Dielectric properties of complex perovskite PZBT-PMNT ceramic under compressive stress

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19990105

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees