JPH06302027A - Reflecting film for magneto-optical recording medium - Google Patents
Reflecting film for magneto-optical recording mediumInfo
- Publication number
- JPH06302027A JPH06302027A JP11215693A JP11215693A JPH06302027A JP H06302027 A JPH06302027 A JP H06302027A JP 11215693 A JP11215693 A JP 11215693A JP 11215693 A JP11215693 A JP 11215693A JP H06302027 A JPH06302027 A JP H06302027A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- magneto
- optical recording
- reflective film
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、レーザ等の光によりデ
ータの再生を行う光記録媒体、特にレーザ等の光によ
り、データの記録、再生、消去等を行う光磁気媒体にお
いて使用される光磁気記録媒体用反射膜に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical recording medium for reproducing data with light from a laser or the like, and particularly to an optical recording medium for recording, reproducing or erasing data with light from a laser or the like. The present invention relates to a reflective film for a magnetic recording medium.
【０００２】[0002]
【従来の技術】光記録媒体は、不揮発性、高記録密度、
非接触、可換、高速アクセス等の理由で、メモリ媒体と
して注目されている。また、光磁気記録媒体は、読出専
用形または追記形の光ディスクとは異なり、書き換えが
可能である。書き換えとは、一度記録したデータを消去
して、新たなデータを書き込むことができることで、そ
の結果、光磁気記録媒体は繰り返し使用することができ
る。そして、この光磁気記録媒体の種類には、セクタ配
置の仕方によって、ＣＡＶ、ＣＶＬ、Ｍ−ＣＡＶの３種
類がある。光記録媒体は、記録および再生の原理によっ
て、光変調型、磁界変調型、相変化型及び２相ポリマ型
がある。そして、光変調型の光磁気記録媒体が広く実用
化されている。2. Description of the Related Art Optical recording media are non-volatile, have high recording density,
It is attracting attention as a memory medium for reasons such as non-contact, exchange, and high-speed access. Further, the magneto-optical recording medium is rewritable, unlike a read-only type or a write-once type optical disc. Rewriting means that once recorded data can be erased and new data can be written, as a result, the magneto-optical recording medium can be repeatedly used. There are three types of magneto-optical recording media, CAV, CVL, and M-CAV, depending on how the sectors are arranged. The optical recording medium is classified into an optical modulation type, a magnetic field modulation type, a phase change type and a two-phase polymer type depending on the principle of recording and reproduction. The light modulation type magneto-optical recording medium has been widely put into practical use.
【０００３】光変調型とは、磁気で結晶（磁気媒体）の
磁化の向きを変化させ、この磁化の向きによってデータ
を書き込むことである。つまり、磁気媒体に一方向に磁
界をかけて、強いレーザ光の熱によりキュリー点にまで
この媒体を熱する。これによって、磁気媒体は全て該方
向を向いて磁化される。すなわち、磁気媒体には全て０
が記録されることとなり、今までに書き込んであったデ
ータは消去される。次に、上記とは逆方向に磁界をか
け、１にしたいビットのみをレーザ光でキュリー点以上
に加熱する。このようにして所望のビットに１を書き込
むことによって、データの書き換えがなされる。また、
再生は、以下のように行っている。すなわち、この磁気
媒体に弱いレーザ光を照射する。このレーザ光の反射光
が偏光フィルタを通るとき、この反射光の偏波面の回転
（光の強弱）を検出する。これによりデータを再生する
ものである。また、この光磁気記録媒体は、磁気とレー
ザ光による熱との両方の作用で、結晶に記録しているの
で、記録データの安定性が高くなっている。そして、こ
のような光磁気記録媒体にあっては、反射膜によってレ
ーザ光を反射し、このレーザ光の反射光の熱を結晶（磁
気媒体、記録層）に伝えている。The light modulation type is a method of magnetically changing the direction of magnetization of a crystal (magnetic medium) and writing data according to this direction of magnetization. That is, a magnetic field is applied to the magnetic medium in one direction, and the medium is heated to the Curie point by the heat of intense laser light. As a result, all the magnetic medium is magnetized in this direction. That is, all 0
Will be recorded, and the data that has been written will be erased. Next, a magnetic field is applied in the opposite direction to the above, and only the bit to be set to 1 is heated by the laser light to the Curie point or higher. By thus writing 1 to the desired bit, the data is rewritten. Also,
Reproduction is performed as follows. That is, this magnetic medium is irradiated with weak laser light. When the reflected light of this laser light passes through the polarization filter, the rotation of the plane of polarization of this reflected light (the intensity of the light) is detected. This reproduces the data. In addition, since the magneto-optical recording medium records on the crystal by both the action of magnetism and the heat of the laser beam, the stability of the recorded data is high. In such a magneto-optical recording medium, the laser light is reflected by the reflective film, and the heat of the reflected light of the laser light is transmitted to the crystal (magnetic medium, recording layer).
【０００４】従来、この光磁気記録媒体用の反射膜とし
ては、Ａｇ、Ｃｕ、Ａｕ、Ａｌ等の反射率の高い純金属
反射膜が使用されていた。反射率が高いと、Ｃ／Ｎ比
（データ対ノイズ比）が優れ、短い時間で記録すること
ができるという理由からである。しかし、上記の純金属
反射膜は、熱伝導率が高いため、データの書き込み時、
レーザ光の熱を記録層（磁気媒体）以外へも逃がし、こ
の記録層に伝わる熱を減少させていた。そのため、デー
タの記録には、レーザ光のパワーを上げたり、または、
レーザ光の照射時間を長くしたりしていた。すなわち、
このような反射膜を有する光磁気記録媒体にあっては、
データを記録する場合の記録感度が低下していたもので
ある。そこで、熱伝導率を低くする方法として、特開平
３−２５７３７号公報に示すものが知られている。Conventionally, a pure metal reflective film having a high reflectance such as Ag, Cu, Au, Al has been used as the reflective film for the magneto-optical recording medium. This is because when the reflectance is high, the C / N ratio (data to noise ratio) is excellent and recording can be performed in a short time. However, since the above-mentioned pure metal reflective film has high thermal conductivity, when writing data,
The heat of the laser light is also released to other than the recording layer (magnetic medium), and the heat transmitted to this recording layer is reduced. Therefore, to record data, increase the power of the laser beam, or
The irradiation time of the laser beam was lengthened. That is,
In a magneto-optical recording medium having such a reflective film,
The recording sensitivity when recording data was lowered. Therefore, as a method for lowering the thermal conductivity, a method disclosed in Japanese Patent Laid-Open No. 25737/1993 is known.
【０００５】これは、ＡｇにＣｕを０．５〜３０ａｔｍ
％含有せしめ、さらに、これに、ＴａまたはＴｉの少な
くとも１種を０．５〜１５ａｔｍ％含有せしめたＡｇ合
金によって、反射膜を構成している。これにより、高い
記録感度で高いＣ／Ｎ比の光磁気記録媒体用反射膜を提
供していた。This is because Cu is added to Ag at 0.5 to 30 atm.
%, And the reflection film is made of an Ag alloy containing 0.5 to 15 atm% of at least one of Ta and Ti. This provided a reflective film for a magneto-optical recording medium with high recording sensitivity and high C / N ratio.
【０００６】しかしながら、上記合金反射膜は、上記純
金属反射膜が有していた高い反射率を低下させてしまっ
た。さらに、従来の光磁気記録媒体用反射膜には、高い
反射率とともに、重要な課題である低い熱伝導率とを同
時に満足させるのには、未だ不十分であるという課題が
あった。そこで、本発明者等は先願において、反射率が
高く、しかも、熱伝導率の低い光磁気記録媒体用反射膜
を提案している。すなわち、先願発明においては、第１
の金属からなる薄膜と、第２の金属からなる薄膜と、を
交互に繰り返し積層した光磁気記録媒体用反射膜の、上
記第１の金属として、Ａｇ、Ｃｕ、Ａｕ、Ａｌ、Ｍｇ、
Ａｇ−Ａｕ合金、および、Ａｕ−Ｃｕ合金からなる群よ
り選ばれる少なくとも１種類の金属を用いるとともに、
上記第２の金属として、Ｐｔ、Ｐｄ、Ｒｈ、Ｉｒ、Ｃ
ｏ、および、Ｎｉからなる群より選ばれる少なくとも１
種類の金属を用い、上記第１の金属と第２の金属との積
層界面に反射率の低い合金層を生じないような成膜条件
で作成した光磁気記録媒体用反射膜を開示している。However, the above alloy reflective film has lowered the high reflectance that the above pure metal reflective film has. Further, the conventional reflective film for a magneto-optical recording medium has a problem that it is still insufficient to satisfy both the high reflectance and the low thermal conductivity which is an important issue at the same time. Therefore, the present inventors have proposed in a prior application a reflective film for a magneto-optical recording medium having a high reflectance and a low thermal conductivity. That is, in the invention of the prior application, the first
Ag, Cu, Au, Al, Mg as the first metal of the reflective film for a magneto-optical recording medium in which a thin film made of the above metal and a thin film made of the second metal are alternately and repeatedly laminated.
While using at least one kind of metal selected from the group consisting of Ag-Au alloy and Au-Cu alloy,
As the second metal, Pt, Pd, Rh, Ir, C
at least 1 selected from the group consisting of o and Ni
Disclosed is a reflective film for a magneto-optical recording medium, which is prepared by using a kind of metal and is formed under a film forming condition such that an alloy layer having a low reflectance is not formed at a laminated interface between the first metal and the second metal. .
【０００７】[0007]
【発明が解決しようとする課題】上記先願発明は、反射
率が低下することなく低熱伝導率の反射膜を与えるので
非常に有用な提案である。しかしながら、難点を強いて
挙げるならば、反射膜を複数の層で形成する煩雑さがあ
り、また、反射膜が厚くなることにより、光磁気記録媒
体そのものがかさ高になるという懸念があった。The above-mentioned prior invention is a very useful proposal because it provides a reflective film having a low thermal conductivity without lowering the reflectance. However, to give a difficult point, there is a concern that the reflective film is formed of a plurality of layers, and that the magneto-optical recording medium itself becomes bulky due to the thick reflective film.
【０００８】そこで、本発明の目的は、このような課題
を解決して、高反射率、低熱伝導率で、かつ、耐食性に
優れ、しかも、簡便に作製することができる光磁気記録
媒体用反射膜を提供することにある。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to solve the above problems and to provide a reflection for a magneto-optical recording medium which has a high reflectance, a low thermal conductivity, an excellent corrosion resistance and can be easily manufactured. To provide a membrane.
【０００９】[0009]
【課題を解決するための手段】このような目的は、下記
の本発明により達成される。すなわち、本発明において
は、光磁気記録媒体用反射膜が金属固溶体により形成さ
れ、この金属固溶体が第１成分としてのＡｇまたはＡｇ
−Ａｕ合金に、第２成分として、２〜９ａｔｍ％のＴ
ｉ、６〜１４ａｔｍ％のＳｎ、または、５〜８ａｔｍ％
のＢｉを含有させたものである。このように組成を限定
した理由は、この範囲では、波長６３２．８ｎｍの光に
対する反射率が８０％以上で、かつ、膜厚１０００オン
グストロームのときの膜面内の熱伝導率が０．３Ｗ／ｃ
ｍＫ以下であるからである。The above object is achieved by the present invention described below. That is, in the present invention, the reflective film for a magneto-optical recording medium is formed of a metal solid solution, and the metal solid solution is Ag or Ag as the first component.
-Au alloy with 2-9 atm% T as the second component
i, 6 to 14 atm% Sn, or 5 to 8 atm%
Bi is included. The reason why the composition is limited in this way is that, in this range, the reflectance for light with a wavelength of 632.8 nm is 80% or more, and the thermal conductivity in the film surface at a film thickness of 1000 Å is 0.3 W / c
This is because it is mK or less.
【００１０】[0010]
【作用】上記のように構成された本発明の光磁気記録媒
体用反射膜では、第１成分として高反射率のＡｇまたは
Ａｇ−Ａｕ合金を用いるため、反射膜全体としての反射
率を高く保持することができる。一方、このＡｇまたは
Ａｇ−Ａｕ合金は熱伝導率が高く、記録層からの熱の放
散が不利となるので、このまま光磁気記録媒体の反射膜
として用いるには不向きである。この対策としてＡｇま
たはＡｇ−Ａｕ合金に第２成分としての金属を添加する
ことにより、高反射率を保持しつつ、熱伝導率を低下さ
せることができる。この添加金属としては主成分金属格
子中に低濃度で固溶した時に、添加金属１原子あたりの
主成分金属の電気伝導度の低下が大きい金属を選ぶこと
が好ましい。金属の熱伝導は自由電子の移動によって起
こるからである。このような金属を主成分金属に低濃度
固溶させると主成分金属を単体で用いる場合と比較して
熱伝導率は大きく低下する一方、添加金属濃度をなるべ
く低く規制することにより、主成分金属単体の場合の高
反射率はあまり低下せず高反射率かつ低熱伝導率の合金
反射膜を得ることができる。また、主成分金属としての
Ａｇは高温の酸素中に放置しても酸化等の化学変化を受
けない安定な金属であり、Ａｕも化学的に非常に安定で
あるので、本発明の反射膜は経時変化によって腐食等を
生じない耐食性の高い、優れた特性を示す。なお、主成
分としてのＡｇ−Ａｕ合金の成分組成は、Ａｇに対しＡ
ｕを５０ａｔｍ％未満含有させることにより、好適な反
射膜を得ることができる。In the reflective film for a magneto-optical recording medium of the present invention constructed as described above, since Ag or Ag-Au alloy having a high reflectance is used as the first component, the reflectance of the entire reflective film is kept high. can do. On the other hand, this Ag or Ag-Au alloy has a high thermal conductivity and is disadvantageous in the dissipation of heat from the recording layer. Therefore, it is unsuitable for use as it is as a reflective film of a magneto-optical recording medium. As a countermeasure against this, by adding a metal as a second component to Ag or Ag-Au alloy, it is possible to reduce the thermal conductivity while maintaining high reflectance. As the added metal, it is preferable to select a metal that causes a large decrease in the electrical conductivity of the main component metal per atom of the added metal when it forms a solid solution in the main component metal lattice at a low concentration. This is because the heat conduction of metal occurs due to the movement of free electrons. When such a metal is dissolved in the main component metal in a low concentration, the thermal conductivity is greatly reduced as compared with the case where the main component metal is used alone, but by controlling the concentration of the added metal as low as possible, the main component metal The high reflectance in the case of a simple substance does not decrease so much, and an alloy reflection film having high reflectance and low thermal conductivity can be obtained. Further, Ag as a main component metal is a stable metal that is not chemically changed by oxidation even when left in high temperature oxygen, and Au is also chemically very stable. Therefore, the reflection film of the present invention is It exhibits excellent properties with high corrosion resistance and does not cause corrosion, etc. due to aging. The composition of the Ag-Au alloy as the main component is A with respect to Ag.
By containing u in an amount of less than 50 atm%, a suitable reflective film can be obtained.
【００１１】[0011]
【実施例】以下、本発明の一実施例について詳述する。
光磁気記録媒体用反射膜としては、通常Ａｕ、Ｃｕ等の
８５〜９６％の高反射率を示す金属が用いられるが、Ａ
ｇあるいはＡｇ−Ａｕ合金を主成分金属とする場合に
は、本発明のようにＴｉ、Ｓｎ、Ｂｉ等の金属との合金
を用いると、高品質の反射膜を得ることができる。本発
明においては、ＡｇあるいはＡｇ−Ａｕ合金に含有させ
るＴｉ、Ｓｎ、あるいは、Ｂｉの量を上記の範囲に規制
する。この範囲に第２成分金属の量を制御することによ
りＡｇあるいはＡｇ−Ａｕ合金の高反射率を保持しつ
つ、低熱伝導率の反射膜を得ることができる。この反射
膜の厚さは１００オングストローム以上であることが好
ましく、また、熱伝導率が膜厚増加にともなって減少す
ること、コスト、生産作業性等を考慮すると、１０００
オングストローム程度以下であることが好ましい。この
反射膜の成膜方法は蒸着法、スパッタ法等を用いれば良
いが、特に通常の２元スパッタ法を用いると成分組成の
制御が容易となるので好適である。この際の成分組成の
制御はターゲットに印加される高周波電力値の調整ある
いは被着体の位置の移動等により行えばよい。EXAMPLE An example of the present invention will be described in detail below.
As the reflective film for the magneto-optical recording medium, a metal having a high reflectance of 85 to 96% such as Au or Cu is usually used.
When g or Ag-Au alloy is used as the main component metal, an alloy with a metal such as Ti, Sn, or Bi is used as in the present invention to obtain a high quality reflective film. In the present invention, the amount of Ti, Sn, or Bi contained in Ag or Ag-Au alloy is regulated within the above range. By controlling the amount of the second component metal within this range, it is possible to obtain a reflective film having a low thermal conductivity while maintaining the high reflectance of Ag or Ag-Au alloy. The thickness of the reflective film is preferably 100 angstroms or more, and when the thermal conductivity decreases with an increase in the film thickness, the cost and the workability of production are taken into consideration, it is 1000
It is preferably about angstrom or less. A vapor deposition method, a sputtering method, or the like may be used as a method for forming the reflective film, but a normal two-way sputtering method is particularly preferable because the composition of components can be easily controlled. At this time, the component composition may be controlled by adjusting the high frequency power value applied to the target or moving the position of the adherend.
【００１２】表１には、各種合金の膜組成に対する測定
波長６３２．８ｎｍのレーザ光による初期反射率Ｒ0、
初期熱伝導率Ｋ0、耐食試験１２００時間後の反射率
（Ｒ1200）の各測定値を示している。この場合、各合金
膜の膜厚は１０００オングストロームである。このよう
にＡｇに本発明に係る範囲の金属成分（Ｔｉ，Ｓｎ，Ｂ
ｉ）を含ませた合金膜では、その初期反射率は８０％以
上で、かつ、熱伝導率は０．３０Ｗ／ｃｍＫ以下であ
り、いずれも良好な値を示している。なお、本発明を外
れる範囲であるＴｉ等の高濃度領域においては、反射率
が極端に低下して、光磁気記録媒体用反射膜としては使
用不能となる。Table 1 shows the initial reflectance R 0 by laser light having a measurement wavelength of 632.8 nm with respect to the film composition of various alloys.
The respective measured values of the initial thermal conductivity K 0 and the reflectance (R 1200 ) after 1200 hours of the corrosion resistance test are shown. In this case, the thickness of each alloy film is 1000 angstrom. As described above, the metal components (Ti, Sn, B) within the range according to the present invention are added to Ag.
The alloy film containing i) has an initial reflectance of 80% or more and a thermal conductivity of 0.30 W / cmK or less, which are all favorable values. In the high concentration region of Ti or the like, which is outside the scope of the present invention, the reflectance is extremely reduced, and it cannot be used as a reflective film for a magneto-optical recording medium.
【００１３】[0013]
【表１】 [Table 1]
【００１４】また、表１に併記するように、ＡｇにＴｉ
を２．１３ａｔｍ％含有させた合金を用いて作製した反
射膜を温度８０℃、相対湿度８５％の雰囲気中に保持し
た場合の耐食試験の結果、このＡｇ−Ｔｉ製反射膜は１
０００時間の経時後も反射率の低下が耐食試験前の初期
状態と比較して８％程度に留まり、優れた耐食性を示し
ている。Further, as also shown in Table 1, Ag is replaced by Ti.
As a result of a corrosion resistance test when a reflective film produced by using an alloy containing 2.13 atm% of Al was held in an atmosphere at a temperature of 80 ° C. and a relative humidity of 85%, this Ag-Ti reflective film was 1
Even after the lapse of 000 hours, the decrease in reflectance was about 8% as compared with the initial state before the corrosion resistance test, showing excellent corrosion resistance.
【００１５】[0015]
【発明の効果】本発明は、ＡｇあるいはＡｇ−Ａｕ合金
の高い反射率を保持しつつ、添加金属のＴｉ、Ｓｎ、あ
るいは、Ｂｉによって、熱伝導率を低下させて耐食性の
高い好適な光磁気記録媒体用反射膜を与え、かつ、その
製造方法も簡便なものである。INDUSTRIAL APPLICABILITY According to the present invention, the high reflectance of Ag or Ag-Au alloy is maintained, while the added metal Ti, Sn, or Bi lowers the thermal conductivity and has a high corrosion resistance. A reflective film for a recording medium is provided, and its manufacturing method is also simple.
Claims (2)
射膜と、を有する光磁気記録媒体において、 上記反射膜を、第１成分としてのＡｇまたはＡｇ−Ａｕ
合金に、第２成分として、Ｔｉを２〜９ａｔｍ％、また
は、Ｓｎを６〜１４ａｔｍ％、または、Ｂｉを５〜８ａ
ｔｍ％の範囲で含有させた２成分系金属固溶体により形
成したことを特徴とする光磁気記録媒体用反射膜。1. A magneto-optical recording medium having a recording layer and a reflective film laminated on the recording layer, wherein the reflective film comprises Ag or Ag—Au as a first component.
In the alloy, as a second component, Ti is 2 to 9 atm%, Sn is 6 to 14 atm%, or Bi is 5 to 8 a.
A reflective film for a magneto-optical recording medium, which is formed of a binary metal solid solution contained in a range of tm%.
に対する反射率が８０％以上で、かつ、膜厚が１０００
オングストロームのときの膜面内の熱伝導率が０．３Ｗ
／ｃｍＫ以下である請求項１に記載の光磁気記録媒体用
反射膜。2. The reflection film has a reflectance of 80% or more for light having a wavelength of 632.8 nm and a film thickness of 1000.
In-plane thermal conductivity of 0.3 W at Angstrom
/ CmK or less, the reflective film for a magneto-optical recording medium according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11215693A JPH06302027A (en) | 1993-04-15 | 1993-04-15 | Reflecting film for magneto-optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11215693A JPH06302027A (en) | 1993-04-15 | 1993-04-15 | Reflecting film for magneto-optical recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06302027A true JPH06302027A (en) | 1994-10-28 |
Family
ID=14579642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11215693A Withdrawn JPH06302027A (en) | 1993-04-15 | 1993-04-15 | Reflecting film for magneto-optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06302027A (en) |
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