JPH08241542A - Optical recording medium - Google Patents

Optical recording medium

Info

Publication number
JPH08241542A
JPH08241542A JP7039583A JP3958395A JPH08241542A JP H08241542 A JPH08241542 A JP H08241542A JP 7039583 A JP7039583 A JP 7039583A JP 3958395 A JP3958395 A JP 3958395A JP H08241542 A JPH08241542 A JP H08241542A
Authority
JP
Japan
Prior art keywords
film
recording
optical recording
phase
magneto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7039583A
Other languages
Japanese (ja)
Inventor
Hideo Kaneko
英雄 金子
Katsushi Tokunaga
勝志 徳永
Yoshio Tawara
好夫 俵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP7039583A priority Critical patent/JPH08241542A/en
Publication of JPH08241542A publication Critical patent/JPH08241542A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain an optical recording medium capable of recording and reproducing four values at the same position as an optical recording medium used in an external recorder. CONSTITUTION: This optical recording medium has at least a magnetooptical recording film and a phase change type recording film on the substrate. The phase change type recording film has the practically same reflectance and mutually different apparent angles of Kerr rotation when the film has a crystal phase and when it has an amorphous phase.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、コンピュータの外部記
録装置などに用いられる光記録媒体において、同じ位置
に4値記録、再生を行うことができ、高記録密度で記
録、再生ができかつ、オーバーライト可能な光記録媒体
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention can record and reproduce four values at the same position in an optical recording medium used for an external recording device of a computer, and can record and reproduce at high recording density. The present invention relates to an overwritable optical recording medium.

【0002】[0002]

【従来の技術】光記録媒体において、光磁気記録媒体や
相変化型記録媒体は書き換え可能な大容量記録媒体とし
て実用化され、さらに高記録密度化し大容量化するため
に種々の試みがなされている。光磁気記録媒体は磁性膜
の磁化の向きで記録し、磁化している磁性体に直線偏光
をあてると偏光面が回転するというカー効果を利用して
信号を読みだすというものである。一般に光磁気記録媒
体は見かけのカー回転角を大きくする(カー回転角エン
ハンスメント)目的で誘電体膜や反射膜を設け、さらに
これらの膜は記録膜の保護や熱特性の向上を担ってお
り、一般には基板/誘電体膜/記録膜/誘電体膜/反射
膜、の構造をしている。一般に記録膜には酸化されやす
い希土類遷移金属合金膜が用いられている。このため誘
電体膜は酸化物より、窒化膜の方が好ましいとされてい
る。また、キュリー温度近くまで記録膜を熱して、ここ
に外部磁界を印加してその方向に記録膜を磁化すること
によって磁化するが、印加する磁場を磁気ヘッドで発生
させることで高速に磁場の向きを変え、記録する方式を
磁界変調方式といい、簡単にオーバーライトのできる方
式として実用化されている。
2. Description of the Related Art Among optical recording media, magneto-optical recording media and phase change recording media have been put to practical use as rewritable large-capacity recording media, and various attempts have been made to further increase recording density and capacity. There is. A magneto-optical recording medium records in the direction of magnetization of a magnetic film and reads a signal by using the Kerr effect that the plane of polarization rotates when linearly polarized light is applied to a magnetized magnet. In general, a magneto-optical recording medium is provided with a dielectric film or a reflective film for the purpose of increasing the apparent Kerr rotation angle (Kerr rotation angle enhancement), and these films are responsible for protecting the recording film and improving thermal characteristics. Generally, it has a structure of substrate / dielectric film / recording film / dielectric film / reflection film. Generally, a rare earth transition metal alloy film that is easily oxidized is used for the recording film. Therefore, it is said that the nitride film is preferable to the oxide film as the dielectric film. In addition, the recording film is magnetized by heating it to a temperature near the Curie temperature and applying an external magnetic field to the recording film to magnetize the recording film in that direction. The method of changing and recording is called the magnetic field modulation method, and it is put to practical use as a method that can be easily overwritten.

【0003】相変化型記録媒体は結晶相とアモルファス
相の二つの異なる状態を利用して記録する方式で、記録
には高いパワーで融点以上に記録膜を熱しアモルファス
相にし、低いパワーで結晶化温度まであげ結晶相にする
というレーザーパワーの強度を2値にすることで記録
し、二つの状態で光学定数が異なるため、反射率の違い
として書き込んだ情報を検出する記録媒体である。高記
録密度化のためには1記録単位(ドメイン)の記録面積
を小さくするか、従来は1記録単位が2値で構成されて
いるが、これを3値、4値と多値にするかいずれかの方
法、もしくは、この組み合わせを行うことによってさら
なる高記録密度化が期待できる。
The phase-change recording medium is a method of recording by utilizing two different states of a crystalline phase and an amorphous phase. For recording, the recording film is heated to a temperature higher than the melting point with a high power to make it an amorphous phase and crystallized at a low power. It is a recording medium for recording information by making the intensity of laser power to be a crystal phase by raising the temperature to a binary value, and detecting written information as a difference in reflectance because the optical constants differ between the two states. In order to increase the recording density, the recording area of one recording unit (domain) should be reduced, or conventionally one recording unit is composed of two values. Further high recording density can be expected by performing either method or this combination.

【0004】しかし、光記録においては、再生できる最
低の大きさの記録単位は、レーザーの波長や光学ヘッド
の集光レンズのNAやレーザー光の強度の空間分布によ
って決まる光の収束度によってきまってしまう。このた
め、アイリスターが提唱されている。多値記録に関して
は、記録位置を微妙にずらしたり、ドメインの大きさを
変えることによって多値化することや記録膜を多層化す
ることによって多値記録を行うことが開示されている。
なかでも光磁気膜と相変化型記録膜を用いて多値記録を
行うことが安定に記録再生できるため好ましい(特開平
4-206054号公報、特開平 5-12751号公報、特開平5-1594
10号公報参照)。しかしここで開示されている方法は反
射率とカー回転角、カー楕円率とカー回転角の2つの量
の違いで検出を行うため、検出が複雑になるという問題
があった。特に反射率がかわると信号再生において増幅
しにくくなるという問題がある。また、光磁気記録膜を
2層にして多値記録を行う方法も開示されているが記録
層2層で3値記録を行っているため記録膜の数に比べて
効率がよくないか、オーバーライトができないものにな
っている(特開昭64-17248号公報、特開平1-290143号公
報、特開平4-010256号公報参照)。
However, in optical recording, the minimum recording unit that can be reproduced depends on the wavelength of the laser, the NA of the condenser lens of the optical head, and the degree of convergence of the light determined by the spatial distribution of the intensity of the laser light. . For this reason, the Ilister is advocated. Regarding multi-valued recording, it is disclosed that the recording position is delicately shifted, the domain is changed in size to make it multi-valued, or the recording film is made multi-layered to make multi-valued recording.
Among them, it is preferable to perform multi-valued recording by using a magneto-optical film and a phase-change recording film because stable recording and reproduction can be performed (Japanese Patent Laid-Open No. Hei 10 (1999) -242242).
4-206054, JP 5-12751, JP 5-1594
(See Japanese Patent No. 10). However, the method disclosed here has a problem that the detection becomes complicated because the detection is performed by the difference between the two quantities of the reflectance and the Kerr rotation angle, and the Kerr ellipticity and the Kerr rotation angle. In particular, when the reflectance changes, there is a problem that it becomes difficult to amplify in signal reproduction. Further, a method of performing multi-valued recording with two magneto-optical recording films is also disclosed, but since three-valued recording is performed with two recording layers, it may be inefficient compared to the number of recording films, or over recording may occur. It cannot write (see JP-A-64-17248, JP-A-1-290143, and JP-A-4-010256).

【0005】[0005]

【発明が解決しようとする課題】本発明は上記の点を解
決して光磁気型記録膜と相変化型記録膜の両方をもつ光
記録媒体において、読み出し量を一つにし、読み出し機
構を単純にすることを目的としたものである。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems, and in an optical recording medium having both a magneto-optical recording film and a phase change recording film, the read amount is set to one and the read mechanism is simplified. The purpose is to

【0006】[0006]

【課題を解決するための手段】本発明は上記の点を解決
した光記録媒体でこれは基板上に少なくとも光磁気記録
膜と相変化型記録膜を具備してなる光記録媒体におい
て、該相変化型記録膜が結晶相であるときとアモルファ
ス相であるときの反射率が実質同じ値を示し、見かけの
カー回転角の大きさが異なる値を示すことを特徴とする
光記録媒体を要旨とするものである。本発明者等は基板
上に光磁気記録膜と相変化型記録膜を具備してなる光記
録媒体において該相変化型記録膜が結晶相であるときと
アモルファス相であるときの反射率が実質同じで見かけ
のカー回転角の大きさが異なる値を示す光記録媒体を用
いることにより同じ位置で4値の記録、再生の出来るこ
とを見出し、種々検討して本発明を完成した。
SUMMARY OF THE INVENTION The present invention is an optical recording medium which solves the above problems, which is an optical recording medium comprising at least a magneto-optical recording film and a phase change recording film on a substrate. The gist of an optical recording medium characterized in that the reflectivity when the variable recording film is in the crystalline phase and that when it is in the amorphous phase show substantially the same value, and the apparent Kerr rotation angle shows different values. To do. The present inventors have found that in an optical recording medium having a magneto-optical recording film and a phase change recording film on a substrate, the reflectance when the phase change recording film is in the crystalline phase and the amorphous phase is substantially equal. The inventors have found that 4-valued recording and reproduction can be performed at the same position by using optical recording media having the same apparent Kerr rotation angles but different values, and various studies have been made to complete the present invention.

【0007】本発明の記録方法は光記録媒体が基板上に
光磁気記録膜と相変化型記録膜を具備しているので、こ
れに入射光を照射することにより、光磁気記録膜におい
てはこれに外部磁場を磁気ヘッドで印加して、磁場の向
きを変えることによって光磁気記録膜の磁化の向きを変
えることが出来る。又同時に相変化型記録膜においては
入射光の強さを変えることにより、入射光が強い場合
(記録膜の温度が高い場合)はアモルファス相に、又入
射光が弱い場合(記録膜の温度が低い場合)は結晶相と
なるので表1に示すように光記録媒体の1点に強、弱の
入射光を照射することにより同じ位置に4つの状態のい
ずれかが記録出来、4値記録が出来ることになる。
In the recording method of the present invention, since the optical recording medium comprises the magneto-optical recording film and the phase-change recording film on the substrate, the incident light is applied to the magneto-optical recording film so that the magneto-optical recording film is not affected by the incident light. The direction of the magnetization of the magneto-optical recording film can be changed by applying an external magnetic field with a magnetic head and changing the direction of the magnetic field. At the same time, by changing the intensity of the incident light in the phase change recording film, when the incident light is strong (when the temperature of the recording film is high), it is in the amorphous phase and when the incident light is weak (when the temperature of the recording film is high). If it is low), it becomes a crystalline phase. Therefore, as shown in Table 1, by irradiating one point of the optical recording medium with strong or weak incident light, one of four states can be recorded at the same position, and four-value recording is possible. It will be possible.

【0008】[0008]

【表1】 [Table 1]

【0009】なお、本発明では光磁気記録膜への記録方
法は通常の光磁気装置の磁界変調方式と同じであり、ま
た、相変化型記録膜も光変調でオーバーライト可能であ
るから、記録後の記録膜の状態は記録前の状態にはよら
ない。よってオーバーライト可能である。
In the present invention, the method of recording on the magneto-optical recording film is the same as the magnetic field modulation method of a normal magneto-optical device, and the phase change recording film can be overwritten by optical modulation. The state of the subsequent recording film does not depend on the state before recording. Therefore, it is possible to overwrite.

【0010】本発明では記録の再生の点から状態1と状
態4、及び状態2と状態3がそれぞれ見かけのカー回転
角の大きさが同じで偏光面の回転の向きが異なってい
る。ただし状態1と2及び状態3と4は偏光面の回転の
方向は同じであるが、見かけのカー回転角は異なるもの
である。状態1〜4からカー回転角のちがいから読みだ
される信号の強度比は例えば表2に示す相対強度1また
は2の強度比であるのが記録の再生のし易さの点から好
ましい。
In the present invention, in terms of recording and reproduction, the states 1 and 4 and the states 2 and 3 have the same apparent Kerr rotation angle and different polarization directions. However, in the states 1 and 2 and the states 3 and 4, the directions of rotation of the polarization planes are the same, but the apparent Kerr rotation angles are different. The intensity ratio of the signals read out from the states 1 to 4 due to the difference in the Kerr rotation angle is preferably the intensity ratio of relative intensities 1 or 2 shown in Table 2 from the viewpoint of ease of recording and reproduction.

【0011】[0011]

【表2】 [Table 2]

【0012】再生方法はカー回転角を検出する通常の光
磁気記録装置の再生系でよく、差動検出系を用いること
でノイズを低減できる。
The reproducing method may be a reproducing system of an ordinary magneto-optical recording device for detecting the Kerr rotation angle, and noise can be reduced by using a differential detecting system.

【0013】相変化型記録膜が結晶相であるときとアモ
ルファス相であるときの反射率が実質同じで、見かけの
カー回転角が異なる値を示すように設定するには、各膜
の厚みを調節することによって行うことが出来る。すな
わち膜全体の仮想複素屈折率を、相変化型記録膜が結晶
相のときを、Nc *とし、アモルファス相のときをNa *
し、又これ等に対して右円偏光に対しては仮想複素屈折
率をNc *+ 、Na *+ とし、左円偏光に対しては仮想複素
屈折率をNc *- 、Na *- とし、更に基板の仮想複素屈折
率をn* とすると、各仮想複素屈折率の関係が(1)式
でかつ(2)式の関係になるように各膜の厚みを設定す
ればよい。 |(n* −Nc *) / (n* +Nc *)|2 ≒|(n* −Na *) / (n* +Na *)|2 …( 1) Nc *+ ≠Na *+ またはNc *- ≠Na *- …(2) ここに反射率が実質同じ値とは、相変化型記録膜がアモ
ルファス相であるときの反射率の値に対して、結晶相で
あるときの反射率の値が90〜110 %の範囲の値を意味す
るものである。
In order to set the reflectances when the phase-change recording film is in the crystalline phase and when it is in the amorphous phase to be substantially the same and the apparent Kerr rotation angle shows different values, the thickness of each film is set. It can be done by adjusting. That is, the virtual complex refractive index of the entire film is N c * when the phase change recording film is in the crystalline phase and N a * when it is in the amorphous phase. virtual complex refractive index n c * +, and n a * +, n c * virtual complex refractive index with respect to left-circularly polarized light -, n a * - and then, further virtual complex refractive index of the substrate and the n * Then, the thickness of each film may be set so that the virtual complex refractive indices have the relationship of the expression (1) and the relationship of the expression (2). | (n * -N c *) / (n * + N c *) | 2 ≒ | (n * -N a *) / (n * + N a *) | 2 ... (1) N c * + ≠ N a * + Or N c *- ≠ N a *- (2) Here, the value that the reflectance is substantially the same means that the value in the crystalline phase is different from the value in the reflectance when the phase change recording film is in the amorphous phase. The reflectance value at a given value means a value in the range of 90 to 110%.

【0014】膜構成としてはポリカーボネート樹脂(P
C)やポリメチルメタアクリレイト(PMMA)のよう
なプラスチックやガラスのような透明な基板の上に光磁
気記録膜と相変化型記録膜を兼ね備えていればよい。し
かし、一般には書き込み温度は相変化型記録膜の方が高
いため、相変化型記録膜と光磁気記録膜の間には誘電体
膜をはさんだ方が好ましい。また、基板と記録膜の間に
も記録膜の耐食性の向上や、基板の熱による変形を防ぐ
ために誘電体膜を設けた方が好ましく、さらには、カー
回転角のエンハンスのために反射膜を設けることも有効
である。膜構造の例として、例えば光入射側から下記の
順で積層された膜構造として基板/誘電体膜(1) /相変
化型記録膜/誘電体膜(2) /光磁気型記録膜/誘電体膜
(3) /反射膜よりなるもの、基板/誘電体膜(1) /光磁
気型記録膜/誘電体膜(2) /相変化型記録膜/誘電体膜
(2) /反射膜よりなるもの、更に基板/誘電体膜(1) /
相変化型記録膜/誘電体膜(2) /光磁気型記録膜/反射
膜が例示される。
As the film constitution, a polycarbonate resin (P
It is sufficient that the magneto-optical recording film and the phase-change recording film are both provided on a transparent substrate such as plastic or glass such as C) or polymethylmethacrylate (PMMA). However, since the writing temperature is generally higher in the phase change recording film, it is preferable to sandwich a dielectric film between the phase change recording film and the magneto-optical recording film. In addition, it is preferable to provide a dielectric film between the substrate and the recording film to improve the corrosion resistance of the recording film and prevent the substrate from being deformed by heat. Furthermore, a reflective film is provided to enhance the Kerr rotation angle. It is also effective to provide. As an example of the film structure, for example, a film structure in which the light incident side is laminated in the following order: substrate / dielectric film (1) / phase change recording film / dielectric film (2) / magneto-optical recording film / dielectric Body membrane
(3) / consisting of reflective film, substrate / dielectric film (1) / magneto-optical recording film / dielectric film (2) / phase change recording film / dielectric film
(2) / consisting of a reflective film, further substrate / dielectric film (1) /
Examples include phase change type recording film / dielectric film (2) / magneto-optical type recording film / reflection film.

【0015】各層の膜厚は熱的な条件と相変化膜がアモ
ルファス相の時と結晶相とで媒体の反射率が一定でかつ
見かけのカー回転角の大きさが異なるように上述の方法
で設定する。膜厚によっては、相変化膜がアモルファス
相の時と結晶の時とで媒体の反射率が等しくなるように
するとカー回転角も同じになってしまうことがある。例
えば、膜構造2で誘電体膜(2) /相変化型記録膜/誘電
体膜(3) /反射膜の仮想屈折率は、相変化型記録膜がア
モルファス相の時と結晶相の時とで同じくなるように選
ぶことができる。しかし、この時には見かけのカー回転
角も同じくなってしまうため4値記録できない。
The thickness of each layer is determined by the above-described method so that the medium reflectivity is constant and the apparent Kerr rotation angle is different depending on the thermal conditions, the phase change film is in the amorphous phase and the crystalline phase. Set. Depending on the film thickness, the Kerr rotation angle may become the same when the medium reflectance is made equal when the phase change film is in the amorphous phase and when the crystal is in the crystal phase. For example, in the film structure 2, the virtual refractive index of the dielectric film (2) / phase change recording film / dielectric film (3) / reflection film is as follows when the phase change recording film is in the amorphous phase and in the crystalline phase. You can choose to be the same. However, at this time, the apparent car rotation angle also becomes the same, so four-value recording cannot be performed.

【0016】相変化型記録膜が結晶相とアモルファス相
で反射率が略同じ値を示し、見かけカー回転角が異なる
値を示すためには、この相変化型記録膜は例えばカルコ
ゲン化合物などの公知のものとすればよく、膜組成は公
知のものでよく例えば Ge-Te,Sb-Te,In-Sb,Sb-Ge-Te,In
-Se-Tl-Co,Ag-In-Te-Sb,In-Sb-Teなどが例示される。相
変化膜の厚さは5nm未満では一様な膜が再現性よく得ら
れにくくなり、50nmを超えると結晶相で相変化膜を透過
する光が少なくなりすぎるので5〜50nmとすることがよ
く、好ましくは5〜20nmである。
In order for the phase-change recording film to show substantially the same reflectivity in the crystalline phase and the amorphous phase and different apparent Kerr rotation angles, the phase-change recording film is made of, for example, a known chalcogen compound. The composition of the film may be a known one, for example Ge-Te, Sb-Te, In-Sb, Sb-Ge-Te, In
-Se-Tl-Co, Ag-In-Te-Sb, In-Sb-Te, etc. are exemplified. If the thickness of the phase change film is less than 5 nm, it is difficult to obtain a uniform film with good reproducibility, and if it exceeds 50 nm, the amount of light passing through the phase change film in the crystalline phase becomes too small. , Preferably 5 to 20 nm.

【0017】光磁気記録膜は一般に知られている公知の
ものでよく例えば Tb-Fe,Tb-Fe-Co,Gd-Fe,Gd-Fe-Co,Gd-
Tb-Fe,Gd-Tb-Fe-Co,Dy-Tb-Fe,Dy-Fe,Gd-Co,Tb-Co,Gd-Dy
-Tb-Fe などの希土類遷移金属合金、またはCo-Pt,Co-P
d,などの超格子多層膜が用いられる。光磁気記録膜の厚
さは5nm未満であると信号に差がつきにくくなり50nmを
超えると書き込みに大きなパワーが必要となるので5〜
50nmとすることがよく、好ましくは5〜30nm、 特に好ま
しくは5〜15nmである。
The magneto-optical recording film may be a generally known and known one, for example, Tb-Fe, Tb-Fe-Co, Gd-Fe, Gd-Fe-Co, Gd-.
Tb-Fe, Gd-Tb-Fe-Co, Dy-Tb-Fe, Dy-Fe, Gd-Co, Tb-Co, Gd-Dy
Rare earth transition metal alloys such as -Tb-Fe, or Co-Pt, Co-P
A superlattice multilayer film such as d, is used. If the thickness of the magneto-optical recording film is less than 5 nm, it is difficult to make a difference in signals, and if it exceeds 50 nm, a large power is required for writing.
The thickness is preferably 50 nm, preferably 5 to 30 nm, particularly preferably 5 to 15 nm.

【0018】誘電体膜としては、公知のものでよく例え
ばSi-N,Si-O,Zn-S,Al-N,Si-Al-O-N,Zn-S-Si-O 、または
これに水素を含有したものが例示され、各誘電体膜1、
2、3は同じでも異なってもよい。特に誘電体膜2は2
層にし、光磁気記録膜側は光磁気記録膜に直接酸化膜を
形成すると光磁気記録膜が酸化するという理由で窒化膜
にし相変化側は ZnS+SiOにすることが好ましい。各誘電
体膜の厚さは特に制限はないが、5nm未満では一様な膜
になりにくく、500 nmを超えると成膜に長時間を要し、
かつ剥離しやすくなるので5〜500 nmとすることが適当
で、好ましくは5〜200nm である。
The dielectric film may be a known one, for example, Si-N, Si-O, Zn-S, Al-N, Si-Al-ON, Zn-S-Si-O, or hydrogen to this. Examples of the inclusion include, each dielectric film 1,
A few may be the same or different. In particular, the dielectric film 2 is 2
The magneto-optical recording film side is preferably a nitride film on the magneto-optical recording film side and the phase-change side is ZnS + SiO because the magneto-optical recording film is oxidized by directly forming an oxide film on the magneto-optical recording film. The thickness of each dielectric film is not particularly limited, but if it is less than 5 nm, it is difficult to form a uniform film, and if it exceeds 500 nm, it takes a long time to form the film.
In addition, the thickness is preferably 5 to 500 nm, and more preferably 5 to 200 nm, because it is easily peeled off.

【0019】反射膜は公知のものでよく、光記録媒体で
一般に用いられているようにAl,Au,Ag,Pt,Cuなど反射率
が高いものがよいが、特にAlは廉価で耐食性もよいので
好ましい。さらにAlなど上記金属にTi、Cr、希土類など
を添加すると熱伝導率がさがり、耐食性が向上するので
好ましい。反射膜の厚さは10nm未満では光が透過してし
まい、500nm を超えると成膜に長時間を要するので10〜
500nm とすることがよく、好ましくは10〜200nm であ
る。
The reflective film may be a known film, and as is generally used in optical recording media, a film having a high reflectance such as Al, Au, Ag, Pt, and Cu is preferable, but Al is inexpensive and has good corrosion resistance. Therefore, it is preferable. Furthermore, it is preferable to add Ti, Cr, a rare earth or the like to the above metal such as Al because the thermal conductivity is lowered and the corrosion resistance is improved. If the thickness of the reflective film is less than 10 nm, light is transmitted, and if it exceeds 500 nm, it takes a long time to form a film.
The thickness is preferably 500 nm, preferably 10 to 200 nm.

【0020】成膜方法は特に制約はないが、一般に光記
録媒体の製造に用いられている、スパッタ法でよい。
The film forming method is not particularly limited, but a sputtering method which is generally used for manufacturing an optical recording medium may be used.

【0021】反射率は特に制約はないが、反射率を35%
を超えて設定するとカー回転角を大きくできず、また10
%未満とするとノイズが大きくなるので10〜35%が好ま
しい。又、各層の反射率は10〜35%の範囲で実質同じ値
に設定することが好ましい。
The reflectance is not particularly limited, but the reflectance is 35%.
If it is set over, the car rotation angle cannot be increased and
If it is less than%, noise increases, so 10 to 35% is preferable. The reflectance of each layer is preferably set to be substantially the same within the range of 10 to 35%.

【0022】本発明は光磁気膜1層、相変化膜1層で説
明したが、光磁気記録膜や相変化膜を多層にして、4値
以上を同じ記録領域に記録してもよく、また、アイリス
ターなどと組み合わせ、さらに高記録密度化することも
出来る。
Although the present invention has been described with respect to the magneto-optical film 1 layer and the phase change film 1 layer, the magneto-optical recording film and the phase change film may be multi-layered to record four or more values in the same recording area. It is also possible to increase the recording density by combining with, such as, Ilister.

【0023】[0023]

【作用】本発明は基板上に少なくとも光磁気記録膜と相
変化型記録膜を具備してなる光記録媒体において、該相
変化型記録膜が結晶相であるときとアモルファス相であ
るときの反射率が実質同じ値を示し、見かけのカー回転
角が異なる値を示す光記録媒体を用いると、同じ位置に
2組の異なる見かけのカー回転角を、磁化の方向を2方
向の異なる向きに記録、再生出来るので、該媒体上の同
じ位置で4値記録、再生が出来、記録方法も通常の光磁
気記録装置の磁界変調方式で行い、再生方法もカー回転
角を検出する通常の光磁気記録装置で行うことが出来る
というメリットがある。
The present invention provides an optical recording medium having at least a magneto-optical recording film and a phase change recording film on a substrate, and reflection when the phase change recording film is in a crystalline phase and in an amorphous phase. By using an optical recording medium that has substantially the same value and different apparent Kerr rotation angles, two sets of different apparent Kerr rotation angles are recorded at the same position in two different magnetization directions. Since it can be reproduced, 4-level recording and reproduction can be performed at the same position on the medium, and the recording method is also the magnetic field modulation method of the ordinary magneto-optical recording apparatus, and the reproducing method is also the ordinary magneto-optical recording in which the Kerr rotation angle is detected. There is a merit that it can be performed by the device.

【0024】[0024]

【実施例】以下本発明の実施例について述べる。 実施例 直径86mm厚さ1.2 mmのガラス基板に誘電体膜(1) /相変
化記録膜/誘電体膜(2) /光磁気記録膜/誘電体膜(3)
/反射膜をこの順に積層した。各膜はRfマグネトロンス
パッタで成膜した。各膜の成膜条件を表3に示す。な
お、ターゲットは4インチで膜厚はあらかじめ単層膜を
つくり、このときの時間と膜厚の関係をもとめ、これよ
り所定の膜厚になる時間だけ成膜を行った。
Embodiments of the present invention will be described below. Example: Dielectric film (1) / phase change recording film / dielectric film (2) / magneto-optical recording film / dielectric film (3) on a glass substrate having a diameter of 86 mm and a thickness of 1.2 mm
/ Reflective film was laminated in this order. Each film was formed by Rf magnetron sputtering. Table 3 shows the film forming conditions for each film. The target was 4 inches, and a single-layer film was formed in advance. The relationship between the time and the film thickness at this time was determined, and the film was formed for a time to obtain a predetermined film thickness.

【0025】[0025]

【表3】 [Table 3]

【0026】これに 830mmのレーザーを照射し、カー回
転角を測定した結果を表4に示す。
The result of irradiating this with a laser of 830 mm and measuring the Kerr rotation angle is shown in Table 4.

【0027】[0027]

【表4】 [Table 4]

【0028】[0028]

【発明の効果】本発明の光記録媒体は、該媒体の同じ位
置に2組の異なる見かけの回転角を、磁化の方向を2方
向の異なる向きに記録、再生出来るので、該媒体上の同
じ位置で4値記録、再生が出来、しかも記録方法も通常
の光磁気記録装置の磁界変調方式において、レーザーパ
ワーも2値で行い、再生方法もカー回転角を検出する通
常の光磁気記録装置で行うことが出来る。又、該媒体を
多層化することにより多値記録、再生が出来、より高密
度記録が出来、オーバーライトが可能である。
The optical recording medium of the present invention is capable of recording and reproducing two sets of different apparent rotation angles at the same position of the medium in two different directions of magnetization, so that the same on the medium. It is a normal magneto-optical recording device that can perform four-valued recording and reproduction at a position, and that the recording method is also the magnetic field modulation method of the normal magneto-optical recording device, and that the laser power is also binary and the reproduction method also detects the Kerr rotation angle. You can do it. Also, by multi-layering the medium, multi-valued recording and reproduction can be performed, higher density recording can be performed, and overwriting is possible.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 俵 好夫 神奈川県川崎市高津区坂戸3丁目2番1号 信越化学工業株式会社コーポレートリサ ーチセンター内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoshio Tawara 3-2-1 Sakado, Takatsu-ku, Kawasaki-shi, Kanagawa Shin-Etsu Chemical Co., Ltd. Corporate Research Center

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 基板上に少なくとも光磁気記録膜と相変
化型記録膜を具備してなる光記録媒体において、該相変
化型記録膜が結晶相であるときとアモルファス相である
ときの反射率が実質同じ値を示し、見かけのカー回転角
が異なる値を示すことを特徴とする光記録媒体。
1. An optical recording medium comprising at least a magneto-optical recording film and a phase change recording film on a substrate, and the reflectance when the phase change recording film is in a crystalline phase and in an amorphous phase. Shows substantially the same value, and the apparent Kerr rotation angles show different values.
【請求項2】 相変化型記録膜と光磁気記録膜の間に誘
電体膜を設けることを特徴とする請求項1に記載の光記
録媒体。
2. The optical recording medium according to claim 1, wherein a dielectric film is provided between the phase change recording film and the magneto-optical recording film.
JP7039583A 1995-01-06 1995-02-28 Optical recording medium Pending JPH08241542A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7039583A JPH08241542A (en) 1995-01-06 1995-02-28 Optical recording medium

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP7-447 1995-01-06
JP44795 1995-01-06
JP7039583A JPH08241542A (en) 1995-01-06 1995-02-28 Optical recording medium

Publications (1)

Publication Number Publication Date
JPH08241542A true JPH08241542A (en) 1996-09-17

Family

ID=26333429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7039583A Pending JPH08241542A (en) 1995-01-06 1995-02-28 Optical recording medium

Country Status (1)

Country Link
JP (1) JPH08241542A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006031925A (en) * 2004-07-16 2006-02-02 Agency For Science Technology & Research Data storage device
JP2009087527A (en) * 2003-10-30 2009-04-23 Kobe Steel Ltd Aluminum alloy reflective coating for optical information recording, optical information recording medium and aluminum alloy sputtering target for depositing aluminum alloy reflective coating for optical information recording

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009087527A (en) * 2003-10-30 2009-04-23 Kobe Steel Ltd Aluminum alloy reflective coating for optical information recording, optical information recording medium and aluminum alloy sputtering target for depositing aluminum alloy reflective coating for optical information recording
JP2006031925A (en) * 2004-07-16 2006-02-02 Agency For Science Technology & Research Data storage device

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