JPH06299315A - Surface modifying method for aluminum and titanium - Google Patents

Abstract

PURPOSE:To easily form a film of metal oxides excellent in various kinds of properties on the surface of AN or Ti by thermally spraying metal oxides on the surface of Al or Ti by an induction plasma torch. CONSTITUTION:An induction plasma thermal spraying device consists of a support body 1, an outside pipe 2 and an intermediate pipe 3 made of a boron nitride sintered compact and is equipped with a high frequency induction heating coil 11. Below it, an At foil to be treated 14 is put on a holder 13 made of a ceramic plate and gas, such as Ar is fed to it from a plasma gas feeding introducing pipe 4 and a seal gas feeding pipe 6 and also TiO2 powder in the shape of fine particles is fed together with carrier gas from a carrier gas introducing pipe 4 and high frequency power is applied to the high frequency induction coil 11 to generate a plasma flame 12. The TiO2 powder is melted by the plasma flame 12 to stably form a TiO2 film 15 excellent in chemical resistance, hardness, etc., on the surface of the Al foil 14 on the holder 13 moving in the X-Y direction.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a film other than aluminum or titanium oxide on the surface of aluminum or titanium and modifying the surface.

[0002]

2. Description of the Related Art Conventionally, as a method of surface-modifying the surface of aluminum or titanium, there is a method of coating a dissimilar metal by plating or a method of forming an aluminum or titanium oxide film by an anodic oxidation method. Has been done.

[0003]

However, in the surface modification method by plating, the material of the coating film is limited to the substance which is ionized in the solution, and the plating based on aluminum or titanium is very difficult. Met. Further, in the surface modification method by anodic oxidation, the film is limited to the aluminum or titanium oxide film of the base material, and it is not possible to form a film of a different substance.

For example, even if it is attempted to form an oxide film having characteristics other than aluminum oxide, such as a titanium film or a strontium oxide film, on the surface of an aluminum foil, it is impossible with the above surface modification method.

[0005]

The present invention is directed to heating and melting fine particles of metal or metal oxide in an induction plasma torch, and heating and melting the aluminum or titanium surface arranged below the induction plasma torch. The fine particles of the above metal or the above metal oxide are sprayed to modify the surface of aluminum or titanium.

Further, aluminum or titanium is an aluminum foil or titanium foil having a thickness of 40 to 1000 μm, and the fine powder is a metal oxide for surface-modifying aluminum or titanium.

[Action]

According to the present invention, fine particles of metal or metal oxide are heated and melted by the plasma in the induction plasma torch. This induction plasma has a low flow velocity, and fine particles of metal or metal oxide that have been heated and melted are slowly sprayed onto the surface of foil-shaped aluminum or titanium, and aluminum or titanium is coated with a metal or metal oxide film. Is formed.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to embodiments, but prior to this, the induction plasma spraying apparatus shown in FIG. 1 used for carrying out the method of the present invention will be described. In the figure, 1 is a cylindrical support obtained by processing a boron nitride sintered body, and inside this support 1, multi-stage insertion holes 1a to 1e are formed. It is provided concentrically by repeating machining and threading, and the carrier gas introducing pipe 4, the intermediate pipe 3, and the outer pipe 2 are fixed to the insertion holes by fitting screws.

The shape of the insertion hole for the concentric support body 1 is such that the insertion hole 1a for inserting the carrier gas introduction pipe 4 through is first formed through the support body 1, and then the intermediate pipe 3 is formed. The insertion hole 1b is formed at a position approximately in the middle of the support 1 so as to be concentric with the insertion hole 1a, and then the insertion hole 1c of the outer tube 2 is inserted. Next, an insertion hole 1d having the same or slightly smaller diameter as the inner diameter of the intermediate tube 3 is provided above the intermediate tube 3 supporting insertion hole 1b, and an inner diameter of the outer tube 2 is provided above the outer tube 2 supporting insertion hole 1c. An insertion hole 1e having the same diameter as or a slightly smaller diameter is formed.

In this way, concentric circles 1a to 1 are formed inside.
An outer tube 2, an intermediate tube 3, and a carrier gas introduction tube, which are each formed in a cylindrical shape by using a boron nitride sintered body, on a cylindrical support body 1 made of a boron nitride sintered body in which an insertion hole of e is formed. 4 and the plasma gas supply pipe 5 and the sheath gas supply pipe 6 are attached, first, the carrier gas introduction pipe 4 is passed through the insertion hole 1a from below, and the screw 9 is screwed and fixed by the fixing bolt 7. After that, similarly, the intermediate pipe 3 is inserted into the insertion hole 1b.
The outer tube 2 is sequentially screwed into the insertion hole 1c, and then the plasma gas supply pipe 5 and the sheath gas supply pipe 6 are respectively inserted into the insertion hole 1c.
The threaded portions 1f and 1g provided tangentially to d and 1e are inserted and screwed. A small gap of about 1 mm is provided between the inner peripheral surface of the outer tube 2 and the outer peripheral surface of the intermediate tube 3 in order to increase the speed of the supplied gas and enhance the cooling efficiency. 11 is the outer tube 2
Is a high frequency induction coil provided on the lower outer periphery of, and is connected to a high frequency power supply (not shown). 12 is a plasma flame.

In the above thermal spraying apparatus, the aluminum surface modification method of the present invention is carried out as follows. First, a holder base material 13 of a ceramic plate having a thickness of 5 mm is arranged below the plasma flame 12 generated in the apparatus by about 50 mm below the apparatus, and the holder base material 13 having a thickness of 40 to 1000 μm is provided thereon.
A 200 mm square aluminum foil is closely attached. Then, from the plasma gas supply pipe 5 to the carrier gas introduction pipe 4 and the intermediate pipe 3
And a plasma gas such as argon gas at a rate of 5 liters / minute between them and a sheath gas such as argon gas at a rate of 20 liters / minute between the sheath gas supply tube 6 and the intermediate tube 3 and the outer tube 2. High-frequency power of 3 kW and 13.56 MHz is supplied to the high-frequency induction coil 11 in a state of supplying fine particles of titanium oxide having a particle size of 2 to 30 μm with 1 to 2 g / min from the gas introduction pipe 4 together with a carrier gas of 2 liters / min. When a normal plasma flame 12 that is well-balanced to the left and right is generated, the titanium oxide fine powder particles that are supplied together with the carrier gas are heated and melted, and the holder base material is moved in the XY directions. A sprayed coating 15 of titanium oxide layer having a thickness of 10 to 100 μm was obtained on the surface 14.

In the above embodiment, titanium oxide fine particles are sprayed on the surface of aluminum, but strontium oxide of another metal oxide or fine particles of aluminum oxide may be sprayed. You may spray the metal fine particles such as. Further, although thermal spraying is performed in the atmosphere in the above-mentioned embodiment, thermal spraying may be performed under reduced pressure.

Although aluminum is used as the base material in the above embodiment, titanium, which is almost equivalent to aluminum, may be used as the base material.

[0014]

As described above, according to the present invention, it is possible to form a film of a different metal or a different metal oxide on the surface of aluminum or titanium by plating or spraying with induction plasma other than anodic oxidation. It is expected that the required properties such as chemical resistance, hardness, contact resistance, dielectric constant and aesthetics can be improved by the sprayed metal and metal oxide. Furthermore, since the plasma velocity of the induction plasma spraying is gentler than that of the DC plasma and the spraying is performed in a short time, even if aluminum or titanium is a foil, it is not damaged by heating.

[Brief description of drawings]

FIG. 1 is a vertical sectional view showing an example of an induction plasma spraying apparatus used in the present invention.

[Explanation of symbols]

 1 Support 2 Outer Tube 3 Intermediate Tube 4 Carrier Gas Introducing Tube 5 Plasma Gas Supply Tube 6 Sheath Gas Supply Tube 11 High Frequency Induction Coil 12 Plasma Flame 13 Holder Base Material 14 Aluminum Foil 15 Titanium Oxide Film

Front page continued (72) Inventor Emilio Fujiwara 2-14-3 Awaji, Higashiyodogawa-ku, Osaka City, Osaka Prefecture Sansha Electric Manufacturing Co., Ltd. (72) Hidehisa Tachibana 2-14-3 Awaji, Higashiyodogawa-ku, Osaka City, Osaka Prefecture No.3 Sansha Electric Co., Ltd. (72) Inventor Hiroyasu Murata 2-14-3 Awaji, Higashiyodogawa-ku, Osaka-shi, Osaka Sansha Electric Co., Ltd.

Claims (2)

[Claims] 1. A metal or a metal oxide obtained by heating and melting a fine powder of a metal or a metal oxide in an induction plasma torch, and heating and melting the aluminum or titanium surface disposed below the induction plasma torch. 2. A method for modifying the surface of aluminum, which comprises spraying fine particles of 2. A surface modification method for aluminum and titanium, wherein the aluminum or titanium of claim 1 is an aluminum foil or titanium foil having a thickness of 40 to 1000 μm, and the fine particles are a metal oxide.