JPH0629776A - Multimode quartz vibrator - Google Patents

Multimode quartz vibrator

Info

Publication number
JPH0629776A
JPH0629776A JP4600892A JP4600892A JPH0629776A JP H0629776 A JPH0629776 A JP H0629776A JP 4600892 A JP4600892 A JP 4600892A JP 4600892 A JP4600892 A JP 4600892A JP H0629776 A JPH0629776 A JP H0629776A
Authority
JP
Japan
Prior art keywords
electrode
attenuation
input
gap
guaranteed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4600892A
Other languages
Japanese (ja)
Other versions
JP3201817B2 (en
Inventor
Kiyohisa Inao
清久 稲尾
Koji Mizuki
宏治 水木
Masanori Kumagai
正紀 熊谷
Takeo Seki
竹夫 関
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP04600892A priority Critical patent/JP3201817B2/en
Publication of JPH0629776A publication Critical patent/JPH0629776A/en
Application granted granted Critical
Publication of JP3201817B2 publication Critical patent/JP3201817B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To raise a guaranteed extent of attenuation by setting the electrode gap to the peak value of the guaranteed extent of attenuation or its vicinity. CONSTITUTION:An input/output electrode is formed on one face of a quartz piece, and a common electrode is formed on the other face, and one face where the input/output electrode is formed is approximated to a shield electrode to raise the guaranteed extent of attenuation. A gap G between the face where the input/output electrode is formed and the shield electrode is set to the peak value of the guaranteed extent of attenuation or its vicinity, namely, 15 to 40mum. That is, the guaranteed extent of attenuation is raised in accordance with reduction of the electrode gap G in any case when a center frequency fo of a multimode vibrator is set to 22MBz, 45MHz, and 90MBz, but the peak value is held in the vicinity of 25mum in the range of 15 to 40mum, and the guaranteed extent of attenuation is quickly reduced when it is lower than 25mum. Consequently, the electrode gap G by which the high guaranteed extent of attenuation is obtained is obtained in accordance with relations between the electrode gap G and the guaranteed extent of attenuation.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はMCF(Monolithic Cry
stal Filter)としての多重モード型水晶振動子(多重
モード振動子とする)を利用分野とし、特に保証減衰量
を高める多重モード振動子に関する。
The present invention relates to an MCF (Monolithic Cry).
The present invention relates to a multimode crystal oscillator (as a stal filter), which is a field of application, and particularly relates to a multimode oscillator that enhances a guaranteed attenuation amount.

【0002】[0002]

【発明の背景】多重モード振動子は水晶片に形成した例
えば二組の電極対間の音響的結合を利用し、所定のフィ
ルタ特性(伝送特性)を得るものとして通信機器等に有
用されている。このようなものの一つに入出力電極間の
電気的結合による漏れ信号を少なくして保証減衰量を高
めたものがある(参照:実願昭60-118993、特願昭63-27
3981、特願平1-83007号)。
BACKGROUND OF THE INVENTION A multimode oscillator is used in communication equipment or the like as a device for obtaining a predetermined filter characteristic (transmission characteristic) by utilizing acoustic coupling between, for example, two pairs of electrodes formed on a quartz piece. . One of these is to increase the guaranteed attenuation by reducing the leakage signal due to the electrical coupling between the input and output electrodes (see Japanese Patent Application No. 60-118993 and Japanese Patent Application No. 63-27).
3981, Japanese Patent Application No. 1-83007).

【0003】[0003]

【従来技術】第6図乃至第8図はこのような多重モード
振動子の一従来例を説明する図で、第6図は(a)は断
面図、第7図は(ab)水晶片の表裏面を示す図、第8
図は容器本体の底面図である。多重モード振動子は水晶
片1を密閉容器2内に封入して形成される。水晶片1は
例えばATカットとした厚みすべり振動子からなる。一
方の主面1aには分割された入出力電極3、4を、他方
の主面1bには共通電極5を形成する。入出力電極3、
4と共通電極5からはそれぞれ引出電極6、7、8を延
出する。密閉容器2は凹状の容器本体9とシーム溶接し
てなる金属蓋体10とからなる。容器本体9の底面9a
には、その中央にシールド電極11と、両側に入出力用
接続電極12、13とをメタイズする。シールド電極1
1は共通電極用引出電極8とワイヤボンディング等によ
り接続し(未図示)、入出力接続電極12、13は入出
力用引出電極6、7と導電性接着剤14等により接続す
る。そして、導電性接着剤14の厚みにより、シールド
電極11と入出力電極3、4とは対向させた状態で、水
晶片1の一方の主面と容器本体9との底面に間隙(電極
間隙Gとする)をもたせる。シールド電極11と入出力
接続電極12、13は容器本体9の外表面に露出して表
面実装用の端子となる。このようなものでは、入出力電
極3、4間の電気的結合により直接的に伝搬する漏れ信
号を、シールド電極11により遮蔽するので、保証減衰
量の低下を防止する。特に、電極間隙Gは、導電性接着
剤14の厚み分となって、大幅に小さくなる。したがっ
て、遮蔽効果を高め、保証減衰量の大幅な増加を期待で
きる。なお、ここでの保証減衰量は第9図に示したよう
に、中心周波数f0から910KHz下がった点での減
衰量A(dB)を指す。
2. Description of the Related Art FIGS. 6 to 8 are views for explaining a conventional example of such a multi-mode oscillator. FIG. 6 (a) is a sectional view and FIG. 7 (ab) is a quartz piece. The figure which shows the front and back, 8th
The figure is a bottom view of the container body. The multimode oscillator is formed by enclosing the crystal piece 1 in a closed container 2. The crystal piece 1 is composed of, for example, an AT-cut thickness sliding oscillator. The divided input / output electrodes 3 and 4 are formed on one main surface 1a, and the common electrode 5 is formed on the other main surface 1b. Input / output electrode 3,
Extraction electrodes 6, 7, and 8 extend from the common electrode 5 and the common electrode 5, respectively. The closed container 2 is composed of a concave container body 9 and a metal lid 10 formed by seam welding. Bottom 9a of container body 9
In this case, the shield electrode 11 is centralized and the input / output connection electrodes 12 and 13 are metalized on both sides. Shield electrode 1
Reference numeral 1 is connected to the common electrode lead electrode 8 by wire bonding or the like (not shown), and the input / output connection electrodes 12 and 13 are connected to the input / output lead electrodes 6 and 7 by a conductive adhesive agent 14 or the like. The shield electrode 11 and the input / output electrodes 3 and 4 are opposed to each other by the thickness of the conductive adhesive 14 so that a gap (electrode gap G) is formed between one main surface of the crystal blank 1 and the bottom surface of the container body 9. And)). The shield electrode 11 and the input / output connection electrodes 12 and 13 are exposed on the outer surface of the container body 9 and serve as terminals for surface mounting. In such a structure, the leak signal that propagates directly due to the electrical coupling between the input / output electrodes 3 and 4 is shielded by the shield electrode 11, so that the reduction of the guaranteed attenuation amount is prevented. In particular, the electrode gap G corresponds to the thickness of the conductive adhesive 14 and is significantly reduced. Therefore, it is possible to enhance the shielding effect and expect a large increase in the guaranteed attenuation amount. The guaranteed attenuation amount here indicates the attenuation amount A (dB) at a point where the center frequency f 0 is lowered by 910 KHz, as shown in FIG. 9.

【0004】[0004]

【従来技術の問題点】しかしながら、上記構成のもので
は、導電性接着剤14の厚みを薄くして電極間隙Gを小
さくすると、その期待に反して保証減衰量が低下する問
題があった。
However, in the above-mentioned structure, when the thickness of the conductive adhesive 14 is reduced to reduce the electrode gap G, there is a problem that the guaranteed attenuation amount decreases contrary to the expectation.

【0005】[0005]

【発明の目的】本発明は、電極間隙と保証減衰量との関
係を更に明確にし、保証減衰量を高める多重モード振動
子を提供することを目的とする。
SUMMARY OF THE INVENTION It is an object of the present invention to further clarify the relationship between the electrode gap and the guaranteed attenuation amount, and to provide a multimode oscillator which enhances the guaranteed attenuation amount.

【0006】[0006]

【解決手段】本発明は、電極間隙に最適値(特異点)の
あることを見い出し、電極間隙を保証減衰量のピーク値
及びその近傍に設定したことを解決手段とする。更に、
具体的には、電極間隙を15μmから40μmに設定し
たことを解決手段とする。以下、本発明の一実施例を、
これらを明らかにする実験例をもって説明する。
SOLUTION: The solution is to find that the electrode gap has an optimum value (singular point), and set the electrode gap to the peak value of the guaranteed attenuation amount and its vicinity. Furthermore,
Specifically, the solution is to set the electrode gap to 15 μm to 40 μm. Hereinafter, one embodiment of the present invention,
This will be described with an experimental example that clarifies these.

【0007】[0007]

【実施例】第1図(abc)は、電極間隙(横軸、μ
m)と保証減衰量(縦軸、dB)との関係を説明する図
である。なお、第1図(a)は多重モード振動子の中心
周波数f0を約22MHz、同図(b)は45MHz、
同図(c)は90MHzとした場合である。また、これ
らの実験例では、前従来例における容器本体9の底壁9
aに対応する保持板上に水晶片1を固着し、導電性接着
剤14の厚みに対応した電極間隙Gを顕微鏡(写真)を
もって測定した。これらの実験結果から、いずれの場合
でも、電極間隙Gが小さくなるほど、保証減衰量は高ま
るが、15から40μm中の25μm近傍でピーク値を
迎え、これ以下になると急激に減少する。特に22MH
z「第1図(a)」の場合はそのピーク値は80dB以
上となり、以下、45MHz「第1図(b)」では約8
0dB、90MHz「第1図(c)」では70dBとな
ることが理解される。なお、中心周波数が高くなるほ
ど、ピーク値を得る電極間隙Gは微妙に小さくなる。こ
の実験結果につき、本発明者がその現象を考察したとこ
ろ、次に起因することが推測された。すなわち、第3図
に示したように、電極間隙Gがピーク値となる例えば2
5μm以上に離れて接近する場合は、入出力電極3、4
間の電気的結合(浮遊容量C1)による漏れ信号P1が、
シールド電極11に流入(吸引)して基準電位に流出す
る。したがって、入出力電極3、4間が遮蔽されて保証
減衰量は増加する。次に、25μm以内に接近すると、
入出力電極3、4とシールド電極11との間に浮遊容量
2、C3を発生する。そして、この浮遊容量C2、C3
経由して入力電極3から出力電極4に漏れ信号P2が漏
洩する(第4図)。したがって、保証減衰量は急激に低
下すると推測された。なお、第3図においても、シール
ド電極11と入出力電極3、4との間に浮遊容量C2
3は発生すると考えられるが、その値が小さくて漏れ
信号P2は微量であり、それ以上に入出力電極3、4間
の漏れ信号P1を遮蔽すると推定される。また、入出力
電極3、4間の漏れ信号P1を特に問題としたが、入出
力電極3、4と共通電極5との間に生ずる漏れ信号(未
図示)についても同様なことが言えると考えられる。し
たがって、上述したことから、電極間隙Gを保証減衰量
のピーク値及びその近傍に設定することにより、例えば
15乃至40μmの間に設定することにより保証減衰量
を良好とした多重モード振動子を得ることができる。
EXAMPLE FIG. 1 (abc) shows the electrode gap (horizontal axis, μ
It is a figure explaining the relationship between a guaranteed attenuation amount (vertical axis, dB) and m). Note that FIG. 1 (a) shows the center frequency f 0 of the multimode oscillator at about 22 MHz, and FIG. 1 (b) shows 45 MHz.
FIG. 6C shows the case of 90 MHz. Further, in these experimental examples, the bottom wall 9 of the container body 9 in the previous conventional example is used.
The crystal piece 1 was fixed on the holding plate corresponding to a, and the electrode gap G corresponding to the thickness of the conductive adhesive 14 was measured with a microscope (photograph). From these experimental results, in any case, the guaranteed attenuation increases as the electrode gap G becomes smaller, but reaches a peak value in the vicinity of 25 μm out of 15 to 40 μm, and sharply decreases below this value. Especially 22MH
In the case of z "Fig. 1 (a)", the peak value is 80 dB or more, and below is about 8 MHz at 45 MHz "Fig. 1 (b)".
It is understood that it becomes 70 dB in 0 dB and 90 MHz "FIG. 1 (c)". It should be noted that the higher the center frequency, the smaller the electrode gap G for obtaining the peak value. When the present inventor considered the phenomenon with respect to the result of this experiment, it was presumed that it was caused by the following. That is, as shown in FIG. 3, the electrode gap G reaches a peak value, for example, 2
When approaching apart by more than 5 μm, input / output electrodes 3, 4
The leakage signal P 1 due to the electrical coupling (stray capacitance C 1 ) between
It flows into (is attracted to) the shield electrode 11 and flows out to the reference potential. Therefore, the input / output electrodes 3 and 4 are shielded and the guaranteed attenuation amount increases. Next, when approaching within 25 μm,
Stray capacitances C 2 and C 3 are generated between the input / output electrodes 3 and 4 and the shield electrode 11. Then, the leak signal P 2 leaks from the input electrode 3 to the output electrode 4 via the stray capacitances C 2 and C 3 (FIG. 4). Therefore, it was estimated that the guaranteed attenuation would drop sharply. Also in FIG. 3, the stray capacitance C 2 , between the shield electrode 11 and the input / output electrodes 3 and 4,
Although it is considered that C 3 is generated, the leakage signal P 2 is so small that the leakage signal P 1 between the input / output electrodes 3 and 4 is further shielded. Further, although the leak signal P 1 between the input / output electrodes 3 and 4 is a particular problem, the same applies to the leak signal (not shown) generated between the input / output electrodes 3 and 4 and the common electrode 5. Conceivable. Therefore, from the above, by setting the electrode gap G to the peak value of the guaranteed attenuation amount or in the vicinity thereof, for example, between 15 and 40 μm, a multimode oscillator having a good guaranteed attenuation amount is obtained. be able to.

【0008】[0008]

【他の事項】上記実施例(実験例)では、保持板(容器
本体の底壁)9aに水晶片1の両端部を導電性接着剤1
4により固着し、その厚み分をシールド電極11と入出
力電極3、4の電極間隙Gとしたが、導電性接着剤14
ではその間隙Gを一定(均一)にしにくいので、例えば
第5図に示したようにしてもよい。すなわち、容器本体
9の底壁に設けるシールド電極11と出力接続電極4の
メタライズ時にその厚みを20μ程度異ならせる。そし
て、水晶片1の一端部を5μ程度の導電性接着剤14に
より固着して電極間隙Gを得る。このようにすると、メ
タライズは均一にできるので、導電性接着剤14のみの
場合よりも電極間隙Gを一定に制御しやすい。また、一
端部のみを固着し、他端部を自由端とするので耐衝撃性
を良好とすることができる。なお、この図において、水
晶片1の入出力電極及び引出電極は省略している。ま
た、他端部からの電極導出はワイヤボンディングとす
る。このように、本発明は種々の変形が可能であり、基
本的には、水晶片1の保持構造等は任意に設計してよ
く、要はシールド電極11と入出力電極3、4の電極間
隙Gを保証減衰量のピーク値となる程度に近接させて構
成したものは、本発明の技術的範囲に包含される。な
お、シールド電極11は金属板等であってもよいことは
勿論である。
[Other Matters] In the above-described embodiment (experimental example), the holding plate (bottom wall of the container body) 9a is provided with the conductive adhesive 1 on both ends of the crystal blank 1.
4 and the electrode gap G between the shield electrode 11 and the input / output electrodes 3 and 4 was used as the thickness.
However, since it is difficult to make the gap G constant (uniform), the gap G may be set as shown in FIG. 5, for example. That is, the thicknesses of the shield electrode 11 provided on the bottom wall of the container body 9 and the output connection electrode 4 are made different by about 20 μ when metallized. Then, one end of the crystal piece 1 is fixed by a conductive adhesive 14 of about 5 μm to obtain an electrode gap G. By doing so, the metallization can be made uniform, so that it is easier to control the electrode gap G to be constant than in the case where only the conductive adhesive 14 is used. Further, since only one end is fixed and the other end is a free end, impact resistance can be improved. In this figure, the input / output electrodes and the extraction electrodes of the crystal blank 1 are omitted. The electrode is led from the other end by wire bonding. As described above, the present invention can be variously modified, and basically, the holding structure of the crystal blank 1 and the like may be designed arbitrarily, that is, the electrode gap between the shield electrode 11 and the input / output electrodes 3 and 4 is basically required. A configuration in which G is close to the peak value of the guaranteed attenuation amount is included in the technical scope of the present invention. Of course, the shield electrode 11 may be a metal plate or the like.

【0009】[0009]

【発明の効果】本発明は、電極間隙に最適値(特異点)
のあることを見い出し、電極間隙を保証減衰量のピーク
値及びその近傍に設定したので、保証減衰量を高める多
重モード振動子を提供でき、その実際上のメリットには
非常に大きいものがある。
The present invention has an optimum value (singular point) for the electrode gap.
Therefore, since the electrode gap is set to the peak value of the guaranteed attenuation amount and its vicinity, it is possible to provide a multi-mode oscillator that enhances the guaranteed attenuation amount, and the practical merit thereof is extremely great.

【図面の簡単な説明】[Brief description of drawings]

【第1図】本発明の作用効果を説明する電極間隙Gに対
する保証減衰量の特性図で、同図(a)は中心周波数を
22MHz、同図(b)は45MHz、同図(c)は9
0MHzの場合である。
FIG. 1 is a characteristic diagram of a guaranteed attenuation amount with respect to an electrode gap G for explaining the function and effect of the present invention. FIG. 1A shows a center frequency of 22 MHz, FIG. 1B shows 45 MHz, and FIG. 9
This is the case of 0 MHz.

【第2図】本発明の一実施例(実験例)のための多重モ
ード振動子の構造断面図である。
FIG. 2 is a structural cross-sectional view of a multimode oscillator for one example (experimental example) of the present invention.

【第3図】本発明の作用効果を説明する模式図で、電極
間隙Gが25μm以上離れて接近したときの図である。
[Fig. 3] Fig. 3 is a schematic diagram for explaining the function and effect of the present invention, and is a diagram when the electrode gap G is approached with a distance of 25 µm or more.

【第4図】本発明の作用効果を説明する模式図で、電極
間隙Gが25μm以内に接近したときの図である。
FIG. 4 is a schematic diagram for explaining the function and effect of the present invention, and is a diagram when the electrode gap G approaches within 25 μm.

【第5図】本発明の他の実施例を説明する多重モード振
動子の断面図である。
FIG. 5 is a cross-sectional view of a multimode oscillator for explaining another embodiment of the present invention.

【第6図】従来例を説明する多重モード振動子の断面図
である。
FIG. 6 is a sectional view of a multimode oscillator for explaining a conventional example.

【第7図】同図(a)は従来例を説明する水晶片の一方
の主面の図で、同図(b)は他方方の主面の図である。
[FIG. 7] FIG. 7 (a) is a view of one main surface of a quartz piece for explaining a conventional example, and FIG. 7 (b) is a view of the other main surface.

【第8図】従来例を説明する容器本体の底面の図であ
る。
FIG. 8 is a bottom view of a container body for explaining a conventional example.

【第9図】多重モード振動子の保証減衰量を示す帯域特
性図である。
FIG. 9 is a band characteristic diagram showing a guaranteed attenuation amount of a multimode oscillator.

【符号の説明】[Explanation of symbols]

1 水晶片、2 密閉容器、3 入力電極、4 出力電
極、5 共通電極、6、7、8 引出電極、9 容器本
体、9a 容器底面、10 金属カバー、11 シール
ド電極、12 入力用接続電極、13 出力用接続電
極、14 導電性接着剤.
DESCRIPTION OF SYMBOLS 1 crystal piece, 2 sealed container, 3 input electrodes, 4 output electrodes, 5 common electrodes, 6, 7 and 8 extraction electrodes, 9 container body, 9a container bottom surface, 10 metal cover, 11 shield electrode, 12 input connection electrodes, 13 output connection electrode, 14 conductive adhesive.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 関 竹夫 埼玉県狭山市大字上広瀬1275番地の2 日 本電波工業株式会社狭山事業所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takeo Seki 2 days at 1275 Kamihirose, Sayama City, Saitama Prefecture Saitama Office

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 水晶片の一方の主面に入出力電極を形成
するとともに他方の主面に共通電極を形成し、該水晶片
の一方の主面をシールド用電極に近接させて保証減衰量
を高めた多重モード型振動子において、 上記水晶片の一方のの主面とシールド用電極との間隙を
保証減衰量のピーク値及びその近傍に設定したことを特
徴とする多重モード型水晶振動子。
1. A guaranteed attenuation amount, wherein an input / output electrode is formed on one main surface of a crystal piece and a common electrode is formed on the other main surface, and one main surface of the crystal piece is brought close to a shield electrode. In the multimode crystal resonator, the multimode crystal resonator is characterized in that the gap between the one principal surface of the crystal piece and the shield electrode is set to the peak value of the guaranteed attenuation amount and its vicinity. .
【請求項2】 前記保証減衰量のピーク値及びその近傍
を得る間隙は15μmから40μであることを特徴とす
る多重モード型水晶振動子。
2. A multimode crystal resonator, wherein a gap for obtaining the peak value of the guaranteed attenuation amount and its vicinity is 15 μm to 40 μm.
JP04600892A 1992-01-31 1992-01-31 Multi-mode crystal oscillator Expired - Lifetime JP3201817B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04600892A JP3201817B2 (en) 1992-01-31 1992-01-31 Multi-mode crystal oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04600892A JP3201817B2 (en) 1992-01-31 1992-01-31 Multi-mode crystal oscillator

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JPH0629776A true JPH0629776A (en) 1994-02-04
JP3201817B2 JP3201817B2 (en) 2001-08-27

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JP04600892A Expired - Lifetime JP3201817B2 (en) 1992-01-31 1992-01-31 Multi-mode crystal oscillator

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010056929A (en) * 2008-08-28 2010-03-11 Nippon Dempa Kogyo Co Ltd Piezoelectric component

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010056929A (en) * 2008-08-28 2010-03-11 Nippon Dempa Kogyo Co Ltd Piezoelectric component

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JP3201817B2 (en) 2001-08-27

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