JPH0629700B2 - Dimensional inspection method and device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention has two features from a reference point (a point that becomes a dimensional reference such as a fixed point) to an edge (corner, ridge, etc.) of an object to be inspected. The present invention relates to a method and an inspection apparatus for simultaneously inspecting a dimensional dimension, that is, an x dimension (dimension in the x-axis direction. For example, a lateral dimension) and a y dimension (dimension in the y-axis direction, for example, a vertical dimension).

[Prior Art] An example of an object to be inspected that is subjected to the above-described two-dimensional dimension inspection is a toner scraping blade for a copying machine. The blade (reference numeral A in FIGS. 1 and 2) generally comprises a blade body (reference numeral Aa) formed of polyurethane and a mounting metal fitting (reference numeral Ab). The metal fitting is mounted in the copying machine, and the ridge of the blade body is pressed against the surface of the photosensitive drum. The ridge scrapes off the toner remaining on the surface of the photosensitive drum. If the two-dimensional dimensions (each dimension in the x-axis and y-axis directions in Fig. 1) from the attachment point of the metal fitting to the ridge of the blade are not specified, the toner cannot be sufficiently scraped off, so these dimensions are strictly checked. It must be.

Conventionally, the dimensional inspection of such a blade has been performed by the following method. That is, a) After fixing the mounting point of the metal fitting as a reference point, a contact type measuring instrument such as a dial gauge is applied to the ridge line in the x and y directions, and the quality of the dimension is judged by the indicated value (measured value).

b) Fix the mounting point of the metal fitting as the reference point, and also fix the projector consisting of the light source and the lens in the x and y directions, thereby projecting the enlarged ridge line image on the screen. Looking at the image, it is determined whether the position of the ridgeline (that is, the dimension from the attachment point) is within a predetermined range.

[Problems to be Solved by the Invention] In each of the conventional methods described above, the x-dimension and the y-dimension are used.
The size was inspected in two stages. That is,
With a contact type measuring device (method a) above or a projector (method b) above), first the dimensions in the x-axis direction must be inspected, and then the y-axis direction must also be inspected. Therefore, 1
With a set of measuring instruments or projectors, two steps of inspection are required, which is time-consuming. On the other hand, if it is attempted to inspect the x and y dimensions almost simultaneously in one step, two sets of measuring instruments or projectors are required. Equipment costs and installation space,
Or the number of inspection personnel will increase.

In particular, in the method a) above, the contact of the measuring device is pressed against the blade body, so that a measurement error is likely to occur due to the difference in pressing force. The pressing force varies from person to person and is not always constant even for the same person, so there is a limit to the accuracy of inspection by this method. Further, the blade has a considerable length in the direction perpendicular to the x-axis and y-axis directions (the direction perpendicular to the paper surface in FIG. 1), but it is not possible to continuously inspect the entire length depending on this direction. It is impossible.

It should be noted that such inconveniences regarding the two-dimensional dimension inspection are not limited to the blades for the copying machine mentioned in the example, but also about various inspected objects which need to inspect the x and y dimensions from the reference point to a specific edge portion. It is common.

The object of the present invention is to make the inspection of the above-mentioned x and y dimensions 1
It is an object to provide a method that can be performed accurately in a process (that is, at the same time), and an apparatus for quickly performing the inspection method with a minimum number of personnel.

[Means for Solving the Problems] A dimension inspection method of the present invention is a method for inspecting an x dimension and ay dimension from a reference point to an edge portion of an object to be inspected. Also, the mirror body which is not parallel is placed immovably from the reference point position such that its edge is separated from the edge of the object to be inspected in the x-axis direction and overlaps in the y-axis direction. The edge, the edge, and the edge reflected on the specular body are projected in a direction perpendicular to the x-axis, and c) the x dimension is inspected by the distance between the edge and the edge in the projected image, and the edge in the projected image is also examined. The y-dimension is inspected by the distance between the edge and the edge reflected on the mirror body.

A dimension inspection apparatus of the present invention is an apparatus for inspecting a two-dimensional dimension of x and y from a reference point in an inspection object to an edge portion, and a mounting base for fixing the reference point to attach the inspection object, The angle and the position of the edge are appropriately set, and the mirror body, the light source and the lens are arranged immovably from the reference point position, and the edge portion, the edge of the mirror body and the edge portion reflected on the mirror body are defined as the x-axis. A projector that projects in a right angle direction,
A light receiving surface is arranged at an image forming position of the projector, and an image sensor for outputting an electric signal according to the brightness of each portion in the projected image is provided.

Regarding this inspection apparatus, as described in claim 3, the mounting base can be moved in a direction perpendicular to the x-axis and the y-axis. It may be configured such that an abnormality of the inspection object is notified when the value exceeds or falls below a certain value.

[Operation] When the object to be inspected and the mirror-finished body are arranged according to the dimension inspection method of the present invention, a direction perpendicular to the x-axis (for example, the y-axis direction).
When viewing the vicinity of the edge of the mirror surface object, the edge portion of the inspection object and the edge of the mirror surface object as well as the edge portion of the inspection object reflected on the mirror surface object can be seen. (Because the mirror body reflects the edge, it is a).
As described above, it is not parallel to both the x-axis and the y-axis, and its edge is placed at a position apart from the edge of the inspection object in the x-axis direction and overlapping in the y-axis direction.

The distance between the edge and the edge seen from the above direction is nothing but the x dimension from the edge to the edge. At that time, the distance between the edge and the edge seen in the specular body is from the edge to the edge. The y dimension is shown. Therefore, as in (b) above, after projecting the edge and the edge and the edge reflected on the specular body, measure the above-mentioned two intervals in the projected image (the absolute value may not be measured, but it may be compared with the standard size). To do. The edge, the edge, and the edge reflected on the specular body appear side by side in this order also in the projected image, and the above-mentioned two intervals are adjacent to each other.
Easily done in process.

The specular body is immovably arranged with respect to the reference point position of the inspection object,
Therefore, since the positional relationship of the edge with respect to the reference point is also constant, the two distances measured above, that is, the distances representing the x and y dimensions from the edge to the edge, cause X-dimension up to the part and y
You can know the dimensions. Since this inspection method is a non-contact method, errors due to individual differences hardly occur.

The dimension inspection apparatus (Claim 2) of the present invention uses the above-mentioned mirror surface body and projector to determine the two-dimensional dimension from the reference point to the edge of the object to be inspected mounted on the mounting table. However, the projection image is formed on the light receiving surface of the image sensor (photoelectric converter). The image sensor outputs an electric signal according to the lightness and darkness of each part in the projected image, but since the image formed by dividing the above two intervals into light and dark is formed on the light receiving surface by the projector, that is, each interval A signal corresponding to is output. This signal is the edge-to-edge x as described above.
Since it corresponds to the y and y dimensions, the x and y dimensions from the reference point to the edge of the inspection object can be known from this signal. At that time, by processing the electric signal, the absolute value of each dimension can be displayed as it is, or it can be displayed whether it is within the allowable range with respect to the specified value.

Therefore, the inspection of the above-mentioned x and y dimensions by this inspection device can be quickly performed in one step by the minimum number of persons (one person).

According to the dimensional inspection device of claim 3, the object to be inspected can be moved in the direction perpendicular to the x-axis and y-axis together with the mounting base while the reference point is fixed in the x-axis and y-axis directions. It is possible to perform continuous dimensional inspection in all directions.

Further, in the dimension inspection apparatus according to claim 4, whether or not the x and y dimensions from the reference point to the edge of the inspected object are within the specified range, that is, whether the inspected object is good or bad does not depend on the inspector. Made by the device itself.

[Embodiment] FIGS. 2 (a) and 2 (b) are a front view and a side view of a dimension inspection apparatus according to an embodiment of the present invention. The inspection target of this apparatus is a toner scraping blade A for a copying machine (not shown). The blade A is manufactured by integrating a polyurethane blade body Aa and a mounting bracket Ab into one body.
The notch Ac provided on the metal fitting Ab is fitted to a protrusion (not shown) on the mounting frame in the copier and positioned, and then the screw hole Ad
It is screwed to the same frame at the part. The blade A is a main body Aa that contacts the surface of the photosensitive drum (not shown).
The toner is scraped off by using one ridgeline (ridgeline P described later). The inspection apparatus shown in the figure inspects whether the two-dimensional dimension from the mounting point of the metal fitting Ab, that is, the notch Ac, is the reference point, and the two-dimensional dimension from the ridge line is within the specified range (within the design allowable range), for the manufactured blade A. To do.

Before explaining the apparatus of FIG. 2, the basic configuration and inspection principle of this apparatus will be described first with reference to FIGS. 1 (a) to 1 (d). Same figure
(a) is an enlarged cross-sectional view of the main part of Fig. 2 (b). As shown in this figure, the blade A mounting base 1
0, a prism mirror 20 having an inclined mirror surface, a projector 30 having a lens 31, light sources 36 and 37, and an image sensor 40 having a light receiving surface 41.

The mounting base 10 is formed with the same protrusion 10a as the mounting frame in the copying machine described above, and the blade A is mounted by fitting the notch Ac of the metal fitting Ab to this. Since the two-dimensional dimension from the notch Ac to the ridgeline P of the blade body Aa is the dimension to be inspected, the position of the protrusion 10a that fits into the notch Ac should be fixed within the plane of FIG. Keep it.
In order to express the two-dimensional dimensions by x and y, the center position of the base of the protrusion 10a will be referred to as an origin O, and x will be moved in the left direction of the drawing (the so-called "tilt" direction of the blade A) from this point.
Take the axis and the direction perpendicular to it (the direction of the width of blade A)
Let's take the y axis. If it is expressed using such x and y, it can be said that the necessary inspection is to know the coordinates (x _P , y _P ) of the ridge P and determine whether or not it is as specified.

The prism mirror 20 has a mirror surface of 45 ° with the x-axis and the y-axis.
The straight edge Q at the lower end of the mirror surface is a little (about 0.5 mm) away from the ridge line P in the x-axis direction (that is, x _Q > in terms of coordinates).
x _P ), slightly (same as above) overlap in the y-axis direction (that is, y _Q <
y _P ). The dimensions of these separations and overlaps in the x-axis and y-axis directions are Δx and Δy, respectively.
And The positions of the origin O and the edge Q are immovable,
Since the position of the ridgeline P differs for each blade A, the dimension Δ
The individual dimensional differences of the blade A appear as they are in x and Δy. In other words, the desired inspection can be performed by knowing the dimensions Δx and Δy instead of the coordinates (x _P , y _P ) of the ridge P.

The projector 30 is for forming a magnified (m-fold) projected image near the ridge P on a light receiving surface 41, which will be described later.
In addition, light sources 36 and 37 are provided below (negative direction of y-axis) and rightward (negative direction of x-axis), respectively. The magnification m is, for example, about 20 times.

With such a projector 30, an image is formed on the light receiving surface 41 of the image sensor 40 as shown in FIG. 1 (c). In the figure, a line p is a projected image of the ridge line P, a line q is a projected image of the edge Q, and a line p ′ is a projected image of the ridge line P reflected on the mirror 20. In this case, a bright portion is formed between the line p and the line q by the light passing from the light source 36 through the interval Δx between the ridgeline P and the edge Q, and between the line q and the line p ′. Light is blocked by the mirror 20 and a dark portion is formed by a portion having a dimension Δy that is shaded by the light from the light source 37. Further, in the figure, the right side of the line p is a dark part where neither light hits, and the left side of the line p'is a bright part due to the light of the light source 37 reflected by the mirror 20. Since the projection is performed in the direction perpendicular to the x axis, the distance δx between the line p and the line q is Δ.
The line q is equal to x × m and the tilt of the mirror 20 is 45 °.
Δy between the line and the line p ′ is equal to Δy × m (δx, δy
Both are around 0.5 mm x 20 = 10 mm). Therefore, the interval δ
It can be said that the dimensions of x and δy represent the individual difference regarding the coordinates (x _P , y _P ) of the ridgeline P by magnifying it by m times.

A light receiving window 42 is opened on the light receiving surface 41 of the image sensor 40,
In this window 42, about 2000 light receiving elements each having a size of 17 μm are densely arranged in a direction perpendicular to the lines p, q, and p ′. Since each element outputs a positive voltage signal when receiving light, the signals of all the elements when receiving the projected image shown in this figure (c) are arranged as shown in this figure (d). In the light receiving window 42,
(m =) A projected image magnified 20 times is sensed by a 17 μm element, so 1 μm (= 0.00
Dimensional error around 1mm) can be read.

The controller (not shown) of the image sensor 40 binarizes the signal from each of the above elements and divides it into a bright portion and a dark portion,
Substituting the signals corresponding to the intervals δx and δy,
It is determined whether or not they are in the set range (which matches the specified dimension of the blade A). In this way, when it is determined that the interval δx or δy is out of the set range,
Since the coordinates (x _P , y _P ) of the ridgeline P are not as specified, the controller of the image sensor 40 outputs a signal indicating that the dimension of the blade A is defective (abnormal), and gives a warning by a buzzer or a lamp.

Now, the apparatus of FIG. 2 basically performs the dimension inspection of the blade A as described above. Pyrism mirror
20 is supported by a supporter 21 on the base 1 so that the horizontal position and height can be adjusted, and the projector 30 (excluding the light source) and the image sensor 40 are attached to the support column 2 so that the vertical position can be adjusted. In addition, two bundles of optical fibers 38 are taken out from the halogen lamp 35 attached to the support column 2, and the light sources 36 and 37
Are respectively led to the light emitting end.

Then, in order to carry out the above-described inspection of the two-dimensional dimension over the entire length of the blade A, the mounting base 10 is arranged on the left and right sides of FIG. 2 (a), that is, in the direction of the z-axis perpendicular to the x-axis and the y-axis. Made a structure that can be slid. That is, the mounting base 10
Is placed on the slide base 11, and this base 11 is moved along the track 12
The lead screw attached to the servo motor 14
A part of the base 11 is screwed into the 13. Servo motor 14
Drives the blade A to mount 10
It moves in the z-axis direction together with 11. However, these are immovable in the x-axis and y-axis directions (that is, in the plane of FIG. 2B) as described above.

Further, the slide base 11 is provided with a rotary clamp 15 for fixing the blade A to the mount 10. If the notch Ac of the blade A is fitted into the protrusion 10a of the mounting base 10 and then the arm 15a of the clamp 15 is turned to pull it, the blade A is pressed and fixed to the mounting base 10, so the screw is passed through the screw hole Ad. It is more efficient than fixing.

When inspecting the above-mentioned two-dimensional dimensions for a large number of blades A of the same type using this inspection apparatus, first, the blades A
After adjusting the positions of the mirror 20, the projector 30, the image sensor 40, etc. according to the above, the following procedure may be repeated.

Using the rotary clamp 15, the blade A is mounted on the mounting base 10 as described above.

The servo motor 14 is driven to move the blade A along with the mounting base 10 and the like in the z-axis direction.

While the blade A is moving, its dimensional inspection is continued based on the above-mentioned principle, and if either of the x and y dimensions is out of the specified range at any place, an alarm is issued as "dimension failure".

When the blade A has finished moving in the z-axis direction, the fixing by the rotary clamp 15 is released and the blade A is removed. At this time, the blade A with the alarm is excluded as a defective product, and only the blade without the alarm is regarded as the acceptable product.

As described above, in addition to the non-contact type inspection, the inspector (standing member) mainly needs to attach and detach the blade A, and the work such as length measurement and determination is not necessary for the dimensional inspection by this device. , Human error is less likely to occur,
Continuous inspection over the entire length of blade A (z-axis direction), x dimension and y dimension inspection in one step,
Moreover, there is an advantage that it can be easily performed by one standing member.

Next, another embodiment of the present invention will be described. First
The same parts as those in the embodiment (FIGS. 1 and 2) are designated by the same reference numerals and detailed description thereof will be omitted.

FIG. 3 shows the basic structure of the dimension inspection apparatus of the second embodiment.
The present apparatus is configured generally in substantially the same manner as the apparatus of the first embodiment, but as shown in the drawing, there is a difference in how to use light for projection. That is, a projector 30 ′ incorporating one light source 32 and a half mirror 33 is used, and a projected image of the light emitted from the light source 32 and reflected by the inspection object B is received on the light receiving surface 41 of the image sensor 40. Imaged.

Therefore, the line p (image of the ridge line P), the line q (image of the edge Q), and the line p ′ (mirror surface 20) are also formed on the light receiving surface 41.
The image of the ridgeline P shown in is projected side by side in this order.
The light and shade between the lines are those in the first embodiment (see FIG. 1).
(See (c)). In the first embodiment, of the light from the light sources (two), the light that has passed by the object to be inspected becomes the bright portion, whereas in the apparatus of this embodiment, the light reflected by the object to be inspected B is bright. This is because an image is formed on the light receiving surface 41 as a part. In this apparatus as well, the image sensor 40 determines the quality of the dimension of the inspection object B from this projected image. From the viewpoint of clarifying the lightness and darkness of the projected image, it is preferable that the inspection object B has a good light reflectance on its surface.

FIG. 4 is a principle diagram relating to the third embodiment of the present invention. In this embodiment, similarly to the first embodiment (FIG. 1), a light receiving surface 81 is formed by a projector having a combination lens 71 and light sources 72 and 73.
Although the projected image can be formed on the upper side, it is a case where the x axis and the y axis form an oblique coordinate system. This inspection object C has an edge P
Since there is a convex portion Ca below, even if light is irradiated in the y-axis direction, the image of the edge portion P cannot be projected because of being blocked by the convex portion Ca. Therefore, the dimension inspection of the inspection object C is performed by the x and y coordinates of the edge portion P in the oblique coordinate system as shown in the figure instead of the orthogonal coordinate system. That is, the image is projected in the direction perpendicular to the x-axis to know the x-coordinate of the edge P from the interval between the lines p and q, and from the interval between the lines q and p ′ (the angle between the coordinate axes and the specular body 61). (Correction is performed based on the inclination angle, etc.) and its y coordinate is known.

The fourth embodiment shown in FIGS. 5 (a) and 5 (b) represents an inspection apparatus in which the light source is not positively used and the automatic determination by the image sensor is omitted. In this example, the object D to be inspected is a cylindrical body (anything other than a cylindrical body can be inspected), and the mounting center Dc is used as a reference point. The y dimension is inspected to check the eccentricity of the inspection object D. For example, a clear-colored background body 75/76 is arranged with respect to the inspection object D, and the lens
Screen 82 as projector 74 (eg frosted glass)
An image of the edge Da of the inspection object D (line da), an image of the edge Q of the specular body 62 (line q), and an image of the edge Db reflected on the specular body 62 (line db) are shown in the same figure. Enlarge and project as shown in (b). These images can be clearly discriminated from the contrast between the inspection object D and the background bodies 75 and 76, and the screen 82 has the above-mentioned x dimension.
Limit line 82a ・ 8 corresponding to the specified value of y dimension (allowable eccentricity)
Since 2b is displayed (the line q does not move because the position of the mirror body 62 does not move), the quality of the dimension of the inspection object D can be visually and easily determined.

Finally, FIG. 6 shows a simple inspection without using a lens. A point light source (or a line light source long in the z-axis direction) is arranged as the light sources 77 and 78 so that the vicinity of the edge P of the inspection object E and the edge Q of the specular body is projected in an enlarged manner and the specular body 63 is arranged. After the angle is set, an image based on the edge P and the edge Q (an image as a shadow, not an image formed by a lens) is projected on the screen 83 as illustrated. If this image is subjected to visual judgment or signal processing by an image sensor, the two-dimensional dimension inspection of the edge portion P of the inspection object E can be performed as in the other embodiments.

[Effect of the Invention] According to the dimension inspection method of the present invention, the required two-dimensional dimension can be inspected at once by the two intervals appearing side by side in one projection image.

Further, according to the dimension inspection apparatus of the present invention, the inspection of the two-dimensional dimension can be performed quickly and easily by one inspector in one process, and there is no individual difference in the inspection.

Further, according to the inspection device of claim 3, it is possible to continuously inspect all the positions in the longitudinal direction of the inspection object, and according to the device of claim 4, the human error concerning the quality judgment of the inspection object. Disappears.

[Brief description of drawings]

1 and 2 relate to the first embodiment of the present invention. FIG. 1 (a) is a drawing showing the basic structure and inspection principle, FIG. 1 (b) is an enlarged view of part b thereof, and FIG. 1 (c) is its c-
Part c is an arrow view, and FIG. 3D is a voltage signal diagram of the image sensor. Also, Fig. 2 (a) is a front view of the dimensional inspection device.
(b) is the bb section arrow view (side view). Figure 3, Figure 4, Figure 5 (a), and Figure 6 are the second
It is a basic configuration diagram or an inspection principle diagram relating to the third, fourth, and fifth embodiments. Note that FIG. 5 (b) is a plan view of the screen which receives the projected image in FIG. 5 (a). 10 ... Mounting base, 20, 61, 62, 63 ... Mirror body (20 is a prism mirror), 30, 30 '... Projector, 40 ... Image sensor, 4
1, 81, 82, 83 ... Light receiving surface (82 and 83 are screens), A,
B, C, D, E ... Inspected object (A is blade), P ... Edge (or ridge), Q ... Edge.

Claims (4)

[Claims] 1. An x from a reference point to an edge of an inspection object.
And a method for inspecting the two-dimensional dimensions of y, a) a mirror surface body that is not parallel to neither the x-axis nor the y-axis is separated from the edge of the inspected object in the x-axis direction by the y-axis. (2) It is placed so as to overlap in the direction, and is immovably arranged from the reference point position. (B) The above-mentioned edge and the edge and the edge reflected on the specular body are projected in a direction perpendicular to the x-axis, and c) the A dimension inspection method characterized by inspecting the above-mentioned dimension x by the distance between the edge and the edge in the projected image, and inspecting the dimension y by the distance between the edge in the projected image and the edge reflected on the mirror body. . 2. x from the reference point to the edge of the inspection object
And a device for inspecting the two-dimensional dimensions of y, in which the reference point is fixed and a mounting base for mounting an object to be inspected, the angle and the position of the edge are appropriately set, and the position is fixed from the reference point position. A projector including a specular body, a light source and a lens, for projecting the edge, the edge of the specular body and the edge reflected on the specular body in a direction perpendicular to the x-axis, and a light receiving surface at an image forming position by the projector. And an image sensor for outputting an electric signal according to the brightness of each part in a projected image. 3. The dimensional inspection device according to claim 2, wherein the mount is movable in a direction perpendicular to the x-axis and the y-axis. 4. The dimensional inspection device according to claim 2, wherein when the lightness / darkness interval in the projected image exceeds or falls below a certain value, an abnormality of the object to be inspected is notified.