JPH06293B2 - Vertical drive mechanism for sample stage - Google Patents
Vertical drive mechanism for sample stageInfo
- Publication number
- JPH06293B2 JPH06293B2 JP9340986A JP9340986A JPH06293B2 JP H06293 B2 JPH06293 B2 JP H06293B2 JP 9340986 A JP9340986 A JP 9340986A JP 9340986 A JP9340986 A JP 9340986A JP H06293 B2 JPH06293 B2 JP H06293B2
- Authority
- JP
- Japan
- Prior art keywords
- sample stage
- base
- rotational force
- stage
- feed gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Machine Tool Units (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、半導体用ウエハ、ホトマスク等の試料の微細
欠陥（異物、キズなど）をレーザ等の光ビームで検査す
る表面検査装置において上記試料を載せて焦点合せをす
る試料ステージの上下駆動機構に関し、特に試料ステー
ジを横揺れすることなく正しく上下移動することができ
る試料ステージの上下駆動機構に関する。The present invention relates to a surface inspection apparatus for inspecting microscopic defects (for example, foreign matter and scratches) on a sample such as a semiconductor wafer and a photomask by a light beam such as a laser. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vertical drive mechanism of a sample stage for focusing by focusing, and particularly to a vertical drive mechanism of a sample stage that can correctly move up and down without rolling.
従来の技術 従来の試料ステージの上下駆動機構は、第４図に示すよ
うに、駆動源としてのモータ１と、このモータ１の駆動
軸に取り付けられた駆動ギア２に噛み合って回転されベ
ース５に対して上下方向には移動せず鉛直軸周りに回転
のみ可能に設けられた送り用ギア３と、この送り用ギア
３の中心部に形成された雌ネジに螺合する雄ネジを有す
るステージ軸４の上端に取り付けられ上記送り用ギア３
の回転によりベース５に対して上昇または下降する試料
ステージ６とを有して成っていた。そして、モータ１を
駆動して駆動ギア２を回転することにより送り用ギア３
が回転し、この送り用ギア３の回転によりステージ軸４
が矢印Ａ，Ｂ方向に上昇または下降し、その上端の試料
ステージ６が上昇または下降するようになっていた。な
お、第４図において、符号７はステージ軸４の下部を保
持するガイドである。ここで、上記試料ステージ６の上
面には、半導体ウエハ、ホトマスク等の試料８がセット
されており、この試料８の上方には表面検査のための光
学系の対物レンズ（図示省略）が固定されている。そし
て、上記試料ステージ６の全体を一平面内でＸ−Ｙ方向
に順次移動させると共に、該試料ステージ６を上下移動
することにより上記試料８の表面に対物レンズの焦点合
せをしながら光学系で検出して二次元画像を構成し、欠
陥マップ図などで出力して表面検査を行っていた。この
場合、上記半導体ウエハ、ホトマスク等の試料８の表面
は完全に平らではなく微小な起伏があり、この起伏に対
して常に対物レンズの焦点合せをしなければならない。
従って、上記Ｘ−Ｙ方向の移動による起伏の変化に追従
して試料ステージ６を上昇または下降させるようになっ
ていた。2. Description of the Related Art As shown in FIG. 4, a conventional vertical drive mechanism for a sample stage is rotated by engaging a motor 1 as a drive source and a drive gear 2 attached to a drive shaft of the motor 1 with a base 5 rotated. On the other hand, a stage shaft having a feed gear 3 provided so as not to move vertically and only rotatable around a vertical axis, and a male screw threaded to a female screw formed at the center of the feed gear 3. 4 is attached to the upper end of the feed gear 3
And a sample stage 6 that moves up and down with respect to the base 5 by rotating. Then, by driving the motor 1 to rotate the drive gear 2, the feed gear 3 is rotated.
Rotates, and the rotation of the feed gear 3 causes the stage shaft 4 to rotate.
Was raised or lowered in the directions of arrows A and B, and the sample stage 6 at the upper end was raised or lowered. In FIG. 4, reference numeral 7 is a guide for holding the lower part of the stage shaft 4. A sample 8 such as a semiconductor wafer or a photomask is set on the upper surface of the sample stage 6, and an objective lens (not shown) of an optical system for surface inspection is fixed above the sample 8. ing. Then, the entire sample stage 6 is sequentially moved in the XY direction within one plane, and the sample stage 6 is moved up and down to focus the objective lens on the surface of the sample 8 by an optical system. The surface was inspected by detecting and constructing a two-dimensional image and outputting it as a defect map diagram. In this case, the surface of the sample 8 such as the semiconductor wafer or photomask is not completely flat and has minute undulations, and the objective lens must always be focused on the undulations.
Therefore, the sample stage 6 is moved up or down in accordance with the change of the undulation due to the movement in the X-Y directions.
発明が解決しようとする問題点 しかし、このような試料ステージの上下駆動機構におい
ては、送り用ギア３の中心部の雌ネジが試料ステージ６
のステージ軸４の雄ネジに直接螺合しているので、モー
タ１を駆動して駆動ギア２を回転させると、その回転力
は上記ステージ軸４の上部に直接作用するものであっ
た。すなわち、第５図に示すように、駆動ギア２の回転
により、送り用ギア３にはその円周の接線方向にトルク
Ｔが働き、このトルクＴがステージ軸４の上部に直接作
用して該ステージ軸４が弾性変形してやや曲がり、この
結果試料ステージ６が矢印Ｃのように横方向に微小変位
（約１ミクロン程度）すると共にやや傾斜するものであ
った。従って、上述のように光学系で試料８の表面に対
物レンズの焦点合せをしながら検出して二次元画像を構
成する際に、上記試料ステージ６の微小変位と共に試料
８も横方向に移動し、該試料８から取り込んだ隣り同士
の画像位置に狂いが生じて二次元画像が正しく構成でき
ないことがあった。このことから、表面検査のための欠
陥マップ図の精度が低下するものであった。また、上記
試料ステージ６を対物レンズのオートフォーカス回路と
連動させたときは、該試料ステージ６の上下移動に従っ
て試料ステージ６がやや傾斜することから、目標位置に
対する追従動作が直線性を有さず動揺的になることがあ
り、試料８の表面に対する焦点合せに時間がかかるもの
であった。そこで、本発明はこのような問題点を解決す
ることを目的とする。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention However, in such a vertical movement mechanism of the sample stage, the female screw at the center of the feed gear 3 is attached to the sample stage 6.
Since it is directly screwed into the male screw of the stage shaft 4, when the motor 1 is driven to rotate the drive gear 2, the rotational force directly acts on the upper part of the stage shaft 4. That is, as shown in FIG. 5, the rotation of the drive gear 2 causes a torque T to act on the feed gear 3 in the tangential direction of its circumference, and this torque T acts directly on the upper portion of the stage shaft 4. The stage shaft 4 was elastically deformed and slightly bent, and as a result, the sample stage 6 was slightly displaced laterally as shown by an arrow C (about 1 micron) and slightly tilted. Therefore, when a two-dimensional image is formed by detecting while focusing the objective lens on the surface of the sample 8 by the optical system as described above, the sample 8 also moves laterally along with the minute displacement of the sample stage 6. However, the two-dimensional image may not be correctly constructed due to an error in the image positions of the adjacent images captured from the sample 8. From this, the accuracy of the defect map diagram for the surface inspection is lowered. Further, when the sample stage 6 is interlocked with the autofocus circuit of the objective lens, the sample stage 6 slightly tilts as the sample stage 6 moves up and down, so that the follow-up operation with respect to the target position does not have linearity. It may be upset and it takes time to focus on the surface of the sample 8. Then, this invention aims at solving such a problem.
問題点を解決するための手段 上記の問題点を解決する本発明の手段は、ベースと、こ
のベースに対して上下方向には移動せず鉛直軸周りに回
転のみ可能に設けられた送り用ギアと、この送り用ギア
を回転させる駆動源と、上記送り用ギアの回転によりベ
ースに対して上昇または下降する試料ステージとを有し
て成る試料ステージの上下駆動機構において、上記送り
用ギアの下面側に短寸円筒状の回転力伝達部を設けると
共に、この回転力伝達部の内周面の少なくとも二箇所に
は内向きに回転力の伝達部材を突設し、上記回転力伝達
部の内側には有底円筒状に形成されて該回転力伝達部の
円筒状内部に嵌合されると共にその側壁の上記伝達部材
と対応する箇所には上下方向に伸びる切欠溝が形成され
且つその底面中央部には下方に突出したネジ支軸を有す
る昇降部材を設け、このネジ支軸を上記ベースの底部中
央部に形成されたネジ穴に螺合すると共に上記切欠溝を
回転力伝達部の伝達部材と上下方向の遊びをもって係合
することによりベースに対して昇降部材を上昇または下
降可能とし、さらにこの昇降部材により上記試料ステー
ジのステージ軸の底面をフローティング機構で支えたこ
とによってなされる。Means for Solving the Problems The means of the present invention for solving the above problems are a base and a feed gear provided so as not to move in the vertical direction with respect to the base but only to rotate around a vertical axis. And a drive source for rotating the feed gear, and a sample stage up-and-down drive mechanism including a sample stage that moves up and down with respect to the base by rotation of the feed gear. A short cylindrical rotating force transmitting portion is provided on the side, and inward rotating force transmitting members are provided at least at two locations on the inner peripheral surface of the rotating force transmitting portion so as to project inside the rotating force transmitting portion. Has a bottomed cylindrical shape and is fitted into the cylindrical shape of the rotational force transmitting portion, and a notch groove extending vertically is formed at a portion of the side wall thereof corresponding to the transmitting member, and the bottom center thereof. Screw protruding downward on the part An elevating member having a supporting shaft is provided, and the screw supporting shaft is screwed into a screw hole formed in the central portion of the bottom of the base, and the notch is engaged with the transmitting member of the rotational force transmitting portion with vertical play. By doing so, the elevating member can be raised or lowered with respect to the base, and the bottom surface of the stage shaft of the sample stage is supported by the floating mechanism by the elevating member.
実施例 以下、本発明の実施例を添付図面に基づいて詳細に説明
する。Embodiment Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
第１図は本発明による試料ステージの上下駆動機構の実
施例を示す中央縦断面図である。図において、ベース１
０は本発明の上下駆動機構を保持する基部材となるもの
で、このベース１０の底部中央部には、昇降部材１１が
上昇または下降可能に設けられている。この昇降部材１
１は、後述の送り用ギア１５によって回転されて上記ベ
ース１０に対して上昇または下降するもので、第２図に
示すように、有底で背の低い円筒状に形成されると共
に、その側壁の対向する二箇所には上縁から上下方向に
伸びる切欠溝としてＵ形溝１２，１２が穿設され、かつ
その底面中央部には雄ネジを形成した支軸１３が下方に
突出している。そして、この支軸１３を上記ベース１０
の底部中央部に形成されたネジ穴１４に螺合することに
より、昇降可能とされている。FIG. 1 is a central longitudinal sectional view showing an embodiment of a vertical drive mechanism for a sample stage according to the present invention. In the figure, base 1
Reference numeral 0 is a base member for holding the vertical drive mechanism of the present invention, and an elevating member 11 is provided at the center of the bottom of the base 10 so as to be able to move up and down. This lifting member 1
Reference numeral 1 denotes a member which is rotated by a feed gear 15 described later and moves up or down with respect to the base 10. As shown in FIG. U-shaped grooves 12, 12 are formed as notch grooves extending vertically from the upper edge at two opposing positions, and a spindle 13 formed with a male screw projects downward at the center of the bottom surface. Then, the support shaft 13 is attached to the base 10
It can be moved up and down by being screwed into the screw hole 14 formed at the center of the bottom of the.
上記昇降部材１１の外側面には、送り用ギア１５が嵌合
している。この送り用ギア１５は、駆動源としてのモー
タ１によって回転されると共にこの回転力を上記昇降部
材１１に伝達するもので、第２図に示すように、中央部
がくり抜かれたドーナツ板状の歯車に形成されると共
に、このドーナツ板状の歯車の下面側にはその内径が上
記昇降部材１１の外径よりも大きい短寸円筒状の回転力
伝達部１６が設けられ、かつこの回転力伝達部１６の内
周面にて上記昇降部材１１のＵ形溝１２，１２の位置に
対応する対向二箇所には回転力の伝達部材としてピン１
７，１７が内向きに突設されている。そして、このピン
１７，１７を上記昇降部材１１のＵ形溝１２，１２に位
置合せして回転力伝達部１６を嵌合することにより、上
記ピン１７とＵ形溝１２とが上下方向の遊びをもって係
合している。また、上記送り用ギア１５の外周面には、
ギア歯１８が形成されており、このギア歯１８にモータ
１の駆動軸に取り付けられた駆動ギア２が噛み合うこと
により、送り用ギア１５が前記ベース１０に対して上下
方向には移動せず鉛直軸周りに回転のみ可能に設けられ
ている。A feed gear 15 is fitted to the outer surface of the elevating member 11. The feed gear 15 is rotated by the motor 1 as a drive source and transmits the rotational force to the elevating member 11. As shown in FIG. 2, the feeding gear 15 has a donut plate shape with a hollowed central portion. On the lower surface side of the gear having the shape of a donut, a short cylindrical rotating force transmitting portion 16 having an inner diameter larger than the outer diameter of the elevating member 11 is provided, and the rotating force is transmitted. The pin 1 is used as a torque transmitting member at two opposing positions on the inner peripheral surface of the portion 16 corresponding to the positions of the U-shaped grooves 12, 12 of the elevating member 11.
7, 17 are provided so as to project inward. Then, by aligning the pins 17 and 17 with the U-shaped grooves 12 and 12 of the elevating member 11 and fitting the rotational force transmitting portion 16, the pin 17 and the U-shaped groove 12 play in the vertical direction. Are engaged. Further, on the outer peripheral surface of the feed gear 15,
Gear teeth 18 are formed, and when the drive gear 2 attached to the drive shaft of the motor 1 meshes with the gear teeth 18, the feed gear 15 does not move vertically with respect to the base 10 and does not move vertically. It is provided so that it can only rotate about its axis.
上記ベース１０の中央部には、試料ステージ１９が支持
されている。この試料ステージ１９は、表面検査の対象
物である半導体用ウエハ、ホトマスク等の試料８をその
上面にセットして上昇または下降するもので、上記試料
ステージ１９の下面中央部から下方に伸びるステージ軸
２０の底部が前記昇降部材１１内に嵌合してその底面が
鋼球２１を介して昇降部材１１の内部底面によりフロー
ティング機構で支えられると共に、該ステージ軸２０の
上部側面は上記ベース１０の上部材１０′の中央開口部
に設けられたベアリング２２，２２により上下動可能に
保持されている。従って、上記試料ステージ１９のステ
ージ軸２０は、駆動ギア２で回転される送り用ギア１５
に直結されることなく、中間に昇降部材１１が介在して
いると共にこの昇降部材１１に対して鋼球２１によりフ
ローティング機構で支えられているので、上記ステージ
軸２０には上下方向の力しか作用しない。A sample stage 19 is supported at the center of the base 10. The sample stage 19 sets a sample 8 such as a semiconductor wafer or a photomask, which is an object of surface inspection, on the upper surface thereof and ascends or descends. A stage axis extending downward from the central portion of the lower surface of the sample stage 19. The bottom of 20 is fitted in the elevating member 11, the bottom surface of which is supported by a floating mechanism by the inner bottom surface of the elevating member 11 via a steel ball 21, and the upper side surface of the stage shaft 20 is above the base 10. Bearings 22, 22 provided in the central opening of the member 10 'are held so as to be vertically movable. Therefore, the stage shaft 20 of the sample stage 19 has the feed gear 15 rotated by the drive gear 2.
Since the elevating member 11 is interposed in the middle and is supported by the floating mechanism by the steel balls 21 without being directly connected to the stage shaft 20, only a vertical force acts on the stage shaft 20. do not do.
次に、このように構成された試料ステージの上下駆動機
構の動作について説明する。初めに、試料ステージ１９
の上面に検査対象物である試料８をセットする。そし
て、上記試料ステージ１９の全体を適宜Ｘ−Ｙ方向に移
動したところで、その点における試料８の表面に対物レ
ンズの焦点を合せるために試料ステージ１９を上昇また
は下降させる。すなわち、まず、モータ１を駆動して駆
動ギア２を回転させる。すると、この駆動ギア２にギア
歯１８が噛み合っている送り用ギア１５が回転される。
そして、上記送り用ギア１５の回転と共にその下面側に
設けられた回転力伝達部１６の内向きのピン１７，１７
も回転するので、このピン１７，１７とＵ形溝１２，１
２との係合により回転力が伝達され、昇降部材１１も上
記送り用ギア１５と共に回転する。このとき、上記ピン
１７，１７が上下方向の動きをしたとしても、Ｕ形溝１
２，１２の切り欠き部によりその動きを逃げることがで
きるので、上記昇降部材１１には回転力のみが伝達され
る。次に、この昇降部材１１の回転と共にその底面の支
軸１３も回転するので、この支軸１３とベース１０のネ
ジ穴１４との螺合により上記昇降部材１１の全体は上昇
または下降する。この昇降部材１１の上下移動は鋼球２
１を介してステージ軸２０の底面に伝達され、該ステー
ジ軸２０を上昇または下降させる。従って、上記ステー
ジ軸２０の上端に設けられた試料ステージ１９が上昇ま
たは下降し、その上面にセットされた試料８が上下移動
する。これにより、上記試料８の上方に固定された光学
系の対物レンズの焦点に合せることができる。Next, the operation of the sample stage vertical drive mechanism configured as described above will be described. First, the sample stage 19
The sample 8 as the inspection object is set on the upper surface of the. Then, when the entire sample stage 19 is appropriately moved in the XY directions, the sample stage 19 is moved up or down in order to focus the objective lens on the surface of the sample 8 at that point. That is, first, the motor 1 is driven to rotate the drive gear 2. Then, the feed gear 15 in which the gear teeth 18 mesh with the drive gear 2 is rotated.
Then, as the feed gear 15 rotates, the inwardly facing pins 17, 17 of the rotational force transmitting portion 16 provided on the lower surface side of the feed gear 15 rotate.
Also rotates, so this pin 17, 17 and U-shaped groove 12, 1
Rotational force is transmitted by engagement with 2, and the elevating member 11 also rotates together with the feed gear 15. At this time, even if the pins 17 and 17 move vertically, the U-shaped groove 1
Since the notches 2 and 12 can escape the movement, only the rotational force is transmitted to the elevating member 11. Next, as the lifting member 11 rotates, the support shaft 13 on the bottom also rotates, so that the lifting member 11 as a whole is raised or lowered by screwing the support shaft 13 into the screw hole 14 of the base 10. The vertical movement of the lifting member 11 causes the steel ball 2
1 is transmitted to the bottom surface of the stage shaft 20 to raise or lower the stage shaft 20. Therefore, the sample stage 19 provided on the upper end of the stage shaft 20 moves up or down, and the sample 8 set on the upper surface moves up and down. As a result, it is possible to focus on the objective lens of the optical system fixed above the sample 8.
発明の効果 本発明は以上のように構成されたので、モータ１で回転
される送り用ギア１５と試料ステージ１９のステージ軸
２０とを直結することなく、上記試料ステージ１９を上
昇または下降させることができる。従って、上記送り用
ギア１５に働くトルク等は上記フローティング機構です
べて吸収され、上記ステージ軸２０には昇降部材１１に
よる上下方向の動きしか伝達されない。このことによ
り、試料ステージ１９を横揺れすることなく正しく上下
移動することができる。この結果、上記試料ステージ１
９をＸ−Ｙ方向に順次移動させながら上下移動して対物
レンズの焦点合せをしても、試料８から取り込んだ画像
により二次元画像を正しく構成することができ、表面検
査のための欠陥マップ図の精度を向上することができ
る。また、上記試料ステージ１９を対物レンズのオート
フォーカス回路と連動させた場合は、目標位置に対する
追従動作が直線性を有する動きとなり、試料８の表面に
対する焦点合せを短時間に行うことができる。さらに、
上記追従動作の直線性から、焦点合せの精度を向上する
ことができる。EFFECTS OF THE INVENTION Since the present invention is configured as described above, it is possible to raise or lower the sample stage 19 without directly connecting the feed gear 15 rotated by the motor 1 and the stage shaft 20 of the sample stage 19. You can Therefore, the torque acting on the feed gear 15 and the like are all absorbed by the floating mechanism, and only the vertical movement by the elevating member 11 is transmitted to the stage shaft 20. As a result, the sample stage 19 can be correctly moved up and down without rolling. As a result, the sample stage 1
Even if the objective lens is focused by moving up and down while sequentially moving 9 in the XY directions, a two-dimensional image can be correctly constructed by the image captured from the sample 8, and a defect map for surface inspection is obtained. The accuracy of the figure can be improved. Further, when the sample stage 19 is linked with the autofocus circuit of the objective lens, the follow-up operation with respect to the target position becomes a linear movement, and focusing on the surface of the sample 8 can be performed in a short time. further,
Due to the linearity of the follow-up operation, the accuracy of focusing can be improved.
第１図は本発明による試料ステージの上下駆動機構の実
施例を示す中央縦断面図、第２図はその送り用ギアと昇
降部材の形状を示す分解組立斜視図、第３図は送り用ギ
アと昇降部材の位置関係を示す平面図、第４図は従来の
試料ステージの上下駆動機構を示す中央縦断面図、第５
図はその平面図である。 １…モータ ２…駆動ギア ８…試料 １０…ベース １１…昇降部材 １２…Ｕ形溝 １３…支軸 １４…ネジ穴 １５…送り用ギア １６…回転力伝達部 １７…ピン（伝達部材） １９…試料ステージ ２０…ステージ軸 ２１…鋼球FIG. 1 is a central longitudinal sectional view showing an embodiment of a vertical drive mechanism for a sample stage according to the present invention, FIG. 2 is an exploded perspective view showing the shapes of a feed gear and a lifting member, and FIG. 3 is a feed gear. And FIG. 5 is a plan view showing the positional relationship between the elevating member and the elevating member. FIG.
The figure is a plan view thereof. DESCRIPTION OF SYMBOLS 1 ... Motor 2 ... Drive gear 8 ... Sample 10 ... Base 11 ... Elevating member 12 ... U-shaped groove 13 ... Spindle 14 ... Screw hole 15 ... Feed gear 16 ... Rotational force transmission part 17 ... Pin (transmission member) 19 ... Sample stage 20 ... Stage axis 21 ... Steel ball
Claims (1)
は移動せず鉛直軸周りに回転のみ可能に設けられた送り
用ギアと、この送り用ギアを回転させる駆動源と、上記
送り用ギアの回転によりベースに対して上昇または下降
する試料ステージとを有して成る試料ステージの上下駆
動機構において、上記送り用ギアの下面側に短寸円筒状
の回転力伝達部を設けると共に、この回転力伝達部の内
周面の少なくとも二箇所には内向きに回転力の伝達部材
を突設し、上記回転力伝達部の内側には有底円筒状に形
成されて該回転力伝達部の円筒状内部に嵌合されると共
にその側壁の上記伝達部材と対応する箇所には上下方向
に伸びる切欠溝が形成され且つその底面中央部には下方
に突出したネジ支軸を有する昇降部材を設け、このネジ
支軸を上記ベースの底部中央部に形成されたネジ穴に螺
合すると共に上記切欠溝を回転力伝達部の伝達部材と上
下方向の遊びをもって係合することによりベースに対し
て昇降部材を上昇または下降可能とし、さらにこの昇降
部材により上記試料ステージのステージ軸の底面をフロ
ーティング機構で支えたことを特徴とする試料ステージ
の上下駆動機構。1. A base, a feed gear which does not move up and down with respect to the base and is rotatable only around a vertical axis, a drive source for rotating the feed gear, and the feed. In a vertical drive mechanism for a sample stage having a sample stage that moves up and down with respect to a base by rotation of a gear, a short-cylindrical rotational force transmitting portion is provided on the lower surface side of the feed gear, and A rotational force transmission member is provided so as to project inward at least at two locations on the inner peripheral surface of the rotational force transmission unit, and is formed in a cylindrical shape with a bottom inside the rotational force transmission unit. A vertically extending notch groove is formed in a portion of the side wall of the cylindrical member which corresponds to the transmitting member, and an elevating member having a screw support shaft protruding downward is provided in the center of the bottom surface. , This screw support shaft above the base The lifting member can be raised or lowered with respect to the base by being screwed into a screw hole formed in the central portion of the bottom and engaging the cutout groove with the transmission member of the rotational force transmission portion with vertical play. An up-and-down drive mechanism for the sample stage, characterized in that the bottom surface of the stage shaft of the sample stage is supported by the floating mechanism by the elevating member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9340986A JPH06293B2 (en) | 1986-04-24 | 1986-04-24 | Vertical drive mechanism for sample stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9340986A JPH06293B2 (en) | 1986-04-24 | 1986-04-24 | Vertical drive mechanism for sample stage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62250341A JPS62250341A (en) | 1987-10-31 |
| JPH06293B2 true JPH06293B2 (en) | 1994-01-05 |
Family
ID=14081497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9340986A Expired - Lifetime JPH06293B2 (en) | 1986-04-24 | 1986-04-24 | Vertical drive mechanism for sample stage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06293B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101904721B1 (en) * | 2017-08-28 | 2018-10-16 | 주식회사 태웅 | Jominy test device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5014170B2 (en) * | 2008-01-16 | 2012-08-29 | ミツテック株式会社 | Work appearance inspection device |
-
1986
- 1986-04-24 JP JP9340986A patent/JPH06293B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101904721B1 (en) * | 2017-08-28 | 2018-10-16 | 주식회사 태웅 | Jominy test device |
| WO2019045216A1 (en) * | 2017-08-28 | 2019-03-07 | 주식회사 태웅 | Jominy test apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62250341A (en) | 1987-10-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5694214A (en) | Surface inspection method and apparatus | |
| US8520066B2 (en) | Automated optical inspection system for the runout tolerance of circular saw blades | |
| JP2016027320A (en) | Automatic screw dimensions measuring system | |
| JPS59129636A (en) | Controller of stage with freedom of six | |
| TWI654408B (en) | Inspection device and inspection method | |
| JP2007078635A (en) | Calibration fixture, and offset calculation method of image measuring machine | |
| KR20200113866A (en) | A Precise driving Tilt Stage | |
| JP6520216B2 (en) | Work inspection apparatus and method of manufacturing rolling bearing | |
| CN113607755A (en) | Automatic detection device for wafer | |
| US6051845A (en) | Method and apparatus for selectively marking a semiconductor wafer | |
| CN215525587U (en) | Automatic detection device for wafer | |
| JP2009088477A (en) | Substrate measuring stage | |
| JPH06293B2 (en) | Vertical drive mechanism for sample stage | |
| JP2007155412A (en) | Visual inspection device and method | |
| JP2008102014A (en) | Apparatus and method for measuring surface profile | |
| CN110006921B (en) | Automatic pose adjusting method and device for large-curvature-radius spherical optical element | |
| CN1178043C (en) | Deformation analyzer of barrel body | |
| JP2003014611A (en) | Scanning type probe microscope | |
| JP2002148001A (en) | Inspection apparatus for dial gage | |
| JPH05160245A (en) | Circular board positioning apparatus | |
| JP2007140137A (en) | Positioning device | |
| JPS594442Y2 (en) | scanning electron microscope | |
| JP2861671B2 (en) | Overlay accuracy measuring device | |
| CN112229841B (en) | Pathological section imaging device and pathological section imaging method based on rotary platform | |
| JPH07333160A (en) | Surface property observation device for inspection object |