JPH06289310A - Vibrator, optical scanning device, optical information reader, and optical detecting equipment - Google Patents

Abstract

PURPOSE:To stabilize the optical scanning of the optical scanning device and further to improve the fall shock resistance. CONSTITUTION:One end of a 1st elastic deformation part 7 consisting of plural parallel beams 7a is connected to the lower side of a connection part 8 and one end of a 2nd elastic deformation part 9 consisting of plural parallel beams 9a is connected to a lateral side of the connection part 8 to form a compound deformation part 12A in a nearly T shape. A vibration input part 4 is provided at the other end of the 1st elastic deformation part 7 and a movable part 5 is provided at the other end of the 2nd elastic deformation part 9. The vibration input part 4 is connected to an excitation source 2 such as a piezoelectric element and the moval part 5 is provided with a mirror part 6. Then, both the elastic deformation parts 7 and 9 are bent by vibrating the excitation source 2 to provide resonance in deformation mode. The movable part 5 is given rotary motion on a P axis by the bending deformation of the 2nd elastic deformation part 9 and two-dimensional motion components of rotary motion on a Q axis by the bending deformation of the 1st elastic deformation part 7 transmitted through the connection part 8, so that a light beam reflected by the mirror part 6 is scanned in two dimensions.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator, an optical scanning device,
The present invention relates to an optical information reader and an optical detection device.
In particular, the present invention relates to a vibrator that uses resonance in an elastically deformable portion, an optical scanning device that uses the vibrator, an optical information reader and an optical detection device that use the optical scanning device.

[0002]

2. Description of the Related Art The applicant of the present invention has developed an ultra-compact optical scanning device 51 as shown in FIGS. 6 (a) and 6 (b). This is composed of a plate-shaped vibrator 52 and a piezoelectric element 53,
A vibration having a frequency equal to the resonance frequency of the elastic deformation portion (torsion bar) 55 is applied from the piezoelectric element 53 to the vibration input portion 54, the elastic deformation portion 55 is caused to resonate by this vibration, and the movable portion 56 is caused by the resonance of the elastic deformation portion 55. Is oscillated (rotated), and the light beam is reflected by the mirror portion 57 provided on the movable portion 56 so that the light beam is scanned in one dimension or two dimensions. At this time, the elastic deformation portion 55 is transferred from the piezoelectric element 53 to the vibration input portion 54.
When a vibration having a frequency equal to the resonance frequency f _B of the bending deformation mode is applied, the elastic deformation portion 55 bends and deforms, and the movable portion 56 rotates about the Q axis, as shown in FIG. 6A. The light beam is also scanned in the same direction. On the other hand, when vibration having a frequency equal to the resonance frequency f _T of the torsional deformation mode of the elastic deformation portion 55 is applied from the piezoelectric element 53 to the vibration input portion 54, the elastic deformation portion 55 undergoes torsional deformation as shown in FIG. 6B. Then, the movable portion 56 rotates about the P axis, and the light beam is also scanned in the same direction.

This optical scanning device can drive a plate-shaped vibrator by a piezoelectric element or the like, and has an advantage that it can be miniaturized. Further, the one having an elastically deformable portion that can be elastically deformed in two or more directions is characterized by being capable of two-dimensional scanning with one optical scanning device, unlike a polygon scanner or a galvano scanner which has been conventionally used. That is, for example, a polygon scanner has a structure in which a polygon mirror (polyhedral mirror) is rotated by a servomotor, and therefore cannot be downsized, and a light beam can be scanned only in a one-dimensional direction. Therefore, in order to perform two-dimensional scanning with a polygon scanner, it is necessary to install two polygon scanners with different scanning directions and reflect the light beam twice. On the other hand, in the optical scanning device that utilizes the resonance of the elastically deforming portion, the elastically deforming portion of the vibrator can simultaneously resonate in two directions, so that the light beam is two-dimensionally scanned by one small optical scanning device. Can be made.

[0004]

In the optical scanning device having the above-described structure, in order to realize high-speed biaxial scanning, the oscillator must be made of a material having high rigidity and light weight. For this reason, in the past, a vibrator in which single crystal silicon (wafer) was microfabricated by using micromachining technology was used. As a result of manufacturing the vibrator using single crystal silicon, high scanning speed and It has become possible to provide an optical scanning device that is excellent in microfabrication and mass productivity.

However, since this optical scanning apparatus utilizes bending deformation about the Q axis and torsional deformation about the P axis, thickening the elastically deforming portion hinders these rotational movements. As a result, the elastically deformable portion cannot be thicker than a certain thickness. Therefore, in an optical scanning device using single crystal silicon as a vibrator, when used in a handheld bar code reader or the like that is held in a hand and operated, there is a risk that the vibrator may be damaged by a shock such as dropping. . In particular, since the elastically deformable portion is thinner than the other portions, it was easily damaged when dropped. In addition, since the resonance characteristics of the oscillator are too good, it becomes clear that the rotation angle of the movable part, that is, the scanning angle of the light beam, changes sensitively if the resonance frequency of the oscillator changes due to subtle environmental changes. It was In order to reduce the change in the scanning angle, it is necessary to keep the scanning angle constant by a resonance frequency control circuit or the like, which causes a problem that the cost is high.

The present invention has been made in view of the above-mentioned drawbacks of conventional examples, and an object thereof is to improve the stability of optical scanning and vibration of an optical scanning device and its vibrator,
Furthermore, it is to improve the drop impact resistance.

[0007]

A first vibrator of the present invention is an elastic deformation part having at least one elastic deformation mode, a vibration input part provided at one end of the elastic deformation part, and the elastic deformation. A movable part provided at the other end of the elastic part, transmitting the vibration applied to the vibration input part to the elastically deformable part, and the movable part according to the vibration in at least one elastically deformable mode of the elastically deformable part. Is vibrated, the elastically deformable portion is constituted by a plurality of parallel beams.

The second vibrator of the present invention is a composite deformation formed by connecting a plurality of elastic deformation portions having at least one elastic deformation mode in series through a connecting portion so as to form an arbitrary angle. Section, a vibration input section provided at one end of the composite deformation section, and a movable section provided at the other end of the composite deformation section, and the vibration applied to the vibration input section is applied to each of the elastic deformation sections. The movable portion vibrates according to the vibration of at least one elastic deformation mode of each elastic deformation portion.

In a third vibrator of the present invention, a plurality of elastic deformation portions having at least one elastic deformation mode are connected via a connecting portion to form a composite deformation portion, and a vibration input portion and a plurality of movable portions. Sections are connected in a non-linear manner by the compound deformation section, the vibration applied to the vibration input section is transmitted to each elastic deformation section, and the vibration is applied according to at least one elastic deformation mode of each elastic deformation section. The feature is that each movable part vibrates.

Also in the second and third vibrators, the elastically deformable portion can be constituted by a plurality of parallel beams.

Further, each of the above-mentioned vibrators can be constituted by a single substrate made of a plate-shaped material such as metal, semiconductor or plastic. At least one of a reflection mirror, an active element such as a light emitting element or a light receiving element, a control circuit for controlling the active element, and a light shaping element such as a mirror or a lens for shaping a light beam is provided on the substrate. Provided,
Thereby, the drive frequency can be adjusted. Further, an active element such as a light emitting element or a light receiving element, and a control circuit for controlling the active element are provided on the substrate, and a signal line connected to the active element or the control circuit is passed through an elastically deformable portion and It can also be routed to the vibration input unit and pulled out from the vibration input unit to the outside.

Further, an optical scanning device can be manufactured by using any one of the above vibrators.

Particularly, in the case of the optical scanning device using the first vibrator, the light beam is one-dimensionally scanned by utilizing the vibration of the movable portion according to one of the elastic deformation modes of the elastic deformation portion. be able to.

Further, in the case of the optical scanning device using the second or third vibrator, the light beam is two-dimensionally scanned by utilizing the fact that the vibration directions of the elastic deformation portions are different. You can

Further, in the above optical scanning device, an actuator utilizing a piezoelectric effect, electrostatic force or electromagnetic force can be used as a driving source for the vibrator.

Further, each of the above optical scanning devices can be used in an optical information reading device and an optical detection device.

[0017]

In the first vibrator according to the present invention, since the elastically deformable portion is constituted by a plurality of parallel beams, the mechanical strength of the elastically deformable portion can be increased. Therefore,
It is possible to increase the strength of the elastically deformable portion, which has conventionally been weak, and improve the drop impact resistance of the vibrator.

Since this vibrator does not easily undergo torsional deformation, it can be used as a vibrator using a vibration mode other than the torsional deformation mode. For example, a vibrator using a bending deformation mode can be used, and the vibrator can be used for an optical scanning device for performing one-dimensional optical scanning. As a result, if it is used as a vibrator that does not use the torsional deformation mode, a wide beam can be used, and thus the drop impact resistance of the vibrator can be further enhanced.

Further, since the elastically deforming portion is composed of a plurality of beams instead of widening the width of one elastically deforming portion, widening the width between the beams can prevent other than bending deformation such as bending deformation. Torsional deformation can be suppressed without disturbing the vibration mode. That is, the drop impact resistance of the vibrator can be enhanced without suppressing vibration modes other than torsional deformation.

Further, since the elastically deformable portion is formed of a plurality of beams, the elastically deformable portion is less likely to be deformed, and the resonance characteristic can be intentionally lowered, so that the resonance frequency changes due to a subtle environmental change or the like. Also, the changes in the rotation angle of the movable portion and the scanning angle of the light beam are less likely to be affected. Furthermore, since it is possible to suppress the generation of secondary and higher-order resonance modes, it is possible to obtain a vibrator having good linearity.

In the second or third vibrator of the present invention, the movable part can be two-dimensionally rotated by combining the vibrations of the plurality of elastically deformable parts having different directions. Therefore, for example, the elastically deformable portions can be vibrated in the same vibration mode and the movable portion can be two-dimensionally scanned. In other words, the movable part can be rotated two-dimensionally by the combination of the one-dimensional vibration of each elastically deformable part without using the torsional deformation, and the two-dimensional optical scanning device can be used.
As a result, the width of each elastically deformable portion can be increased, and a vibrator or optical scanning device that is resistant to drop impact can be manufactured. Furthermore, since the third vibrator includes a plurality of movable parts, when used in an optical scanning device, a plurality of light beams can be simultaneously scanned.

Further, in order to improve the drop impact resistance of the elastically deformable portion, an elastically deformable portion composed of a plurality of parallel beams can be used in addition to the wide elastically deformable portion. With such a structure, it is possible to suppress torsional deformation without suppressing bending deformation or the like of the elastically deformable portion, and it is possible to improve drop impact resistance without hindering vibration of the elastically deformable portion.

Further, on the substrate constituting the vibrator, a reflection mirror, an active element such as a light emitting element or a light receiving element, a control circuit for controlling the active element, and a light such as a mirror or a lens for shaping a light beam. In the optical scanning device provided with at least one of the shaping elements, the resonance frequency of the elastically deformable portion can be adjusted in the assembling process of the optical scanning device depending on the mounting position, size, and the like.

Further, in the optical scanning device according to the present invention, since the width of the elastically deformable portion and its beam can be widened, the signal line of the element or circuit mounted on the vibrator can be provided with the elastically deformable portion. Wiring can be performed by passing it through, and wiring processing on the vibrator can be facilitated.

Furthermore, by using the above-mentioned optical scanning device, it is possible to provide an optical information reading device, an optical detection device, etc., which is equipped with an ultra-compact optical scanning device and is resistant to impact when dropped.

[0026]

1 is a perspective view showing a one-dimensional optical scanning device (optical scanner) A according to an embodiment of the present invention. This optical scanning device A includes a single plate-shaped vibrator 1 and a vibration source 2.
It consists of and. The vibrator 1 has a vibration input section 4 provided at one end of an elastically deformable section 3 composed of a plurality of beams 3a arranged in parallel, and a movable section 5 provided at the other end of the elastically deformable section 3. It has a line-symmetric shape with respect to the central axis P. The plurality of beams 3a have at least one elastic deformation mode, and in this embodiment, each of the beams 3a has two modes, a bending deformation mode and a torsion deformation mode. Further, the vibration input section 4 of the vibrator 1 is joined to the vibration surface of the vibration source 2, and the movable section 5 is provided with a mirror section 6 capable of reflecting a light beam with low loss. This oscillator 1 is manufactured by
It may be finely processed by a micromachining technology using a single crystal silicon substrate as a raw material, but in addition to this, metal materials such as nickel, phosphor bronze, stainless steel and plastics (particularly high impact resistance materials called engineering plastics) The substrate may be finely processed. Particularly, in order to improve drop impact resistance, it is preferable to manufacture the vibrator 1 from a substrate made of a metal material.

The vibration source 2 is preferably a microminiature actuator, but may be any one capable of vibrating at a constant amplitude and frequency. For example, a laminated piezoelectric element that can be vibrated by applying an AC voltage can be used. Alternatively, an electrostatic actuator in which the distance between the electrode plates is changed by the electrostatic force between the electrode plates may be driven by an AC voltage may be used. Alternatively, an electromagnetic force may be used to generate vibration (for example, a solenoid type actuator).

In this optical scanning device A, when a vibration having a frequency equal to the resonance frequency f _B of the bending deformation mode of the elastic deformation portion 3 is applied from the vibration source 2 to the vibration input portion 4, the elastic deformation portion 3 is bent and deformed. Resonance occurs in the mode, thereby causing the movable part 5 to rotate about the Q axis as shown in FIG. 1 (this vibration mode around the Q axis is referred to as a bending deformation mode). Therefore, when a light beam emitted from an external light source (not shown) is projected on the mirror section 6 of the movable section 5, the light beam reflected by the mirror section 6 also has a value of 1 in a plane perpendicular to the Q axis. It will be scanned dimensionally (linearly). Moreover, since the elastically deformable portion 3 is constituted by the plurality of beams 3a, the vibrator 1 has a structure in which a torsional deformation mode centering on the central axis P is unlikely to occur, and the torsional deformation mode or 2
Resonance of higher-order bending deformation modes higher than the second is suppressed, and as a result, the vibrator 1 having good linearity between the applied voltage and the scanning angle can be obtained.

In the vibrator 1 having such a structure, since the elastically deformable portion 3 is composed of a plurality of beams 3a instead of one beam, the elastically deformable portion 3 has a large mechanical strength. Therefore, the strength of the vibrator 1 against the impact when dropped is increased. Further, since the vibrator 1 does not use the torsional deformation mode, the number of the beams 3a can be increased, the width of the beams 3a can be increased, and the beam 3a can be increased without deteriorating the characteristics of the vibrator 1.
It is possible to increase the distance between a and the drop impact resistance of the vibrator 1 can also be increased.

Further, when the vibrator 1 is made of a metal material, the drop impact resistance of the vibrator 1 and the optical scanning device A is further improved as compared with the vibrator 1 made of single crystal silicon. Moreover, in the vibrator 1, even when a metal material such as nickel is used, a sufficiently high speed vibrator can be obtained without impairing the high speed scanning property. This is because the vibrator 1 uses only bending deformation and does not use torsional deformation, so that the width and the number of the beams 3a can be increased. When the width of the elastically deformable portion 3 is widened in this way, the spring rigidity k of the elastically deformable portion 3 is increased, and an equation representing the resonance frequency f _B of the vibrator 1, f _B = (k / I) ^1/2 / (2π) As shown by, a high resonance frequency f _B can be obtained. However, I is the moment of inertia of rotation of the vibrator 1. That is, even if a material having a large moment of inertia I such as metal is used, the vibrator 1 having a large resonance frequency f _B can be configured depending on the design of the spring rigidity k, and the speed of the vibrator 1 can be increased.

Moreover, since the elastically deformable portion 3 is composed of a plurality of beams 3a, the actual width of the elastically deformable portion 3 (width of beam 3a × beam 3a) can be obtained by setting the distance between the beams 3a to an appropriate distance. Three
The apparent width of the elastic deformation portion 3 can be increased without increasing (the number of a), and the vibration in the torsional deformation mode can be suppressed without suppressing the vibration in the bending deformation mode. Similarly, the drop impact resistance of the elastic deformation portion 3 can be improved without suppressing the vibration in the bending deformation mode.

FIG. 2 is a perspective view showing a two-dimensional optical scanning device B according to still another embodiment of the present invention. In the optical scanning device A of FIG. 1, the elastically deformable portion 3 is less likely to be torsionally deformed than the elastically deformable portion 3 including the plurality of beams 3a.
Only one-dimensional optical scanning can be expected. Therefore, an optical scanning device having an elastically deforming portion having a similar structure that enables two-dimensional optical scanning is the optical scanning device B in FIG. In this optical scanning device B, one of the connecting portions 8 in the shape of a square plate is used.
A second elastic deformation formed by connecting one end of the first elastic deformation portion 7 formed by a plurality of parallel beams 7a to a side and forming a plurality of parallel beams 9a on an adjacent side of the connecting portion 8. One end of the portion 9 is connected to form a composite deformable portion 12A. That is, the two elastically deformable portions 7 and 9 are connected via the connecting portion 8 at an angle of approximately 90 degrees. Further, the vibration input unit 4 is integrally formed with the other end of the first elastic deformation unit 7,
The movable portion 5 is integrally formed with the other end of the second elastically deformable portion 9. Further, the vibration input unit 4 is a vibration source 2 such as a piezoelectric element.
And a mirror portion 6 is formed on the movable portion 5.

Even in the optical scanning device B, since the elastic deformation portions 7 and 9 are composed of a plurality of beams, the vibration in the torsional deformation mode is suppressed and only the vibration in the bending deformation mode is possible. Become. Now, the resonance frequencies f1 and f2 in the bending deformation mode of the first and second elastic deformation portions 7 and 9
Consider different cases (for example, the resonance frequency can be changed depending on the number and width of the beams). in this case,
When a superimposed signal obtained by superimposing an AC signal having a frequency equal to both the resonance frequencies f1 and f2 is applied to the vibration source 2 to vibrate the vibration source 2 and vibrate the elastically deformable portions 7 and 9, The elastic deformation portion 7 of No. 1 resonates in the bending deformation mode due to its resonance frequency (f1) component, and rotates the connecting portion 8 around the Q axis. Further, the second elastic deformation portion 9 also resonates in the bending deformation mode due to its resonance frequency (f2) component, and causes the movable portion 5 to rotate about the P axis. As a result, the movable portion 5 rotates about the P axis due to the bending deformation of the second elastically deforming portion 9 and rotates around the Q axis due to the bending deformation of the first elastically deforming portion 7 transmitted through the connecting portion 8. When a two-dimensional motion component of rotational movement is given and a light beam is projected on the mirror section 6, the reflected light is scanned in two dimensions. Therefore, according to this optical scanning device, two-dimensional optical scanning can be performed only by the bending deformation mode.

In this way, the first and second elastically deformable portions 7,
When the resonance frequencies f1 and f2 in the bending deformation mode of 9 are different, the rotation angle of the movable part 5 around the P axis and the Q axis and the scanning angle of the light beam are adjusted by adjusting the amplitude of each resonance frequency component. Each can be controlled. Therefore, when it is not necessary to change the rotation angle and the scanning angle in each direction, the resonance frequencies f1 and f2 in the bending deformation mode of both elastic deformation portions 7 and 9 may be the same. Also, the angle formed by the first and second elastically deforming portions 7 and 9 is not limited to 90 degrees, and the light beam is two-dimensionally scanned in the parallelogram-shaped scanning region by selecting an arbitrary angle other than 180 degrees. It is also possible to perform optical scanning in a circular pattern.

FIG. 3 is a perspective view showing an optical scanning device C according to still another embodiment of the present invention. In this optical scanning device C, one end of the first elastically deforming portion 7 constituted by a plurality of parallel beams 7a is connected to the lower side of the rectangular plate-shaped connecting portion 8 so that the connecting portion 8 has the right and left sides. A second structure composed of a plurality of parallel beams 10a and 11a on both sides.
Also, one ends of the third elastically deformable portions 10 and 11 are connected to each other to form a composite deformable portion 12B. That is, the three elastically deformable portions 7, 10, 11 are connected in a substantially T-shape via the connecting portion 8. Further, the vibration input section 4 is integrally formed at the other end of the first elastically deformable section 7, the first movable section 5a is integrally formed at the other end of the second elastically deformable section 10, and the second The movable portion 5b is integrally formed with the other end of the third elastically deformable portion 11, and the first movable portion 5a and the second movable portion 5b are connected to both sides of the connecting portion 8. Further, the vibration input section 4 is joined to the vibration source 2 such as a piezoelectric element, and the movable section 5 is provided with a mirror section 6.

Even in the optical scanning device C, let us consider a case where the resonance frequencies f1, f3, f4 in the bending deformation mode of the first, second and third elastic deformation portions 7, 10, 11 are different. , A superimposed signal obtained by superimposing an AC signal having a frequency equal to each resonance frequency f1, f3, f4 is applied to the vibration source 2 to vibrate the vibration source 2, and the vibration source 2 vibrates as a result of this vibration. The first elastic deformation portion 7 resonates in a bending deformation mode due to its resonance frequency (f1) component, and rotates the connecting portion 8 around the Q axis. Further, the second elastic deformation portion 10 also resonates in the bending deformation mode due to its resonance frequency (f3) component, and rotates the movable portion 5a around the P ₁ axis. The third elastic deformation portion 11 also resonates in the bending deformation mode due to its resonance frequency (f4) component, and rotates the movable portion 5b around the P ₂ axis. As a result,
The first movable portion 5a rotates about the P ₁ axis by the bending deformation of the second elastically deforming portion 10 and the Q axis by the bending deformation of the first elastically deforming portion 7 transmitted through the connecting portion 8. When a two-dimensional motion component of the rotational motion of is given and a light beam is projected on the mirror section 6, the reflected light is scanned in two dimensions. In addition, the second movable portion 5b is
The first elastically deformable portion 7 transmitted through the connecting portion 8 and the rotational movement about the P ₂ axis due to the bending and deformation of the elastically deformable portion 11 of FIG.
When the two-dimensional motion component of the rotational movement about the Q axis due to the bending deformation is given and the light beam is projected on the mirror section 6, the reflected light is two-dimensionally scanned. Therefore, according to the optical scanning device C, the light beam can be reflected and scanned by the two movable portions 5a and 5b, and the two-dimensional optical scanning device C having a wide scanning region can be manufactured. When the resonance frequencies f1, f3, and f4 are different from each other, the vibration mode and scanning angle of the movable parts 5a and 5b can be controlled by changing the amplitude of each frequency component. Note that, also in this embodiment,
Any two or three of the resonance frequencies f1, f3, f4 of the first, second and third elastically deforming portions 7, 10, 11 may be the same. Further, the angle formed by the first elastic deformation portion 7 and the second elastic deformation portion 10 and the angle formed by the first elastic deformation portion 7 and the third elastic deformation portion 11 are both angles other than 90 degrees. It may be.

FIG. 4 is a partially cutaway sectional view of an optical scanning device D according to yet another embodiment of the present invention.
In this optical scanning device D, a concave portion 14 is formed in the movable portion 5 provided at the end of the elastically deformable portion 13 constituted by a plurality of beams, and the light emitting element 15 is mounted in the concave portion 14. Fresnel lens 1 for beam shaping on the surface of the movable part 5.
6 is attached. In the optical scanning device D, the light beam emitted from the external light source is not reflected and scanned, but the light beam emitted from the light emitting element 15 is condensed or collimated by the Fresnel lens 16. The light beam emitted from the light emitting element 15 is similarly scanned in one dimension or two dimensions by the rotary movement of the movable portion 5. Further, in this embodiment, the resonance frequency (driving frequency) of the elastically deformable portion 13 can be changed and adjusted by the light emitting element 15 and the Fresnel lens 16 provided in the movable portion 5. As a means for beam-shaping the light beam, a concave mirror (not shown) or the like may be provided behind the light emitting element instead of the lens.

FIG. 5 is a front view showing an optical scanning device E according to still another embodiment of the present invention. In this optical scanning device E, a chip-shaped light emitting diode (LED) is mounted on the element mounting pad 21 provided in the central portion of the movable portion 5.
The light emitting element 22 such as a semiconductor laser element (LD) is die-bonded, and the electrode of the light emitting element 22 is wire-bonded to the electrode pad 23. Further, a chip-shaped light receiving element 25 is die-bonded on the element mounting pad 24 provided in the central portion of the connecting portion 8, and the electrode of the light receiving element 25 is wire-bonded to the electrode pad 26.
Further, the vibration input unit 4 has a control circuit (I
C) 27 is mounted and each element mounting pad 21, 2 is mounted.
4 and each electrode pad 23, 26 are connected to the control circuit 27 by a signal line (pattern wiring) 28 wired on the surface of the vibrator 1 through the surfaces of the beams 7a, 9a of the elastically deformable portions 7, 9. Further, the control circuit 27 of the vibration input unit 4
A wire (not shown) is drawn from the outside to the outside.

However, in this optical scanning device E,
While rotating the movable part 5 in the two-dimensional direction, the light beam emitted from each light emitting element 22 is two-dimensionally scanned within a certain scanning area, and the reflected light reflected by the object in the scanning area is reflected. It can be detected by the light receiving element 25, subjected to necessary signal processing by the control circuit 27, and then output to the outside. Therefore, the optical scanning device E can be used as a bar code reading device for reading a bar code by providing the control circuit 27 with a necessary function. Alternatively, it can also be used as a two-dimensional photoelectric sensor or the like for detecting whether or not an object exists within a certain scanning area, or for detecting the existing position. Further, an optical scanning device for a laser beam printer (in this case, the light receiving element 2
5 is not necessary).

Further, in the optical scanning device of the present invention, since the width of the beam of the elastically deforming portion can be made wider than in the conventional case, the wiring pattern is formed on the surface of the beam as in this embodiment. Therefore, the wiring process can be facilitated.

[0041]

In the vibrator according to the present invention, the elastically deformable portion is deformed by another vibration mode without using the torsional deformation mode, and the movable portion is rotationally moved. Since it is not used, a wide elastic deformation portion can be used, and the drop impact resistance of the vibrator can be improved. Moreover, even if the vibrator does not use the vibration in the torsional deformation mode as described above, in the vibrator having the composite deforming portion in which a plurality of elastic deforming portions are connected so as to have an arbitrary angle, the vibration of each elastic deforming portion is increased. By combining the above, the movable part can be two-dimensionally rotated, and it can be used for a two-dimensional optical scanning device.

Further, in the vibrator provided with the elastically deformable portion composed of a plurality of parallel beams, the mechanical strength is increased by increasing the number of the beams, so that the drop impact resistance of the vibrator can be enhanced. . Moreover, by widening the width between the beams, torsional deformation can be suppressed without hindering vibration modes other than torsional deformation such as bending deformation, that is, the vibration resistance of the oscillator can be suppressed without suppressing vibration modes other than torsional deformation. It is possible to improve drop impact resistance.

Further, since the elastically deformable portion is formed of a plurality of beams, the elastically deformable portion is less likely to be deformed, and the resonance characteristic can be intentionally lowered, so that the resonance frequency changes due to a subtle environmental change or the like. Also, the changes in the rotation angle of the movable portion and the scanning angle of the light beam are less likely to be affected. Furthermore, since it is possible to suppress the generation of secondary and higher-order resonance modes, it is possible to obtain a vibrator having good linearity.

Furthermore, when the vibrator having a plurality of movable parts is used in an optical scanning device, a plurality of light beams can be simultaneously scanned.

Further, on the substrate constituting the vibrator, a reflection mirror, an active element such as a light emitting element or a light receiving element, a control circuit for controlling the active element, a light such as a mirror or a lens for shaping a light beam. In the optical scanning device provided with at least one of the shaping elements, the resonance frequency of the elastically deformable portion can be adjusted in the assembling process of the optical scanning device depending on the mounting position, size, and the like.

Further, in the optical scanning device according to the present invention, since the width of the elastically deformable portion and its beam can be widened, the signal line of the element, circuit, etc. mounted on the vibrator is provided with the elastically deformable portion. Wiring can be performed by passing it through, and wiring processing on the vibrator can be facilitated.

Furthermore, by using the above optical scanning device, it is possible to provide an optical information reading device, an optical detection device, etc., which is equipped with a microminiature optical scanning device and is resistant to impact when dropped.

[Brief description of drawings]

FIG. 1 is a perspective view showing an optical scanning device according to an embodiment of the present invention.

FIG. 2 is a perspective view showing an optical scanning device according to another embodiment of the present invention.

FIG. 3 is a perspective view showing an optical scanning device according to another embodiment of the present invention.

FIG. 4 is a sectional view showing an optical scanning device according to another embodiment of the present invention.

FIG. 5 is a front view showing an optical scanning device according to still another embodiment of the present invention.

6A and 6B are perspective views showing a conventional optical scanning device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vibrator 2 Excitation source 3 Elastic deformation part 3a Beam of elastic deformation part 4 Vibration input part 5 Movable part 7,9 Elastic deformation part 7a, 9a Beam of elastic deformation part 8 Connecting part 5a, 5b Movable part 10, 11 Elastic Deformation part 10a, 11a Beam of elastic deformation part 15 Light emitting element 16 Fresnel lens 22 Light emitting element 25 Light receiving element 27 Control circuit 28 Signal line

Claims (16)

[Claims] 1. An elastic deformation part having at least one elastic deformation mode, a vibration input part provided at one end of the elastic deformation part, and a movable part provided at the other end of the elastic deformation part, In a vibrator in which the vibration applied to the vibration input unit is transmitted to the elastic deformation unit, and the movable unit vibrates in accordance with the vibration of at least one elastic deformation mode of the elastic deformation unit, the elastic deformation units are parallel to each other. A vibrator comprising a plurality of beams. 2. The vibrator according to claim 1, wherein the vibrator is composed of one substrate made of a plate-shaped material such as metal, semiconductor, or plastic. 3. At least one of a reflecting mirror, an active element such as a light emitting element or a light receiving element, a control circuit for controlling the active element, and a light shaping element such as a mirror or a lens for shaping a light beam. The oscillator according to claim 2, wherein the driving frequency is adjusted by being provided on the substrate. 4. An active element such as a light emitting element or a light receiving element and a control circuit for controlling the active element are provided on the substrate, and a signal line connected to the active element or the control circuit passes through an elastically deforming portion. The vibrator according to claim 2 or 3, wherein the vibrator is drawn to the vibration input unit and is drawn from the vibration input unit to the outside. 5. A composite deformation part formed by connecting a plurality of elastic deformation parts having at least one elastic deformation mode in series through a connection part so as to form an arbitrary angle, and a composite deformation part. A vibration input portion provided at one end and a movable portion provided at the other end of the composite deformation portion are provided, and the vibration applied to the vibration input portion is transmitted to each elastic deformation portion, and each elastic deformation portion. The movable part vibrates according to the vibration in at least one elastic deformation mode of 1. 6. A composite deformation part is formed by connecting a plurality of elastic deformation parts having at least one elastic deformation mode via a connecting part, and the vibration input part and the plurality of movable parts are made non-movable by the composite deformation part. It is connected in a straight line, and the vibration applied to the vibration input section is transmitted to each elastic deformation section, and each movable section vibrates according to the vibration of at least one elastic deformation mode of each elastic deformation section. Characteristic oscillator. 7. The vibrator according to claim 5, wherein the elastically deformable portion is composed of a plurality of beams arranged in parallel. 8. The vibrator according to claim 5, 6 or 7, wherein the vibrator is composed of a single substrate made of a plate-shaped material such as metal, semiconductor material, or plastic. 9. A reflective mirror, an active element such as a light emitting element or a light receiving element, a control circuit for controlling the active element, and at least one of a light shaping element such as a mirror or a lens for shaping a light beam. 9. The vibrator according to claim 8, wherein the driving frequency is adjusted by being provided on the substrate. 10. An active element such as a light emitting element or a light receiving element,
A control circuit for controlling the active element is provided on the substrate, and a signal line connected to the active element or the control circuit is routed to the vibration input section through an elastically deformable section, and then pulled out from the vibration input section. The vibrator according to claim 8 or 9, characterized in that. 11. Claims 1, 2, 3, 4, 5, 6, 7,
An optical scanning device comprising: the vibrator according to any one of 8, 9 and 10; and a drive source for driving the vibrator. 12. An optical scanning device using the vibrator according to claim 1, 2, 3 or 4, wherein the vibration of the movable part according to any elastic deformation mode of the elastic deformation part is utilized,
An optical scanning device characterized in that a light beam is scanned one-dimensionally. 13. An optical scanning device using the vibrator according to claim 5, 6, 7, 8, 9 or 10, wherein the vibration directions of the elastically deforming portions are different, An optical scanning device characterized in that a light beam is scanned two-dimensionally. 14. The optical scanning device according to claim 11, wherein an actuator utilizing a piezoelectric effect, an electrostatic force or an electromagnetic force is used as a driving source of the vibrator. 15. An optical information reading device using the optical scanning device according to claim 11, 12, 13, or 14. 16. An optical detection device using the optical scanning device according to claim 11, 12, 13, or 14.