JPH06284759A - Fine rotational actuator and manufacture thereof - Google Patents

Abstract

PURPOSE:To rotate a rotor stably without requiring large driving voltage. CONSTITUTION:Two stators 1, 2 are faced oppositely and joined mutually through spacers 4. A rotor 3 is supported rotatably between each stator 1, 2. Annular permanent magnets 25, 26 are fixed onto the outer circumferential sections of both surfaces of the rotor 3 respectively. Annular permanent magnets 22, 23 are fastened to sections oppositely faced to the permanent magnets 25, 26 while the same poles as the permanent magnets 25, 26 of the rotor 3 are faced mutually respectively even in each stator 1, 2, and the rotor 3 and each stator 1, 2 are not brought into contact. A plurality of permanent magnets 24 are mounted onto an opposed surface with one stator 1 of the rotor 3, and a plurality of electromagnets 10 are set up to one stator 1 in response to the permanent magnets 24. Voltage pulses are applied to each electromagnet 10 at specified timing, thus rotating the rotor 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary actuator comprising a fine structure produced by anodic bonding under light irradiation using a photosensitive glass, a Pyrex glass, a Si substrate and a conductive material, and a method for manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, a structure of an electrostatic actuator manufactured by using a Si semiconductor process is used for forming a Si film on a Si substrate, forming a thin film such as a Si oxide film or a Si nitride film, It is made by using etching (including sacrifice layer etching). An electrostatic micromotor will be described below as an example of such an electrostatic actuator.

FIG. 12 is a perspective view of a conventional electrostatic micromotor. As shown in FIG. 12, the rotor 103 is rotatably supported on the substrate by a pin joint 102. Further, a plurality of stators 101 are arranged radially with the center of rotation of the rotor 103 sandwiched therebetween, and their opposing members (for example, U-U ') form a pair of electrodes. A portion of each stator 103 near the center of the rotor 103 is lifted by several microns from the substrate, and the rotor 103 can pass thereunder. Here, for example, when a voltage is applied to the pair of stators U-U '101, the rotor 103 is attracted by the electrostatic force to be sucked under the voltage-applied stator 101. If the stator 101 to which the voltage is applied is switched in order such as VV 'and WW' according to the movement, the rotor 103 continuously rotates.

[0004]

However, in the above-mentioned conventional electrostatic micromotor, the electrostatic force for rotating the rotor is proportional to the voltage (driving voltage) applied to the stator, and the static force between the stator and the rotor is large. It is inversely proportional to the square of the distance. Therefore, in order to increase the driving force, it is necessary to increase the applied voltage or decrease the distance between the stator and the rotor. However, it is difficult to manufacture this distance to a micron order or a submicron order, for example. Therefore, there is a problem that the drive voltage must be increased. Further, since the rotor is in physical contact with a pin joint or the like in order to rotate the rotor surface parallel to the stator surface, mechanical friction is generated during rotation. Furthermore, the electrostatic force is
Since it depends on the ratio of the surface area to the volume of the object, it is necessary to make the rotor thin, that is, to form it in a thin film, in order to effectively apply the electrostatic force to the rotor. As a result, the rotor is easily mechanically distorted, and the electrostatic attraction of the stator may cause the rotor to contact the stator. The contact of the rotor with the stator means that the distance between the rotor and the stator becomes zero, and therefore the electrostatic force becomes extremely large, which makes it extremely difficult to drive the rotor. In order to prevent this, the drive voltage must be reduced, but if the drive voltage is reduced, the desired output cannot be obtained. Further, dust may easily enter between the stator and the rotor due to static electricity, which may hinder the rotation of the rotor.

Therefore, an object of the present invention is to provide a micro rotary actuator which can rotate a rotor stably without requiring a large drive voltage, and a manufacturing method thereof.

[0006]

In order to achieve the above object, a micro rotary actuator according to the present invention comprises two stators joined to each other with a spacer interposed therebetween, and a rotatably rotatably supporting member between the stators. Rotor, magnetic levitation means provided on each of the stators and on opposing surfaces of the rotor, and on one surface of the rotor at positions equidistant from the center of rotation of the rotor and at equal intervals from each other. A plurality of permanent magnets, and a portion of each of the stators facing each of the permanent magnets of the stator facing each of the permanent magnets in order to exert a magnetic attraction force and a repulsive force on each of the permanent magnets. It is characterized by having electromagnets provided respectively.

Each of the stators may be made of photosensitive glass, and the spacers may be made of a Si substrate.

Further, a space may be formed between the stators, the space being sealed by the stators and the spacers, and the space may be in a vacuum atmosphere.

According to the method of manufacturing the micro rotary actuator of the present invention, the rotary shaft is provided at the center of the rotor, and a plurality of rotors are provided on one surface of the rotor at equal distances from the center of the rotary shaft and at equal intervals. A permanent magnet is fixed, and further annular permanent magnets are fixed to the outer peripheral portions of both surfaces of the rotor. On the other hand, one of the two stators made of photosensitive glass is provided on one of its surfaces. A plurality of grooves for inserting electromagnetic coils constituting a plurality of electromagnets for applying a magnetic attraction force and a repulsive force to the plurality of permanent magnets respectively, and the rotary shaft at the center of the other surface. And a plurality of magnetic cores that form the respective electromagnets together with the electromagnetic coils on the other surface, and an annular permanent ring fixed to the rotor. An annular permanent magnet for exerting a magnetic repulsive force is fixed to the magnet, and the other stator of the two stators is magnetically repelled by the annular permanent magnet fixed to the rotor. An annular permanent magnet for exerting a force is fixed, the rotary shaft of the rotor is inserted into the hole of the one stator, and the rotor is rotatably supported by the one stator, and then the one stator. A spacer made of a Si substrate that surrounds the outer periphery of the rotor is bonded to one surface of the stator by anodic bonding while irradiating light from one surface of the one stator, and then,
The other stator is joined to the rotor by anodic bonding while radiating the light from the other stator, and then the electromagnetic coils are fixed to the grooves formed on the one surface of the one stator. It is characterized by doing.

Further, the rotor and the other stator are joined in a vacuum atmosphere, the plural permanent magnets are fixed to the rotor, and the plural magnetic cores are fixed to the one stator. It may be performed by anodic bonding while irradiating each with light.

Further, a portion corresponding to a portion to be joined on the surface irradiated with the light at the time of the anodic joining is previously formed.
A thin film having a property of transmitting or absorbing the light is previously formed on a portion corresponding to a portion to be joined on the surface projecting the light at the time of the anodic bonding, which is formed thinner than other portions. It may be formed.

When a thin film is formed on the light projecting surface, the thin film may be a Si film.

In this case, the irradiation light has a wavelength of 0.
The light may be in the range of 2 to 12 μm. Specifically, CO ₂ laser light, YAG laser light, or excimer laser light can be used.

[0014]

In the micro rotary actuator of the present invention constructed as described above, the facing surfaces of the two stators joined to each other through the spacers and the rotor rotatably supported between the stators. Further, since the magnetic levitation means are provided respectively, the facing surfaces of the stator and the rotor do not always come into contact with each other even while the rotor is rotating. As a result, the rotor is stably rotated, and wear of each stator and rotor does not occur. Further, the rotation of the rotor is performed by applying a magnetic attractive force and a repulsive force to each permanent magnet provided to the rotor by each electromagnet provided to one stator. Compared with this, the driving voltage is small. Furthermore, by forming a gap between the stators, the gap being sealed by the stators and the spacers, and making the gap a vacuum atmosphere, air resistance during rotation of the rotor is eliminated, and the rotor rotates more stably.

In the method of manufacturing a micro rotary actuator of the present invention, each stator made of photosensitive glass and the spacer made of Si substrate are joined by anodic joining while irradiating light. There is no need to heat the spacer. Therefore, even if the members such as the photosensitive glass and the SI substrate having different thermal expansion coefficients are bonded to each other, the dimensional change due to the temperature change does not occur, and the bonded portion is not peeled off due to the dimensional change. In addition, by forming a portion of the surface onto which light is projected at the time of anodic bonding that corresponds to the portion to be bonded in advance to have a smaller thickness than other portions, that portion is selectively bonded. Further, in advance, in a portion corresponding to a portion to be joined on the surface projecting light,
By forming a thin film having a property of transmitting or absorbing light, the portions to be joined can be joined more effectively.

[0016]

Embodiments of the present invention will now be described with reference to the drawings.

FIG. 1 is a sectional view of an embodiment of the micro rotary actuator of the present invention, FIG. 2 is a cross sectional view of the micro rotary actuator shown in FIG. 1 taken along the line AA-AA, and FIG. 3 is shown in FIG. FIG. 4 is a cross-sectional view of the minute rotary actuator shown in FIG. 4, taken along the line C-C of the minute rotary actuator shown in FIG. 1, and FIG. 5 is D- of the minute rotary actuator shown in FIG.
It is a D line sectional view.

The micro rotary actuator of this embodiment will be described below mainly with reference to FIG. 1 and other drawings. Two disk-shaped stators 1 and 2 made of photosensitive glass having a diameter of 8 mm and a thickness of 1 mm are shown in FIGS.
, The outer diameter is 8 mm, the inner diameter is 5 mm, and the thickness is 0.52 mm, and the stators 1, 2 and The space 15 surrounded by the spacer 4 has 10
The vacuum is about ^-2 Torr. One stator 1
And the spacer 4 and the stator 2 on the other side are bonded by a bonding point selection light irradiation anodic bonding method.

In the bonding location selection light irradiation anodic bonding method, a DC voltage is applied to a site to be bonded between two members to be bonded while irradiating light, so that the two members to be bonded without heating. Is a method of joining. At this time, if a film that transmits or absorbs light is formed on the light-irradiated surface of the member that is irradiated with light corresponding to the part to be joined, only the part where this film is formed is selected. Are joined together. In such an adhesion site selection light irradiation anodic bonding method, since it is not necessary to heat two members to be bonded, members having different thermal expansion coefficients, such as the bonding of the photosensitive glass and the Si substrate of this embodiment, are used. Suitable for joining. On the other hand, in the method of joining while heating, the dimensional change of the joint occurs due to the difference in the thermal expansion coefficient of the two members before the temperature returns to room temperature, and the joint is separated. When a Si film, for example, is used as the film that transmits or absorbs the light, Si has a wavelength that absorbs light well even in the wavelength band of 0.2 to 12 μm. It is preferable to use light having a value of 0.2 to 12 μm.

In order to carry out the joining by this anodic joining method for irradiating the selected light spot, the stator joining grooves 17 and 18 having a depth of 0.7 mm are formed in the respective stators 1 and 2 in correspondence with the spacer 4. And, as shown in FIG. 5, the stator connecting grooves 17 and 18 are formed in an annular shape.
The selective bonding electrodes 3 each made of a Si film on the bottom wall of the
0 and 31 are formed. In addition, one stator 1
A rotary shaft hole 6 is formed in the center of the surface of the other surface facing the other stator 2. The photosensitive glass, which is the material of each of the stators 1 and 2, is made of the stator bonding grooves 17 and 18 by a method similar to the semiconductor process used for forming a pattern on the Si substrate, that is, a method such as a mask pattern and etching. Such a fine pattern can be easily formed. As described above, since the photosensitive glass can be easily subjected to fine processing, it becomes possible to manufacture a micro rotary actuator using the photosensitive glass as each of the stators 1 and 2.

On the other hand, the diameter is 4.5 mm and the thickness is 0.5 m.
The rotor 3 made of disc-shaped photosensitive glass having a diameter of m has a rotating shaft 5 made of Pyrex glass fixed to a hole formed in the center thereof by bonding and having a diameter of 1 mm and a height of 0.5 mm. The rotor 3 is rotatably supported in the gap 15 by rotatably supporting the rotary shaft 5 in the rotary shaft hole 6 of the one stator 1. The rotor 3 and the rotating shaft 5 are also joined by the bonding point selection light irradiation anodic joining method similarly to the joining of the stators 1 and 2 and the spacer 4. Therefore, the hole formed in the center of the rotor 3 is provided with a conductive intermediate layer 27 made of a Si film having a thickness of about 1500 Å, and the surface of the rotor 3 facing the other stator 2 is also formed. In the central portion of the, used for forming the conductive intermediate layer 27, the diameter is 1 mm and the depth is 0.
A 3 mm electrode hole 20 is formed.

An annular groove is formed on the outer peripheral end of the surface of the rotor 3 facing the one stator 1, and the groove is formed in the groove of FIG.
A ring-shaped bulk Sm—Co permanent magnet 25 as shown in FIG. An annular groove is formed in a portion of the one stator 1 facing the rotor 3 facing the permanent magnet 25, and an annular bulk Sm-Co system as shown in FIG. 2 is formed in the groove. The permanent magnet 22 is fitted and fixed. The permanent magnet 22 fixed to one of the stators 1 and the permanent magnet 25 fixed to the rotor 3 are arranged such that their polarities are opposite to each other, and the rotor 3 is repulsed by the repulsive forces of the permanent magnets 22 and 25. A force in the direction of being separated from one stator 1 acts on this.
Similarly, a ring-shaped bulk Sm—Co permanent magnet 26 as shown in FIG. 4 is also fixed to the outer peripheral end of the surface of the rotor 3 facing the other stator 2. An annular bulk Sm-Co as shown in FIG. 5, which is arranged so that the permanent magnets 26 and the same poles face each other.
The permanent magnet 23 of the system is fixed to the surface of the other stator 2 facing the rotor 3, and the repulsive force of each of the permanent magnets 23 and 26 exerts a force on the rotor 3 in a direction away from the other stator 2. To do. Therefore, the rotor 3 is supported in the space 15 between the stators 1 and 2 without contacting the stators 1 and 2. As is clear from the above description, the permanent magnet 22 fixed to one stator 1 and the permanent magnet 25 facing it, and the permanent magnet 23 fixed to the other stator 2 and the permanent magnet 26 facing it.
The magnetic levitation means is constituted by.

Further, on the side of the surface of the rotor 3 facing the one stator 1 closer to the center than the permanent magnets 25 provided at the peripheral ends, the positions are such that the distances from the center are equal and the distances are equal to each other. Six holes are formed, and a permanent magnet 24 as shown in FIG. 3 is fixed to each of these holes by joining. The permanent magnets 24 are arranged such that the same poles are directed toward the one stator 1. The joining of the permanent magnets 24 is also performed by the bonding point selection light irradiation anodic joining method. Therefore, a conductive intermediate layer 29 made of a Si film is formed on the bottom wall of each groove to which each permanent magnet 24 is fixed, and each permanent magnet on the surface facing the other stator 2 of the rotor 3 is formed. Six electrode grooves 19 each having a selective bonding electrode 32 made of a Si film formed on the bottom wall are formed at portions corresponding to the positions 24 (see FIG. 4).

Then, six electromagnets 10 for generating magnetism that act on the respective permanent magnets 24 are provided at portions of the one stator 1 corresponding to the above-mentioned respective permanent magnets 24. The electromagnet 10 will be described below. FIG. 6 is an enlarged cross-sectional view of the electromagnet shown in FIG. As shown in FIG. 6, the rotor 3 of one stator 1
(See FIG. 1) The permanent magnet 24 (see FIG. 1) on the surface facing the
0.6 mm deep and 1 mm inside diameter
The magnetic core hole 8 is formed, and the magnetic core hole 8 has a thickness of about 15 mm.
A magnetic core 21 having a height of 0.6 mm and an outer diameter of 0.9 mm, which is made of a high-permeability material such as bulk permalloy and is covered with a conductive intermediate layer 28 made of a Si film of 00Å, is irradiated with light for selecting bonding points. It is bonded and fixed by the anodic bonding method. In order to join the magnetic core 21 to the magnetic core hole 8, the surface of the stator 1 (upper surface in the drawing) has a shape and size almost equal to the upper end surface of the magnetic core 21 in the drawing, that is, a diameter of 1 mm and a thickness of about 1500Å. And a selective bonding electrode 39 made of a transparent ITO film is formed. On the surface of the stator 1, an annular electromagnetic coil groove 7 whose center position is equal to that of the magnetic core hole 8 and whose inner diameter is larger than the outer diameter of the magnetic core hole 8 is formed. A thin wire electromagnetic coil 33 for magnetizing the magnetic core 21 is inserted into the electromagnetic coil groove 7, and the electromagnetic coil 33 is fixed by the epoxy resin filled in the electromagnetic coil groove 7. ing. The magnetic core 21 is magnetized by passing a current through the electromagnetic coil 33. The polarity of the magnetic core 21 at this time changes according to the direction of the current, and by changing the direction of the current, the permanent magnet 2
It is possible to apply a magnetic attraction force or a repulsive force to 4. Here, one electromagnet 10 has been described, but the other electromagnets 10 have the same configuration, and thus description thereof will be omitted. Both ends of the electromagnetic coil 33 of each electromagnet 10 are, as shown in FIG. 7, wirings 35 and 36 made of an Al film formed on the surface of the stator 1, respectively.
To each wiring 3 by electrical bonding.
Electrodes 37 and 38 made of an Al film formed on the surface of the stator 1 are electrically connected to one end of each of the electrodes 5 and 36 for electrical connection to an external power source (not shown). The electromagnetic coil 33 of each electromagnet 10 shares the wirings 35 and 36 with the electromagnetic coil 33 of the electromagnet 10 which is located in point symmetry with respect to the center of the stator 1. On the other hand, the electromagnetic coils 33 of the two electromagnets 10 which are located symmetrically with respect to each other are configured such that currents flow in the same direction.

When a timing voltage pulse is applied to each of the pair of positive and negative electrodes 37 and 38 based on the above structure, a current flows through the electromagnetic coils 33 through the wirings 35 and 36. As a result, the magnetic core 21 of each electromagnetic coil 33 is
Is magnetized. At this time, a voltage pulse is applied to the adjacent electromagnetic coils 33 so that currents in opposite directions flow, and the polarities of the voltage pulses are switched at a predetermined timing, so that the permanent magnets facing the electromagnetic coils 33 face each other. A magnetic attraction force is sequentially applied to the magnet 24 by each electromagnetic coil 33, and at the same time, a repulsive force is received from the electromagnetic coil 33 adjacent to the electromagnetic coil 33 on which the attraction force acts, and the rotor 3 rotates. Also, while the rotor 3 is rotating,
The permanent magnets 25, 26 provided on the outer peripheral end of the rotor 3
Since a magnetic repulsive force always acts between the permanent magnets 22 and 23 provided on the stators 1 and 2 facing each other, the rotor 3 does not contact the stators 1 and 2 in a non-contact manner. Can rotate. Furthermore, since the space 15 between the stators 1 and 2 is held in vacuum, the rotor 3 can rotate without receiving air resistance. As a result, each electrode 3
Even if a voltage pulse of 5 V was applied between Nos. 7 and 38 and the rotor 3 was rotated at a rotation speed of about 5000 rpm, problems such as abrasion did not occur.

Next, a method of manufacturing the micro rotary actuator of this embodiment will be described.

First, each electromagnetic coil groove 7 and stator joining groove 17 are formed on one surface of one stator 1.
An annular groove for fixing the rotary shaft hole 6, each magnetic core hole 8, and the annular permanent magnet 22 is formed on the other surface. Next, the selective joining electrode 30 is formed on the bottom wall of the stator joining groove 17, and the selective joining electrode 39 corresponding to each magnetic core hole 8 is formed on one surface of one stator 1. After that, the magnetic cores 21 are inserted into the respective magnetic core holes 8 and bonded by the bonding point selection light irradiation anodic bonding method. Then, the permanent magnet 22 is inserted into the annular groove to fix the permanent magnet 22.

Here, a method of joining one of the magnetic cores 21 to the magnetic core hole 8 of the stator 1 will be described with reference to FIG. As shown in FIG. 8, a joining device for joining the magnetic core 21 to the magnetic core hole 8 by bonding and irradiating the selected core with a selective light is connected to a platen 40 made of a conductor and a DC power supply 45 from an electrode 47 provided on the platen 40. A needle-like electrode 43 made of a tungsten wire and a laser light source (not shown) for irradiating a laser beam 49 to the joint, which are electrically connected to each other.
And a lens 48 for expanding the luminous flux of the laser light 49 emitted from the laser light source. Using such a bonding apparatus, the magnetic core 2 is previously placed in the magnetic core hole 8 with the selective bonding electrode 39 directed upward on the surface of the platen 40.
The stator 1 in which 1 is inserted is placed. Then, the needle electrode 43 is brought into contact with the selective bonding electrode 39, and bonding is performed while applying a DC voltage from the DC power supply 45 between the selective bonding electrode 39 and the conductive intermediate layer 28 covered with the magnetic core 21. The part is irradiated with laser light 49. Thereby, the magnetic core 8 is firmly bonded to the magnetic core hole 8. The laser light 49 used in this bonding is an excimer laser (wavelength is 0.246 μm).
m), the intensity was 1.5 W / cm ² , and the irradiation time of the laser beam 49 was 30 minutes. The voltage of the DC power supply 45 was 1.5 kV.

On the other hand, the stator joining groove 18 is formed on one surface of the other stator 2, and the annular groove for fixing the annular permanent magnet 23 is formed on the other surface. Then, the selective joining electrode 3 is formed on the bottom wall of the stator joining groove 18.
1 is formed, and the permanent magnet 23 is inserted into the annular groove to fix the permanent magnet 23.

Further, on one surface of the rotor 3, the rotating shaft 5
A hole for fixing the permanent magnet 24, a hole for fixing each permanent magnet 24, and a groove for fixing the annular permanent magnet 25 are formed, and on the other surface, the central electrode hole 20 and its periphery are formed. A groove for fixing each electrode hole 19 of the portion and the annular permanent magnet 26 is formed. Next, the conductive intermediate layer 27 is formed on the bottom wall of the hole for fixing the rotating shaft 5, and the selective bonding electrode 32 is also formed on the bottom wall of each electrode hole 19. Inserting the rotary shaft 5 into the hole for fixing the rotary shaft 5 and fixing the bonding position by the light irradiation anodic bonding method, and inserting the permanent magnets 24 into the holes for fixing the respective permanent magnets 24 and selecting the bonding position. It is fixed by the light irradiation anodic bonding method. In addition, the permanent magnets 2 are respectively provided in the annular grooves.
5 and 26 are inserted and the permanent magnets 25 and 26 are fixed.

Here, a method of joining the rotary shaft 5 will be described. Since the rotary shaft 5 cannot be directly bonded to the rotor 3 by the anodic bonding of the light for irradiating the bonding position selecting light, it is bonded via the conductive intermediate layer 27. Therefore, prior to joining the rotating shaft 5 to the rotor 3, the joint between the rotor 3 and the conductive intermediate layer 27 is strengthened. For that purpose, the same joining device as that shown in FIG. 8 is used, and as shown in FIG. 9, the rotor 3 is placed on the surface of the platen 40 with the electrode holes 20 facing upward. Then, the needle electrode 43 is brought into contact with the bottom wall of the electrode hole 20, and a DC voltage from the DC power supply 45 is applied between the electrode hole 20 and the conductive intermediate layer 27, while the laser is applied to the electrode hole 20. Irradiate with light 49. As a result, the conductive intermediate layer 27 is more firmly bonded to the rotor 3. In addition,
The laser light 49 used in this bonding was a YAG laser (wavelength 1.06 μm), the intensity thereof was 4 W / cm ² , and the irradiation time of the laser light 49 was 30 minutes. The voltage of the DC power supply 45 was 1.5 kV.

For joining the permanent magnets 24, the magnetic core 2
Since the same method as the joining method of 1 may be used, the description thereof will be omitted.

After the conductive intermediate layer 27 is bonded more firmly in this way, the rotary shaft 5 is bonded to the rotor 3 by anodic bonding with the irradiation light for selecting the bonding portion. In this case, the DC power supply 45 and the electrode 4
The wiring for connecting with 7 is removed from the electrode 47,
Instead, another needle electrode 44 is connected as shown in FIG. Using such a joining device, the rotor 3 is placed on the surface of the platen 40 with the conductive intermediate layer 27 facing upward.
And the rotary shaft 5 is placed on the conductive intermediate layer 27.
Then, one needle-shaped electrode 43 is brought into contact with the rotating shaft 5 and the other needle-like electrode 44 is brought into contact with the conductive intermediate layer 27, and the DC power supply 45 is applied between the rotating shaft 5 and the conductive intermediate layer 27. The rotary shaft 5 is irradiated with the laser beam 49 while applying the DC voltage. As a result, the rotating shaft 5 is firmly joined to the conductive intermediate layer 27, and as a result, the rotating shaft 5 and the rotor 3 are firmly joined. The laser light 49 used in this bonding is a CO ₂ laser (wavelength is 10.6 μm).
The intensity was 5 W / cm ² , and the irradiation time of the laser beam 49 was 30 minutes. The voltage of the DC power supply 45 is 1.5k
It was set to V.

Next, one of the stators 1 and the spacers 4 are bonded to each other by a bonding point selection light irradiation anodic bonding method. The joining of the stator 1 and the spacer 4 on one side is also performed by referring to FIGS.
This is performed using a welding device similar to the welding device shown in FIG. However, in this case, as shown in FIG. 11, the spacer 4 is placed on the surface of the platen 40 via the ceramic plate 41 covered with the film electrode 42 made of an Al film, and the stator bonding is performed on the spacer 4. The stator 1 is placed with the working groove 17 facing upward. Then, the needle electrode 43 is brought into contact with the selective bonding electrode 30, and a DC voltage from the DC power supply 45 is applied between the selective bonding electrode 30 and the spacer 4, while the laser beam 49 is applied to the stator bonding groove 17. Irradiate. As a result, the spacer 4 is firmly joined to the stator 1. The laser light 49 used in this bonding is C
The intensity of the O ₂ laser was 5 W / cm ² , and the irradiation time of the laser beam 49 was 30 minutes. The voltage of the DC power supply 45 was 1.5 kV.

After that, the rotary shaft 5 is inserted into the rotary shaft hole 6 and the rotor 3 is attached to one stator 1, and then the spacer 4 and the other stator 1 are bonded in the same manner as the spacer 4 and the one stator 1. The stator 2 and the stator 2 are joined together by a bonding-site-selective light irradiation anodic joining method, and the space 15 in which the rotor 3 is located is sealed. At this time, by joining the spacer 4 and the other stator 2 in a vacuum chamber (not shown) that has been evacuated, the void 15 can be made a vacuum atmosphere.
At this time, the light source (not shown) that emits the laser light 49 shown in FIG.
Alternatively, a flat glass (not shown) made of the same material as that is provided on the wall surface of the vacuum chamber, and the laser beam 49 is introduced into the vacuum chamber through the lens 48 or the flat glass. Further, the void portion 15 can be made into an arbitrary gas atmosphere by performing the operation in an arbitrary gas atmosphere. The joint strength between each of the stators 1 and 2 and the spacer 4 joined in this manner was strong, and even when the joint portion was cut with a cutter or the like, it was not peeled off at the joint portion.

When the joining of the stators 1 and 2 and the spacer 4 is completed, the electromagnetic coils 33 are inserted into the electromagnetic coil grooves 7 formed in one of the stators 1, and the electromagnetic coils 33 are epoxy-bonded. Fix with the system resin 34. When each electromagnetic coil 33 is fixed, each wiring 35, 36 and each electrode 37, 38 are formed on the surface of one stator, and each electromagnetic coil 33 and each wiring 35, 36 are electrically connected by bonding. To do.

In the present embodiment, an example in which there are six electromagnets 10 and six permanent magnets 24 is shown, but the number is not limited to six, and may be increased or decreased as necessary. However, the size of each member is not limited to that used in this embodiment. Further, in the present embodiment, an example in which the void 15 is sealed is shown, but the rotary shaft hole 6 formed in one stator 1 is used as a through hole, and the rotary shaft 5 is used as one stator 1. The rotor 3 may be protruded from the rotor 3 and the rotation of the rotor 3 may be taken out. If such a micro rotary actuator is manufactured and mounted on a gyro, a small gyro can be manufactured. Further, the rotor 3 is processed into a rectangular shape for a scanner, and a minute rotary actuator is manufactured by using glass as a material of the spacer 4 transparent to the laser light for the scanner. By using this as a scanner, a small scanner can be obtained. It becomes possible to make.

[0038]

Since the present invention is configured as described above, it has the following effects.

In the micro rotary actuator of the present invention, magnetic levitation means are respectively provided on the facing surfaces of the two stators arranged to face each other via the spacer and the rotor rotatably supported between the stators. By being provided, the contact between the facing surfaces of each stator and the rotor is eliminated.
As a result, the rotor can be stably rotated, and wear of each stator and the rotor during rotation of the rotor can be prevented. Further, the rotation of the rotor is performed by applying a magnetic attractive force and a repulsive force to the permanent magnets provided on the rotor by the electromagnets provided on the one stator, so that the drive voltage can be reduced. it can.

Further, by forming a gap between the stators, which is sealed by the stators and the spacers, and creating a vacuum atmosphere in the gap, there is no air resistance when the rotor rotates, and the rotor rotates more stably. Can be made.

In the method of manufacturing the micro rotary actuator of the present invention, since each stator made of photosensitive glass and the spacer made of Si substrate are joined by anodic bonding while irradiating light, the photosensitive glass and the Si substrate are joined together. Such members having different coefficients of thermal expansion can be surely joined together, which is suitable for manufacturing the micro rotary actuator of the present invention. This is the same when fixing a plurality of permanent magnets to the rotor and fixing a plurality of magnetic cores to one stator while anodic bonding while irradiating light.

In addition, a portion of the surface which projects the light upon anodic bonding, which corresponds to the portion to be bonded, is formed in advance to be thinner than the other portions, so that the portion is selectively bonded. It is possible to form a thin film having a property of transmitting or absorbing light in advance on a portion of the surface projecting light, which corresponds to the portion to be joined, so that the joining of the portions to be joined is improved. It is done effectively.

[Brief description of drawings]

FIG. 1 is a sectional view of an embodiment of a micro rotary actuator of the present invention.

FIG. 2 is an AA of the micro rotary actuator shown in FIG.
It is a sectional view taken along line A-A.

FIG. 3 is a BB of the micro rotary actuator shown in FIG.
It is a line sectional view.

4 is a C-C of the micro rotary actuator shown in FIG.
It is a line sectional view.

5 is a DD of the micro rotary actuator shown in FIG.
It is a line sectional view.

6 is an enlarged cross-sectional view of an electromagnet of the micro rotation actuator shown in FIG.

FIG. 7 is a plan view of the micro rotary actuator shown in FIG.

8A and 8B are views for explaining a method of joining a magnetic core to a magnetic core hole in the micro rotary actuator shown in FIG.

9 is a diagram for explaining a method of more firmly joining the conductive intermediate layer before joining the rotary shaft to the rotor in the micro-rotating actuator shown in FIG.

FIG. 10 is a diagram for explaining a method of joining a rotary shaft to a rotor in the micro rotary actuator shown in FIG.

FIG. 11 is a diagram for explaining a method of joining a spacer to a stator in the micro rotary actuator shown in FIG.

FIG. 12 is a perspective view of a conventional electrostatic micromotor.

[Explanation of symbols]

 1, 2 Stator 3 Rotor 4 Spacer 5 Rotating shaft 6 Rotating shaft hole 7 Electromagnetic coil groove 8 Magnetic core hole 10 Electromagnet 15 Void portion 17, 18 Stator joining groove 19 Electrode groove 20 Electrode hole 22, 23, 24, 25, 26 Permanent magnet 21 Magnetic core 27, 28, 29 Conductive intermediate layer 30, 31, 32, 39 Electrode for selective bonding 33 Electromagnetic coil 34 Epoxy resin 35, 36 Wiring 37, 38, 47 Electrode 40 Platen 43, 44 Needle electrode 45 DC power supply 48 Lens 49 Laser light

Claims (13)

[Claims] 1. A pair of stators, which are joined to face each other via a spacer, a rotor rotatably supported between the stators, and a stator and a rotor. Magnetic levitation means, a plurality of permanent magnets arranged on one surface of the rotor at positions equidistant from the center of rotation of the rotor and at equal intervals from each other, and a magnetic attraction force on each of the permanent magnets. A micro-rotation actuator, comprising: an electromagnet provided at a portion of each of the stators facing the permanent magnets, of the stators facing the permanent magnets, in order to exert a repulsive force. 2. The micro rotary actuator according to claim 1, wherein each of the stators is made of photosensitive glass, and the spacer is made of a Si substrate. 3. An air gap formed by the stators and the spacers is formed between the stators,
The micro rotary actuator according to claim 1, wherein the void has a vacuum atmosphere. 4. A rotating shaft is provided in the center of the rotor, and a plurality of permanent magnets are fixed to one surface of the rotor at positions equidistant from the center of the rotating shaft and at equal intervals from each other. An annular permanent magnet is fixed to the outer peripheral portion of each of the two surfaces of each of the two, and on the other hand, one of the two stators made of photosensitive glass has a magnet on one of its surfaces. A plurality of grooves for inserting electromagnetic coils constituting a plurality of electromagnets for exerting a static attractive force and a repulsive force, and a hole into which the rotary shaft is rotatably inserted in the center portion of the other surface. For applying a magnetic repulsive force to the other surface of the annular permanent magnet fixed to the rotor, and a plurality of magnetic cores forming the electromagnets with the electromagnetic coils. Ring Of the two stators, an annular permanent magnet for applying a magnetic repulsive force to the annular permanent magnet fixed to the rotor is fixed to the other stator of the two stators. Then, after inserting the rotating shaft of the rotor into the hole of the one stator and rotatably supporting the rotor on the one stator, a Si substrate surrounding the outer periphery of the rotor on one surface of the one stator. A spacer consisting of the one of the stators is joined by anodic bonding while irradiating light from one surface of the one stator, and then the other stator is joined to the rotor by anodic bonding while irradiating the light from the other stator. After joining, the electromagnetic coils are fixed to the grooves formed on the one surface of the one stator, respectively. The method of production. 5. The method of manufacturing a micro rotary actuator according to claim 4, wherein the rotor and the other stator are joined in a vacuum atmosphere. 6. The method according to claim 4, wherein the plurality of permanent magnets are fixed to the rotor and the plurality of magnetic cores are fixed to the one stator by anodic bonding while irradiating light. Manufacturing method of micro rotary actuator of. 7. The surface of the surface irradiated with light at the time of the anodic bonding is formed in advance to have a thickness smaller than that of the other portion, which corresponds to a portion to be bonded. A method for manufacturing the micro-rotation actuator according to the above item. 8. A thin film having a property of transmitting or absorbing the light is previously formed on a portion of the surface projecting the light upon the anodic bonding, which corresponds to a portion to be bonded. 5. A method for manufacturing a micro rotary actuator according to 5, 6, or 7. 9. The method for manufacturing a micro rotary actuator according to claim 8, wherein the thin film is a Si film. 10. The irradiation light has a wavelength of 0.2 to 1
The method for manufacturing a micro rotary actuator according to claim 9, wherein the light is light in a range of 2 μm. 11. The method of manufacturing a micro rotary actuator according to claim 9, wherein the irradiation light is CO ₂ laser light. 12. The method for manufacturing a micro rotary actuator according to claim 9, wherein the irradiation light is YAG laser light. 13. The method for manufacturing a micro rotary actuator according to claim 9, wherein the irradiation light is excimer laser light.