JPH06281366A - Controller for gas extractor - Google Patents
Controller for gas extractorInfo
- Publication number
- JPH06281366A JPH06281366A JP7061793A JP7061793A JPH06281366A JP H06281366 A JPH06281366 A JP H06281366A JP 7061793 A JP7061793 A JP 7061793A JP 7061793 A JP7061793 A JP 7061793A JP H06281366 A JPH06281366 A JP H06281366A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- extractor
- condenser
- amount
- gas extractor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Engine Equipment That Uses Special Cycles (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、地熱発電所で復水器よ
り不凝縮ガスを抽出し、復水器真空度を維持するガス抽
出機装置に係り、特にガス抽出機装置の起動および負荷
運転中に不凝縮ガス量が低下した場合のガス抽出機の制
御に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas extractor device for extracting a non-condensable gas from a condenser in a geothermal power plant and maintaining a condenser vacuum degree, and particularly to starting and loading of the gas extractor device. The present invention relates to control of a gas extractor when the amount of non-condensed gas decreases during operation.
【0002】[0002]
【従来の技術】図3は、従来のこの種のガス抽出機装置
の構成を示す系統図であり、蒸気タービン1からの排出
蒸気は復水器5に流入するようになっており、復水器5
で蒸気と冷却水(図示せず)が熱交換することにより蒸
気は凝縮する。一方蒸気中に含まれている不凝縮ガス
は、ガス抽出機入口弁12、ガス抽出機入口管13よりガス
抽出機3により吸込れ、ガス抽出機吐出管6、逆止弁8
およびガス放出管9より大気に放出される。2. Description of the Related Art FIG. 3 is a system diagram showing a configuration of a conventional gas extractor device of this type, in which exhaust steam from a steam turbine 1 flows into a condenser 5. Bowl 5
The steam condenses due to heat exchange between the steam and cooling water (not shown). On the other hand, the non-condensable gas contained in the steam is sucked by the gas extractor 3 from the gas extractor inlet valve 12 and the gas extractor inlet pipe 13, and is discharged by the gas extractor discharge pipe 6 and the check valve 8.
And it is released to the atmosphere through the gas release pipe 9.
【0003】蒸気タービン1の起動は、起動エゼクター
4に起動エゼクター作動蒸気管23、止め弁26より蒸気を
流入させ、復水器5の空気を起動エゼクターガス入口弁
11を通し吸引して大気へ放出して復水器5の真空度を上
昇させてから起動する。この起動により、一軸に結合さ
せている発電機2、ガス抽出機3も回転上昇とする。こ
の時、復水器5のガス量は少く、ガス抽出機3を運転す
るために必要な最低ガス量を維持できないために、ガス
抽出機ガス入口弁12は閉とし、空気吸込管16、空気量調
節弁15および空気管14より空気を吸込み、ガス抽出機3
を運転するために必要な最低ガス量を確保する。蒸気タ
ービン1の負荷が上昇したら、ガス抽出機ガス入口弁12
を開し、起動エゼクターガス入口弁11、止め弁26を閉と
して、起動エゼクター4を停止する。復水器5からの不
凝縮ガス量が減少したときは、ガス抽出機吐出管6に設
置されているオリフィス7、流量検出器21、変換器25に
よりガス抽出機3の運転に必要なガス量になるように空
気量調節弁15が制御される。To start the steam turbine 1, steam is introduced into the starting ejector 4 from the starting ejector actuating steam pipe 23 and the stop valve 26, and the air in the condenser 5 is started.
It is sucked through 11 and discharged to the atmosphere to raise the vacuum degree of the condenser 5 and then started. By this activation, the generator 2 and the gas extractor 3 that are coupled to one shaft also rotate up. At this time, the amount of gas in the condenser 5 is small and the minimum amount of gas required to operate the gas extractor 3 cannot be maintained. Therefore, the gas extractor gas inlet valve 12 is closed and the air suction pipe 16 and air Air is sucked from the volume control valve 15 and the air pipe 14, and the gas extractor 3
To ensure the minimum amount of gas needed to operate the. When the load on the steam turbine 1 increases, the gas extractor gas inlet valve 12
Is opened, the starting ejector gas inlet valve 11 and the stop valve 26 are closed, and the starting ejector 4 is stopped. When the amount of non-condensable gas from the condenser 5 decreases, the amount of gas required to operate the gas extractor 3 is adjusted by the orifice 7, the flow rate detector 21, and the converter 25 installed in the gas extractor discharge pipe 6. The air amount control valve 15 is controlled so that
【0004】[0004]
【発明が解決しようとする課題】しかしながら、前記従
来ガス抽出機制御装置において、地熱発電所の蒸気に含
まれるガス量は、長時間運転すると減少することが多
く、ガス抽出機3の運転中に不凝縮ガス量が低下し、ガ
ス抽出機3を運転するために必要なガス量を確保できな
い場合、大気より空気を吸込んでガス抽出機3を運転す
ることになり、ガスより分子量の大きい空気による運転
が長くなりガス抽出機の軸動力が大きくなる問題があっ
た。However, in the conventional gas extractor control device described above, the amount of gas contained in the steam of the geothermal power plant often decreases when the gas extractor 3 is operated for a long time. When the amount of non-condensed gas decreases and the amount of gas required to operate the gas extractor 3 cannot be secured, the gas extractor 3 is operated by sucking air from the atmosphere, and the gas having a larger molecular weight than the gas is used. There is a problem that the operation becomes long and the shaft power of the gas extractor becomes large.
【0005】本発明は、かかる状況に鑑みなされたもの
で、蒸気タービンの起動時には、起動エゼクターの運転
により、復水器の真空度を上昇させ、一軸に結合されて
いるガス抽出機には大気空気を吸込制御とし、蒸気ター
ビン負荷が上昇したら、ガス抽出機吐出流量検出により
ガス抽出機吐出よりガス量の一部を復水器に再循環させ
ることにより、ガス抽出機の運転に必要なガス量を確保
するように、空気吸込みとガス量再循環とを切替え制御
することができるガス抽出機制御装置を提供することを
目的とする。The present invention has been made in view of the above situation, and when the steam turbine is started, the vacuum degree of the condenser is raised by the operation of the starter ejector, and the gas extractor connected to the single shaft is exposed to the atmosphere. When the suction control of air is performed and the steam turbine load rises, the gas flow rate detected by the gas extractor is used to recirculate a part of the gas amount from the gas extractor discharge to the condenser, and the gas required to operate the gas extractor is recirculated. An object of the present invention is to provide a gas extractor control device capable of switching and controlling air suction and gas amount recirculation so as to secure a sufficient amount.
【0006】[0006]
【課題を解決するための手段】本発明は、前記目的を達
成する手段として、蒸気タービンの起動時には、起動エ
ゼクターの運転により、復水器の真空度を上昇させ、一
軸に結合させているガス抽出機には空気を吸込制御し、
蒸気タービン負荷が上昇したら、負荷信号により空気の
吸込弁を閉し、ガス抽出機吐出量によりガス量の一部を
復水器に再循環させる切替えにより、ガス抽出機の運転
に必要なガス量になるように制御する制御機構とをそれ
ぞれ設けたことを特徴とする。Means for Solving the Problems As a means for achieving the above object, the present invention increases the degree of vacuum of a condenser by operating a starter ejector at the time of starting a steam turbine, so that the gas is uniaxially connected. Suction control of air into the extractor,
When the steam turbine load increases, the load signal closes the air intake valve, and the discharge amount of the gas extractor changes the amount of gas that is recirculated to the condenser. And a control mechanism for controlling so that
【0007】[0007]
【作用】本発明に係わるガス抽出機制御装置において
は、ガス抽出機の吸込みには、空気を吸込み制御するた
めの空気管、空気量調節弁が設けられ、ガス抽出機の吐
出には、ガス量を再循環制御するためのガス再循環管、
ガス再循環量調節弁が設けられている。蒸気タービンの
起動時は、起動エゼクターの運転により、復水器の真空
度を上昇させ、一軸に結合されているガス抽出機にはガ
ス抽出機の運転に必要な最低量を確保するために大気空
気を空気管、空気量調節弁により吸込制御し、蒸気ター
ビン負荷が上昇したら、負荷信号により、大気空気の空
気量調節弁を閉し、ガス再循環量調節弁に切替え、ガス
抽出機吐出量によりガス抽出機の運転に必要なガス量を
確保するためにガス量の一部をガス再循環管、ガス再循
環量調節弁により、復水器に再循環させることにより、
ガス抽出機の運転に必要なガス量を確保する制御が可能
となる。In the gas extractor control device according to the present invention, the suction of the gas extractor is provided with the air pipe for controlling the intake of air and the air amount control valve, and the discharge of the gas extractor is provided with the gas extractor. Gas recirculation pipe for controlling the amount recirculation,
A gas recirculation amount control valve is provided. At the time of starting the steam turbine, the starter ejector is operated to raise the vacuum degree of the condenser, and the gas extractor connected to the single shaft has the atmospheric pressure to ensure the minimum amount necessary for operating the gas extractor. Suction control of air by the air pipe and air amount control valve, when the steam turbine load rises, the load signal closes the air amount control valve of atmospheric air and switches to the gas recirculation amount control valve. By recirculating a part of the gas amount to the condenser with the gas recirculation pipe and the gas recirculation amount control valve in order to secure the gas amount necessary for the operation of the gas extractor,
It becomes possible to control to secure the amount of gas required for operating the gas extractor.
【0008】[0008]
【実施例】図1は、本発明の第1実施例に係わるガス抽
出機制御装置に示す系統図であり、図中、蒸気タービン
1からの排出蒸気は復水器5に流入するようになってお
り、復水器5で蒸気と冷却水(図示せず)が熱交換する
ことにより蒸気は凝縮する。一方蒸気中に含まれている
不凝縮ガスは、ガス抽出機入口弁12、ガス抽出機入口管
13よりガス抽出機3により吸込れ、ガス抽出機吐出管
6、逆止弁8およびガス放出管9より大気に放出され
る。蒸気タービン1の起動は、起動エゼクター4に起動
エゼクター作動蒸気管23、止め弁26より蒸気を流入さ
せ、復水器5の空気を起動エゼクターガス入口弁11を
通し吸引して大気へ放出して復水器5の真空度を上昇さ
せてから起動する。この起動により、一軸に結合されて
いる発電機2、ガス抽出機3も回転上昇する。この時、
復水器5のガス量は少なく、ガス抽出機3を運転するた
めに必要な最低ガス量を維持できないために、ガス抽出
機ガス入口弁12は閉とし、空気吸込管16、空気量調節弁
15および空気管14より空気を吸込み、ガス抽出機3を運
転するために必要な最低ガス量を確保する。蒸気タービ
ン1の負荷が上昇したら、ガス抽出機ガス入口弁12を開
し、起動エゼクターガス入口弁11、止め弁26を閉とし
て、起動エセクター4を停止する。復水器5からの不凝
縮ガス量が減少したときは、ガス抽出機吐出管6に設置
されているオリフィス7、流量検出器21、変換器25によ
りガス抽出機3の運転に必要なガス量になるように空気
量調節弁15が制御される。蒸気タービン1負荷が上昇し
たら、発電機出口信号20、変換器22により電磁弁18を閉
し、電磁弁19を開とする。この制御により、空気量調節
弁15は閉となる。一方、ガス再循環量調節弁17はガス抽
出機吐出管6に設置されているオリフィス7、流量検出
器21、変換器25からの信号により電磁弁19が開になり切
替え制御となり、ガス抽出機吐出量が低下した時は、ガ
ス抽出機3の運転に必要なガス量を確保するためにガス
量の一部をガス再循環管10、ガス再循環量調節弁17によ
り、復水器5に再循環させることにより、ガス抽出機の
運転に必要なガス量を確保するように制御される。1 is a system diagram showing a gas extractor control device according to a first embodiment of the present invention. In the figure, exhaust steam from a steam turbine 1 flows into a condenser 5. The steam is condensed by the heat exchange between the steam and the cooling water (not shown) in the condenser 5. On the other hand, the non-condensable gas contained in the steam is the gas extractor inlet valve 12, the gas extractor inlet pipe.
The gas is sucked in by the gas extractor 3 from 13 and is discharged to the atmosphere through the gas extractor discharge pipe 6, the check valve 8 and the gas discharge pipe 9. To start the steam turbine 1, steam is introduced into the starter ejector 4 through the starter ejector actuating steam pipe 23 and the stop valve 26, and the air in the condenser 5 is sucked through the starter ejector gas inlet valve 11 and released to the atmosphere. After the vacuum degree of the condenser 5 is increased, the condenser 5 is started. By this activation, the generator 2 and the gas extractor 3 which are connected to the single shaft also rotate up. At this time,
Since the amount of gas in the condenser 5 is small and the minimum amount of gas required to operate the gas extractor 3 cannot be maintained, the gas extractor gas inlet valve 12 is closed, the air suction pipe 16, the air amount control valve.
Air is sucked from 15 and the air pipe 14 to secure the minimum amount of gas required to operate the gas extractor 3. When the load of the steam turbine 1 increases, the gas extractor gas inlet valve 12 is opened, the starter ejector gas inlet valve 11 and the stop valve 26 are closed, and the starter esector 4 is stopped. When the amount of non-condensable gas from the condenser 5 decreases, the amount of gas required to operate the gas extractor 3 is adjusted by the orifice 7, the flow rate detector 21, and the converter 25 installed in the gas extractor discharge pipe 6. The air amount control valve 15 is controlled so that When the load on the steam turbine 1 increases, the electromagnetic valve 18 is closed and the electromagnetic valve 19 is opened by the generator outlet signal 20 and the converter 22. By this control, the air amount control valve 15 is closed. On the other hand, the gas recirculation amount control valve 17 opens the solenoid valve 19 in response to signals from the orifice 7, the flow rate detector 21, and the converter 25 installed in the discharge pipe 6 of the gas extractor to perform switching control. When the discharge amount decreases, a part of the gas amount is supplied to the condenser 5 by the gas recirculation pipe 10 and the gas recirculation amount control valve 17 in order to secure the gas amount necessary for the operation of the gas extractor 3. By recirculating, it is controlled to secure the amount of gas required for the operation of the gas extractor.
【0009】図2は、本発明の第2実施例を示す系統図
で、ガス抽出機を別置のモーター駆動としたものであ
る。すなわち、蒸気タービン1からの排出蒸気は復水器
5に流入するようになっており、復水器5で蒸気と冷却
水(図示せず)が熱交換することにより蒸気が凝縮す
る。一方蒸気中に含まれている不凝縮ガスは、ガス抽出
機入口弁12、ガス抽出機入口管13よりガス抽出機3によ
り吸込れ、ガス抽出機吐出管6、逆止弁8およびガス放
出管9より大気に放出される。FIG. 2 is a system diagram showing a second embodiment of the present invention, in which the gas extractor is driven by a separate motor. That is, the exhaust steam from the steam turbine 1 flows into the condenser 5, and the steam and the cooling water (not shown) exchange heat in the condenser 5 to condense the steam. On the other hand, the non-condensable gas contained in the steam is sucked by the gas extractor 3 from the gas extractor inlet valve 12 and the gas extractor inlet pipe 13, and the gas extractor discharge pipe 6, the check valve 8 and the gas discharge pipe. It is released to the atmosphere from 9.
【0010】蒸気タービン1の起動は、起動エゼクター
4に起動エゼクター作動蒸気管23、止め弁26より蒸気を
流入させ、復水器5の空気を起動エゼクターガス入口弁
11を通し吸引して大気へ放出して復水器5の真空度を上
昇させてから起動する。この時、復水器5のガス量は少
なく、ガス抽出機3を運転するために必要な最低ガス量
を維持できないために、ガス抽出機ガス入口弁12は閉と
し、空気吸込管16、空気量調節弁15および空気管14より
空気を吸込み、ガス抽出機3を運転するために必要な最
低ガス量を確保する。蒸気タービン1の負荷が上昇した
ら、ガス抽出機ガス入口弁12を開し、起動エゼクターガ
ス入口弁11、止め弁16を閉として、起動エゼクター4を
停止する。復水器5からの不凝縮ガス量が減少したとき
は、ガス抽出機吐出管6に設置されているオリフィス
7、流量検出器21、変換器25によりガス抽出機3の運転
に必要なガス量になるように空気量調節弁15が制御され
る。蒸気タービン1負荷が上昇したら、発電機出力信号
20、変換器22により電磁弁18を閉し、電磁弁19を開とす
る。この制御により、空気量調節弁15は閉となる。一
方、ガス再循環量調節弁17はガス抽出機吐出管6に設置
されているオリフィス7、流量検出器21、変換器25から
の信号により電磁弁19が開になり切替え制御となり、ガ
ス抽出機吐出量が低下した時は、ガス抽出機3の運転に
必要なガス量を確保するためにガス量の一部をガス再循
環管10、ガス再循環量調節弁17により、復水器5に再循
環させることにより、ガス抽出機の運転に必要なガス量
を確保するように制御される。When the steam turbine 1 is started, steam is introduced into the starter ejector 4 from the starter ejector actuating steam pipe 23 and the stop valve 26, and the air in the condenser 5 is started.
It is sucked through 11 and discharged to the atmosphere to raise the vacuum degree of the condenser 5 and then started. At this time, since the amount of gas in the condenser 5 is small and the minimum amount of gas required to operate the gas extractor 3 cannot be maintained, the gas extractor gas inlet valve 12 is closed and the air suction pipe 16, air Air is sucked from the amount control valve 15 and the air pipe 14 to secure the minimum amount of gas required to operate the gas extractor 3. When the load on the steam turbine 1 increases, the gas extractor gas inlet valve 12 is opened, the starter ejector gas inlet valve 11 and the stop valve 16 are closed, and the starter ejector 4 is stopped. When the amount of non-condensable gas from the condenser 5 decreases, the amount of gas required to operate the gas extractor 3 is adjusted by the orifice 7, the flow rate detector 21, and the converter 25 installed in the gas extractor discharge pipe 6. The air amount control valve 15 is controlled so that When the load on the steam turbine 1 rises, the generator output signal
20, the solenoid 22 is closed by the converter 22, and the solenoid valve 19 is opened. By this control, the air amount control valve 15 is closed. On the other hand, the gas recirculation amount control valve 17 opens the solenoid valve 19 in response to signals from the orifice 7, the flow rate detector 21, and the converter 25 installed in the discharge pipe 6 of the gas extractor to perform switching control. When the discharge amount decreases, a part of the gas amount is supplied to the condenser 5 by the gas recirculation pipe 10 and the gas recirculation amount control valve 17 in order to secure the gas amount necessary for the operation of the gas extractor 3. By recirculating, it is controlled to secure the amount of gas required for the operation of the gas extractor.
【0011】[0011]
【発明の効果】以上説明したように、本発明は、蒸気タ
ービンの起動時は、起動エゼクターの運転により、復水
器の真空度を上昇させ、ガス抽出機は空気を吸込制御
し、蒸気タービン負荷が上昇したら、負荷信号による切
替えにより、大気空気の吸込弁を閉し、ガス再循環弁が
制御となり、ガス抽出機吐出量が低下するとガス量の一
部を復水器に再循環させることにより、ガス抽出機の運
転に必要なガス量になるように制御することにより、運
転中の不凝縮ガス量低下に対し、ガス抽出機吐出量の一
部を復水器に再循環することにより、空気より分子量の
小さいガスによる再循環運転ができるため、ガス抽出機
の軸動力を小さくすることができ、地熱発電所の主蒸気
量の削減または所内動力量の削減ができる。As described above, according to the present invention, when the steam turbine is started, the vacuum degree of the condenser is increased by the operation of the starter ejector, the gas extractor controls the intake of air, and the steam turbine is controlled. When the load rises, the load signal switches to close the atmospheric air intake valve and control the gas recirculation valve. When the gas extractor discharge decreases, part of the gas is recirculated to the condenser. By controlling so that the amount of gas required for the operation of the gas extractor is reduced, by recirculating a part of the discharge amount of the gas extractor to the condenser against the decrease in the amount of non-condensable gas during operation. Since the recirculation operation can be performed with a gas having a smaller molecular weight than that of air, the shaft power of the gas extractor can be reduced, and the amount of main steam of the geothermal power plant or the amount of power in the plant can be reduced.
【図1】本発明の第1実施例に係わるガス抽出機制御装
置を示す系統図。FIG. 1 is a system diagram showing a gas extractor control device according to a first embodiment of the present invention.
【図2】本発明の第2実施例に係わるガス抽出機制御装
置を示す系統図。FIG. 2 is a system diagram showing a gas extractor control device according to a second embodiment of the present invention.
【図3】従来のガス抽出機装置を示す系統図。FIG. 3 is a system diagram showing a conventional gas extractor device.
1…蒸気タービン 2…発電機 3…ガス抽出機 4…起動エゼクター 5…復水器 6…ガス抽出機ガス吐出管 7…オリフィス 8…逆止弁 9…ガス放出管 10…ガス再循環 11…起動エゼクターガス入口弁 12…ガス抽出機ガス入口弁 13…ガス抽出機ガス入口管 14…空気管 15…空気量調節弁 16…空気吸込管 17…ガス再循環量調節弁 18…電磁弁 19…電磁弁 20…発電機出力信号 21…流量検出器 22…変換器 23…起動エゼクター作動蒸気管 24…モーター 25…変換器 26…止め弁 1 ... Steam turbine 2 ... Generator 3 ... Gas extractor 4 ... Start-up ejector 5 ... Condenser 6 ... Gas extractor gas discharge pipe 7 ... Orifice 8 ... Check valve 9 ... Gas discharge pipe 10 ... Gas recirculation 11 ... Start-up ejector Gas inlet valve 12 ... Gas extractor gas inlet valve 13 ... Gas extractor gas inlet pipe 14 ... Air pipe 15 ... Air amount control valve 16 ... Air suction pipe 17 ... Gas recirculation amount control valve 18 ... Solenoid valve 19 ... Solenoid valve 20 ... Generator output signal 21 ... Flow rate detector 22 ... Converter 23 ... Start-up ejector actuation steam pipe 24 ... Motor 25 ... Converter 26 ... Stop valve
Claims (1)
真空度を維持するガス抽出機において、ガス抽出機吸込
経路に空気を吸込ませる機構と、ガス抽出機吐出経路か
ら復水器へ不凝縮ガスの一部を再循環させる機構とを具
備し、蒸気タービンの起動時と負荷運転中に大気空気の
吸込みと不凝縮ガスの一部を復水器に再循環とする切替
え運転をすることを特徴とするガス抽出機制御装置。1. In a gas extractor for extracting non-condensable gas from a condenser and maintaining the degree of vacuum of the condenser, a mechanism for sucking air into a gas extractor suction path and a condensate from a gas extractor discharge path. Equipped with a mechanism that recirculates a portion of the non-condensable gas to the condenser, switching operation that sucks in atmospheric air and recirculates a portion of the non-condensable gas to the condenser during steam turbine startup and load operation A gas extractor control device characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7061793A JPH06281366A (en) | 1993-03-30 | 1993-03-30 | Controller for gas extractor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7061793A JPH06281366A (en) | 1993-03-30 | 1993-03-30 | Controller for gas extractor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH06281366A true JPH06281366A (en) | 1994-10-07 |
Family
ID=13436750
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7061793A Pending JPH06281366A (en) | 1993-03-30 | 1993-03-30 | Controller for gas extractor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH06281366A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6863019B2 (en) | 2000-06-13 | 2005-03-08 | Applied Materials, Inc. | Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas |
JP2011047640A (en) * | 2009-08-28 | 2011-03-10 | Inteco Special Melting Technologies Gmbh | Method and device of controlling condenser cooling water for vapor injection vacuum pump |
-
1993
- 1993-03-30 JP JP7061793A patent/JPH06281366A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6863019B2 (en) | 2000-06-13 | 2005-03-08 | Applied Materials, Inc. | Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas |
JP2011047640A (en) * | 2009-08-28 | 2011-03-10 | Inteco Special Melting Technologies Gmbh | Method and device of controlling condenser cooling water for vapor injection vacuum pump |
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