JPH06278016A - Polishing method - Google Patents

Abstract

PURPOSE:To reduce variation in polishing by easily machining the levitating surface of a levitating magnetic head slider into a cylindrical shape. CONSTITUTION:A magnetic head slider 2 bonded to a machining jig 1 is lapped on a lapping surface plate 3 using a heated polishing liquid. In this case, the outer peripheral portion of a levitation rail is expanded by the heat of the polishing liquid and lapping work can be achieved with a levitating surface deformed into a roughly recessed surface. Thereafter cooling is performed whereby a projecting, cylindrical floating surface can be obtained. Thus the levitating surface can be easily and accurately formed into a cylindrical shape.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magnetic head slider used in a magnetic disk device, and more particularly to a method of manufacturing a magnetic head which is advantageous in reducing the flying height of a magnetic disk.

[0002]

2. Description of the Related Art A floating type head of this type floats up due to the air flow accompanying the rotation of a magnetic medium, but its reliability may deteriorate due to the adsorption phenomenon when it is stopped. It has a small cylindrical surface to reduce contact resistance. Conventionally, in order to form such a cylindrical surface, a magnetic head slider 2 having a groove formed in a lower end surface thereof as shown in FIG. Paste it on. After that, the magnetic head slider 2 is processed on the lapping platen 3 as shown in FIG. 1C, the magnetic head slider 2 is removed from the processing jig 1, and the magnetic head slider 2 is processed as shown in FIG.
The air bearing surface was formed as a cylindrical surface. Another method is, for example, Japanese Patent Laid-Open No. 4-153904.

[0003]

By the way, in the conventional method for forming the cylindrical surface, the man-hour required to form the groove on the lower end surface of the magnetic head slider is required, and the cylindrical surface is formed depending on the variation of the groove size and the position of the load. There is a drawback that the variation in shape is large.

Further, the miniaturization of the magnetic head slider is required along with the miniaturization of the magnetic disk drive device. However, due to the presence of the groove on the lower end surface of the magnetic head slider, the adhesion area with the suspension is reduced or the magnetic head slider is accumulated in the groove. The deformation of the air bearing surface due to the shrinkage of the adhesive is a problem.

[0005]

According to the method of manufacturing a magnetic head slider of the present invention, a hot polishing liquid heated when lapping is performed on a lapping plate after the magnetic head slider is attached to a processing jig. Use the magnetic head slider to thermally expand only the outer circumference of the air bearing surface to make it a substantially concave surface, then remove it from the lapping plate and cool it to shrink the outer circumference of the air bearing surface, so that the longitudinal direction of the air bearing surface changes. It is characterized by having a cylindrical surface shape that is a part of the cylinder.

[0006]

According to the above construction, it is not necessary to form a groove on the lower end surface of the magnetic head slider, the attachment to a processing jig is simple, and the curvature of the cylindrical surface can be controlled by controlling the temperature.

The higher the temperature is than the surface plate, the larger the curvature, and the smaller the temperature difference from the surface plate, the smaller the curvature.

This is because, of the lower surface of the slider, the end surface portion expands because it is heated by the polishing liquid, while the central portion of the lower surface is kept at the same temperature as the surface plate by the surface plate.

If the temperature difference between the polishing liquid and the surface plate is 5 ° C. or more, a remarkable effect is obtained in forming the cylindrical surface.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings.

FIG. 1 is a schematic side view of an embodiment of the present invention. As shown in FIG. 1A, the magnetic head slider attached to the processing jig 1 is placed on the lapping plate 3. Next, as shown in FIG. 2B, a heated warm polishing liquid is sprayed or dropped,
Rotate the lapping plate.

At this time, the outer peripheral portion of the air bearing surface of the magnetic head slider 2 expands due to the heat of the polishing liquid, and the magnetic head slider 2 is processed as shown in FIG. Thereafter, when the processing jig 1 is removed from the lapping plate 3 and cooled, the air bearing surface of the magnetic head slider 2 is transformed into a convex cylindrical surface as shown in FIG. By further selecting the temperature, it is possible to form a cylindrical surface of any size.

[0013]

As described above, according to the present invention, by using the warm polishing liquid, it is possible to easily manufacture the magnetic head slider having the cylindrical shape on the air bearing surface, and to select the polishing liquid temperature. Thus, a cylindrical surface having an arbitrary size can be formed.

[Brief description of drawings]

FIG. 1 is a schematic side view of an embodiment of the present invention.

FIG. 2 is a conventional schematic side view.

[Explanation of symbols]

 1 Processing jig 2 Magnetic head slider 3 Lapping plate 4 Hot polishing liquid

Claims (4)

[Claims] 1. A method of polishing a work using a surface plate and a polishing liquid, which comprises heating or cooling the polishing liquid and dropping the liquid onto the surface plate for polishing. 2. The polishing method according to claim 1, wherein the temperature difference between the surface plate and the polishing liquid is 5 ° C. or more. 3. A method of manufacturing a magnetic head slider, comprising:
A method of manufacturing a magnetic head slider, wherein the slider surface is lapped with a polishing liquid having a temperature higher than that of a surface plate. 4. The method of manufacturing a magnetic head slider according to claim 3, wherein the temperature of the hot polishing liquid is 40 ° C. to 70 ° C.