JPH06272040A - Controller of film forming device - Google Patents

Abstract

PURPOSE:To resume film forming from a stopped part when automatic film forming operation is stopped without preparing the data again. CONSTITUTION:A computer 1 for setting and controlling the data on the film forming conditions and a sequencer 2 for controlling the operation of a film forming device 3 based on the data supplied by the computer 1 are separately constituted. Process switches 5 used to urgently and frequently operate the device 3 is provided at the specified position of the sequencer 2. One of the process switches is used as an automatic suspension switch 5a. An operation progress storage part 10 is furnished to the sequencer 2 to store the data on the film forming conditions of a film forming stage after the stopped stage like when the automatic suspension switch 5a is pushed and the automatic film forming operation is stopped.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a control device for controlling the operation of a film forming apparatus for performing a film forming operation.

[0002]

2. Description of the Related Art Conventionally, when the specifications of film forming work are complicated such as film forming of an optical film, and when many kinds of film forming materials are required such as film forming of a multilayer film, there are many kinds of film forming materials. A computer is used to manage the data of the film forming conditions extending to the above, and the computer is connected to the film forming apparatus by a signal line. Moreover, since the computer has various functions in addition to the data management function, it displays the operating status of the film forming apparatus and controls the automatic operation, manages the data (production information) during the film forming operation of the substrate, and prints out. Etc. are involved in all processes related to film formation.

[0003]

However, in the above-mentioned conventional control apparatus, the computer is used in a state of being involved in the film forming apparatus from the beginning to the end of the film forming process, and the film forming operation is always performed during the film forming operation. Because it is restricted by the equipment, it is not possible to start film deposition preparation work such as design of film deposition conditions and technical calculation using a computer unless the film deposition work is completed, which lowers the overall work efficiency. There's a problem.

Further, in this type of film forming apparatus, the degree of vacuum changes due to the deposition of adhered substances on the inner wall of the vacuum chamber as the film forming operation progresses, and the abnormal discharge due to the decrease in the insulating degree of the insulating portion, It is known that the film formation state becomes unstable due to the irregular release of gas from the film formation material, the degree of consumption of the film formation material, etc., and adversely affects the film formation. In the case of forming a film, since the film forming time is extended, such adverse effects are likely to occur. Therefore,
Conventionally, there is a demand to immediately stop the operation and switch from the automatic film forming operation by the computer to the manual operation when a situation in which such a film forming state becomes unstable occurs.

Conventionally, as a means for responding to this request, the automatic film forming operation is stopped by resetting the computer. However, with such a means, when the control of the film forming apparatus by the computer is stopped, when the film formation is restarted, it becomes impossible to start the film formation from this stopped portion. I will end up. That is, for example, when the film forming state becomes unstable during the film forming operation of the fifth layer and the computer is reset at this point to stop the automatic film forming operation, the computer should be provided with only the conditions for the fifth layer and thereafter. Since the provided data (data in which the conditions of the first to fourth layers are deleted) is not managed,
When the film forming operation from the fifth layer is to be restarted, it is necessary to newly create data having only the conditions for the fifth layer and thereafter and to transmit this data from the computer to the film forming apparatus. Will end up. Then, there is a problem that the work of creating new data is not only complicated but also prolongs the entire working time.

The present invention has been made in view of the above points, and an object thereof is to improve the work efficiency of a computer and to newly create data when the operation is stopped during the automatic film forming operation. An object of the present invention is to provide a controller for a film forming apparatus that can restart film forming from a stopped portion without doing so.

[0007]

In order to achieve the above object, the present invention is provided with a film forming control means for controlling the operation of a film forming apparatus and managing the same, in addition to a computer, thereby making an abnormality in the film forming operation. The data after the stop is stored by the film formation control means when the operation is stopped due to the above, and the film formation is performed based on the stored data when the film formation is restarted. Specifically, the invention according to claim 1 is premised on a control device that controls the operation of a film forming apparatus that performs a film forming operation. Then, it is connected to the film forming apparatus via a transmission line, reads the data of the film forming condition set and managed by a computer, and manages the operation of the film forming apparatus based on the data of the film forming condition. A film forming control means is provided. Further, in the film forming control means, an automatic stop switch for stopping the film forming operation by an ON operation by an operator, and when the film forming operation is stopped by turning on the automatic stop switch, after the stopped step The operation progress status storing means for storing the data of the film forming conditions of the film forming step is provided.

According to a second aspect of the present invention, in the control device of the film forming apparatus according to the first aspect, the film forming control means displays the data of the film forming conditions stored by the operation progress status storing means. The touch panel display is provided so that the displayed film formation condition data can be corrected and set on the screen.

According to a third aspect of the present invention, in the control device of the film forming apparatus according to the first or second aspect, the computer is connected to a plurality of film forming control means.

According to a fourth aspect of the present invention, in the control device of the film forming apparatus according to the first or second aspect, the film forming control means is provided with a reading means, and the reading means is provided for a film forming condition that a computer has. The data is recorded on the storage medium so that the data can be read.

[0011]

With the above construction, in the invention according to claim 1,
When an operator turns on the automatic stop switch due to an abnormality during the film forming operation, the film forming operation is stopped. When the film formation operation is stopped in this way, the operation progress status storage means provided in the film formation control means stores the data of the film formation conditions of the film formation step after the stopped step. Then, when the film formation operation is restarted from this stopped state, the film formation operation is performed based on the data of the film formation conditions stored in the operation progress status storage means. For this reason, it is not necessary to perform the complicated work of creating new data after resetting the computer as in the related art. Further, since the film forming control means controls the operation of the film forming apparatus, the computer is not restricted by the film forming apparatus, so that the versatility of the computer is expanded and the work efficiency is improved.

According to the second aspect of the present invention, when the automatic pause switch is turned on and the film formation operation is stopped, the film formation condition data stored by the operation progress storage means is displayed on the touch panel display, The displayed film formation condition data can be corrected and set on the screen of the touch panel display.

According to the third aspect of the present invention, the data of the film forming conditions are given from one computer to the plurality of film forming control means, and the film forming control means are connected to each other based on the respective data. Operation management of the film forming device.

According to the fourth aspect of the present invention, the data of the film forming conditions is read by the reading means via the storage medium, so that the data is given to the film forming control means and the computer is not connected to the film forming control means. Since the computer is completely separated from the film forming apparatus, the computer can be freely used and its installation position is not restricted.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows the entire film forming apparatus 3 and its control equipment according to a first embodiment of the present invention. Further, in this example, the computer 1 and the sequencer 2 which is the film forming control means are separately configured. The sequencer 2 is connected via a transmission line to a film forming apparatus 3 for forming a film on a substrate in a vacuum environment and a power board 4 having a power source of the film forming apparatus 3. The computer 1 is the sequencer 2
In order to determine the specifications of the film forming operation in the film forming apparatus 3 on the computer 1, a large amount of data regarding the film forming conditions such as the environment in the film forming apparatus 3 and the film forming configuration of the substrate is stored. The data of the film forming conditions are sent to the sequencer 2 while the settings are managed. The sequencer 2 receives the data of the film forming conditions from the computer 1 and controls and manages the operation of the film forming apparatus 3 based on the data of the film forming conditions, and the situation during the film forming operation of the substrate in the film forming apparatus 3. Is recorded in data and managed as production information.

The film forming apparatus 3 is a vacuum vapor deposition apparatus,
Although not shown, a film forming apparatus such as a vacuum pump for creating a vacuum environment, a heater for heating the substrate, a substrate jig for holding and rotating the substrate, and an evaporation source for evaporating a film forming material is provided. Further, the film forming apparatus 3 is connected with various measuring instruments (not shown) for measuring the environment inside the film forming apparatus 3 when the various film forming apparatuses are operated, and these measuring instruments are connected to the sequencer 2. It is designed to send measured data.

The sequencer 2 includes a plurality of push button type process switches 5, 5, ... For performing various operations of the film forming apparatus 3 and a touch panel display 6 for performing various operations on the screen. It is provided. The process switches 5, 5, ... Are provided at predetermined positions in the vicinity of the touch panel display 6, and are frequently used with high urgency such as starting and stopping the film forming apparatus 3 and switching between automatic operation and manual operation. It is designed to be used for operations.
One of the process switches 5, 5, ... Is an automatic pause switch 5a, and when the film formation state becomes unstable and the film formation is adversely affected, the operator The automatic film forming operation is stopped by pressing the automatic pause switch 5a. Further, as a feature of this example, the sequencer 2 is provided with the driving progress storage unit 10 as the driving progress storage means in the present invention, and as described above, the automatic pause switch 5a is pushed to automatically perform the automatic progress switch. When the film operation is stopped, the operation progress storage unit 10 stores the data of the film forming conditions of the film forming process after the stopped process. Further, when such an automatic film forming operation is stopped, the film forming condition data stored in the operation progress storage unit 10 is also displayed on the touch panel display 6. .

When the film forming apparatus 3 is automatically operated, data of the film forming conditions downloaded from the computer 1 is displayed on the touch panel display 6 and, if necessary, on this screen. The data of the film forming conditions are corrected and set. The data set on the touch panel display 6 is read by the computer 1 side connected to the sequencer 2, and the registered data can be corrected and newly registered on the computer 1 based on the read data. Has become. Further, when it is necessary to change the automatic operation procedure of the film forming apparatus 3, such as when the various film forming apparatuses of the film forming apparatus 3 are changed, the setting is made except during the automatic operation of the film forming apparatus 3. At that time, the operation is performed on the screen of the touch panel display 6. In addition, as described above, the automatic film formation operation is stopped by the pushing operation of the automatic pause switch 5a, and the film formation condition data stored in the operation progress status storage unit 10 is displayed on the touch panel display 6. Even if there is, the data of the film forming condition is corrected and set on the screen of the touch panel display 6.

On the other hand, during the manual operation of the film forming apparatus 3,
The operating conditions of the various film-forming equipments are displayed on the touch panel display 6, and the apparatus conditions are set on this screen in accordance with changes in the various film-forming equipments used.
The operating conditions of various film-forming equipment, which change according to the usage conditions, are set.

Further, on the touch panel display 6, the operation status of various film forming equipment is also displayed based on the data sent from the measuring device during the film forming operation of the film forming apparatus 3. There is.

The sequencer 2 is equipped with an alarm device (not shown) for issuing an alarm when an abnormality occurs in the film forming apparatus 3.
Data relating to the abnormality is displayed on the touch panel display 6. Further, a printer 7 is connected to the sequencer 2, and the printer 7 prints out data when the film forming apparatus 3 has an abnormality and substrate production information.

Next, the film forming operation based on the control by the sequencer 2 will be described with reference to the flowchart of FIG.

When the automatic film forming operation is started, first, in step S1, data of film forming conditions for all layers is input from the computer 1 to the sequencer 2. After that, the variable n is set to 0 as an initial value in step S2, and 1 is added to n in step S3 (n = 1). After that, the process proceeds to step S4, and the film forming conditions of the first (n = 1) layer are read out from the data input from the computer 1, and the film formation of the first layer is started in step S5. Then, in step S6, the automatic pause switch 5a is turned off.
If the automatic pause switch 5a is not turned on in step S6, the process proceeds to step S7, and it is determined whether or not the film formation of the first layer has reached the set film thickness. It is determined whether or not the automatic pause switch 5a is turned on until the film thickness is reached. And
In step S7, if the film thickness of the first layer reaches the set film thickness, the determination is NO in step S8, which is not the final layer yet, and the process returns to step S3 to add 1 to n (n = 2). Then, the film formation conditions for the second layer are read, and the film formation for the second layer is started. In this way, if the OFF state of the automatic pause switch is maintained,
Film formation is performed in order from the first layer to the final layer, and when the film formation reaches the set film thickness during the film formation operation of the final layer, YES is determined in step S7 and step S8, respectively, and film formation is completed. The automatic film forming operation is ended. Then, during such an automatic film forming operation, the degree of vacuum changes due to the deposition of adhered substances on the inner wall of the vacuum chamber as the film forming work progresses, abnormal discharge due to a decrease in the insulating degree of the insulating portion, and the film forming material. If the film forming state becomes unstable due to the irregular release of the gas or the degree of consumption of the film forming material and the film forming is adversely affected, the operator presses the automatic pause switch 5a. Then, YES is determined in step S6, the process proceeds to step S9, and the automatic film formation operation is stopped. Then, when the automatic film formation operation is stopped in this manner, the data of the film formation conditions stored in the operation progress status storage unit 10 is displayed on the touch panel display 6, and in this state, by the operator in step S10. Data on the film forming conditions are corrected and set on the screen of the touch panel display 6. The correction and setting of the data of the film forming conditions include, for example, changing the selected crucible number in order to replace the crucible as the evaporation source. Then, after the data of the film forming conditions are corrected and set, it is determined in step S11 whether the automatic suspension is released. This determination is made, for example, by recognizing whether or not the automatic pause switch 5a has been pressed again to be in the OFF state. And this step S
If YES in 11 when the automatic suspension is released,
In S12, the film formation is restarted, the film formation process after the stopped process is automatically performed based on the corrected and set data of the film formation conditions, and the process returns to step S6.

Even when the automatic pause switch 5a is not turned on, when the film forming apparatus 3 to be used is changed, the apparatus conditions to be changed are set by the operation on the touch panel display 6. . After the data of the film forming conditions is given to the sequencer 2 by the computer 1,
When it is necessary to change the film forming conditions and the automatic operating procedure of the film forming apparatus, the operation of setting the film forming conditions and the automatic operating procedure is performed on the touch panel display 6.
During the film forming operation, the operation status of the film forming apparatus 3 and the set data are displayed on the touch panel display 6.
As described above, during the setting of the apparatus condition, the setting of the film forming condition, the setting of the automatic operation procedure and the film forming operation, the computer 1
Since it is not restricted by the sequencer 2 and the film forming apparatus 3, it is possible to start preparation for another film forming operation such as design of an optical film and technical calculation, and it is possible to improve the efficiency of the whole operation.

Since the control conditions such as the apparatus conditions, the film forming conditions and the automatic operation procedure, which are relatively easily changed, are set on the screen temporarily displayed on the touch panel display 6, individual operation switches and Wiring can be reduced, and the manufacturing cost of the device can be reduced.
Further, since the hardware of the sequencer 2 is not changed in accordance with the change of the control content, the hardware of the sequencer 2 is kept constant and the manufacturing of the apparatus is stabilized, so that the manufacturing cost and the manufacturing time of the apparatus can be improved. Can be saved.

Furthermore, the temporarily performed operations of changing the film forming conditions, changing the automatic operating procedure of the film forming apparatus 3 and setting the apparatus conditions are performed on the screen temporarily displayed on the touch panel display 6. On the other hand, the film forming apparatus 3
Emergency and frequent operations such as starting and stopping the
Since it is performed by the process switches 5, 5, ... Permanently provided in the sequencer 2, it is possible to prevent an erroneous operation from occurring between an emergency and frequent operation and a temporary operation, and at the same time, perform an emergency and frequent operation. But you can do it quickly.

And, as a characteristic effect of this example,
The sequencer 2 has a driving progress storage unit 10,
If the automatic pause switch 5a is pressed to stop the automatic film formation operation, the operation progress storage unit 10 stores the data of the film formation conditions of the film formation process after the stopped process, When the operation is restarted, the stored film forming condition data enables the process after the stop, so that the automatic film forming operation is stopped by resetting the computer 1 as in the conventional case. Comparing with other things, complicated work such as creating new data is unnecessary, and extension of the whole working time is not caused.

Further, when the automatic film forming operation is stopped,
Since the film formation condition data stored in the operation progress storage unit 10 is displayed on the touch panel display 6, the operator can easily confirm the film formation condition data. Is designed to be modified and set on the screen of the touch panel display 6, so data can be easily changed.
This film formation data can be easily changed to data required when the operation is restarted, and operability can be improved.

FIG. 3 shows the entire film forming apparatus 3 and its control equipment according to a second embodiment as an embodiment according to the invention of claim 3. In this example, one computer 1
A plurality of sequencers 2, 2 and 2 are connected to each other, and a power board 4 and a film forming apparatus 3 are connected to each sequencer 2. Data of film forming conditions are given to a plurality of sequencers 2, 2, 2 from one computer 1,
Each sequencer 2 manages the operation of the film forming apparatus 3 connected thereto based on the respective data. In this way, since one computer 1 can use a plurality of film forming apparatuses 3, 3, 3 for film forming operation at one time, the efficiency of the film forming operation can be significantly improved. . When the automatic pause switch 5a is pressed in one sequencer 2 to stop the automatic film formation operation in the automatic film formation operation in such a configuration, the operation of the stopped sequencer 2 is stopped. The progress status storage unit 10 stores the film forming condition data of the film forming process after the stopped process, and when the operation is restarted, the process after the stopping is performed by the stored film forming condition data. . That is, it is possible to stop the automatic operation of only the film forming apparatus 3 in which an abnormality has occurred, while continuing the automatic film forming operation of the other film forming apparatuses 3 and 3.

FIG. 4 shows the entire film forming apparatus 3 and its control equipment according to a third embodiment as an embodiment according to the invention of claim 4. In this example, the computer 1 is not connected to the sequencer 2 and the film forming apparatus 3, but is independent of the sequencers 2 and 3. The sequencer 2 is provided with a disk device 8 which is a reading means, and the film forming condition data is managed by the computer 1 and recorded from the computer 1 to a floppy disk 9 which is its storage medium. ing. Data on the film forming conditions are obtained from the floppy disk 9 to the disk device 8 described above.
It is added to the sequencer 2 by being downloaded to.

For this reason, in the third embodiment, the data of the film forming conditions is transferred to the disk device 8 via the floppy disk 9.
By loading the data into the sequencer 2, the computer 1 does not have to be connected to the sequencer 2, so that the computer 1 can be completely separated from the film forming apparatus 3 and the apparatus installation area in the film forming work chamber can be reduced. At the same time, the computer 1 can be freely used for purposes other than the film forming work, and the installation position is not restricted. Further, since the data can be added by only one computer, the cost can be reduced.

Since the second and third embodiments are the same as the first embodiment except for the above structure, the same reference numerals are given and detailed description thereof is omitted. It is needless to say that the second and third embodiments have the same basic structure as the first embodiment, and therefore the same effect can be obtained.

In the first and second embodiments, the sequencer 2 is used when the data on the film forming conditions is sent to the sequencer 2.
Although the data is directly downloaded from the computer 1 connected to the computer 1, the data may be temporarily recorded from the computer 1 to the storage medium and the storage medium having the data recorded may be sent to the sequencer 2 via the reading means. Various storage media such as a floppy disk, an IC card, and a flash memory card can be used.

Furthermore, in the above-mentioned first to third embodiments,
Although the process switches 5, 5, ... Are provided in the vicinity of the touch panel display 6 of the sequencer 2, if the screen of the touch panel display 6 can be configured to be less complicated, the process switch is eliminated and the function thereof is changed to the touch panel display. It may be configured so that it is provided on the screen of No. 6.

Further, in the first to third embodiments, the sequencer 2 is connected to the film forming apparatus 3 which is a vacuum evaporation apparatus, but the film forming apparatus operated and controlled by the sequencer 2 is limited to the vacuum evaporation apparatus. However, it can be connected to various devices such as an ion plating device and a sputtering device.

[0036]

As described above, according to the present invention, the following effects are exhibited. According to the invention of claim 1, the film formation control means includes an automatic stop switch for stopping the film formation operation by an ON operation by an operator,
When the automatic pause switch is turned on and the film forming operation is stopped, operation progress storage means for storing data of film forming conditions of the film forming process after the stopped process is provided. Since, after the automatic pause switch is turned on and the film formation operation is stopped, when the operation is restarted, the process after the stop can be performed by the data of the film formation condition stored by the operation progress storage means, Compared to the case where the automatic film deposition operation is stopped by resetting the computer like the above, it does not require complicated work such as creating new data, which leads to extension of the entire working time. Nor. In addition, since the film formation control means controls the operation of the film formation apparatus, the computer is not restricted by the film formation apparatus, so that the versatility of the computer is expanded and the work efficiency can be improved.

According to the second aspect of the present invention, the film formation control means displays the film formation condition data stored by the operation progress status storage means, and displays the displayed film formation condition data on the screen. In order to be equipped with a touch panel display that can be modified and set above,
The operator can easily confirm the data of the film forming conditions, and the film forming data can be easily changed to the necessary data at the time of restarting, so that the operability can be improved.

According to the third aspect of the present invention, since the computer is connected to the plurality of film forming control means, the data of the film forming conditions are respectively sent from one computer to the plurality of film forming control means. By adding the plurality of film forming apparatuses, it is possible to use a plurality of film forming apparatuses at one time for the film forming operation and improve the efficiency of the film forming operation. Moreover, when the automatic pause switch is turned on and the automatic film forming operation is stopped in one film forming control means, an abnormality occurs while continuing the automatic film forming operation of the other film forming apparatus. It is possible to stop the automatic operation of only the film forming apparatus in which the occurrence of the above occurs.

According to the invention as set forth in claim 4, since it is not necessary to connect a computer to the film forming control means, the computer can be completely separated from the film forming apparatus to reduce the apparatus installation area in the film forming working chamber. The computer can be used universally and the installation position is not restricted. Further, since the data can be added by only one computer, the cost can be reduced.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a control device of a film forming apparatus according to a first embodiment of the present invention.

FIG. 2 is a flowchart showing an automatic film forming operation operation in the first embodiment.

FIG. 3 is a configuration diagram of a control device of a film forming apparatus according to a second embodiment of the present invention.

FIG. 4 is a configuration diagram of a controller of a film forming apparatus according to a third embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Computer 2 Sequencer (deposition control means) 3 Deposition apparatus 5a Automatic pause switch 6 Touch panel display 8 Disk device (reading means) 9 Floppy disk (storage medium) 10 Operation progress status storage unit (operation progress status storage means)

Claims (4)

[Claims] 1. A control device for controlling the operation of a film forming apparatus for performing a film forming operation, comprising data of film forming conditions connected to the film forming apparatus via a transmission line and set and managed by a computer. And a film forming control means for controlling the operation of the film forming apparatus on the basis of the data of the film forming conditions. The film forming control means controls the film forming operation by an ON operation by an operator. An automatic pause switch to be stopped, and an operation progress storage means for storing data of film forming conditions of the film forming process after the stopped process when the automatic pause switch is turned on to stop the film forming operation. A controller for a film forming apparatus, comprising: 2. The film formation control means displays the film formation condition data stored by the operation progress status storage means, and the displayed film formation condition data can be corrected and set on the screen. The control device for a film forming apparatus according to claim 1, further comprising a touch panel display. 3. The control device of the film forming apparatus according to claim 1, wherein the computer is connected to a plurality of film forming control means. 4. The film forming control means is provided with a reading means, and the reading means is provided so as to be able to read data from a storage medium in which data of film forming conditions included in a computer is recorded. The control device for a film forming apparatus according to claim 1 or 2, wherein: