JPH05331639A - Controller in film forming device - Google Patents

Abstract

PURPOSE:To improve the efficiency of the whole body of operations as for film forming and to reduce the cost. CONSTITUTION:A computer 1 setting and controlling the data of film forming conditions and a sequencer 2 executing the operational control for a film forming apparatus 3 in accordance with the data imparted from the computer 1 are separately constituted. The prescribed position of the sequencer 2 is provided with process switches 5 used for the operation performed urgently and frequently to the film forming device 3. The sequencer 2 is provided with a touch panel display 6 displaying the operating condition of the film forming device 3 and in which the setting of the device conditions in accordance with the change in the film forming device 3 to be used, the automatic operating procedure in the film forming device 3 and the change in the film forming conditions are operated on the screen.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film forming apparatus for performing steps from setting and managing data of film forming conditions for determining specifications of film forming operation to operation management of a film forming apparatus for performing film forming operation. The present invention relates to a control device.

[0002]

2. Description of the Related Art Conventionally, when the specifications of film forming work are complicated such as film forming of an optical film, and when various kinds of film forming materials are required such as film forming of a multilayer film, there are many kinds of materials. A computer is used and connected to the film forming apparatus in order to manage the data of the film forming conditions extending to the above. Moreover, since the computer has various functions in addition to the data management function, in the above film forming apparatus, the operation status display and operation control of the film forming apparatus and the data (production information) during the film forming operation of the substrate are produced.
It is involved in all processes related to film formation, such as film management and printout.

[0003]

However, in the above conventional control apparatus, the computer is used in a state of being involved with the film forming apparatus from the beginning to the end of the film forming process, and the film forming apparatus is always used during the film forming operation. Therefore, there is a problem in that it is impossible to start the preparation work of the film formation such as the design of the film formation conditions and the technical calculation using the computer, and the overall work efficiency is lowered.

The present invention has been made in view of the above points, and an object thereof is to perform a film forming preparation work even during a film forming operation and to improve the efficiency of the whole operation. It is intended to provide a control device for the device.

[0005]

In order to achieve the above object, the invention according to claim 1 performs the film forming work from setting and managing data of film forming conditions that determine the specifications of the film forming work. In a control device of a film forming apparatus that performs processes up to operation management of a film apparatus, a film forming condition is set on the basis of a computer that sets and manages the data of the film forming condition and the film forming condition data given from the computer. The film formation control means for managing the operation of the apparatus is separately provided, and the operation status of the film formation apparatus is displayed on the film formation control means, and the apparatus condition is set according to the change of the film formation apparatus used. The automatic operation procedure of the film forming apparatus and the touch panel display for changing the film forming conditions are operated on the screen.

The invention according to claim 2 is dependent on the invention according to claim 1, and is used for an emergency and frequent operation for the film forming apparatus at a predetermined position of the film forming control means. The process switch is provided.

The invention according to claim 3 is the same as claim 1 or 2.
According to the invention described above, the film formation control means is provided with a reading means, and the reading means is arranged to be capable of reading the data from a storage medium in which data of the film forming conditions of the computer is recorded. It is a thing.

A fourth aspect of the invention is dependent on the first, second or third aspect of the invention, in which a computer is connected to a plurality of film forming control means.

[0009]

With the above construction, in the invention according to claim 1,
When the film forming apparatus to be used is changed, the apparatus condition of the film forming apparatus to be changed is set by the operation on the touch panel display. When it is necessary to change the film forming condition and the automatic operation procedure of the film forming apparatus after the data of the film forming condition is given to the film forming control means by the computer,
The operation of setting the film forming conditions and the automatic operation procedure is performed on the touch panel display. During the film forming operation, the operating status of the film forming apparatus and the set data are displayed on the touch panel display. As described above, the computer is not restricted during the setting of the apparatus condition, the setting of the film forming condition, the setting of the automatic operation procedure, and the film forming work, and is therefore used for the preparation work for another film forming work. Further, since the control contents such as the apparatus condition, the film forming condition and the automatic operation procedure, which are relatively easily changed, are set on the screen temporarily displayed on the touch panel display. The hardware of the membrane control means is unchanged.

According to the second aspect of the invention, the temporarily performed operations of changing the film forming conditions, changing the automatic operating procedure of the film forming apparatus, and setting the apparatus conditions are the screens temporarily displayed on the touch panel display. On the other hand, operations that are performed urgently and frequently, such as starting and stopping the film forming apparatus, are performed by a process switch that is permanently installed in the film forming control means.

According to the third aspect of the present invention, the data of the film forming conditions is read by the reading means via the storage medium, so that the data is given to the film forming control means and the computer is not connected to the film forming control means. Since the computer is completely separated from the film forming apparatus, the computer can be freely used.

According to the fourth aspect of the present invention, data of film forming conditions are provided from a single computer to a plurality of film forming control means, and the film forming control means are connected to each other based on the respective data. Operation management of the film forming device.

[0013]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a controller A of a film forming apparatus according to the first embodiment of the present invention, in which the computer 1 and a sequencer 2 which is a film forming control means are constructed separately. Has been done. The sequencer 2 is connected to a film forming apparatus 3 for forming a film on a substrate in a vacuum environment and a power board 4 having a power source for the film forming apparatus 3. The computer 1 is connected to the sequencer 2, and on the computer 1, in order to determine the specifications of the film forming operation in the film forming apparatus 3, the environment inside the film forming apparatus 3, the film forming configuration of the substrate, etc. A large number of data relating to the film forming conditions are set and managed, and the data of the film forming conditions are sent to the sequencer 2. Sequencer 2 is computer 1
The data of the film forming conditions is received from the above, and the operation of the film forming apparatus 3 is controlled and managed based on the data of the film forming conditions.
The situation at the time of film forming operation of the substrate in the film forming apparatus 3 is recorded in data and managed as production information.

The film forming apparatus 3 is a vacuum vapor deposition apparatus,
Although not shown, a film forming apparatus such as a vacuum pump that creates a vacuum environment, a heater that heats the substrate, a substrate jig that holds and rotates the substrate, and an evaporation source that evaporates the material for film formation is provided. Further, the film forming apparatus 3 is connected with various measuring instruments (not shown) for measuring the environment inside the film forming apparatus 3 during the operation of the various film forming apparatuses, and these measuring instruments are connected to the sequencer 2. It is designed to send measured data.

The sequencer 2 includes a plurality of push button type process switches 5, 5, ... For performing various operations of the film forming apparatus 3 and a touch panel display 6 for performing various operations on the screen. It is provided. The process switches 5, 5, ... Are provided at predetermined positions near the touch panel display 6, and are frequently used with high urgency, such as starting and stopping the film forming apparatus 3 and switching between automatic operation and manual operation. It is designed to be used for operations.

When the film forming apparatus 3 is automatically operated, data of film forming conditions downloaded from the computer 1 is displayed on the touch panel display 6 and, if necessary, is displayed on this screen. The film condition data is modified and set. The data set on this touch panel display 6 is
The data is read by the computer 1 connected to the sequencer 2, and the registered data can be corrected and new registration can be performed on the computer 1 based on the read data. When it is necessary to change the automatic operation procedure of the film forming apparatus 3, such as when the various film forming apparatuses of the film forming apparatus 3 are changed, the setting is made except during the automatic operation of the film forming apparatus 3. At that time, the operation is performed on the screen of the touch panel display 6.

On the other hand, during the manual operation of the film forming apparatus 3,
On the touch panel display 6, the operating conditions of the various film forming equipments are displayed, and on this screen, the setting of the apparatus conditions according to the change of the various film forming equipments used,
The operating conditions of various film-forming equipment, which change according to the usage conditions, are set.

On the touch panel display 6, the operation status of various film forming equipment is displayed based on the data sent from the measuring device during the film forming operation of the film forming apparatus 3. There is.

The sequencer 2 is equipped with an alarm device (not shown) for issuing an alarm when an abnormality occurs in the film forming apparatus 3.
Data relating to the abnormality is displayed on the touch panel display 6. Further, a printer 7 is connected to the sequencer 2, and the printer 7 prints out data when the film forming apparatus 3 has an abnormality and substrate production information.

Next, the function and effect of the first embodiment will be described. When the film forming apparatus 3 to be used is changed, the apparatus condition to be changed is set by the operation on the touch panel display 6. When it is necessary to change the film forming condition and the automatic operating procedure of the film forming apparatus after the data of the film forming condition is given to the sequencer 2 by the computer 1, the operation of setting the film forming condition and the automatic operating procedure is performed. Is performed on the touch panel display 6. During the film forming operation, the operation status of the film forming apparatus 3 and the set data are displayed on the touch panel display 6. in this way,
Since the computer 1 is not restricted during the setting of the apparatus conditions, the setting of the film forming conditions, the setting of the automatic operation procedure, and the film forming work, it is possible to start the preparation of another film forming work such as the design of the optical film and the technical calculation. Therefore, the efficiency of the whole work can be improved.

Since the control conditions such as the apparatus conditions, the film forming conditions and the automatic operation procedure, which are relatively easy to change, are set on the screen temporarily displayed on the touch panel display 6, individual operation switches and Wiring can be reduced, and the manufacturing cost of the device can be reduced.
Further, since the hardware of the sequencer 2 is not changed in accordance with the change of the control content, the hardware of the sequencer 2 is kept constant and the manufacturing of the device is stabilized. Can be saved.

Furthermore, the temporarily performed operations of changing the film forming conditions, changing the automatic operation procedure of the film forming apparatus 3 and setting the apparatus conditions are performed on the screen temporarily displayed on the touch panel display 6. While being performed, the film forming apparatus 3
Emergency and frequent operations such as starting and stopping
Since it is performed by the process switches 5, 5, ... Permanently installed in the sequencer 2, it is possible to prevent an erroneous operation from occurring between an urgent and frequent operation and a temporary operation, and at the same time, perform an urgent and frequent operation. But you can do it quickly.

FIG. 2 shows a controller B of the film forming apparatus according to the second embodiment of the present invention, in which the computer 1 is not connected to the sequencer 2 and the film forming apparatus 3, It is independent of both 2 and 3. The sequencer 2 is provided with a disk device 8 as a reading means, and the data of film forming conditions is managed by the computer 1 and recorded from the computer 1 to a floppy disk 9 which is its storage medium. ing. The data of the film forming conditions is given to the sequencer 2 by being downloaded from the floppy disk 9 to the disk device 8.

As described above, in the second embodiment, the data of the film forming conditions is read into the disk device 8 through the floppy disk 9 to give the data to the sequencer 2 and the computer 1 to the sequencer 2. Since no connection is required, the computer 1 can be completely separated from the film forming apparatus 3 to reduce the apparatus installation area in the film forming work chamber, and the computer 1 can be freely used for purposes other than film forming work. Further, since the data can be added by only one computer, the cost can be reduced.

FIG. 3 shows a controller C of a film forming apparatus according to the third embodiment of the present invention. In this controller C, a plurality of sequencers 2, 2, 2 are connected to one computer 1. Each sequencer 2 includes a power board 4 and a film forming apparatus 3.
And are connected. Data of film forming conditions is given from a single computer 1 to a plurality of sequencers 2, 2 and 2, and each sequencer 2 manages the operation of the film forming apparatus 3 connected thereto based on the respective data. It is supposed to do. In this way, since one computer 1 can use a plurality of film forming apparatuses 3, 3, 3 for film forming operation at one time, the efficiency of film forming operation can be significantly improved.

Since the second and third embodiments are the same as the first embodiment except for the above structure, the same reference numerals are given and detailed description thereof is omitted. It is needless to say that the second and third embodiments have the same basic structure as the first embodiment, and therefore the same effect can be obtained.

In the first and third embodiments, the sequencer 2 is used when the data on the film forming conditions is sent to the sequencer 2.
Although the data is directly downloaded from the computer 1 connected to the computer 1, the data may be temporarily recorded from the computer 1 to the storage medium and the storage medium on which the data is recorded may be sent to the sequencer 2 via the reading means. In this case, various storage media such as floppy disks and IC cards can be used.

Further, in the second embodiment, the floppy disk is used as the storage medium for recording the film formation condition data, but other storage media such as an IC card may be used.

Furthermore, in the above-mentioned first to third embodiments,
Although the process switches 5, 5, ... Are provided in the vicinity of the touch panel display 6 of the sequencer 2, if the screen of the touch panel display 6 can be configured to be less complicated, the process switch is eliminated and the function thereof is changed to the touch panel display. It may be configured so that it is provided on the screen of No. 6.

Further, in the first to third embodiments, the sequencer 2 is connected to the film forming apparatus 3 which is a vacuum evaporation apparatus, but the film forming apparatus operated and controlled by the sequencer 2 is limited to the vacuum evaporation apparatus. However, it can be connected to various devices such as an ion plating device and a sputtering device.

[0032]

As described above, according to the controller of the film forming apparatus of the first aspect, the computer is not involved in setting the control contents of the film forming apparatus and during the film forming operation.
During this period, the computer can be used to start the preparation work for another film formation operation, and the efficiency of the entire operation can be improved. Further, since the control contents that are relatively easily changed are set on the touch panel display, it is possible to reduce the manufacturing cost of the device by reducing the number of individual operation switches and wiring. Further, since the hardware of the control device is not changed with the change of the control content, the manufacturing cost and the manufacturing time of the device can be improved by stabilizing the hardware of the control device to stabilize the manufacturing of the device. Can be saved.

According to the control device of the film forming apparatus of the second aspect, the temporarily performed operation is performed on the screen temporarily displayed on the touch panel display, while the urgent and frequently performed operation is performed. Since it is performed by the permanent process switch, it is possible to prevent an erroneous operation from occurring between an urgent and frequent operation and a temporary operation, and to perform an urgent and frequent operation quickly at any time.

According to the control device of the film forming apparatus of the third aspect, since the computer does not have to be connected to the film forming control means, the computer is completely disconnected from the film forming apparatus and the device installation area in the film forming work chamber is reduced. Can be made smaller and the computer can be freely used for general purpose. Further, since the data can be added by only one computer, the cost can be reduced.

According to the film-forming apparatus control device of the fourth aspect, data of film-forming conditions are given from a single computer to a plurality of film-forming control means, thereby forming a plurality of film-forming devices at one time. The apparatus can be used for the film forming operation, and the efficiency of the film forming operation can be improved.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a control device of a film forming apparatus according to a first embodiment of the present invention.

FIG. 2 is a block diagram of a controller of a film forming apparatus according to a second embodiment of the present invention.

FIG. 3 is a block diagram of a controller of a film forming apparatus according to a third embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Computer 2 Sequencer (deposition control means) 3 Deposition apparatus 5 Process switch 6 Touch panel display 8 Disk device (reading means) 9 Floppy disk (storage medium) A, B, C Deposition apparatus control device

Claims (4)

[Claims] 1. A controller of a film forming apparatus for performing steps from setting and managing data of film forming conditions for determining specifications of a film forming operation to operation management of a film forming apparatus for performing the film forming operation. A computer that sets and manages film condition data and a film formation control unit that manages the operation of the film formation apparatus based on the data of the film formation condition given from this computer are separately configured, The film forming control means displays the operation status of the film forming apparatus, and displays a screen for setting the apparatus conditions according to changes in the film forming apparatus used, the automatic operation procedure of the film forming apparatus, and changing the film forming conditions. A controller for a film forming apparatus, comprising: a touch panel display operated above. 2. The control of the film forming apparatus according to claim 1, wherein a process switch used for an emergency and frequent operation of the film forming apparatus is provided at a predetermined position of the film forming control means. apparatus. 3. The film formation control means is provided with a reading means, and the reading means is provided so that the data can be read from a storage medium in which the data of the film forming conditions of the computer is recorded. The control device of the film forming apparatus according to claim 1. 4. The control device of the film forming apparatus according to claim 1, 2 or 3, wherein the computer is connected to a plurality of film forming control means.