JPH06266413A - Method and system for production management - Google Patents

Abstract

PURPOSE:To shorten a processing time at the time of mapping out a processing plan of a manufacture line, in which lots whose priority or importance is different from each other are mixed, to reduce the number of use memories, and to execute advance control of the line, a completion date prediction of the low whose priority and importance are high, and advance control of the lost whose priority is low. CONSTITUTION:The system is constituted of an off-line scheduler 2 for mapping out a processing plan extending over a long period to the time of delivery with respect to a low whose priority or importance is high in the manufacturing lots by a scheduler, and an on-line scheduler 1 for mapping out a processing plan of a short period with respect to all the lots.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system for managing the production of semiconductor parts such as LSI, clothing, and various industrial products such as automobiles. Manufacturing management here means scheduling that determines the manufacturing order of products of multiple types according to their processing steps and urgency,
This includes monitoring the progress of manufacturing and acquiring process data during manufacturing.

[0002]

2. Description of the Related Art A conventional production management system will be described below by taking an LSI manufacturing process as an example. FIG. 9 is a diagram for explaining the outline of the manufacturing procedure of the LSI. Depositing an insulating film such as an oxide film / nitride film on a single crystal wafer, diffusion by heat treatment, pattern formation by photolithography, film deposition by vapor deposition or sputtering, etching, introduction of impurities by ion implantation, scribing (splitting) ), Mounting, bonding and other techniques are used at least once, and many are used dozens of times, while the function is built on the semiconductor substrate,
The LSI is manufactured. In addition, each technique is further subdivided into several processes. For example, in the photolithography technique, as shown in the left side of FIG. 9, (a) application of a resist as a photosensitizer, (b) mask alignment / exposure, (c) pattern formation by development, and (d) processing by etching. , Etc., and such a processing unit is usually called a “process”. An LSI is manufactured by repeating these steps several hundred times. A list of procedures of this manufacturing process is a “process chart” as shown in FIG.
The processing contents including at least the used device and the processing condition (recipe) are described.

This process chart is designated for each lot (processing unit: usually cassette unit, single-sheet processing unit),
The LSI can be manufactured by sequentially performing the processing according to the process chart. What is characteristic here is that the same apparatus is used many times under different process conditions in this step. When different types of products are manufactured, the same process is performed under different processing conditions. The processing conditions (recipe) here are not only the manufacturing conditions such as the temperature for heat treatment, the gas flow rate, and the mask used during exposure, but also
It also includes inspection conditions such as the position of dimension measurement. In this way, since a permutation combination of many elements is controlled, the line is complicated.

In recent years, not only LSIs but also diversification of products and immediate response to customer needs have been demanded. Along with this, in LSI production management as well, demand for delivery date management / TAT control is increasing due to improvement in production efficiency due to automation of transportation. With the diversification of products, many kinds of products have been produced on one production line. Further, these products are not only different in the amount of production, but also different in importance and processing priority for each kind. Here, the degree of importance depends on the added value such as the design cost of the mask or the like, the manufacturing cost of requiring a special process, etc., and is usually determined when the lot is put in. On the other hand, the priority indicates which is to be processed first when the same manufacturing apparatus waits for processing, and the delivery time can be afforded. For this reason, a lot with low priority was initially expected because there was a sufficient margin until the delivery date, so it was necessary to raise the priority because it was late on schedule in the middle, or conversely, there was room in the middle and priority was given. It may also be lowered.

Further, acquiring and monitoring the process execution data is useful not only for preventing product defects, but also for analyzing the cause at the time of failure. Therefore, it is essential to acquire the processing data including the inspection data. Here, it is desirable that this processed data be automatically collected from the device,
It does not necessarily have to be automatic. When collecting this equipment data / inspection data, the same equipment is used many times in the process, so the data indicates which process of which lot (the number of process in the process chart). Key (word) information is added and stored in the database. As this key information, it is convenient to use a processing schedule created by scheduling. That is, it is a method of recognizing the lot by a bar code reader at the time of lot processing, receiving the processing schedule through network communication, and storing it in a database together with the processing data. Alternatively, there is a method in which a magnetic card or the like is transported together with the lot, the card is read, the key information is read, and the processed data is stored in the database. All of these have the feature that they can also serve as lot progress management. Such a line management procedure is shown in FIG. The schedule result is distributed to the computers arranged in the line in the form of a schedule, and the worker executes the process based on the work instruction according to the schedule. Execution records such as processing data are sent directly from the manufacturing / inspection equipment to collect online data, or the operator notifies the progress of offline from the terminal to feed back to the scheduler to manage the progress, and to make progress at the next schedule. Reflect the situation.

In a mass production line where a large number of products of the same type are produced, old ones are sequentially processed (first-in first-out) from the accumulated lots that are accumulated in each device waiting to be processed. In addition, a signboard method that visually displays the arrival lot excess or deficiency is often used as a production method. Sequentially, information on which process of which lot belongs to which lot is added on the spot by key input or reading with a barcode, and the data is stored in the database. However, in this case, since it is not possible to grasp the processing schedule of each process of each lot, it is difficult to control delivery date management and TAT (the number of days until the lot is completed).

On the other hand, in the ASIC LSI production line,
There are lots of varieties with different processing priorities and importance. Among ASICs, LSIs using full-custom or standard cells are highly important because they require a dedicated mask pattern from the substrate process. However, in the gate array LSI, since the substrate is common, the importance thereof is low at the stage of forming the gate array substrate, but becomes higher when the wiring process using the dedicated mask pattern is started. On the other hand, the priority indicates which is processed first when the same device waits for processing, and is determined by a margin until the delivery date. For this reason, it is necessary to raise the priority of a lot that was low in priority because it had a sufficient margin until the delivery date at the beginning and was delayed from the schedule in the middle. On the contrary, there is a case where there is a margin on the way and the priority is lowered. Thus, the priority changes as the lot processing progresses.

The time (TAT) from the loading of such a product to its completion depends on the number of lots loaded in the line. When products with different priorities are mixed, the products with low priorities are delayed in processing due to the products with high priorities. Therefore, as is done conventionally,
For each lot, the exact completion date cannot be predicted only by predicting the progress from the number of lots set in the device and the processing time and determining whether the delivery date can be met. Therefore, in order to control the completion date of a lot of priority or importance (hereinafter referred to as a progress control lot) so that the delivery date is not delayed, and to create the key information for data acquisition, It is necessary to monitor the progress of the lot and execute regular scheduling about once a day and aperiodic scheduling due to equipment troubles, lot progress delays, etc. to sequentially update the processing schedule. That is,
Monitor the progress of lots, and based on the processing results,
Change the priority of which lot to process first, and execute the scheduling after the processing has already been performed, considering the operating status (information such as failure) of the device, maintenance status, or operating status of the operator. I have to do it. In order to perform production management by such scheduling, all lots in the line are disassembled into processes, the availability of the equipment used (in some cases, the operator) is determined, and the priority of each lot is determined. You have to create a processing schedule. Especially in LSI manufacturing, many processes require continuity with the previous process (must be processed within a certain period of time), and in order to accurately predict the delivery date, the actual operating time While checking, it is necessary to schedule the process start schedule for each process of each lot in detail.

[0009]

However, in preparing such a processing schedule, there are a plurality of apparatuses of the same kind, so what is the combination of apparatuses that can be processed, operators, and combinations considering the continuity with the next process? There is also a street. Therefore, the memory capacity and calculation time required to create a schedule by allocating each process of all lots while checking the operating status (vacant time zone) of the equipment and the operator, the number of lots and the number of equipment (consider the operator In this case, the number of operators increases as the number of operators increases, and especially when the number of lots is large, a large memory capacity and calculation time are required.

An object of the present invention is to provide a lot of lots of high priority or importance whose progress must be controlled in a mass-produced product in which neither priority nor importance is mixed. It is intended to shorten the processing time and the memory used, and thereby to manage the progress of the line and accurately predict the completion date of a lot having high priority or importance. It is also possible to manage the progress of low-priority lots. In particular, it is to be able to adapt to a manufacturing line in which the number of manufacturing lots and the number of types of the entire line are large.

[0011]

According to a first aspect of the present invention, a process schedule showing manufacturing conditions, a manufacturing order, etc. and an operation schedule of each manufacturing apparatus are used to determine a processing schedule for each manufacturing lot or each manufacturing apparatus. A production management method in which a first step of creating a short-term processing schedule and a second step of creating a long-term processing schedule are created, and processing progresses and data is stored based on the processing schedule. Then, the first step includes a step of selecting only lots of high priority or importance from the production lots, a process chart of the selected lots, and a delivery date of the selected lots, From the step of passing the current priority of the selected lot to the second step, and the priority of the unselected lot from the priority of the selected lot determined in the second step. Decision And a step of creating a short-term processing schedule of the manufacturing lot, and the second step assigns the processing step of the selected lot to the device and performs a long-term processing until the completion date. Creating a schedule and predicting the completion date, and increasing the priority if the completion date is later than the delivery date, lowering the priority of the lot with a margin, and determining the processing priority of the lot. , Passing the determined priority to the first step.

In addition to the first aspect of the invention, the second aspect of the invention is that, in the second step, lots extracted at regular intervals from among the lots of low importance are processed as important lots. It is characterized in that it is composed of a step of fixing. A third aspect of the present invention is a production management system, in which a process schedule of processes to be processed for each manufacturing lot or each of the manufacturing devices is shown based on a process chart showing manufacturing conditions, a manufacturing order, etc. In a production management system that has a scheduler that calculates time, and that progresses processing and stores data based on a processing schedule created by the scheduler, the scheduler includes a first scheduler and a second scheduler.
The first scheduler selects at least a communication control unit that communicates with the second scheduler, and selects only lots of high priority or importance from manufacturing lots, Set the priority of all lots based on the process schedule, the delivery date, the lot selection unit for transmitting the current priority to the communication control unit, and the priority of the second scheduler. A schedule creating unit that creates a lot schedule, the second scheduler is a communication control unit that communicates with the first scheduler, and a schedule that creates a processing schedule based on data from the first scheduler. It consists of a creation unit and a priority change unit that checks the delivery delay from the processing schedule created by the schedule creation unit and changes the priority. It is characterized in.

[0013]

In the production management system and method of the present invention, the entire line schedule is not scheduled for all lots, and the offline scheduler only schedules lots of high importance. The memory used can be reduced. Therefore, it becomes possible to schedule for a long time until the delivery date. In addition, the finished processing schedule reflects the long-term plan for lots whose progress must be controlled. On the other hand, the online scheduler creates a short-term work schedule in response to the priority change result in the offline scheduler. In this case, since the period is short, it is possible to reduce the calculation time and the memory used. Therefore, an accurate processing schedule can be created in consideration of the operation of the operator.

[0014]

Embodiments of the present invention will now be described in detail with reference to the drawings. First, the production management system configuration of the present invention is shown in FIG. This system uses two schedulers. One is an online scheduler 1 that is directly connected to the progress management / data collection system 3 in the manufacturing line, and the other is an offline scheduler 2 that has a role of predicting the completion date.

The online scheduler 1 not only manages work instructions (sending schedule information) and progress, but also makes short-term work instructions to each terminal in the manufacturing line based on the priority change result from the offline scheduler. Create a processing schedule between. In this way, the online scheduler 1 creates a processing schedule to be used as key information at the time of data storage, so that in principle all lots are subject to scheduling. However, if it is not necessary to store data, it is also possible to use a pseudo process chart that excludes the lot from the schedule or excludes the process from the schedule. The processing schedule of the online scheduler 1 is stored in the database 6 as key information at the time of data collection together with processing data (including manual input) from the device.

The offline scheduler 2 receives the registration information and the progress result from the online scheduler 1, creates a long-term processing schedule thereafter, and predicts the completion date of the progress control lot (priority lot / important lot). Based on the result, the priority of each lot is changed and passed to the online scheduler 1. The long-term processing schedule and the lot processing result are displayed in the form of a lot progress chart 5 (Gantt chart) or the like.

FIG. 2 is a diagram showing the configurations of the online scheduler 1 and the offline scheduler 2. The online scheduler 1 has a database 10 of registration information of each lot in the line (lot name, usage schedule,
It has a database 11 of delivery date, initial value of priority or current priority, device information, etc., processing schedule of each lot, and processing result. Of these, the one to be processed will be changed as appropriate. In addition to this, a lot selection unit 12 that selects a lot of priority or a lot of importance from the registration information of each lot, a communication control unit 14 that transfers information of the selected lot to an offline scheduler, and a schedule creation unit 13 Consists of. The communication control unit 14 also receives the priority and the processing schedule of some lots from the offline scheduler 2. The above is the basic configuration of the online scheduler 1 of the present invention, but in addition to this, it is also possible to provide the processing schedule extraction unit 15 in order to shorten the creation of the processing schedule. On the other hand, the offline scheduler 2 has a schedule creation unit 18 and a priority change unit 19 in addition to the communication control unit 17.

Next, FIG. 3 shows a method of preparing a processing schedule in the production management method of the present invention. Steps S1 to S6
Is processing by the online scheduler 1, S7 to S12
Is the processing in the offline scheduler 2. First, the lot selection unit 12 in the online scheduler 1 refers to the registration information to check whether each lot is a priority lot or an important lot, and the process chart of the lot, the current priority (or initial value), The processed final step is passed to the communication control unit 14 (S1).

The communication controller 14 transfers the data from the lot selector 12 to the communication controller 17 of the off-line scheduler 2 (S2). Here, among the lots to be selected,
In addition to the lots currently on the line, lots with high priority and importance among lots to be put in future are included. The communication control unit 17 of the offline scheduler 2 which has received this data stores this data in the schedule creation unit 18
(S7).

The schedule creating unit 18 creates a processing schedule for these selected lots (S8). The schedule period includes at least a period until a newly introduced lot (latest input lot) is completed, and usually extends over a period of several months. Information on the estimated completion date, delivery date, priority of each lot calculated here is
It is sent to the priority changing unit 19.

The priority changing unit 19 checks whether each lot is completed by the delivery date.
The priority is changed, the schedule is executed again, and the completion date is checked (S9). If there is no lot to be delayed, the priority of each lot at that time (priority of which process is prioritized when overlapping with the same device) and the process schedule are sent to the communication control unit 17 (S10).

On the other hand, if the delay in delivery cannot be prevented even if the priority is changed and the reschedule is performed several times, the calculation is stopped and an alarm is generated (S12). Communication control unit 17
Then, the received data is transferred to the communication control unit 14 of the online scheduler 1 (S11). Here, it is possible to send only the priority and schedule all lots again on the side of the online scheduler.

To change the priority, the one with a large difference (margin) between the expected completion date and the delivery date is lowered and the one with a small margin is raised. Here, this expected completion date can be simply summed up the processing time in each device like the conventional method, or by analogy,
This is accurate because it is not calculated by including the statistical waiting time value in each device, but is assigned to each process of each lot while checking the idle time of the device. Therefore, it is possible to accurately predict the delivery date and manage the progress based on the processing schedule. In the process schedule creation of the offline scheduler 2, lots are selected and reduced. Therefore, if a schedule is created for the entire line scale, the number of devices will be large for the number of lots, and lots will advance faster than they actually are. The completion date will be calculated faster than it actually is. In order to prevent this, when the devices in the line are multiplexed, the number of devices is reduced in proportion to the lot selection ratio. Further, when the number of devices cannot be reduced, the available time is restricted to reduce the number of devices practically. Strictly speaking, when calculating lots with high priority, after calculating with a regular line configuration, when calculating lots with low priority but important (marker lots described later), the line scale is reduced. Although it is correct to do it, if the number of priority lots is small, the completion prediction does not deviate so much even if a schedule is created with a pseudo line reduced from the beginning. Further, the reduction of this line may be executed only for a few types of devices having a high operating rate that are likely to become a bottleneck. This off-line schedule is independent of the online scheduler 1 that issues work instructions to the operator, so that rescheduling does not hinder the actual work of the operator.

When the priority setting by the offline scheduler 2 is completed, the communication control unit 14 of the online scheduler 1 receives the result, and passes the priority data to the schedule creating unit 13 of the online scheduler 1 (S3). The schedule creation unit 13 of the online scheduler 1 refers to this priority and resets the priority of all lots (S4). This reassignment is left unchanged for lots with high priority. Lots that are not covered by the off-line schedule are assigned priorities by referring to priorities assigned by the off-line scheduler 2 for lots of the same type. (The preceding lots are ordered so that they are processed first.) Based on this priority, a short-term (usually several days) processing schedule for work instructions for all lots is created (S6).

In steps S3, S4, and S6, it is possible to re-schedule all lots. However, since the processing schedules for lots with high priority are hardly changed, the following method is used for those with high priority. It is possible to shorten the time required to create a processing schedule by using this. That is, the online scheduler is provided with the processing schedule extraction unit 15, and the result (processing schedule) of the offline schedule is stored here. A method of creating a processing schedule in this case is shown in FIG. Figure 3
S1, S2, and S7 to S12 are omitted. When creating a schedule in the online scheduler 1,
The processing schedule of the relevant lot in the specified period is extracted and set as the processing schedule. For other lots, the processing schedule is filled in this free time zone.

The online schedule and the offline schedule do not necessarily have to be executed at the same time. For example, the offline scheduler 2 stores the priority setting, and if it is within a week, the online scheduler 1 creates a schedule using the value, and the offline scheduler 2 waits for 1 week. It is also possible to activate it once.

In this method, the online scheduler side has a short period, and the offline scheduler side has a small number of target lots. Therefore, the number of target processes to be calculated at one time is small. It is possible to accurately make a production plan that considers the delivery date without receiving it. Therefore, it can be effectively applied to a line having a large number of lots. The off-line scheduler can also be used for simulations for making lot lot planning.

In the method of FIG. 3, the offline schedule targets are the priority lot and the important lot. In such a method, it is difficult to manage the production plan and the progress of the lot because a processing schedule cannot be set for a lot of general-purpose products having low priority and importance. In order to prevent this, there is a method of using a marker lot as a method of making a processing schedule and reducing the time and memory required for the scheduling. The method will be described below.

There are lots of different priorities on the line. Among these, for the lots with high priority, the entire process schedule is executed, the completion date is predicted, and the progress is controlled in order to manage the delivery date. However, by scheduling only high priority lots, the progress of low priority lots is completely unknown. Mass-produced products such as low-priority gate array substrates (those that use the same process sheet even if different masks are used can be regarded as mass-produced products) are lots extracted at regular intervals from the mass-produced products ( Marker lot: Every 10 lots, for example, is used as an index for performing progress management (delivery date management), and the offline scheduler schedules all processes together with priority lots to predict progress,
Change the priority and add the next lot.

That is, as shown in FIG. 5, when lots C _i, C _{i + 1,} ... _, C _{i + N,} ... A lot is created and a processing schedule is created for this lot with the offline scheduler. This process schedule was created according to the actual process on the line by designating the lot start time or the process start process of the day (the end process may be notified at a certain time). It is possible to make a processing schedule and manage the progress of lots on the line. On the other hand, the other lots are processed in the order of the input lots. That is, when a plurality of lots are in a waiting state in the same process, if it is decided that the lot that has been put in first is processed first, the other lots between the two marker lots will also be rough lots. Can manage the progress of. In addition, data collection can be performed in the same manner as a lot that has been subjected to a normal schedule.

The effect of using this marker lot is shown in FIG. This figure normalizes all lots and the number of lots that can be calculated by the method of scheduling all processes (the number of lots for which delivery can be simulated) is standardized as 1. It is the figure which showed the rate of as a parameter. For example, if the priority lot ratio is 0.01 (1%), the marker lot is 5
%, That is, 1 lot per 20 lots, the number of lots that is 15 times the conventional number can be calculated. If there is no priority lot, the calculation amount decreases in proportion to the ratio of the marker lot. Considering a mass production line in which 100 lots are put in each day (30,000 lots per year), if one lot of the general-purpose lots 100 put in that day is set as a marker lot, the progress can be managed within one day. The calculation amount in this case is 1/100 of that in the normal case, and a scheduler capable of handling 300 lots is sufficient. If the progress management accuracy is about 2 days, a scheduler that can handle 150 lots, which is half that amount, can be used. As described above, the marker lot method is an extremely efficient method in a mass production line.

In the online scheduler shown in FIG. 1, progress control lots (including marker lots) are scheduled for all processes by reflecting the priority of the offline schedule. For this reason, both are basically scheduled to be processed in the same way. On the contrary,
Since the schedule of a general-purpose lot that is not a progress control lot (also not a marker lot) has a short period, it is possible to schedule the entire process as it is. However, if the marker lot method is used, it is not always necessary to make a processing schedule for all lots that are not progress control lots. That is, in addition to progress prediction and delivery date management, the intended use of processing is to use key information when storing data. In the latter case, data cannot be stored without schedule information (process table information). . For this reason, in the system that uses the schedule information at the time of storing data, it is necessary to schedule all lots, but this scheduling is not for progress prediction, so it is not necessary to be accurate in terms of time. It suffices to create only the processing schedule of only the device whose processing time is to be known accurately and the device whose data is to be acquired. In this case, the process schedule may be set up using the pseudo process chart. The pseudo process chart will be described below.

The pseudo process chart is a process chart in which only the minimum steps required for data collection and progress management (steps displayed on the lot progress chart) are the targets of the schedule, and the actual processing is It is performed based on the work instructions according to the standard process chart. FIG. 7 is a diagram illustrating the concept of the pseudo process chart. For example, in the process table, there are a mixture of processes such as inspections (K2 and K5) that always acquire data, processes that display on a lot progress chart to monitor the progress (K4), and other processes. For a progress control lot consisting of a lot with a high priority and a marker lot, all of these processes are subject to scheduling, so the original process chart is used as it is. For a lot that only acquires data but does not manage progress, use a pseudo data collection process chart that includes only data acquisition processes. For example, it is a process chart only for dimension measurement, film thickness measurement, and the like. By using this pseudo process chart, it is possible to reduce the memory and time at the time of scheduling. Further, from the operator's point of view, since data can be collected in the same procedure as when there is a processing schedule based on the regular process chart, the risk of operation mistakes is reduced. (In the case of a command to each device,
During the marker lot, the processing schedules of these pseudo processes are set and commands are issued. At the time of online scheduling, short-term standard scheduling and pseudo-scheduling are performed at the same time. First, a process of a lot with a high priority is reserved, and pseudo-scheduling is performed during the idle time. Therefore, the pseudo scheduling does not change the contents of the standard scheduling. In the case of the pseudo scheduling (non-progress control lot), the wafer processing is separately instructed in the standard process chart, and is performed by the production management method such as the piled-up method or the signboard method between the progress control lots.

In the system shown in FIG. 1, a method of creating a scheduling that incorporates a pseudo process chart will be described in more detail. Although a progress control lot for the purpose of TAT management (progress management such as prediction of completion date) requires long-term scheduling, pseudo scheduling for data storage may be scheduled for several days. Therefore, the long-term scheduling of only the progress control lot and the data storage process schedule creation (short period) of all lots (including the non-progress control lot based on the pseudo process chart) cannot be scheduled at once. The latter schedule should be implemented by an online scheduler directly connected to the data collection system.
However, in the former system, an offline scheduler is used in this system, and the schedule of the progress control lot and the schedule of the non-progress control lot are separated into two schedulers. FIG. 8 shows the concept.

In the figure, the shaded area is the progress control lot, and the high-priority lot and the marker lot are subjected to long-term scheduling by the offline scheduler according to the standard process chart. From this result, the priority of the lot that is likely to be delayed is raised, and the priority of the lot that has time to delivery is lowered. An online scheduler that reflects this priority change performs short-term all-lot scheduling in the shaded area.
At this time, the standard scheduling and the pseudo-scheduling for storing the data of the non-progress control lot are simultaneously performed.
The process of the lot with a high priority is reserved, and the pseudo scheduling is performed during the idle time. Therefore, the result of the online scheduling of the priority lot is the same as the content of the offline scheduling. Normally, this schedule period extends over a period of 2-3 months because the offline scheduler calculates the delivery date. On the other hand, the online scheduler creates a processing schedule for several days.
Further, these schedule results are appropriately changed depending on the progress. The rescheduling timing is, for example, regular on a daily basis for the online scheduler, once a week for the offline scheduler, or delayed from the initial processing schedule by the time (eg, 1 day) in which the lot progresses. Some even re-schedule.

[0036]

According to the production management system of the present invention, all lots are divided into an online scheduler and an offline scheduler without scheduling all processes. In the offline scheduler, only progress management lots (lots of high priority or importance) are targeted for scheduling, so it is possible to significantly reduce the memory used when creating a schedule.

The processing schedule created by the offline scheduler reflects the long-term plan for lots whose progress must be controlled. Therefore, based on this processing schedule, the processing schedule of the entire line is created by the online scheduler for each short period. By executing the processing according to this processing schedule,
Accurate delivery control is possible.

Further, even in a mass production lot that is not a progress control lot, the approximate progress can be managed by using the marker lot. Therefore, it is effective to perform the delivery date prediction by scheduling the line in which a large number of lots flow. Is possible.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a production management system of the present invention.

FIG. 2 is a diagram showing configurations of an online scheduler and an offline scheduler of the production management system of the present invention.

FIG. 3 is a diagram showing a method of creating a processing schedule in an online scheduler and an offline scheduler.

FIG. 4 is a diagram showing a method of creating a processing schedule in an online scheduler when a processing schedule extraction unit is added.

FIG. 5 is a diagram showing a concept in the case of performing progress management by a marker lot.

FIG. 6 is a diagram showing how the number of lots that can be calculated increases when a marker lot is used.

FIG. 7 is a diagram showing an example of a method of creating a pseudo process chart.

FIG. 8 is a diagram showing a concept of processing schedule creation in the production system of the present invention.

FIG. 9 is a diagram illustrating an outline of a manufacturing procedure of an LSI.

FIG. 10 is a diagram showing an example of a process table.

FIG. 11 is a diagram showing a conventional production management method.

[Explanation of symbols]

1 ... Online scheduler 2 ... Offline scheduler 3 ... Progress management / data collection system 4 ...
Manufacturing / inspection equipment 5 ... Lot progress chart 6 ... Database 10 ... Registration information database 11 ... Processing result database 12 ... Lot selection unit 13, 18 ... Schedule creation unit 14, 17 ... ..Communication control unit 15 ... Processing schedule extracting unit 16 ... Processing schedule (short-term) 19 ... Priority changing unit

Claims (3)

[Claims] 1. A first process for preparing a processing schedule for each manufacturing lot or each of the manufacturing devices and a short-term processing plan from a process chart showing manufacturing conditions, manufacturing order, etc. and an operation schedule of each manufacturing apparatus. And a second step of creating a long-term processing schedule, and based on the processing schedule, the production management method of performing processing progress and storing data, wherein the first step comprises: Selecting only lots of high priority or importance from the production lots, the process chart of the selected lots, the delivery date of the selected lots, and the current priority of the selected lots To the second step, determining the priority of the unselected lot from the priority of the selected lot determined in the second step, and And a step of creating a short-term processing schedule of a lot, and the second step assigns the processing process of the selected lot to the device and creates a long-term processing schedule until the completion date. Predicting the date, increasing the priority if the completion date is later than the delivery date, lowering the priority of the lot with a margin, determining the processing priority of the lot, and determining the determined priority. A production control method comprising: a step of passing to the first step. 2. The second step comprises a step of re-creating a processing schedule as an important lot of lots extracted at regular intervals from the low-importance lots. Production management method according to item 1 3. A scheduler is provided, which calculates a scheduled processing time of a process to be processed for each manufacturing lot or for each manufacturing apparatus from a process table showing manufacturing conditions, manufacturing order, etc. and an operation schedule of each manufacturing apparatus. In a production management system that performs processing progress and data storage based on a processing schedule created by a scheduler, the scheduler includes a first scheduler and a second scheduler, and the first scheduler is at least the A communication control unit that communicates with the second scheduler, and selects only lots of high priority or importance from the production lots, and the communication control of the process table, delivery date, and current priority of the relevant lot is performed. A lot selection unit for transmitting to each department, and setting the priority of all lots based on the priority of the second scheduler, A schedule creation unit that creates a schedule, wherein the second scheduler is a communication control unit that communicates with the first scheduler, and a schedule creation unit that creates a processing schedule based on data from the first scheduler. And a priority change unit that checks the delivery delay from the processing schedule created by the schedule creation unit and changes the priority, and the production management system.