JPH06265309A - Measuring device of discontinuous structure body - Google Patents

Abstract

PURPOSE:To accurately obtain the space information such as the displacement, dimensions, and spacing of a discontinuous structure body even if the spacing and dimensions of the discontinuous structure body to be measured are small. CONSTITUTION:Terminals 1a-1f are discriminated and the positions are recognized by a quantity-of-light signal Ic which is detected by a quantity-of-light detection part 2c and is binary-coded and then are processed by a signal processing part 4, thus calculating a terminal position Pi, a terminal width Wi, and a distance Di between terminals. Then, by obtaining the signal value of a displacement signal Hc corresponding to a calculated terminal position Pi of the terminals 1a-1f, an amount of displacement Hi of the terminals 1a-1f is obtained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is intended for a structure having a discontinuous measurement surface, and is a space related to a discontinuous surface for each element width, element position, element displacement, element coordinate position, etc. from scanning measurement of a laser displacement meter. The present invention relates to a measuring device for a discontinuous structure that seeks information.

[0002]

2. Description of the Related Art If the terminals of an LSI package are not uniform in height or the pads on a printed circuit board to be mounted are not uniform in height, soldering failure will occur, resulting in low reliability. I will end up. In order to inspect these, measurement technology using laser light is used. This measurement technology that measures the surface displacement and surface shape of a discontinuous structure to be measured includes laser displacement measurement technology that uses reflected light when laser light is irradiated to a non-measurement object, and transmitted light. There is something to use. For example, a laser displacement meter using reflection of irradiated laser light is used for inspection of terminal floating of terminals of an LSI package, inspection of uneven height of pads of a printed circuit board on which this LSI package is mounted, and the like. ing.

FIG. 12 is a configuration diagram showing the basic configuration of this conventional laser displacement meter. In the figure, 121 is a laser generating means that oscillates a laser, 122 is a measurement surface to be measured, 123 is a lens that collects the laser light reflected by the measurement surface 122, and 124 is the reflected light that is collected by the lens 122. The detector 125 is a position calculation means for processing the signal output from the detector 124 and calculating the displacement of the measurement surface 122.

The laser light, which is the spot light emitted from the laser generating means 121, is applied to the measurement surface 122 in a state of being focused so that the spot diameter becomes the minimum. The light reflected by the measurement surface 122 is scattered around the specular reflection direction, so a part of it is received by the lens 123 and the measurement surface 122
The image of the bright light spot of the upper reflection point is projected on the light receiving surface of the detector 124. The detector 124 outputs to the position calculation means 125 as an electric signal the position on the light receiving surface where the incident light is received. Therefore, when the measurement surface 122 is displaced, it is observed that the reflection point on the measurement surface 122 seen from the lens 123 moves, the output signal of the detector 124 changes, and the position calculation means 125 changes the displacement of the measurement surface 122. A proportional signal output is obtained.

If this laser displacement meter is used, for example, L
Displacement of SI package terminals, terminal spacing, terminal width, and terminal pitch can be measured. FIG. 13 is a cross-sectional view showing a measurement state of a terminal state of an LSI package using a laser displacement meter and a waveform diagram showing signals obtained by the measurement. Figure 1
In FIG. 3A, 131 is a laser displacement meter that performs linear scanning, 132a to 132e are terminals of the LSI package, and terminals 132d are floating terminals. The laser displacement meter 131 linearly scans the terminals 132a to 132e, so that a signal 133 as shown in FIG. 13B is obtained.

This signal 133 is subjected to threshold value processing using the reference signal 134, etc.
~ 132e displacement, terminal spacing, each terminal 132a ~ 132
The width of e and the pitch of terminals can be measured. Here, in order to accurately obtain these measured values, the terminals 132a to 132e are used.
It is desirable that the width be larger than the beam diameter of the laser light used, be flat, and have a uniform optical reflectance.

On the other hand, when measuring the width of the terminals of the package of the LSI using the transmitted light when the laser light is irradiated, a measuring device as shown in FIG. 14 is used. 14
FIG. 6A is a cross-sectional configuration diagram showing an example of terminal width measurement using transmitted light when laser light is irradiated. In the figure, 141 is the terminal of the package to be measured, 142 is the laser light to be irradiated, and 143 is the amount of incident light (transmitted light intensity).
This is a light amount detection unit for detecting. Laser light for irradiation 142
By linearly scanning, the terminal 141 blocks the laser light 141, and the transmitted light intensity detected by the light amount detection unit 143 changes as shown in FIG. The width of the terminal 141 or the like can be measured from the change point of the transmitted light intensity.

[0008]

Since the prior art is constructed as described above, there are the following problems.
First, in the case of a laser displacement meter that uses reflection, since the discontinuous structure to be measured, for example, the terminals of the LSI package is becoming thinner and the pitch is becoming smaller, it is necessary to reduce the spot diameter of the laser light to be irradiated. Must-have. Therefore, if there is a large error in the distance between the laser displacement meter and the measurement target, measurement cannot be performed.

That is, depending on the installation state of the package to be measured, the distance from the laser displacement meter changes from package to package or the package is tilted. If the distance changes, the average level of the obtained signal changes and the reference level does not become constant, making it difficult to identify each terminal of the package. Further, when the measurement target package is measured in a tilted state, the reference line of the obtained signal is also tilted, and the data such as the displacement amount and the pitch cannot be calculated by a simple thresholding process.

In the laser displacement meter, there is a measurable region within a certain range before and after the focal position of the irradiated laser light, that is, the position where the spot diameter of the laser light is minimum. As shown in FIG. 15A, the terminal 151 to be measured
However, when the laser light 152 is out of this measurable region, even if the package to be measured is not tilted and the terminals are evenly arranged in a horizontal row, as shown in FIG. The applied displacement signal Hc becomes irregular. If the obtained displacement signal Hc is in a state as shown in FIG. 16B, it can be processed as a binarized signal with a predetermined threshold value. If the terminals of the package become smaller and the pitches become smaller, scattered light 152 from the terminals 151 with floating terminals easily enters the detector as shown in FIG. 15B, which causes noise. It was

On the other hand, when the transmitted light is used, there is a slope in the rising edge of the signal intensity to be detected because the spatial spread of the laser light to be emitted is finite. This inclination obscures the detection of the position of each terminal to be measured, and this phenomenon becomes more remarkable as the width of the terminals and the distance between the terminals become finer.

The present invention has been made in order to solve the above problems, and even if the distance or size of the discontinuous structure to be measured becomes small, the displacement and size of the discontinuous structure become small. , The aim is to be able to accurately obtain spatial information such as intervals.

[0013]

DISCLOSURE OF THE INVENTION A measuring device for a discontinuous structure according to the present invention comprises a laser generating means for emitting a laser beam in the form of a spot on an object to be measured, and a laser irradiated on the object to be measured. Position sensitive detection means that receives the reflected light of the light and outputs a signal corresponding to the light receiving position, and receives the reflected light of the laser light that is irradiated on the measured object and outputs a light amount signal according to the light amount Linearly moving the displacement measuring unit and the displacement measuring unit configured by the displacement calculating unit that outputs the displacement signal proportional to the displacement of the measured object by the signal output from the position sensitive detecting unit. The displacement means, which outputs a coordinate signal corresponding to the position of the displacement measuring unit, and the displacement, width, and position of the object to be measured by the displacement signal, the coordinate signal, and the light amount signal.
And a signal processing means for calculating an interval.

Further, the measuring apparatus for a discontinuous structure according to the present invention can obtain spatial information of the measured object by detecting the transmitted light of the laser beam applied to the measured object to be measured. In the measuring device, a laser generating means for emitting a spot-shaped laser beam to the object to be measured and a high-order light of the transmitted light of the laser beam applied to the object to be measured, and a light quantity signal corresponding to the light quantity A light detecting means for outputting
An edge detection unit that receives the 0th order light of the transmitted light of the laser beam applied to the object to be measured and outputs an edge signal having a peak corresponding to the edge position of the object to be measured.

[0015]

The width, position and interval of the object to be measured are obtained from the obtained light amount signal, and the displacement of the object to be measured is calculated using the displacement signal based on this.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. Example 1. FIG. 1A is a configuration diagram showing the configuration of a measuring apparatus for a discontinuous structure, which is an embodiment of the present invention. In the figure, 1a to 1f are terminals of an LSI package to be measured, 2 is a laser displacement measuring unit, 3 is a moving table for linearly moving the laser displacement measuring unit 2, and 4 is a laser displacement continuation unit 2. Displacement signal Hc and light amount signal Ic
And the coordinate signal Xc output from the moving table 3 is obtained,
A signal processing unit that processes these to calculate the terminal width Wi, the terminal position Pi, the terminal displacement amount Hi, and the inter-terminal distance Di.

The laser displacement measuring section 2 includes a laser generating section 2
a, a position sensitive detection unit 2b, a light amount detection unit 2c, and a signal processing unit 2d. The laser light emitted from the laser generation unit 2a is reflected by the terminals 1a to 1f, and part of the laser light is detected by the light amount detection unit 2c. It is captured and output as the light amount signal Ic. The other part of the light reflected by the terminals 1a to 1f is captured by the position-sensitive detector 2b, and the captured light is detected by the position-sensitive detector 2
A signal corresponding to where on the light receiving surface of b the light is received is output. This signal is processed by the signal processing unit 2d and output as the displacement signal Hc.

The signal processing unit 4 binarizes the light quantity signal Ic input by a preset threshold value V as shown in FIG. 17, and a binarization processing unit 4a. The displacement signal H is used as a position recognition signal (terminal position Pi).
a displacement calculation unit 4b that extracts the terminal displacement amount Hi from c and outputs the displacement amount of each of the terminals 1a to 1f as a time-series signal;
Using the binarized signal as the position recognition signal, the terminal width Wi and the inter-terminal distance Di are calculated from the coordinate signal Xc, and each terminal 1a to
The distance calculation unit 4c is configured to output the width of 1f and the distance between them as a time-series signal.

FIG. 1B is a waveform diagram showing the state of each signal obtained by the measuring apparatus for a discontinuous structure according to the first embodiment. Since the amount of light reflected from the terminals 1a to 1f is equal,
The obtained light amount signal Ic has a uniform height and can be easily binarized. As shown in FIG.
Discrimination and position recognition of the terminals 1a to 1f are performed based on the binarized light amount signal Ic, whereby the terminal position Pi, the terminal width Wi, and the inter-terminal distance Di can be calculated. Then, by calculating the signal value of the displacement signal Hc corresponding to the calculated terminal position Pi (coordinate position) of each of the terminals 1a to 1f, FIG.
Even if the displacement signal Hc in the state as shown in FIG.
The displacement amount Hi of a to 1f is obtained.

Example 2. FIG. 2 is a configuration diagram showing a configuration of a measuring apparatus for a discontinuous structure which is a second embodiment of the present invention. In the figure, reference numeral 5 denotes a trigger oscillating unit that receives the coordinate signal Xc from the moving table 3 and outputs a trigger signal T to the laser displacement gauge side unit 2 for each unit coordinate, and is otherwise similar to FIG. Since the movement characteristics of the movement table 3 are not strictly constant but fluctuate, the displacement signal Hc and the light amount signal I detected by the laser displacement meter side portion 2 and output as they are are equal.
The coordinate values of c are not evenly spaced. However, in this embodiment, since the laser displacement meter side part 2 controls the detection period by the trigger signal output for each unit coordinate when the moving table 2 moves, the displacement signal Hc and the light amount signal Ic to be output are controlled. Is less distorted.

Example 3. FIG. 3 is a configuration diagram showing a configuration of a measuring apparatus for a discontinuous structure which is a third embodiment of the present invention. In the figure, reference numeral 34 is a signal processing unit in the measuring apparatus for a discontinuous structure according to the second embodiment, and unlike the signal processing unit 4 shown in FIG. 1, a correction unit 34d for correcting the output signal of the distance calculation unit 4c. 1 and the others are the same as in FIG. The correction unit 34d includes the terminals 1a to 1a output by the distance calculation unit 4c.
The time series signals of the width of 1f and the distance between them are used by using a preset reference table, and the displacement signal Hc is added.
Correct by referring to.

Here, as described above, the light quantity signal Ic is suitable for quantifying the terminal position and the terminal width. Figure 4
Is a superposition of the displacement signal Hc and the light amount signal Ic obtained for the terminals of the LSI package.
Regarding the terminal width Wi, the light quantity signal Ic is the displacement signal Hc.
The value is closer to the actual size value. The displacement signal Hc is not suitable for the terminal width measurement because of the displacement amount calculation formula for obtaining the displacement signal Hc. However, even if the terminal width Wi and the inter-terminal distance Di are obtained using the light amount signal Ic, there is an obstacle to higher accuracy of measurement as shown below.

When the terminal to be measured is displaced from the focal position of the laser light to be irradiated, that is, the position where the spot diameter is the minimum, the measured terminal width Wi is different. As shown in FIG. 5, the measurement result of the terminal 52a whose measurement distance is at the focus position of the laser light 51 is different from the measurement result of the terminal 52b whose measurement distance is before the focus position and the terminal 52c which is ahead. Become. As shown in FIG. 6, the measured terminal width Wi has a minimum value when the terminal position is at the focal position of the laser light to be irradiated, and when it deviates from that value, it is measured larger than the actual width. Since this can be obtained in advance by experiments, it can be set in the correction unit 24d (FIG. 3) as a reference table and the data obtained from the distance calculation unit 4c can be corrected. As a result, it is possible to accurately measure the width and pitch even if the distance from the measurement target is different, such as when terminals are floating.

Example 4. A signal such as the light amount signal Ic originally has a characteristic that the baseline fluctuates. Therefore, if it is used as it is, an accurate coordinate position of the object to be measured cannot be obtained. Here, as shown in FIG. 7, the reference signal RFc and the light amount signal I, which are composed of pulses having different initial phases but the same period, are used.
and the light amount signal I by using the equation (1) shown below.
If the phase φ _{OPT of} c and the pitch D _OPT are calculated, an accurate coordinate position can be obtained.

M (φi, di) = ∫ {Ic (n) × RFc (n, φi, di)} δn ∴ {M (φi, di) | MAX} (1) where di is a reference The pulse pitch (cycle) of the signal RFc, φi, is the initial phase value of the reference signal RFc.

FIG. 8 is a block diagram showing the arrangement of a measuring apparatus for a discontinuous structure according to the fourth embodiment. In the figure, reference numeral 81 is a reference table in which the reference signal RFc is set, and reference numeral 82 is a template matching unit that calculates the coordinate position of a terminal or the like to be measured based on the reference signal RFc and the light amount signal Ic set in the reference table 81. Is. The template matching unit 82 adds / subtracts the light amount signal Ic according to the polarity of the reference signal RFc and sequentially adds and subtracts the results, and the maximum value of the results calculated by the addition / subtraction cumulative units 821 to 82n. And a maximum value detecting means 82a for detecting

The reference signal RFc as shown in FIG. 7 is set in the reference table 81, and the addition / subtraction accumulation means 821 is set.
.About.82n simultaneously process the reference signal RFc and the light amount signal Ic, and the maximum value of the results is detected by the maximum value detecting means 82a.
It becomes the initial value of the phase φ _OPT of c. FIG. 9 shows the correlation strength between the reference signal RFc and the light amount signal Ic when the pitch di is changed from 226 to 280 μm in 6 μm steps,
The relationship of the initial value of the phase φ _OPT is shown. From the figure, D _OPT =
It shows that φ _OPT = 190 μm when 250 μm. Note that this processing may be used for the displacement signal Hc.

Example 5. By the way, if the light intensity distribution due to the reflected light from the object to be measured obtained by irradiating the laser beam is spatially Gaussian-type symmetrical, the position-sensitive detector 2b (FIG. 1) can obtain it. The reflected light intensity is always constant, and the maximum value in the distribution at that time can be obtained. However, if the object to be measured is a discontinuous structure, such as the terminals of an LSI package, and the terminal width and terminal spacing become finer, multiple scattered light is generated due to some terminal floating, etc. The received light intensity distribution of 2b becomes complicated. Here, instead of the position-sensitive detector 2b, a CCD
By using the image sensor, if the intensity distribution of the incident reflected light is recognized and the maximum value of these is used for the output of the light amount signal Ic, the light amount signal Ic will always be constant.

In the case of the fifth embodiment, as shown in FIG. 10, a CCD line sensor 102 is used to output the light amount signal Ic, and this CCD line sensor 102 is installed in a state orthogonal to the scanning direction. The CCD line sensor 102 does not need to be installed in a direction orthogonal to the scanning direction, and may be arranged in any way as long as the optical path of the reflected light is adjusted using a lens or the like.

Example 6. FIG. 11 shows a sixth embodiment of the present invention, which is a measuring device for a discontinuous structure for measuring the terminal width and the terminal interval of the LSI package by using the transmitted light of the laser beam applied to the object to be measured. It is a block diagram which shows a structure. In FIG. 11A, 111 is a terminal to be measured,
Reference numeral 112 denotes a laser beam to be radiated, 113 denotes a photodetection unit for detecting higher-order light of the transmitted laser beam 112, and 114 denotes an edge detection unit arranged on the photodetection unit 113 and smaller than the photodetection unit 113. The edge detection unit 114 is shown in FIG.
As shown in (b), the 0th order light of the laser light transmitted through the terminal 111 portion is detected and the edge signal 115 is output,
The photodetector 113 detects higher-order light in the transmitted laser light 112 and outputs a transmitted light intensity signal 116.

Conventionally, as shown in FIG. 14, since only one transmitted light intensity is measured by one photodetector 143, the spatial extent of the laser beam 142 is finite, so that the terminal 141 is Transmitted light intensity 144 obtained by the presence
Since there is a slope in the rising edge of, the accurate measurement was not possible. However, in the sixth embodiment, the edge detector 1
By adding 14, the edge signal 115 and the transmitted light intensity signal 116 are obtained, and the width, interval, position, etc. of the terminal 111 can be accurately measured by these.

[0032]

As described above, according to the present invention, even if the space or size of the discontinuous structure to be measured becomes small, the spatial information such as the displacement, size or space of the discontinuous structure can be obtained. The effect is that it can be accurately determined.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a configuration of a measuring device for a discontinuous structure which is an embodiment of the present invention, and a waveform diagram showing a state of each obtained signal.

FIG. 2 is a configuration diagram showing a configuration of a measuring apparatus for a discontinuous structure, which is a second embodiment of the present invention.

FIG. 3 is a configuration diagram showing a configuration of a measuring apparatus for a discontinuous structure, which is a third embodiment of the present invention.

FIG. 4 is a waveform diagram showing a state in which a displacement signal Hc and a light amount signal Ic are superimposed.

FIG. 5 is a sectional configuration diagram showing a positional relationship between a focal position of laser light and a measurement distance of a terminal.

FIG. 6 is a correlation diagram showing a correlation between a measurement distance and a measurement result.

FIG. 7 is a waveform diagram showing a reference signal having a different initial phase and a reference signal having a different pulse width.

FIG. 8 is a configuration diagram showing a configuration of a measuring device for a discontinuous structure according to a fourth embodiment of the present invention.

FIG. 9 is a waveform diagram showing the relationship between the correlation strength between the reference signal RFc and the light amount signal Ic and the initial value of the phase φ _OPT when the pitch di is changed from 226 to 280 μm in 6 μm steps.

FIG. 10 is a configuration diagram showing a configuration of a measuring device for a discontinuous structure according to a fifth embodiment of the present invention.

FIG. 11 is a configuration diagram showing a configuration of a measuring device for a discontinuous structure according to a sixth embodiment of the present invention.

FIG. 12 is a configuration diagram showing a basic configuration of a conventional laser displacement meter.

FIG. 13 is a cross-sectional view showing a measurement state of a terminal state of an LSI package using the laser displacement meter of FIG. 12, and a waveform diagram showing a signal obtained.

FIG. 14 is a cross-sectional configuration diagram showing an example of terminal width measurement using transmitted light when laser light is irradiated.

FIG. 15 is a cross-sectional view showing the positional relationship between laser light and terminals.

FIG. 16 is a waveform diagram showing a waveform of a signal obtained by a conventional laser displacement meter.

FIG. 17 is a waveform diagram showing a binary state of the obtained light amount signal.

[Explanation of symbols]

 1a to 1f Terminal 2 Laser displacement measuring section 2a Laser generating section 2b Position sensitive detecting section 2c Light amount detecting section 2d Signal processing section 3 Moving table 4 Signal processing section 4a Binarization processing section 4b Displacement calculating section 4c Distance calculating section Di terminal Distance Hc Displacement signal Hi Terminal displacement amount H Ic Light amount signal Pi Terminal position Wi Terminal width Xc Coordinate signal

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[Procedure amendment]

[Submission date] September 30, 1993

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0010

[Correction method] Change

[Correction content]

In the laser displacement meter, there is a measurable region within a certain range before and after the focal position of the irradiated laser light, that is, the position where the spot diameter of the laser light is minimum. As shown in FIG. 15A, the terminal 151 to be measured
However, when the laser light 152 is out of this measurable region, even if the package to be measured is not tilted and the terminals are evenly arranged in a horizontal row, as shown in FIG. The applied displacement signal Hc becomes irregular. If the obtained displacement signal Hc is in a state as shown in FIG. 16B, it can be processed as a binarized signal with a predetermined threshold value. When the terminals of the package are reduced and the pitches are reduced, scattered light 152 a from the terminals 151 a having floating terminals easily enters the detector as shown in FIG. 15B, which causes noise. Was becoming.

[Procedure Amendment 2]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 5

[Correction method] Change

[Correction content]

[Figure 5]

[Procedure 3]

[Document name to be corrected] Drawing

[Name of item to be corrected] Fig. 14

[Correction method] Change

[Correction content]

FIG. 14

[Procedure amendment 4]

[Document name to be corrected] Drawing

[Correction target item name] Figure 15

[Correction method] Change

[Correction content]

FIG. 15 ─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] December 15, 1993

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0010

[Correction method] Change

[Correction content]

In the laser displacement meter, there is a measurable region within a certain range before and after the focal position of the irradiated laser light, that is, the position where the spot diameter of the laser light is minimum. As shown in FIG. 15A, the terminal 151 to be measured
Within the measurable area of the laser light 152
Even when the package to be measured is not tilted and the terminals are evenly arranged in a horizontal row when the focus position is far away , as shown in Fig. 16 (a), the obtained displacement is obtained. Signal Hc
Will be irregular. The obtained displacement signal Hc is shown in FIG.
In the case of the state shown in (b), 2 is set according to a predetermined threshold value.
It can be processed as a digitized signal. Further, when the terminals of the package are reduced and the pitches are reduced, as shown in FIG.
As shown in (b), scattered light 152a from the terminal 151a whose terminal is floating easily enters the detector, causing noise.

[Procedure Amendment 2]

[Document name to be corrected] Drawing

[Name of item to be corrected] Fig. 4

[Correction method] Change

[Correction content]

[Figure 4]

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Toshifumi Kimura 8-1-1 Tsukaguchihonmachi, Amagasaki-shi, Hyogo Sanryo Electric Co., Ltd.

Claims (9)

[Claims] 1. A laser generator that emits a spot-shaped laser beam to a measured object to be measured, and a reflected light of the laser beam applied to the measured object, and a signal corresponding to the light receiving position. Position sensitive detection means for outputting, the light quantity detecting means for receiving the reflected light of the laser beam applied to the object to be measured, and outputting a light quantity signal according to the light quantity, and the output of the position sensitive detection means A displacement measuring unit configured to output a displacement signal proportional to the displacement of the object to be measured by a signal, and a coordinate corresponding to the position of the displacement measuring unit by linearly moving the displacement measuring unit. A discontinuity structure comprising: a moving unit that outputs a signal; and a signal processing unit that calculates the displacement, width, position, and interval of the measured object based on the displacement signal, the coordinate signal, and the light amount signal. Measuring device. 2. The measuring apparatus for a discontinuous structure according to claim 1, wherein the light amount detecting means is a light detecting element in which a plurality of light detecting sections are arranged. 3. A measuring device for a discontinuous structure, which obtains spatial information of the object to be measured by detecting transmitted light of a laser beam applied to the object to be measured, Laser generating means for emitting a laser beam in the form of a spot, light detecting means for receiving higher-order light of the transmitted light of the laser light applied to the object to be measured, and outputting a light amount signal according to the light amount, the object to be detected, Edge discontinuity means for receiving the 0th order light of the transmitted light of the laser beam applied to the measurement object and outputting an edge signal having a peak corresponding to the edge position of the measurement object. Measuring device for structures. 4. The measuring apparatus for a discontinuous structure according to claim 1, wherein the coordinate signal is based on a unit coordinate of the displacement measuring unit. 5. The measuring device for a discontinuous structure according to claim 1, wherein the signal processing unit binarizes the light amount signal and outputs a binarized light amount signal.
A measuring device for a discontinuous structure, comprising: a binarizing unit; and a displacement calculating unit that calculates the displacement of the object to be measured based on the binarized light amount signal and the displacement signal. 6. The measuring device for a discontinuous structure according to claim 1, wherein the signal processing device binarizes the light amount signal and outputs a binarized light amount signal.
An apparatus for measuring a discontinuous structure, comprising: a binarizing unit; and a dimension calculating unit that calculates a width, a position, and a space of the object to be measured based on the binarized light amount signal and the coordinate signal. 7. The measuring apparatus for a discontinuous structure according to claim 1, wherein the signal processing unit binarizes the light amount signal and outputs a binarized light amount signal.
Valuing means, dimension calculating means for calculating the width, position and interval of the object to be measured based on the binarized light amount signal and the coordinate signal, the measurement position of the object to be measured and the width and position to be measured, A measuring device for a discontinuous structure, comprising: a correction unit configured to correct a value calculated by the dimension calculation unit with reference to the displacement signal, in which a correlation with an interval is set. 8. The measuring apparatus for a discontinuous structure according to claim 1, wherein the signal processing means adds or subtracts a reference table in which a plurality of reference signals having different initial phases are set and an input signal. A measuring device for a discontinuous structure, comprising template matching means for performing preprocessing by using the reference signal that gives the maximum value of the calculation result. 9. The measuring apparatus for a discontinuous structure according to claim 1, wherein the signal processing unit sets a plurality of first reference signals having different initial phases and second reference signals having different reference periods. Discontinuity, characterized by having a reference table and a template matching means for performing preprocessing by using the first and second reference signals that give the maximum value of the addition and subtraction accumulation result with the input signal. Measuring device for structures.