JPH06262019A - Dust, oil and water separation and recovery device - Google Patents
Dust, oil and water separation and recovery deviceInfo
- Publication number
- JPH06262019A JPH06262019A JP5107155A JP10715593A JPH06262019A JP H06262019 A JPH06262019 A JP H06262019A JP 5107155 A JP5107155 A JP 5107155A JP 10715593 A JP10715593 A JP 10715593A JP H06262019 A JPH06262019 A JP H06262019A
- Authority
- JP
- Japan
- Prior art keywords
- oil
- filter
- dust
- gas
- filter element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 title claims abstract description 32
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 24
- 239000003921 oil Substances 0.000 title abstract description 40
- 238000000926 separation method Methods 0.000 title description 7
- 238000011084 recovery Methods 0.000 title description 2
- 238000004519 manufacturing process Methods 0.000 claims abstract description 7
- 230000007774 longterm Effects 0.000 claims abstract 2
- 239000007789 gas Substances 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 10
- 239000007787 solid Substances 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 4
- 230000001965 increasing effect Effects 0.000 claims description 4
- 238000012423 maintenance Methods 0.000 claims description 2
- 239000002341 toxic gas Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 abstract description 5
- 238000003860 storage Methods 0.000 abstract description 5
- 230000002093 peripheral effect Effects 0.000 abstract description 3
- 238000009825 accumulation Methods 0.000 abstract 1
- 239000003595 mist Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 238000005119 centrifugation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 239000012717 electrostatic precipitator Substances 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- JTJMJGYZQZDUJJ-UHFFFAOYSA-N phencyclidine Chemical class C1CCCCN1C1(C=2C=CC=CC=2)CCCCC1 JTJMJGYZQZDUJJ-UHFFFAOYSA-N 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Separating Particles In Gases By Inertia (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、製造工場等から発生す
る排気ガス中に含まれる油水，粉塵，有毒ガス等を、任
意にかつ継続して高効率で分離，捕集することにより、
排ガス処理能力を高めると共に、目的に応じ油の再利用
が可能となる装置と方法の改良に関するものである。BACKGROUND OF THE INVENTION The present invention can arbitrarily and continuously separate and collect oily water, dust, toxic gas, etc. contained in exhaust gas generated from a manufacturing plant, etc., with high efficiency.
The present invention relates to improvement of an apparatus and a method capable of reusing oil according to the purpose while enhancing exhaust gas treatment capacity.
【０００２】[0002]
【従来の技術】現在、ＣＶＤ装置を減圧下にするため、
油入りポンプを使用している。ＣＶＤ装置内にＳｉＨ２
ＣＬ２，ＳｉＨ４等のガスが分解して大量の粉塵が発生
し、排ガス配管内にこれらの粉塵とポンプからリークす
る油が混合した物が溜まり、なおかつ油入り真空ポンプ
の減圧度が低下するため、真空ポンプの洗浄回数を増や
したり、複数の装置を設置してバッチ式に使用しなけれ
ばならない等、運転管理及びメンテナンスの点で、障害
が多く、また費用がかかるという欠点があった。排ガス
中の油水物や粉塵の分別には従来、湿式スクラバー，電
気集塵機，サイクロン，バグフィルターやミストセパレ
ーター等の装置にて行って除害してきた。そのため、装
置自体がかなり大きくなり、なおかつ圧損増大等のため
連続運転が出来ないという欠点もあった。2. Description of the Related Art Currently, in order to reduce the pressure of a CVD apparatus,
I am using an oil pump. SiH 2 in CVD equipment
Gases such as CL 2 and SiH 4 are decomposed to generate a large amount of dust, and a mixture of these dust and oil leaking from the pump is accumulated in the exhaust gas pipe, and the degree of pressure reduction of the oil-containing vacuum pump is reduced. For this reason, there are many drawbacks in terms of operation management and maintenance, such as increasing the number of times the vacuum pump is cleaned and using multiple devices by installing them in batches. Conventionally, oil and water substances and dust in exhaust gas have been separated by devices such as wet scrubbers, electrostatic precipitators, cyclones, bag filters and mist separators. Therefore, there is a drawback that the apparatus itself becomes considerably large and continuous operation cannot be performed due to an increase in pressure loss and the like.
【０００３】また、排ガス中の油水，粉塵を分離するの
に遠心分離が用いられてきたが、排ガスを回転式フィル
ターエレメントの内部から外部へ通す方法が多く使われ
てきたが、このとき、回転式フィルターエレメントが粉
塵，油水物で詰まり、圧損が増大するという欠点があっ
た。Centrifugation has been used to separate oil water and dust in exhaust gas, but a method of passing exhaust gas from the inside to the outside of the rotary filter element has been widely used. The filter element was clogged with dust and oil and water, and the pressure loss increased.
【０００４】[0004]
【発明が解決しようとする課題】本発明はかかる従来例
に鑑みて為されたもので、その目的とするところは、半
導体ガス等を含む油水物や、半導体排ガスから生成する
粉塵を、処理装置にて連続的に処理できる処理方法と、
その装置並びに油の再利用を提供するものである。例え
ば、以下のようにして、油水物，粉塵を処理することを
指摘できる。SUMMARY OF THE INVENTION The present invention has been made in view of such a conventional example, and an object of the present invention is to treat an oily water substance containing a semiconductor gas or the like or a dust generated from the semiconductor exhaust gas with a treatment device. With a processing method that can be continuously processed in
It provides the equipment as well as oil reuse. For example, it can be pointed out that oily water and dust are treated as follows.
【０００５】[0005]
【問題点を解決するための手段】本発明方法は、上記問
題点を解決するために、請求項１，２，３，４，５，
６，７に示すように、 本装置は回転式フィルターを有し、 フィルター自体が回転することにより、いかなる大き
さの粒子も効率よく捕らえ、 捕らえたミスト，粉塵を回転させ、飛ばすことで、フ
ィルターを目詰まりさせずに、連続してミスト等を捕捉
することが出来る。 ；という技術的手段を採用しており、According to the method of the present invention, in order to solve the above-mentioned problems, the method according to claim 1, 2, 3, 4, 5,
As shown in Figs. 6 and 7, this device has a rotary filter, and by rotating the filter itself, particles of any size can be efficiently captured, and the captured mist and dust can be rotated and blown off to filter. It is possible to continuously capture mist and the like without clogging. The technical means of
【０００６】また、前記の方法を達成するため、請求項
２，３，４，５，６，７にて フィルターをガス分だけが通過し、 フィルターを一方方向に回転させることにより、粉
塵，油水物をフィルターからはぎ取り、 ガスの流れを回転式フィルターエレメントの外側から
内側へ流し、 回転式フィルターエレメントの回転数が少ない。 ；という技術的手段を採用しており、Further, in order to achieve the above method, in claims 2, 3, 4, 5, 6 and 7, only the gas component passes through the filter, and the filter is rotated in one direction, whereby dust, oil and water are obtained. The object is stripped from the filter, the gas flow is made to flow from the outside to the inside of the rotary filter element, and the rotation speed of the rotary filter element is low. The technical means of
【０００７】更に、前記の方法を達成するため、請求項
９にて、 請求項１の油水分離排ガス処理装置において、 請求項２，３，４，５，６，７の回転式フィルターを
設置し、 油の再利用が出来るようにドレインタンク（貯油槽）
を設置する。 ；という技術的手段を採用している。Further, in order to achieve the above method, in claim 9, in the oil-water separation exhaust gas treatment apparatus of claim 1, the rotary filter of claims 2, 3, 4, 5, 6, 7 is installed. , Drain tank (oil storage tank) so that oil can be reused
Set up. Is adopted as a technical means.
【０００８】[0008]
【作用】以上のような構成により、本発明の方法では、
真空ポンプからリークした油及び粉塵が回転数を自由に
変化できる回転式フィルターを装着された装置に流入
し、排ガスから油及び粉塵を分離，分別させることによ
り、出口排ガス導入管の内周面に粉塵，油水物が堆積す
ることはない。With the above construction, the method of the present invention is
Oil and dust leaked from the vacuum pump flow into a device equipped with a rotary filter that can freely change the rotation speed, and by separating and separating the oil and dust from the exhaust gas, the inner peripheral surface of the outlet exhaust gas introduction pipe No dust or oily matter will be accumulated.
【０００９】フィルターの構造については（図２）に示
すようになっている。そして、フィルター素材の外側は
強度をもたせるようなパンチングメタルで作られてお
り、フィルター素材の内側も強度をもたせるようなバン
チングメダルで作られている。なおかつ、フィルターの
中央部には、いろいろなフィルターエレメント（糸巻き
フィルター，ゼオライト等）を装着している。The structure of the filter is as shown in FIG. And, the outside of the filter material is made of punching metal that gives strength, and the inside of the filter material is also made of bunching medals that give strength. Moreover, various filter elements (wound filter, zeolite, etc.) are attached to the center of the filter.
【００１０】更に、本装置では回転式フィルターエレメ
ントの材質及びメッシュ等が自由に変えられることによ
り、粉塵濃度や粉塵の大きさに関わらず、ＣＶＤ炉や真
空ポンプ等の油が取り除かれ、かつドレインタンク（貯
油槽）が簡単になる。Further, in this apparatus, the material of the rotary filter element, the mesh, etc. can be freely changed, so that the oil of the CVD furnace, the vacuum pump, etc. can be removed and the drain can be removed regardless of the dust concentration and the size of the dust. The tank (oil storage tank) becomes simple.
【００１１】その原理は図２に示すように回転式フィル
ターエレメントによる。同じ回転数でも遠心効果は例え
ば半径が１５０φで６７０（８００ｒｐｍ）で、７５φ
で３３０（８００ｒｐｍ）まで変化する。このことによ
る粒径の小さい油水物（質量の小さいもの）は徐々に半
径の小さい方へ移行していく。半径の小さいところでは
徐々ではあるが、粒径の小さい粉塵や油水物が凝集しや
すくなり質量を増大させて回転式フィルターの回転によ
り分離する。これは遠心力による離脱よりも重力による
移動が進行し、凝集が生じ易くなり周速の小さい方へ移
行しやすくなることに依る。遠心分離は重力場における
機械的分離操作を遠心力場において行うもので、その効
果は固／液分離においては有効であるが、固・液／気系
では本発明の如く、全く逆の発想を要求される。即ちこ
の回転式フィルターにおける固・液／気系の質量の差を
利用し、これを拡大して、分離効率を高め、定常かつ継
続してクリーンガスを取り出すことが可能になる。The principle is based on a rotary filter element as shown in FIG. Even with the same number of rotations, the centrifugal effect is, for example, with a radius of 150φ, 670 (800 rpm), 75φ
Changes to 330 (800 rpm). Due to this, the oil-water substance having a small particle size (those having a small mass) gradually shifts to the smaller radius. Although it is gradual in a small radius, dust or oily water having a small particle size is likely to aggregate, increasing the mass and separating by rotation of the rotary filter. This is because the movement due to gravity progresses rather than the detachment due to the centrifugal force, aggregation is likely to occur, and it is easier to shift to a lower peripheral speed. Centrifugation is a mechanical separation operation in a gravitational field performed in a centrifugal force field, and its effect is effective in solid / liquid separation, but in a solid / liquid / gas system, the completely opposite idea is used as in the present invention. Required. That is, it is possible to utilize the difference in mass of the solid / liquid / gas system in this rotary filter, expand it, improve the separation efficiency, and steadily and continuously take out clean gas.
【００１２】回転式フィルターの働きは、そのエレメン
ト表面で有効濾過面積の拡大をもたらし、その内部にお
いては気体中の液・固成分粒子間の無数の衝突付着，分
離，結合が繰り返され、質量の差は増大する。The function of the rotary filter causes an expansion of the effective filtration area on the surface of the element, and in the inside thereof, numerous collision adhesions, separations, and bonds between liquid and solid component particles in the gas are repeated, resulting in mass loss. The difference increases.
【００１３】[0013]
【実施例】以下、本発明を第１図の図示実施例に従って
詳述する。半導体製造設及び付随装置から出る油水物，
粉塵を含んだ排ガスは、本発明装置のガス入口から装置
内に入り、回転しているフィルターを通過する。この
際、油水物，粉塵だけが分離，捕捉される。油は回収さ
れ、そのまま再利用される。第１図をもとに説明する
と、半導体製造装置及び付随装置からでる油水物，粉塵
を含んだ排ガスは図１の３（装置本体の入口）から入
り、装置本体に排ガス等が入る。その時に図１の２（モ
ーター）で図１の１（回転式フィルターエレメント）が
回転しているため、油水物，粉塵はフィルターに付着す
ることなく、装置本体のケーシングに落とす。また、フ
ィルターにより落とされた油だけがドレインタンク（貯
油槽）に溜められる。回転式フィルターにより除去され
たガスは図２（図１の１の詳細図）フィルターエレメン
トの外側から内側を通過して図１の４（装置本体の出
口）から系外に排出される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to the embodiment shown in FIG. Oil and water products from semiconductor manufacturing facilities and associated equipment,
The exhaust gas containing dust enters the device through the gas inlet of the device of the present invention and passes through the rotating filter. At this time, only oily water and dust are separated and captured. The oil is recovered and reused as is. Explaining with reference to FIG. 1, the exhaust gas containing oil and water substances and dust emitted from the semiconductor manufacturing apparatus and ancillary equipment enters from 3 (inlet of the apparatus body) in FIG. 1 and the exhaust gas and the like enter the apparatus body. At that time, since 1 (rotary filter element) of FIG. 1 is rotating by 2 (motor) of FIG. 1, oil and water substances and dust are dropped onto the casing of the main body of the apparatus without adhering to the filter. Further, only the oil dropped by the filter is stored in the drain tank (oil storage tank). The gas removed by the rotary filter passes from the outside to the inside of the filter element in FIG. 2 (detailed view 1 in FIG. 1) and is discharged to the outside of the system from 4 in FIG. 1 (outlet of the apparatus main body).
【００１４】その結果は現場実験により確認されてお
り、第３図に示す。第３図は油の回収量を示した結果で
ある。第３図の横軸に月数を取り、縦軸に油の回収油量
を取ると、油の回収量は６ヵ月（２４時間連続運転）経
過しても、油の回収効率に変化が見られないことを確認
した。このことから粉塵，油水分離装置の入口の圧力と
その出口の圧力の差は６ヵ月経過しても変化がみられな
かった。The results have been confirmed by field experiments and are shown in FIG. FIG. 3 shows the results of the amount of oil recovered. When the number of months is plotted on the horizontal axis of Fig. 3 and the amount of oil recovered is plotted on the vertical axis, the oil recovery efficiency changes even after 6 months (24 hours continuous operation). I confirmed that I could not. Therefore, the difference between the pressure at the inlet of the dust / oil water separator and the pressure at its outlet did not change even after 6 months.
【００１５】回転式フィルターエレメントの特徴は次の
ような点である。即ち回転式フィルターの働きは、その
エレメント表面で有効濾過面積の拡大をもたらし、その
内部においては気体中の液・固体成分粒子間の無数の衝
突，付着，分離，結合が繰り返され、質量の差は増大す
る。このことを現場実験により確認したことになる。The characteristics of the rotary filter element are as follows. That is, the function of the rotary filter causes an expansion of the effective filtration area on the surface of the element, and in the inside, countless collisions, adhesions, separations, and bonds between the liquid and solid component particles in the gas are repeated, resulting in a difference in mass. Will increase. This is confirmed by the field experiment.
【００１６】[0016]
【効果】本発明の第１の特徴では、回転式フィルター
で、粉塵，油等が除去できる。フィルターを通過したガ
スを系外へ排出する配管に、油，粉塵を堆積させること
がない。また、本発明の第２の特徴では、回収した油は
新たな油とまったく同じで、そのまま、再利用しても問
題はなかった。このことにより、製造設備装置を停止す
ることなく連続運転でき、また、操業に関してもミスト
に起因する不定期な停止はなくなり、計画通り連続運転
できるという利点がある。[Effect] According to the first feature of the present invention, the rotary filter can remove dust, oil and the like. Oil and dust will not be accumulated on the pipe that discharges the gas that has passed through the filter to the outside of the system. Further, in the second feature of the present invention, the recovered oil is exactly the same as the new oil, and there is no problem in reusing it as it is. As a result, there is an advantage that the manufacturing equipment can be continuously operated without stopping, and the operation can be continuously operated as planned without any irregular stop due to mist.
【００１７】[0017]
【図１】 本発明で使用した一実施例の全体構成図FIG. 1 is an overall configuration diagram of an embodiment used in the present invention
【図２】 本発明の装置での回転式フィルターエレメン
トを示した図FIG. 2 shows a rotary filter element in the device of the invention.
【図３】 第１図に図示した実施例を用いた現場実験に
より得られた運転月数に対する回収油量の変化の一例を
示す図FIG. 3 is a diagram showing an example of a change in the amount of recovered oil with respect to the number of operating months obtained by an on-site experiment using the embodiment shown in FIG.
Ａ：有害ガス，水，油ミスト捕捉装置本体， Ｂ：ドレインタンク（貯油槽）， １：回転式フィルター， ２：モーター， ３：ガス入口， ４：ガス出口， ５：再生パージ入口， ６：再生パージ出口， ７：サンプル取出口（入口）， ８：サンプル取出口（出口）， ９：窒素ガスパージ， １０：ガス入口側圧力ゲージ， １１：ガス出口側圧力ゲージ， １２：静圧計， A: Hazardous gas, water, oil mist trap body, B: Drain tank (oil storage tank), 1: Rotary filter, 2: Motor, 3: Gas inlet, 4: Gas outlet, 5: Regeneration purge inlet, 6: Regeneration purge outlet, 7: sample outlet (inlet), 8: sample outlet (outlet), 9: nitrogen gas purge, 10: gas inlet side pressure gauge, 11: gas outlet side pressure gauge, 12: static pressure gauge,
Claims (9)
まれる油水，粉塵，有毒ガス等を新型フィルターで油
水，粉塵とガス分に分離する装置と方法。フィルターを
回転させることにより固・液体成分の質量が増大し、固
・液体はフィルターを通過することなく、適切なバラン
スでフィルターから離脱し、ケイシング内で捕集される
装置と方法。1. A device and method for separating oil water, dust, toxic gas, etc., contained in exhaust gas generated from a manufacturing plant etc. into oil water, dust and gas by a new type filter. A device and method in which the mass of solid and liquid components is increased by rotating the filter, and the solid and liquid leave the filter in an appropriate balance without passing through the filter and are collected in the casing.
成分のみ通過させ、従ってフィルターは常時新鮮なた
め、フィルターメンテナンスが少なくなる装置と方法。2. A device and method which reduces the filter maintenance by allowing only the gas components to pass through the filter used in claim 1 and thus keeping the filter fresh at all times.
せることにより、フィルターエレメント内部において固
・液体成分が非蓄積であり、そのため低圧損である機能
を持つことを特徴とする処理装置と方法。3. A treatment device and method, characterized in that by rotating the filter used in claim 1, the solid and liquid components are not accumulated inside the filter element and therefore have a function of low pressure loss.
円柱形，円錐台形，円錐形の形状をしていることを特徴
とする装置と方法。4. An apparatus and method, characterized in that the filter used in claim 1 has a cylindrical, frustoconical or conical shape.
トの外側から内側へ入り、同伴する固・液体等を粗大化
させ、遠心力によりガスの流れと逆の方向に飛ばし、蓄
積する装置と方法。5. A device and method for causing a gas flow to enter from the outside to the inside of a rotary filter element to coarsen entrained solid / liquid and the like, and to cause the centrifugal force to fly in the direction opposite to the gas flow to accumulate the gas.
ガスの流れとは逆方向に飛ばし、ガス体だけが回転式フ
ィルターエレメントを通過するために、いつまでも回転
式フィルターエレメントの損失圧が変化しない装置と方
法。6. The loss pressure of the rotary filter element forever because the solid / liquid is flown in the direction opposite to the gas flow and only the gas body passes through the rotary filter element. Device and method that does not change.
少ないため、騒音，振動，磨耗が小さくなり、長期連続
運転が可能となる装置と方法。7. A device and method that enable a long-term continuous operation by reducing the number of rotations of the rotary filter element, thereby reducing noise, vibration, and wear.
り構造が単純なため、用途に応じてモーター容量の小型
化及び装置の小型化ができる方法。8. A method capable of downsizing the motor capacity and downsizing the device depending on the application because the structure is simple due to the characteristics of the rotary filter element.
ルームや製造工場等で発生する排ガス中の水分，油分，
粉塵，有害ガス等を回収及び処理する分野に応用できる
装置と方法。9. The method according to claim 6, wherein water, oil, etc. in exhaust gas generated in a clean room such as an electronic industry or a manufacturing plant,
Equipment and method applicable to the field of collecting and treating dust, harmful gas, etc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5107155A JPH06262019A (en) | 1993-03-15 | 1993-03-15 | Dust, oil and water separation and recovery device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5107155A JPH06262019A (en) | 1993-03-15 | 1993-03-15 | Dust, oil and water separation and recovery device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06262019A true JPH06262019A (en) | 1994-09-20 |
Family
ID=14451905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5107155A Pending JPH06262019A (en) | 1993-03-15 | 1993-03-15 | Dust, oil and water separation and recovery device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06262019A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103638763A (en) * | 2013-11-28 | 2014-03-19 | 昆山亿诚化工容器有限公司 | Waste gas purification tower |
-
1993
- 1993-03-15 JP JP5107155A patent/JPH06262019A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103638763A (en) * | 2013-11-28 | 2014-03-19 | 昆山亿诚化工容器有限公司 | Waste gas purification tower |
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