JPH06261559A - Rotary actuator - Google Patents

Rotary actuator

Info

Publication number
JPH06261559A
JPH06261559A JP5072852A JP7285293A JPH06261559A JP H06261559 A JPH06261559 A JP H06261559A JP 5072852 A JP5072852 A JP 5072852A JP 7285293 A JP7285293 A JP 7285293A JP H06261559 A JPH06261559 A JP H06261559A
Authority
JP
Japan
Prior art keywords
piezoelectric element
movable member
rotor
electrodes
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5072852A
Other languages
Japanese (ja)
Inventor
Yasuhiro Okamoto
泰弘 岡本
Koji Katsuragi
廣治 葛城
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Minolta Co Ltd
Original Assignee
Minolta Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minolta Co Ltd filed Critical Minolta Co Ltd
Priority to JP5072852A priority Critical patent/JPH06261559A/en
Publication of JPH06261559A publication Critical patent/JPH06261559A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain an actuator wherein its size is small and its transmission efficiency is good without being subjected to a restriction on an electricity-feeding means by a method wherein a driving electric signal whose waveform has a gentle rise part and a quick fall part is supplied to an electromechanical conversion element. CONSTITUTION:In an actuator, a piezoelectric element 15 is arranged, bonded and fixed between a face 1b on a receiver part 1a for a fixation member 1 and a face 5b on a cutout part 5a. When sawtooth waves are applied to electrodes for the piezoelectric element 15, the thickness of the piezoelectric element 15 is expanded by a voltage which is increased gently. Then, a movable member 5 is turned by a definite angle with reference to the fixation member 1. Also a rotor 7 is turned by a definite angle together with the movable member, and a gear part at the outer circumference turns and drives a motive-power transmission mechanism. When the sawtooth waves reach the peal of their rise part, a voltage which is reduced suddenly is applied to the electrodes for the piezoelectric element 15, and the thickness of the piezoelectric element 15 is shrunk rapidly. As a result, the movable member 5 is returned. However, since its movement is larger than the frictional coupling between the rotor 7 and the movable member 5, the rotor 7 remains at its position.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、圧電素子、磁歪素子
などを使用したロータリーアクチユエータに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary actuator using a piezoelectric element, a magnetostrictive element or the like.

【0002】[0002]

【従来の技術】カメラや複写機などでは、各種の内部機
構の駆動に多数のモータが使用されている。例えばカメ
ラでは、フイルム巻き上げ機構、撮影レンズの焦点調節
機構などに、それぞれモータを組み込み、所定の制御指
令に応じて駆動されるように構成されている。このよう
な各種機構を駆動するモータは、所望のトルクや所望の
駆動速度を得るために歯車減速機構などを使用して回転
数を落として使用されることが多いが、モータと歯車減
速機構による駆動機構は、構造が簡単である利点を有す
るが、一方、装置を大型にするばかりでなく、伝達効率
が悪いという欠点がある。
2. Description of the Related Art In cameras and copying machines, many motors are used to drive various internal mechanisms. For example, in a camera, a motor is incorporated in each of a film winding mechanism, a focus adjusting mechanism of a photographing lens, and the like, and the motor is driven according to a predetermined control command. Motors that drive such various mechanisms are often used at a reduced rotational speed by using a gear reduction mechanism or the like in order to obtain a desired torque or a desired driving speed. The drive mechanism has the advantage of being simple in structure, but on the other hand, it has the drawback of not only making the device bulky, but also of poor transmission efficiency.

【0003】このため、圧電素子などを利用した動力源
が提案されている。即ち、圧電素子に電圧を加えると長
さ方向の歪みが生ずる現象を利用し、慣性体に固定され
た圧電素子に衝撃電圧を加えて慣性体に衝撃力を与え、
その衝撃力による慣性体の運動を利用して被駆動体を駆
動しようとするするものである(特開昭63−1107
4号公報、特開昭63−299785号公報参照)。
Therefore, a power source using a piezoelectric element or the like has been proposed. That is, by utilizing the phenomenon that distortion in the length direction occurs when a voltage is applied to the piezoelectric element, an impact voltage is applied to the piezoelectric element fixed to the inertial body to apply an impact force to the inertial body,
The motion of the inertial body due to the impact force is used to drive the driven body (Japanese Patent Laid-Open No. 63-1107).
4 and JP-A-63-299785).

【0004】[0004]

【発明が解決しようとする課題】上記した圧電素子を利
用した動力源は、従来のモータと歯車減速機構とを利用
した駆動機構に比較して小型で伝達効率も改善される
が、なお、移動量、回転角度、移動方向などの制御が容
易に行え、また慣性体が移動することによる圧電素子へ
の給電手段の制約などを受けることのない、より優れた
構成の開発が求められていた。この発明は上記課題を解
決することを目的とするものである。
The power source using the above-mentioned piezoelectric element is small in size and improved in transmission efficiency as compared with the conventional drive mechanism using the motor and the gear reduction mechanism, but it is still movable. There has been a demand for the development of a better configuration that can easily control the amount, rotation angle, moving direction, and the like, and is not restricted by the means for feeding the piezoelectric element due to the movement of the inertial body. The present invention is intended to solve the above problems.

【0005】[0005]

【課題を解決するための手段】この発明は上記課題を解
決するもので、回転軸を備えた固定部材と、前記回転軸
上に回転自在に配置された回転部材と、前記固定部材に
対して前記回転部材を回転方向に変位させるように固定
部材と回転部材との間に配置された電気−機械変換素子
と、前記回転軸上に回転自在に配置され、前記回転部材
に摩擦結合する駆動要素とから構成され、前記電気−機
械変換素子に、緩やかな立上り部と急速な立下り部を持
つ波形の駆動電気信号を供給することにより駆動要素を
駆動することを特徴とするものである。
SUMMARY OF THE INVENTION The present invention is to solve the above-mentioned problems, and a fixing member having a rotating shaft, a rotating member rotatably disposed on the rotating shaft, and the fixing member. An electro-mechanical conversion element arranged between a fixed member and a rotating member so as to displace the rotating member in a rotation direction, and a drive element rotatably arranged on the rotating shaft and frictionally coupled to the rotating member. The drive element is driven by supplying a drive electric signal having a waveform having a gentle rising portion and a rapid falling portion to the electro-mechanical conversion element.

【0006】[0006]

【作用】圧電素子、磁歪素子などの電気−機械変換素子
に緩やかな立上り部を持つ駆動信号を供給すると伸び変
位を生じ、固定部材に対して回転部材を回転方向に変位
させる。これにより回転部材に摩擦結合する駆動要素は
回転部材とともに回転し、駆動される。電気−機械変換
素子に急速な立下り部を持つ復帰信号を供給すると、急
速な縮み変位を生じ、固定部材に対して回転部材は先と
逆方向に急速に変位するが、このとき回転部材に摩擦結
合する駆動要素はその位置に留まる。電気−機械変換素
子に供給する駆動電気信号の波形を調整することによ
り、所望の速度で駆動要素を駆動することができる。
When a drive signal having a gentle rising portion is supplied to an electro-mechanical conversion element such as a piezoelectric element or a magnetostrictive element, extensional displacement occurs and the rotary member is displaced in the rotational direction with respect to the fixed member. As a result, the drive element frictionally coupled to the rotary member is rotated and driven together with the rotary member. When a return signal having a rapid falling portion is supplied to the electro-mechanical conversion element, a rapid contraction displacement is caused, and the rotating member is rapidly displaced in the opposite direction to the fixed member. The drive element which is frictionally coupled remains in its position. The drive element can be driven at a desired speed by adjusting the waveform of the drive electric signal supplied to the electro-mechanical conversion element.

【0007】[0007]

【実施例】以下、この発明の実施例について説明する。
図1はこの発明を実施したロータリーアクチユエータの
外観を示す斜視図、図2はその側面の一部を切欠いた断
面図、図3は図2のA−A線に沿った切断平面図であ
る。
Embodiments of the present invention will be described below.
FIG. 1 is a perspective view showing the outer appearance of a rotary actuator embodying the present invention, FIG. 2 is a cross-sectional view with a part of its side cut away, and FIG. 3 is a plan view taken along the line AA of FIG. is there.

【0008】まず、全体の構成を説明する。図1乃至図
2において、1は固定部材、2は固定部材1に設けられ
た軸である。軸2上には、固定部材1側から第1のスラ
スト軸受4、可動部材5、摩擦円盤6、駆動力を取り出
す駆動要素であるロータ7、第2のスラスト軸受8、ば
ね9が順次配置されている。ロータ7はその外周に歯形
が形成された歯車であつて、図示しない動力伝達機構な
どに結合して駆動力を取り出すように構成されている。
First, the overall structure will be described. 1 and 2, reference numeral 1 is a fixing member, and 2 is a shaft provided on the fixing member 1. On the shaft 2, a first thrust bearing 4, a movable member 5, a friction disk 6, a rotor 7, which is a drive element for extracting a driving force, a second thrust bearing 8, and a spring 9 are sequentially arranged from the fixed member 1 side. ing. The rotor 7 is a gear having a tooth profile formed on the outer circumference thereof, and is configured to be coupled to a power transmission mechanism (not shown) or the like to take out a driving force.

【0009】また、軸2の端部にはねじ部11が形成さ
れており、ねじ部11にはナツト10が螺合しており、
ナツト10の締め付けによりばね9の圧縮力を調整し
て、可動部材5、摩擦円盤6、及びロータ7間の摩擦結
合力を調整することができるように構成されている。
A threaded portion 11 is formed at the end of the shaft 2, and a nut 10 is screwed into the threaded portion 11.
By tightening the nut 10, the compression force of the spring 9 can be adjusted to adjust the frictional coupling force between the movable member 5, the friction disk 6, and the rotor 7.

【0010】圧電素子の配置を説明する。図1乃至図
3、特に図3を参照すると明らかなように、固定部材1
には軸2と並行な方向に突出し、略法線方向の面1bを
持つ受け部1aが設けられており、また可動部材5には
前記受け部1aに対応する部分に、略法線方向の面5b
を持つ切り欠き部5aが設けられている。そして、受け
部1aの前記の面1bと、切り欠き部5aの前記の面5
bとの間には圧電素子15が配置され、圧電素子15の
上下両端部は、それぞれ面5b及び面1bに接着により
固定されている。
The arrangement of the piezoelectric elements will be described. As can be seen with reference to FIGS. 1 to 3, and in particular to FIG.
Is provided with a receiving portion 1a protruding in a direction parallel to the axis 2 and having a surface 1b in a substantially normal direction, and the movable member 5 is provided in a portion corresponding to the receiving portion 1a in a substantially normal direction. Surface 5b
Is provided with a notch portion 5a. Then, the surface 1b of the receiving portion 1a and the surface 5 of the cutout portion 5a.
The piezoelectric element 15 is disposed between the piezoelectric element 15 and the element b, and the upper and lower end portions of the piezoelectric element 15 are fixed to the surface 5b and the surface 1b, respectively, by adhesion.

【0011】圧電素子15は、その両端の電極に電圧を
印加すると、厚み方向の変位が生じるものを使用する。
As the piezoelectric element 15, a piezoelectric element which is displaced in the thickness direction when a voltage is applied to the electrodes at both ends thereof is used.

【0012】次に、その動作について説明する。図示し
ない鋸歯状波発振器から、所望の周波数及び振幅の鋸歯
状波(図5参照)を圧電素子15に供給する。
Next, the operation will be described. A sawtooth wave (see FIG. 5) having a desired frequency and amplitude is supplied to the piezoelectric element 15 from a sawtooth wave oscillator (not shown).

【0013】まず、圧電素子15の電極に鋸歯状波が印
加されていない状態では、固定部材1と可動部材5とは
図3に示す位置にあるものとする。
First, in a state where the sawtooth wave is not applied to the electrodes of the piezoelectric element 15, the fixed member 1 and the movable member 5 are assumed to be in the positions shown in FIG.

【0014】圧電素子15の電極に鋸歯状波が印加され
ると、まず、鋸歯状波の立ち上がり部分で示される緩や
かに増加する電圧により、圧電素子15はその厚みが伸
長する。すると、固定部材1の受け部1aの面1bと可
動部材5の欠き部5aの面5bとの間隙が開かれ、可動
部材5は固定部材1に対して一定角度回動する。可動部
材5に摩擦円盤6を介して圧接しているロータ7も可動
部材5と共に一定角度回動し、その外周の歯車部分は図
示しない動力伝達機構を回転駆動する。図4は、図3と
同一部分の切断平面図であるが、圧電素子15の厚みが
伸長した状態の固定部材1と可動部材5との位置を示し
ている。
When a sawtooth wave is applied to the electrodes of the piezoelectric element 15, first, the thickness of the piezoelectric element 15 is extended by the gently increasing voltage shown at the rising portion of the sawtooth wave. Then, the gap between the surface 1b of the receiving portion 1a of the fixed member 1 and the surface 5b of the cutout portion 5a of the movable member 5 is opened, and the movable member 5 rotates with respect to the fixed member 1 by a certain angle. The rotor 7, which is in pressure contact with the movable member 5 via the friction disk 6, also rotates with the movable member 5 by a certain angle, and the gear portion on the outer periphery thereof rotationally drives the power transmission mechanism (not shown). 4 is a cutaway plan view of the same portion as FIG. 3, but shows the positions of the fixed member 1 and the movable member 5 in a state where the thickness of the piezoelectric element 15 is expanded.

【0015】鋸歯状波の波形が立ち上がり部分のピーク
に達すると、圧電素子15の電極には鋸歯状波の立ち下
がり部分で示される急激に減少する電圧が印加され、圧
電素子15は急速にその厚みが縮む。これにより、可動
部材5は図3に示す位置に復帰するが、このとき、圧電
素子15の急速な縮み動作による可動部材5の逆方向の
動きはロータ7と可動部材5との間の摩擦結合よりも大
きいので、可動部材5の逆方向の動きにも拘らず、ロー
タ7はその位置に留まる。
When the waveform of the sawtooth wave reaches the peak of the rising portion, a sharply decreasing voltage indicated by the falling portion of the sawtooth wave is applied to the electrodes of the piezoelectric element 15, and the piezoelectric element 15 rapidly changes its voltage. The thickness shrinks. As a result, the movable member 5 returns to the position shown in FIG. 3, but at this time, the movement of the movable member 5 in the opposite direction due to the rapid contraction of the piezoelectric element 15 causes frictional coupling between the rotor 7 and the movable member 5. Since it is larger than the above, the rotor 7 stays in that position in spite of the reverse movement of the movable member 5.

【0016】なお、上記の動作はロータ7と可動部材5
との間の摩擦結合力に依存するから、予め軸2上のナツ
ト10によるばね9の圧縮力を調整して、適当な摩擦結
合力が得られるようにしておく。
The above operation is performed by the rotor 7 and the movable member 5.
Since it depends on the frictional coupling force between and, the compression force of the spring 9 by the nut 10 on the shaft 2 is adjusted in advance so that an appropriate frictional coupling force can be obtained.

【0017】圧電素子15の電極に鋸歯状波を印加し続
けると、可動部材5及びロータ7は上記の動作を繰り返
し、可動部材5は一定の角度範囲で往復回動を繰り返す
が、ロータ7は一定の方向に間欠的に回転駆動される。
When the sawtooth wave is continuously applied to the electrodes of the piezoelectric element 15, the movable member 5 and the rotor 7 repeat the above operation, and the movable member 5 repeats reciprocating rotation within a certain angle range, but the rotor 7 does not rotate. It is rotationally driven intermittently in a fixed direction.

【0018】また、ロータ7の質量や動力伝達機構のト
ルク、あるいは摩擦結合力を適切に設定することによ
り、慣性を利用して連続駆動させることもできる。
Further, by appropriately setting the mass of the rotor 7, the torque of the power transmission mechanism, or the friction coupling force, it is possible to continuously drive by utilizing the inertia.

【0019】圧電素子15の電極に印加される鋸歯状波
の波形Vと、圧電素子15に発生するの変位量δの関係
を図5に示す。鋸歯状波の波形は立ち上がり部分のピー
クに達した後、急速に立ち下がる波形であるが、これに
対して圧電素子15の変位量は、緩やかに伸長した後、
鋸歯状波の立ち下がり波形よりも時間遅れのある縮み方
向の変位を示す。これは圧電素子の特性によるものであ
る。
FIG. 5 shows the relationship between the waveform V of the sawtooth wave applied to the electrodes of the piezoelectric element 15 and the displacement amount δ of the piezoelectric element 15 generated. The waveform of the sawtooth wave is a waveform of rapidly falling after reaching the peak of the rising portion, whereas the displacement amount of the piezoelectric element 15 is gradually extended after gradually expanding.
It shows the displacement in the shrinking direction with a time delay from the falling waveform of the sawtooth wave. This is due to the characteristics of the piezoelectric element.

【0020】圧電素子15の電極に印加される鋸歯状波
の周波数を変えることにより、ロータ7の単位時間当た
りの駆動回数、即ち回転数を変えることができる。ま
た、鋸歯状波の振幅を変えることにより、ロータ7の1
パルス当たり駆動量を変えることができ、これにより回
転数、及び回転停止位置の精度を変えることが可能であ
る。
By changing the frequency of the sawtooth wave applied to the electrodes of the piezoelectric element 15, the number of times the rotor 7 is driven per unit time, that is, the number of rotations can be changed. Further, by changing the amplitude of the sawtooth wave,
It is possible to change the drive amount per pulse, and thus it is possible to change the rotational speed and the accuracy of the rotation stop position.

【0021】また、圧電素子15の電極に印加される鋸
歯状波の極性を変えることにより、ロータ7の回転方向
を反転させることもできる。
The rotating direction of the rotor 7 can be reversed by changing the polarity of the sawtooth wave applied to the electrodes of the piezoelectric element 15.

【0022】圧電素子15は、固定部材1と一定の角度
範囲で往復回動する可動部材5とに取り付けられてお
り、軸2の回りに何回も回転することがないので、圧電
素子15への配線は極めて簡単に行うことができる。
The piezoelectric element 15 is attached to the fixed member 1 and the movable member 5 which reciprocally rotates within a fixed angle range, and does not rotate about the shaft 2 many times. The wiring can be done very easily.

【0023】なお、以上の実施例では、駆動源の電気−
機械変換素子として圧電素子を使用したが、その他の電
気−機械変換素子、例えば磁歪素子などを使用しても、
全く同様に構成することができる。
In the above embodiment, the drive source electricity is
Although the piezoelectric element is used as the mechanical conversion element, other electro-mechanical conversion elements, such as a magnetostrictive element, are also used.
It can be configured in exactly the same way.

【0024】[0024]

【発明の効果】以上説明したとおり、この発明によれ
ば、駆動源の電気−機械変換素子に供給する電気信号の
周波数、振幅、極性を調整するだけで、移動量、回転角
度、回転方向などの制御を容易に行うことができ、ま
た、電気−機械変換素子への給電手段などに制約を受け
ることなく、小型で伝達効率のよいアクチユエータを提
供することができる。
As described above, according to the present invention, the amount of movement, the rotation angle, the rotation direction, etc. can be adjusted by simply adjusting the frequency, amplitude and polarity of the electric signal supplied to the electromechanical conversion element of the drive source. It is possible to provide a small-sized actuator with high transmission efficiency without being restricted by the power supply means for the electro-mechanical conversion element.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明のロ−タリ−アクチユエ−タの外観を
示す斜視図。
FIG. 1 is a perspective view showing the outer appearance of a rotary actuator of the present invention.

【図2】ロ−タリ−アクチユエ−タの側面断面図。FIG. 2 is a side sectional view of the rotary actuator.

【図3】図2に示すロ−タリ−アクチユエ−タのA−A
線断面図。
FIG. 3 is a rotary actuator AA shown in FIG.
FIG.

【図4】ロ−タリ−アクチユエ−タの可動部材が動作し
た位置を示す動作説明図。
FIG. 4 is an operation explanatory view showing a position where a movable member of the rotary actuator is operated.

【図5】圧電素子に印加される鋸歯状波波形と圧電素子
変位量の関係を示す図。
FIG. 5 is a diagram showing a relationship between a sawtooth wave waveform applied to a piezoelectric element and a piezoelectric element displacement amount.

【符号の説明】[Explanation of symbols]

1 固定部材 2 軸 4 第1スラスト軸受 5 可動部材 6 摩擦円盤 7 ロ−タ 8 第2スラスト軸受 9 ばね 10 ナツト 15 圧電素子 1 Fixed member 2 Shaft 4 1st thrust bearing 5 Movable member 6 Friction disk 7 Rotor 8 2nd thrust bearing 9 Spring 10 Nut 15 Piezoelectric element

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 回転軸を備えた固定部材と、 前記回転軸上に回転自在に配置された回転部材と、 前記固定部材に対して前記回転部材を回転方向に変位さ
せるように固定部材と回転部材との間に配置された電気
−機械変換素子と、 前記回転軸上に回転自在に配置され、前記回転部材に摩
擦結合する駆動要素とから構成され、 前記電気−機械変換素子に、緩やかな立上り部と急速な
立下り部を持つ波形の駆動電気信号を供給することによ
り駆動要素を駆動することを特徴とするロータリーアク
チユエータ。
1. A fixing member having a rotating shaft, a rotating member rotatably disposed on the rotating shaft, and a fixing member rotating so as to displace the rotating member in a rotation direction with respect to the fixing member. The electro-mechanical conversion element is disposed between the electro-mechanical conversion element and the member, and a drive element that is rotatably arranged on the rotation shaft and frictionally coupled to the rotation member. A rotary actuator characterized in that it drives a drive element by supplying a drive electric signal having a waveform having a rising portion and a rapid falling portion.
【請求項2】 請求項1記載のロータリーアクチユエー
タにおいて、前記電気−機械変換素子は圧電素子である
ことを特徴とするロータリーアクチユエータ。
2. The rotary actuator according to claim 1, wherein the electro-mechanical conversion element is a piezoelectric element.
【請求項3】 請求項1記載のロータリーアクチユエー
タにおいて、前記電気−機械変換素子は磁歪素子である
ことを特徴とするロータリーアクチユエータ。
3. The rotary actuator according to claim 1, wherein the electromechanical conversion element is a magnetostrictive element.
JP5072852A 1993-03-09 1993-03-09 Rotary actuator Pending JPH06261559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5072852A JPH06261559A (en) 1993-03-09 1993-03-09 Rotary actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5072852A JPH06261559A (en) 1993-03-09 1993-03-09 Rotary actuator

Publications (1)

Publication Number Publication Date
JPH06261559A true JPH06261559A (en) 1994-09-16

Family

ID=13501323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5072852A Pending JPH06261559A (en) 1993-03-09 1993-03-09 Rotary actuator

Country Status (1)

Country Link
JP (1) JPH06261559A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6092431A (en) * 1996-09-05 2000-07-25 Minolta Co., Ltd. Rotary type driving device employing electromechanical transducer and apparatus provided with the rotary type driving device
WO2002043162A1 (en) * 2000-11-23 2002-05-30 Khaled Karrai Inertial rotation device
EP1161652B1 (en) * 1999-03-06 2006-02-01 Kleindiek, Stephan Dr. Electromechanical drive element comprising a piezoelectric element
WO2006122816A1 (en) * 2005-05-20 2006-11-23 Universität Hamburg Piezoelectric motor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6092431A (en) * 1996-09-05 2000-07-25 Minolta Co., Ltd. Rotary type driving device employing electromechanical transducer and apparatus provided with the rotary type driving device
EP1161652B1 (en) * 1999-03-06 2006-02-01 Kleindiek, Stephan Dr. Electromechanical drive element comprising a piezoelectric element
WO2002043162A1 (en) * 2000-11-23 2002-05-30 Khaled Karrai Inertial rotation device
US6940210B2 (en) 2000-11-23 2005-09-06 Attocube Systems Ag Inertial rotation device
WO2006122816A1 (en) * 2005-05-20 2006-11-23 Universität Hamburg Piezoelectric motor

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