JPH0625886A - Anode for apparatus for continuous production of metallic foil - Google Patents

Anode for apparatus for continuous production of metallic foil

Info

Publication number
JPH0625886A
JPH0625886A JP34449291A JP34449291A JPH0625886A JP H0625886 A JPH0625886 A JP H0625886A JP 34449291 A JP34449291 A JP 34449291A JP 34449291 A JP34449291 A JP 34449291A JP H0625886 A JPH0625886 A JP H0625886A
Authority
JP
Japan
Prior art keywords
anode
electrode
ribs
foil
metal foil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP34449291A
Other languages
Japanese (ja)
Other versions
JP2774209B2 (en
Inventor
Takayuki Shimamune
孝之 島宗
Yasuo Nakajima
保夫 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
De Nora Permelec Ltd
Original Assignee
Permelec Electrode Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Permelec Electrode Ltd filed Critical Permelec Electrode Ltd
Priority to JP34449291A priority Critical patent/JP2774209B2/en
Publication of JPH0625886A publication Critical patent/JPH0625886A/en
Application granted granted Critical
Publication of JP2774209B2 publication Critical patent/JP2774209B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Electrolytic Production Of Metals (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

PURPOSE:To uniformalize the power feed to an insoluble metallic electrode surface and to enable the production of foil having a uniform thickness by mounting ribs at a specific angle on the surface of the insoluble metallic electrode opposite from the surface facing a cylindrical cathode. CONSTITUTION:The ribs are mounted to the surface of the insoluble metallic electrode formed to a curved surface shape opposite from the cylindrical cathode in continuous electrolysis of the metallic foil. The ribs consist of two groups mounted spirally or in other forms on the semicylindrical curved surface of an anode and are so disposed that the ribs belonging to the same group do not intersect and that the ribs of the different groups intersect with each other to enable the uniform power feed to the insoluble metallic electrode surface. The power feed to the anode is executed by mounting conductive members to the ribs.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、金属箔連続電解製造装
置に使用する陽極に関するもので、とくに回転する円筒
型陰極に対向する構造に特徴を有する不溶性金属陽極に
関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anode used in a continuous metal foil electrolytic production apparatus, and more particularly to an insoluble metal anode having a structure facing a rotating cylindrical cathode.

【0002】[0002]

【従来の技術】銅箔の製造には種々の方法があるが、主
なものは圧延ローラーによって加圧すして延伸する方法
と電解によって製造する方法である。圧延による方法
は、箔の厚みを薄くするにしたがってローラー間の距
離、箔の引張り力等の調整のために圧延装置等の制御が
複雑となるという問題点を有している。
2. Description of the Related Art There are various methods for producing a copper foil, but the main ones are a method of applying pressure by a rolling roller and stretching and a method of producing by electrolysis. The rolling method has a problem that as the thickness of the foil is reduced, the control of the rolling device or the like becomes complicated for adjusting the distance between the rollers, the tensile force of the foil, and the like.

【0003】これに対して、電解法による銅箔の製造方
法は、薄い銅箔を製造する目的に適した方法である。こ
の方法は1920年代末から1930年代に、アメリカ
人イエーツとシェークスピアによって開発され、実用化
されたものである。とくに、電解銅箔は、トランジスタ
等の素子とともに開発された新しい配線方法であるプリ
ント基板用の材料としてひろく用いられている。
On the other hand, the electrolytic method for producing a copper foil is suitable for the purpose of producing a thin copper foil. This method was developed and put into practical use by American Yates and Shakespeare in the late 1920s and 1930s. In particular, electrolytic copper foil is widely used as a material for a printed circuit board, which is a new wiring method developed together with elements such as transistors.

【0004】図3は電解法による銅箔製造装置である
が、銅箔製造装置31は電解槽32内にの電解液33中
に曲面の半分が没するように回転可能な円筒型陰極34
が設けられており、円筒型陰極に対向して曲面状の陽極
35が設けられている。円筒型陰極34と陽極35との
間の空間には陽極に設けた電解液供給スリット36から
電解液が供給され、電解液中から陰極表面に析出した金
属銅37をは、陰極面から接線方向にひきはがしながら
連続的に生産する装置である。この装置の基本的な構成
は開発の当初のものと変化していないが、より高度な製
品を能率よく製造するための工夫が広く行われており、
製品精度、製造速度は、格段の進歩をとげている。
FIG. 3 shows a copper foil manufacturing apparatus by an electrolytic method. The copper foil manufacturing apparatus 31 is a cylindrical cathode 34 which is rotatable so that half of a curved surface is immersed in an electrolytic solution 33 in an electrolytic bath 32.
Is provided, and a curved anode 35 is provided so as to face the cylindrical cathode. The space between the cylindrical cathode 34 and the anode 35 is supplied with an electrolyte solution from an electrolyte solution slit 36 provided in the anode, and the metal copper 37 deposited on the cathode surface from the electrolyte solution is tangential to the cathode surface. It is a device that produces continuously while peeling. Although the basic configuration of this device has not changed from the original one, it has been widely devised to efficiently manufacture more advanced products.
Product precision and manufacturing speed have made remarkable progress.

【0005】このために、 (1)電解液中から金属銅を析出させる円筒型の陰極材
料を、初期の硬鉛からチタン、ステンレススチール製と
し、陰極表面の精度の向上と、高電流密度の通電を可能
とした。 (2)電解槽内での電解液の流れをより速く、均一にす
ることによって、10〜20A/dm2 の電流密度であ
ったものを、50〜100A/dm2 の高電流密度での
運転が可能となった。 (3)電解液中に添加物を加えるとともに、添加物の改
良を行った。 (4)陽極を不溶性の鉛合金として、その耐久性を向上
させるとともに高電流密度の電流の通電による高速化が
行われた。
Therefore, (1) the cylindrical cathode material for depositing metallic copper from the electrolytic solution is made of titanium or stainless steel from the initial hard lead to improve the accuracy of the cathode surface and to improve the high current density. It was possible to energize. (2) faster flow of the electrolyte in the electrolytic bath, by a uniform operation of what was the current density of 10~20A / dm 2, at a high current density of 50~100A / dm 2 Became possible. (3) The additive was added to the electrolytic solution and the additive was improved. (4) The anode is made of an insoluble lead alloy to improve its durability and to increase the speed by passing a high current density current.

【0006】このようにして、基本的なプロセスは変化
してはいないが、以前のものに比べて電流密度のみで3
〜6倍又はそれ以上になっており、箔厚み分布精度も大
幅に向上している。
In this way, the basic process has not changed, but compared with the previous one, the current density alone is 3%.
It is up to 6 times or more, and the foil thickness distribution accuracy is greatly improved.

【0007】[0007]

【発明が解決しようとする課題】鉛合金製の陽極は変形
しやすく、また鉛あるいは陽極の鉛合金のその他の成分
がわずかながら電解液中へ溶出し、これらの溶出した物
質が銅箔中の不純物の原因となる。そこで、こうした問
題を解決するために鉛合金製の不溶性陽極に代えて、D
SEまたはDSAの商品名で本出願人等が提供している
チタン、タンタル等の弁金属製の基体上に白金族の金属
あるいは金属酸化物を主成分とする不溶性金属陽極が電
解銅箔の製造に採用されはじめている。
The anode made of a lead alloy is easily deformed, and lead or other components of the lead alloy of the anode are slightly eluted into the electrolytic solution, and these eluted substances are contained in the copper foil. Causes impurities. Therefore, in order to solve these problems, instead of the insoluble anode made of lead alloy, D
Manufacture of electrolytic copper foil with insoluble metal anode containing platinum group metal or metal oxide as a main component on a base made of valve metal such as titanium or tantalum provided by the applicant under the trade name of SE or DSA Is being adopted by.

【0008】この不溶性金属電極の構造は、従来の鉛合
金電極と同様であり、また高速電解に十分な金属イオン
を供給し、いわゆるめっき焼けを防ぐために、円筒状陰
極と対向する半円筒状陽極面との間で間隔が均一な流路
を形成し、電解液を層流で流すことが行われている。そ
こで、一体で形成した滑らかな面を有する半円筒状の曲
面の内側を陽極面としており、半円筒状の陽極の外側か
ら給電している。
The structure of this insoluble metal electrode is similar to that of a conventional lead alloy electrode, and in order to supply sufficient metal ions for high-speed electrolysis and prevent so-called plating burn, a semi-cylindrical anode facing a cylindrical cathode. A flow path having a uniform interval is formed between the surface and the surface, and the electrolytic solution is caused to flow in a laminar flow. Therefore, the inside of a semi-cylindrical curved surface having a smooth surface formed integrally is used as the anode surface, and power is supplied from the outside of the semi-cylindrical anode.

【0009】陽極の大きさは、電解槽の大きさ、構造に
よって異なるが、板厚40mm、幅1500mm、直径
3000mmの半円筒状の大型の電極もあり、4分の1
の円弧に分割しているものもある。大型の電極では陽極
の材料としてチタンなどの比重の比較的小さな部材を使
用しても、300〜500kgに達している。
The size of the anode depends on the size and structure of the electrolytic cell, but there is also a large semi-cylindrical electrode having a plate thickness of 40 mm, a width of 1500 mm and a diameter of 3000 mm, which is a quarter.
Some are divided into arcs. Even in the case of a large-sized electrode, even if a member having a relatively small specific gravity such as titanium is used as the material of the anode, the amount reaches 300 to 500 kg.

【0010】不溶性金属電極は鉛電極に比べて電極の寿
命が長いが、数千〜2万時間程度で電極が失活するため
に、再活性化のために陽極を金属箔電解装置から取り外
して、再生処理を行う必要があるが、重量の大きな陽極
の再活性化には電極の取扱および電極の処理に長時間を
要し、再生時の製造停止時間が長くなり経済性でも問題
があった。
The insoluble metal electrode has a longer life than the lead electrode, but since the electrode is deactivated in about several thousand to 20,000 hours, the anode is removed from the metal foil electrolyzer for reactivation. However, it is necessary to regenerate, but reactivating a heavy anode requires a long time for handling and treating the electrode, and the production stop time during regeneration is long, which is a problem in terms of economy. .

【0011】また、陽極は半円筒状のものを複数の部材
に分割して取扱を容易とすることが行われるが、このよ
うな場合は、分割したそれぞれの部分に均等に電流を流
すために、板状の電極の板厚を薄くすることはできず、
また複雑な導電接続手段が必要となる。さらに、板状電
極相互の接続部が完全に同一平面上にないと、角の部分
に電流が集中し電極の寿命が短くなるという問題点があ
った。
In addition, a semi-cylindrical anode is divided into a plurality of members to facilitate the handling. In such a case, in order to apply an electric current evenly to each of the divided parts. , It is not possible to reduce the plate thickness of the plate-shaped electrode,
In addition, complicated conductive connection means are required. Further, if the connecting portions of the plate-shaped electrodes are not completely on the same plane, there is a problem that the current concentrates at the corners and the life of the electrodes is shortened.

【0012】[0012]

【課題を解決するための手段】本発明は、金属箔連続電
解製造装置用の陽極であって、円筒状陰極に対向して曲
面状に不溶性金属電極を形成し、不溶性金属電極の円筒
状陰極と対向する面との反対面には、リブを取り付けた
ものである。とくにリブは陽極の半円筒状の曲面にスパ
イラル状等に取り付けられた2つの群からなり、同一の
群に属するリブは交わらず、異なる群のリブが相互に交
わるように配置して、不溶性金属電極面へ均一に給電す
ることを可能としたものであり、リブには導電部材を取
り付けて陽極への給電を行っている。
The present invention relates to an anode for a continuous metal foil electrolytic production apparatus, in which an insoluble metal electrode is formed in a curved surface so as to face a cylindrical cathode, and a cylindrical cathode of the insoluble metal electrode is formed. Ribs are attached to the surface opposite to the surface opposite to. In particular, the ribs consist of two groups attached in a spiral shape to the semi-cylindrical curved surface of the anode. Ribs belonging to the same group are arranged so that the ribs of different groups intersect with each other, and It is possible to uniformly supply power to the electrode surface, and a conductive member is attached to the rib to supply power to the anode.

【0013】本発明で使用する不溶性金属電極は、棒あ
るいは線をすだれ状にならべたもの、エキスパンデッド
メタル、網状のメッシュ等を基体として表面に電極触媒
物質を被覆したものである。
The insoluble metal electrode used in the present invention is one in which rods or wires are arranged in a comb shape, expanded metal, a mesh of mesh or the like is used as a substrate and the surface is coated with an electrode catalyst substance.

【0014】従来の金属箔連続電解製造装置は、高速で
金属箔を得るために、陰極表面に金属イオンが速やかに
供給されるように高速で電解液を陰極円筒面を流すこと
が必要とされ、このために陰極に対向する陽極の表面も
凹凸のない平滑な曲面を有する半円筒状の陽極を用いな
ければめっき焼けと称するむらが形成されたり、厚み分
布の均一なものが得られないと考えられていた。しかし
ながら、本発明者らが検討をしたところ、円筒状陰極と
陽極との電極間隔が5mm以上、好ましくは7mm以上
あれば、陽極表面に1〜2mm程度の凹凸が形成されて
も、電解液の流速が50cm/秒以上であれば、陽極面
に部分的に電解液の滞留が生じるものの陰極面での電解
液の流れには影響がなく、またそのような凹凸が陽極面
全体に均一に分散して存在していれば、得られる金属箔
の品質にも影響をおよぼさないことを見いだした。
In order to obtain a metal foil at a high speed, the conventional continuous metal foil electrolytic production apparatus is required to flow an electrolytic solution through the cathode cylindrical surface at a high speed so that metal ions are quickly supplied to the cathode surface. For this reason, even if the surface of the anode facing the cathode is not a semi-cylindrical anode having a smooth curved surface without unevenness, unevenness called plating burn is formed, or a uniform thickness distribution cannot be obtained. Was being considered. However, as a result of studies by the present inventors, if the electrode distance between the cylindrical cathode and the anode is 5 mm or more, preferably 7 mm or more, even if irregularities of about 1 to 2 mm are formed on the anode surface, When the flow velocity is 50 cm / sec or more, the electrolytic solution is partially retained on the anode surface, but the flow of the electrolytic solution on the cathode surface is not affected, and such irregularities are uniformly dispersed over the entire anode surface. It has been found that, if present, it does not affect the quality of the obtained metal foil.

【0015】そこで、本発明では直径2〜4mmの金属
棒をすだれ状にならべたものや、エキスパンデッドメタ
ルまたは金属の細線を編んだウーブンメッシュ(woo
ven mesh)等の電極面に若干の凹凸がある電極
を使用した。これらは凹凸があるため、いくつかのブロ
ックに分けてそれらを組み合わせても、組み合わせた部
分に生じた段差による電流集中が起こらず、電極面全体
がほぼ一様な高さとなるために、端部等での電流集中が
生じないという特徴を合わせ持つことができた。また、
リブあるいは不溶性金属電極の成形加工において、下地
の台の精度を良くしておけば、高い極面の精度が容易に
得られるという特徴を有している。
Therefore, in the present invention, a metal rod having a diameter of 2 to 4 mm is arranged in a comb shape, or an expanded metal or a woven mesh of thin metal wires is used.
An electrode having a slight unevenness on the electrode surface such as a ven mesh) was used. Since these have irregularities, even if they are divided into several blocks and they are combined, the current concentration due to the steps generated in the combined parts does not occur, and the entire electrode surface has a substantially uniform height. It was possible to have the feature that current concentration does not occur at the same time. Also,
In forming a rib or an insoluble metal electrode, if the accuracy of the base table is improved, a high polar surface accuracy can be easily obtained.

【0016】またこのような電極を使用することによっ
て、エキスパンデッドメタルであれば、裏面の面積を含
めて板状の電極の2倍、また3mmの直径の金属棒のす
だれ状の陽極の場合には、隙間なく配置した場合には
1.5倍の面積のものが得られ、金属棒の間に1.5m
m程度の間隔を設けながら並べると、裏面まで使用する
ことができるので2倍の面積となり、電極面積の増加に
より実質的な電流密度を低下させることができ、陽極の
寿命が長くなる。これらのエキスパンデッドメタル又は
金属棒のすだれ状の電極に均一に通電をするためには、
背面に導電リブを取り付ける必要がある。そのリブの最
も簡単な構造としては、陽極の外面に回転軸に平行な直
線と交わるように円周方向に形成する方法が考えられる
が、そのような構造の場合には、リブを取り付けた部分
に電流集中が生じ、得られる箔の厚みが箔の幅方向に分
布を生じるという問題が起こるので、スパイラル状等の
円周方向にも、回転軸方向にも変位して取り付けること
が好ましい。その結果、極面との溶接箇所も円筒状電極
の軸に対して、平均化して配置されるので、より幅方向
の厚みの均一性が良好となる。また、これらのリブには
導電部材を取りつけて給電することができる。
Further, by using such an electrode, in the case of an expanded metal, in the case of a comb-shaped anode of a metal rod having a diameter of 3 mm, which is twice as large as that of a plate-shaped electrode including the area of the back surface. In case of arranging without gap, the area of 1.5 times is obtained, and the distance between the metal bars is 1.5m.
If they are arranged with an interval of about m, they can be used up to the back surface, so that the area is doubled, and the substantial current density can be reduced due to the increase in the electrode area, and the life of the anode is extended. To evenly energize the interdigital electrodes of these expanded metals or metal rods,
It is necessary to attach a conductive rib to the back. The simplest structure of the rib is to form it on the outer surface of the anode in a circumferential direction so that it intersects with a straight line parallel to the rotation axis. Since current concentration occurs in the foil and the thickness of the obtained foil is distributed in the width direction of the foil, it is preferable to displace the foil in both the circumferential direction such as a spiral shape and the rotation axis direction. As a result, the welded portion with the pole face is also arranged with being averaged with respect to the axis of the cylindrical electrode, so that the thickness uniformity in the width direction becomes better. In addition, a conductive member can be attached to these ribs to supply power.

【0017】しかも、本発明の金属を互いに接して並べ
たすだれ状の電極等では、一方の面から他方の面へ液が
漏れるが、陽極と陰極の間を大きな流速で電解液を流し
ているので、電極間隔の電解液の状態には何等影響を及
ぼさない。
Moreover, in the interdigital electrode or the like in which the metals of the present invention are arranged in contact with each other, the liquid leaks from one surface to the other surface, but the electrolytic solution flows at a high flow rate between the anode and the cathode. Therefore, it has no effect on the state of the electrolytic solution in the electrode interval.

【0018】[0018]

【作用】本発明の金属箔連続電解製造装置用の陽極は、
円筒状陰極に対向して曲面状に不溶性金属電極を形成し
たものであるが、不溶性金属電極の円筒状陰極と対向す
る面との反対面には、陽極の半円筒状の曲面にスパイラ
ル状等の軸および軸に直角の方向からは変位したリブを
設けたものであり、平板を曲面状に加工した陽極に比較
して、構造的には複雑となるが、板状体を曲面状に加工
した電極に比して交換や再生が容易な陽極を得ることが
でき、表面に凹凸を有している不溶性金属電極を用いる
ので、複数に分割しても分割部分の電流集中がなく、分
割構造とすることも容易となる。
The function of the positive electrode for the metal foil continuous electrolytic production apparatus of the present invention is as follows.
The insoluble metal electrode is formed in a curved surface so as to face the cylindrical cathode, and the semi-cylindrical curved surface of the anode has a spiral shape or the like on the surface opposite to the surface of the insoluble metal electrode facing the cylindrical cathode. It has a rib that is displaced from the axis and the direction perpendicular to the axis, and is structurally more complicated than an anode made by processing a flat plate into a curved surface, but a plate-shaped body is processed into a curved surface. It is possible to obtain an anode that can be easily exchanged and regenerated compared to other electrodes, and because an insoluble metal electrode with irregularities is used on the surface, there is no current concentration in the divided parts, and there is a divided structure. It is also easy to

【0019】[0019]

【実施例】本発明の金属箔電解製造装置の陽極を図面に
よって説明する。図1は陽極をリブを形成した側からの
平面に展開した図である。図2は陽極の側面図である。
The anode of the metal foil electrolytic production apparatus of the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing the anode developed on a plane from the side where the ribs are formed. FIG. 2 is a side view of the anode.

【0020】図1に示す金属箔電解製造装置用の陽極1
は、棒状の陽極2をすだれ状に曲面状に配置して、リブ
3によって相互の結合をしている。そしてリブには導電
部材4を取り付けており、導電部材を通じて陽極に給電
することができる。
Anode 1 for metal foil electrolytic production apparatus shown in FIG.
The rod-shaped anodes 2 are arranged in a comb-like curved shape and are connected to each other by the ribs 3. A conductive member 4 is attached to the rib so that power can be supplied to the anode through the conductive member.

【0021】実施例1 直径2mm、長さ300mmのチタン線を、間隔を設け
ずに並べたすだれ状の部材を使用して、幅300mm、
直径300mmの円筒状の陰極を有する金属箔の連続電
解製造装置用の半円筒状の陽極を製造した。厚さ1.5
mm、幅10mmのチタン板からなるリブをチタン線と
45度の角度をなすように10cmの間隔で配置してい
げた状に編んだ。このリブを直径304mmの曲面状に
成形加工し、スポット溶接によりすだれ状のチタン線を
取りつけた。チタン線は円筒の軸方向に接して並べた。
リブ上に厚さ10mmのチタン板からなる導電部材をチ
タン棒と平行に取りつけた。
Example 1 A titanium wire having a diameter of 2 mm and a length of 300 mm was arranged without any interval, and a comb-shaped member was used.
A semi-cylindrical anode for a continuous electrolytic production apparatus for metal foil having a cylindrical cathode having a diameter of 300 mm was produced. Thickness 1.5
Rims made of a titanium plate having a width of 10 mm and a width of 10 mm were knitted in a bent manner by arranging them at intervals of 10 cm so as to form an angle of 45 degrees with the titanium wire. The rib was formed into a curved surface having a diameter of 304 mm, and a comb-shaped titanium wire was attached by spot welding. The titanium wire was arranged in contact with the axial direction of the cylinder.
A conductive member made of a titanium plate having a thickness of 10 mm was mounted on the rib in parallel with the titanium rod.

【0022】電極面には、厚さ2μmの酸化イリジウム
を熱分解法によって形成し陽極とした。
On the electrode surface, iridium oxide having a thickness of 2 μm was formed by a thermal decomposition method to form an anode.

【0023】得られた陽極を用いて、150g/lの硫
酸と100g/lの無水硫酸銅からなる水溶液に50p
pmとなるようにゼラチンを加えて電解液とした。これ
を陰極面での流速が50cm/秒となるように供給しな
がら陰極面での電流密度100A/dm2 で電解し、陰
極を回転し厚さ20μmの銅箔を得た。
Using the obtained anode, an aqueous solution containing 150 g / l of sulfuric acid and 100 g / l of anhydrous copper sulfate was added at 50 p / s.
Gelatin was added to give an electrolyte solution of pm. This was electrolyzed at a current density of 100 A / dm 2 on the cathode surface while being supplied so that the flow rate on the cathode surface was 50 cm / sec, and the cathode was rotated to obtain a copper foil having a thickness of 20 μm.

【0024】1時間電解したところで、箔の幅方向の厚
み分布を2cm間隔で測定した。測定は、箔を10cm
切りとり、それを2cm間隔に切ってその重量で計測す
る方法によって行ったが、箔の幅方向の厚みの分布は均
一であった。
After electrolysis for 1 hour, the thickness distribution of the foil in the width direction was measured at 2 cm intervals. The foil is 10 cm
It was cut into pieces, cut into 2 cm intervals and weighed, and the thickness distribution in the width direction of the foil was uniform.

【0025】比較例1 実施例1で用いたものと同じ厚み1.5mm、幅10m
mのチタン板をチタン棒に対して直角に交わるように5
cm間隔で設けて、スポット溶接によってすだれ状のチ
タン棒に取り付けた点を除いて実施例1と同様の方法に
よって電極を作成し、実施例1と同様に電解を行ったと
ころ、得られた銅箔にはリブを取り付けた箇所とリブ間
では10%の厚みの相違が生じた。
Comparative Example 1 Same thickness as used in Example 1, 1.5 mm, width 10 m
5m of titanium plate should intersect the titanium rod at right angle.
Electrodes were prepared in the same manner as in Example 1 except that the electrodes were provided at cm intervals and were attached to a comb-shaped titanium rod by spot welding, and electrolysis was performed in the same manner as in Example 1 to obtain copper. There was a 10% thickness difference between where the ribs were attached to the foil and between the ribs.

【0026】[0026]

【発明の効果】本発明の金属箔連続電解製造装置用の陽
極は、不溶性金属電極の円筒状陰極と対向する面との反
対面には、リブを取り付けたものであり、とくにリブは
陽極の半円筒状の曲面にスパイラル状であって、いげた
状に編むように取り付けられており、不溶性金属電極面
へ均一に給電することを可能とすると共に、リブへの取
付に対する影響を電極面上に均等に分散することができ
るので、電極表面に溶接点ができるような構造であって
も、均一な厚みの箔を製造することができ、またリブ上
で分割した陽極を接続することによって、陽極を複数に
分割しても分割部分の電流集中がなく、均一な厚みの箔
の製造可能な陽極が得られる。
INDUSTRIAL APPLICABILITY The anode for the continuous metal foil electrolytic production apparatus of the present invention has a rib attached to the surface of the insoluble metal electrode opposite to the surface facing the cylindrical cathode. It is spirally attached to a semi-cylindrical curved surface, and is attached so as to be knitted in a raised shape, which makes it possible to supply power to the insoluble metal electrode surface evenly, and to affect the attachment to the rib on the electrode surface. Since it can be dispersed evenly, it is possible to manufacture a foil with a uniform thickness even with a structure where welding points are formed on the electrode surface, and by connecting the divided anodes on the ribs, Even if it is divided into a plurality of parts, the current is not concentrated at the divided parts, and an anode capable of producing a foil having a uniform thickness can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の金属箔電解製造装置用の陽極を平面に
展開した図である。
FIG. 1 is a diagram in which a positive electrode for a metal foil electrolytic production apparatus of the present invention is developed on a plane.

【図2】本発明の金属箔電解製造装置用の陽極の側面図
である。
FIG. 2 is a side view of an anode for a metal foil electrolytic production apparatus of the present invention.

【符号の説明】[Explanation of symbols]

1…金属箔電解製造装置、2…電解槽、3…電解液、4
…円筒型陰極、5…陽極、6…不溶性金属電極、7…ね
じ穴、8…ビス、9…電解液供給スリット、21…銅箔
製造装置、22…電解槽、23…電解液、24…円筒型
陰極、25…陽極、26…電解液供給スリット、27…
金属銅
DESCRIPTION OF SYMBOLS 1 ... Metal foil electrolytic production apparatus, 2 ... Electrolyte tank, 3 ... Electrolyte solution, 4
... Cylindrical cathode, 5 ... Anode, 6 ... Insoluble metal electrode, 7 ... Screw hole, 8 ... Screw, 9 ... Electrolyte supply slit, 21 ... Copper foil manufacturing device, 22 ... Electrolyzer, 23 ... Electrolyte, 24 ... Cylindrical cathode, 25 ... Anode, 26 ... Electrolyte supply slit, 27 ...
Metal copper

─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成3年12月27日[Submission date] December 27, 1991

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】図3[Name of item to be corrected] Figure 3

【補正方法】追加[Correction method] Added

【補正内容】[Correction content]

【図3】電解法による銅箔製造装置の1例を示す図であ
る。
FIG. 3 is a diagram showing an example of a copper foil manufacturing apparatus by an electrolysis method.

【手続補正2】[Procedure Amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】符号の説明[Correction target item name] Explanation of code

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【符号の説明】 1…金属箔電解製造装置、2…電解槽、3…電解液、4
…円筒型陰極、5…陽極、6…不溶性金属電極、7…ね
じ穴、8…ビス、9…電解液供給スリット、31…銅箔
製造装置、32…電解槽、33…電解液、34…円筒型
陰極、35…陽極、36…電解液供給スリット、37…
金属銅
[Explanation of reference numerals] 1 ... Metal foil electrolytic production apparatus, 2 ... Electrolyte tank, 3 ... Electrolyte solution, 4
... Cylindrical cathode, 5 ... Anode, 6 ... Insoluble metal electrode, 7 ... Screw hole, 8 ... Screw, 9 ... Electrolyte supply slit, 31 ... Copper foil manufacturing device, 32 ... Electrolyzer, 33 ... Electrolyte, 34 ... Cylindrical cathode, 35 ... Anode, 36 ... Electrolyte supply slit, 37 ...
Metal copper

【手続補正3】[Procedure 3]

【補正対象書類名】図面[Document name to be corrected] Drawing

【補正対象項目名】図3[Name of item to be corrected] Figure 3

【補正方法】追加[Correction method] Added

【補正内容】[Correction content]

【図3】 ─────────────────────────────────────────────────────
[Figure 3] ─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成4年12月25日[Submission date] December 25, 1992

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】特許請求の範囲[Name of item to be amended] Claims

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【特許請求の範囲】[Claims]

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 円筒状陰極の表面に金属箔を電解によっ
て析出させる金属箔連続製造装置用の陽極において、円
筒状陰極に対向して曲面状に不溶性金属電極を形成し、
不溶性金属電極の円筒状陰極と対向する面との反対面に
は、陰極の回転軸と平行な直線と直角以外の角度で交わ
るリブを設けたことを特徴とする金属箔連続製造装置用
の陽極。
1. An anode for a continuous metal foil manufacturing apparatus, in which a metal foil is electrolytically deposited on the surface of a cylindrical cathode, to form a curved insoluble metal electrode facing the cylindrical cathode,
An anode for a continuous metal foil manufacturing apparatus, characterized in that a rib intersecting a straight line parallel to the rotation axis of the cathode at an angle other than a right angle is provided on the surface of the insoluble metal electrode opposite to the surface facing the cylindrical cathode. .
【請求項2】 リブは2つの群から構成されており、同
一の群のリブは交わらず、異なる群のリブと交わるとと
もに、電極面全体に均一な電流分布が得られるように配
置したことを特徴とする請求項2記載の金属箔連続製造
装置用の陽極。
2. The rib is composed of two groups, and ribs of the same group do not intersect but ribs of different groups, and the ribs are arranged so as to obtain a uniform current distribution over the entire electrode surface. The anode for a continuous metal foil manufacturing apparatus according to claim 2, which is characterized.
【請求項3】 不溶性金属電極が棒または線状の金属を
並べたすだれ状の基体、エキスパンデッドメタル、網状
の基体に電極触媒被覆を形成したものであることを特徴
とする請求項1記載の金属箔連続製造装置用の陽極。 【請求項3】 電極面を複数の部分に分割可能としたこ
とを特徴とする請求項1記載の金属箔連続製造装置用の
陽極。
3. The electrode according to claim 1, wherein the insoluble metal electrode is a comb-shaped substrate in which rods or linear metals are arranged, an expanded metal, or a net-shaped substrate on which an electrode catalyst coating is formed. Anode for continuous metal foil manufacturing equipment. 3. The anode for a continuous metal foil manufacturing apparatus according to claim 1, wherein the electrode surface can be divided into a plurality of parts.
JP34449291A 1991-12-26 1991-12-26 Anode for continuous metal foil production equipment Expired - Fee Related JP2774209B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34449291A JP2774209B2 (en) 1991-12-26 1991-12-26 Anode for continuous metal foil production equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34449291A JP2774209B2 (en) 1991-12-26 1991-12-26 Anode for continuous metal foil production equipment

Publications (2)

Publication Number Publication Date
JPH0625886A true JPH0625886A (en) 1994-02-01
JP2774209B2 JP2774209B2 (en) 1998-07-09

Family

ID=18369688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34449291A Expired - Fee Related JP2774209B2 (en) 1991-12-26 1991-12-26 Anode for continuous metal foil production equipment

Country Status (1)

Country Link
JP (1) JP2774209B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000068465A1 (en) * 1999-05-06 2000-11-16 Union Steel Manufacturing Co., Ltd. THE APPARATUS FOR MANUFACTURING Ni-Fe ALLOY THIN FOIL
JP2016125122A (en) * 2015-01-08 2016-07-11 Jfeスチール株式会社 Electroplating device
JP2017511428A (en) * 2014-02-19 2017-04-20 インドゥストリエ・デ・ノラ・ソチエタ・ペル・アツィオーニ Anode structure for metal electrowinning cell
KR20210060215A (en) 2019-11-18 2021-05-26 주식회사 포스코 Imaging apparatus and sintering installation having thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000068465A1 (en) * 1999-05-06 2000-11-16 Union Steel Manufacturing Co., Ltd. THE APPARATUS FOR MANUFACTURING Ni-Fe ALLOY THIN FOIL
US6428672B1 (en) 1999-05-06 2002-08-06 Union Steel Manufacturing Co., Ltd. Apparatus and method for manufacturing Ni—Fe alloy thin foil
JP2017511428A (en) * 2014-02-19 2017-04-20 インドゥストリエ・デ・ノラ・ソチエタ・ペル・アツィオーニ Anode structure for metal electrowinning cell
JP2016125122A (en) * 2015-01-08 2016-07-11 Jfeスチール株式会社 Electroplating device
KR20210060215A (en) 2019-11-18 2021-05-26 주식회사 포스코 Imaging apparatus and sintering installation having thereof

Also Published As

Publication number Publication date
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