JPH06258139A - Transmission type position detector - Google Patents

Abstract

PURPOSE:To easily adjust first and second reflection mirrors without requiring sufficient space at the other side of an object to be measured. CONSTITUTION:An illumination light 4 applied from a line-shaped light source 10 provided at one side of an object 2 to be measured is retracted to illumination light with a small spread angle by a cylindrical lens 11. A first reflection mirror 12 bends the light path of the illumination light and a second reflection mirror 13 further bends the light path of the illumination light. Then, the illumination light reflected by the second reflection mirror 13 enters an image-forming lens 14 via the object 2 to be measured and further forms an image on the light-reception surface of a line sensor 15. Therefore, when adjustment deviation occurs in the first and second reflection mirrors 12 and 13, reflection light being applied to the object 2 to be measured is shifted in parallel for normal reflection light being applied to the object 2 to be measured.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transmission used for detecting the position of a drive system of plant equipment in an electric power plant, a public plant, a steel plant, etc., and in the FA (factory automation) field for detecting the position of a work member, etc. The present invention relates to a mold position detecting device.

[0002]

2. Description of the Related Art FIG. 6 shows, for example, "visual inspection automation technology".
(Nikkan Kogyo Shimbun, published on January 13, 1987) is an overall view showing a conventional transmission type position detecting device, in which 1 is a transparent plate, 2 is an object to be measured, and 3 is a diffusion plate. Four
Is illumination light, and 5 is an optical sensor.

Next, the operation will be described. The illumination light 4 projected from below the diffusion plate 3 is guided to the transparent plate 1 via the diffusion plate 3. In this case, since the DUT 2 is placed on the transparent plate 1, the illumination light 4 guided to the transparent plate 1 is the
It is incident on the optical sensor 5 via. Therefore, the optical sensor 5 captures a portion of the DUT 2 as a dark image,
The outer part of is captured as a bright image. Then, the position of the DUT 2 is detected based on the bright and dark image captured by the optical sensor 5.

As described above, the transmissive position detecting device shown in FIG. 6 projects the illumination light 4 from the opposite side of the optical sensor 5, but the transmissive position detecting device shown in FIG. The reflection mirror 6 is arranged on the opposite side to illuminate the illumination light 4 into the optical sensor 5
It is arranged on the same side as. As a result, the transmission type position detection device shown in FIG. 7 can be applied even when a sufficient space cannot be secured on the opposite side of the optical sensor 5. In FIG. 7, the same members as those in FIG. 6 are designated by the same reference numerals and the description thereof will be omitted.

Next, the operation will be described. The illumination light 4 projected from the optical sensor 5 side is reflected by the reflection mirror 6 (see FIG. 8A), and is guided to the transparent plate 1 via the diffusion plate 3. As a result, the position of the DUT 2 can be detected as in the transmission type position detection device shown in FIG.

[0006]

Since the conventional transmission type position detecting device is constructed as described above, the device for projecting the illumination light 5 from the side opposite to the optical sensor 5 shown in FIG.
As shown in FIG. 8B, the set angle of the reflection mirror 6 is θ.
When there is an error of θ, an error of θ ° occurs in the illumination light 4 reflected by the reflection mirror 6. Therefore, the illumination light 4 reflected by the reflection mirror 6 has a larger error in the irradiation position as the illumination light 4 moves away from the reflection mirror 6, so that there is a problem in that positioning of the reflection mirror 6 requires highly accurate adjustment. .

The inventions of claims 1 to 5 were made in order to solve such a problem, and an object thereof is to provide a transmission type position detecting device which can easily adjust the positioning of the reflecting mirror 6. And

[0008]

According to a first aspect of the present invention, there is provided a transmission type position detecting device, wherein a light source provided on one side of an object to be measured and an illumination light emitted from the light source are refracted and collimated. A condenser lens for converting light, a first reflecting mirror provided on the other side of the object to be measured and bending the optical path of the parallel light by 90 °, and a first reflecting mirror provided on the other side of the object to be measured. The optical path of the parallel light refracted by 90 ° by the reflection mirror is further 90
A second reflecting mirror that bends the beam and irradiates the object to be measured with parallel light from the side opposite to the light source; and the parallel light that is provided on one side of the object to be measured and is irradiated onto the object to be measured. An image forming means for forming an image, a light receiving surface provided at the image forming position of the parallel light, and an optical sensor for photoelectrically converting an optical image formed on the light receiving surface, and an electric signal output from the optical sensor. And a position detecting means for detecting the position of the object to be measured based on the above.

In the transmission type position detecting device according to the invention of claim 2, the illumination light emitted from the linear light source is cylindrically refracted into parallel light having a rectangular cross section, and the parallel light is divided into first and second parallel lights. It is reflected by a reflection mirror and irradiates the object to be measured.
The parallel light emitted to the object to be measured forms an image on the light receiving surface of the optical sensor through one image forming lens.

According to a third aspect of the present invention, there is provided a transmission type position detecting device, wherein a plurality of image forming lenses for forming parallel light beams reflected by a second reflecting mirror and radiated on an object to be measured are inverted on a light receiving surface of an optical sensor. Are arranged in parallel, and a light shielding plate is provided between the respective imaging lenses.

In the transmission type position detecting device according to the invention of claim 4, an image inversion prism is provided in front of the plurality of imaging lenses so as to face each of the imaging lenses.

In the transmission type position detecting device according to the invention of claim 5, a gradient index lens is used as the image forming means.

[0013]

In the transmission type position detecting device according to the first aspect of the present invention, the light source is provided on one side of the object to be measured, and the illumination light emitted from the light source is refracted into parallel light by the condenser lens. The first and second reflection mirrors are provided in a V shape on the other side of the object to be measured, the first reflection mirror bends the optical path of the parallel light emitted from the condenser lens by 90 °, and the second reflection mirror is 90
The optical path of the parallel light that has been bent is further bent by 90 degrees. As a result, the parallel light reflected by the second reflecting mirror is set parallel to the parallel light emitted from the condenser lens. Then, the parallel light reflected by the second reflecting mirror enters the image forming means via the object to be measured, and is imaged on the light receiving surface of the optical sensor via the image forming means. The optical sensor photoelectrically converts the received optical image and outputs an electric signal to the position detecting means. The position detecting means detects the position of the object to be measured based on the input electric signal.

As described above, since the irradiation light projected from the light source is guided to the object to be measured through the first and second reflecting mirrors provided in a V shape, the other of the objects to be measured is By arranging the first and second reflecting mirrors in a narrow space on the side, the reflected light of the second reflecting mirror and the incident light to the first reflecting mirror can be set in parallel. Therefore, when the first and second reflecting mirrors are misaligned, the reflected light of the second reflecting mirror shifts in the parallel direction with respect to the regular reflected light. The amount of deviation does not increase.

In the transmission type position detecting device according to the second aspect of the present invention, the illumination light emitted from the linear light source is refracted by the cylindrical lens to form parallel light having a rectangular cross section. Then, the parallel light is reflected by the first and second reflecting mirrors and illuminates the object to be measured. The parallel light that irradiates the object to be measured is imaged on the light receiving surface of the optical sensor through one imaging lens.
Therefore, the position of the object to be measured can be detected within a relatively short range within the outer diameter of one imaging lens.

In the transmission type position detecting device according to the invention of claim 3, a plurality of image forming lenses are arranged in parallel, and a light shielding plate is provided between the respective image forming lenses. Then, the parallel light reflected by the second reflection mirror and applied to the object to be measured is imaged upside down on the light receiving surface of the optical sensor by the plurality of imaging lenses. Therefore, the position of the object to be measured can be detected within a relatively narrow range (wide range) by restoring the inverted light image formed on the light receiving surface of the optical sensor by the position detecting means.

In the transmission type position detecting device according to the invention of claim 4, since the image inversion prism is provided in front of each of the imaging lenses, the optical image is inverted in front of each of the imaging lenses.
Therefore, an erecting light image can be formed on the light receiving surface of the optical sensor through each of the image forming lenses. Further, since the light shielding plate between the respective imaging lenses can be removed, it is possible to prevent the portion corresponding to the peripheral edge of the imaging lens from becoming dark.

In the transmission type position detecting device according to the fifth aspect of the present invention, since the gradient index lens is used as the image forming means, an erecting light image can be formed on the light receiving surface of the optical sensor.

[0019]

【Example】

Example 1. An embodiment of the present invention will be described below. Claim 1 corresponds to the first to fourth embodiments, and claim 2 corresponds to the first embodiment. Further, claim 3 corresponds to the second embodiment,
Claim 4 corresponds to Example 3. Further, claim 5 corresponds to the fourth embodiment. FIG. 1 is a perspective view of a transmission type position detecting device according to the present invention. In the figure, 10 is a linear light source (light source), 11 is a cylindrical lens (condensing lens), 12 is a first reflection mirror, 13 is a second reflection mirror, and the first and second reflection mirrors 12 and 13 are covered. It is arranged on the opposite side of the linear light source 10 with respect to the measurement object 2. Further, 14 is an imaging lens (imaging means), 15 is a line sensor (optical sensor), and the line sensor 15 is arranged on the same side as the linear light source 10 with the DUT 2 as a reference. Reference numeral 16 is a signal processor (position detecting means).
In FIG. 1, the same members as those of the conventional transmission type position detecting device shown in FIGS. 6 and 7 are designated by the same reference numerals and the description thereof will be omitted.

Next, the operation will be described. The illumination light 4 projected from the linear light source 10 is condensed by the cylindrical 11 and becomes parallel light having a rectangular cross section. The optical path of this parallel light is bent 90 ° by the first reflecting mirror 12, and the optical path is bent 90 ° by the second reflecting mirror 13. As a result, the optical path of the parallel light emitted from the cylindrical lens 11 and the optical path of the parallel light reflected by the second reflection mirror 13 are bent by 180 ° and are parallel to each other (see FIG. 2A). Then, the parallel light reflected by the second reflection mirror 13 is transmitted from the opposite side of the line sensor 15 to the object to be measured 2
Irradiate. The parallel light emitted to the DUT 2 passes through the DUT 2, passes through the imaging lens 14, and forms an image on the light receiving surface of the line sensor 15. Therefore, the line sensor 15 images the portion of the DUT 2 as a dark image and the portion outside the DUT 2 as a bright image. Next, an image signal is output from the line sensor 15 to the signal processor 16, and the signal processor 16 outputs the measured object 2 based on the input image signal.
Detect the position of. Then, the signal processor 16 outputs a position detection signal of the DUT 2.

In this way, by arranging the first reflecting mirror 12 and the second reflecting mirror 13 in a V shape on the opposite side of the line sensor 15 with respect to the DUT 2, the linear light source 10 can be obtained. It can be arranged on the same side as the line sensor 15. Further, by arranging the first and second reflection mirrors 12 and 13 in a V shape, the optical path of the parallel light incident on the first reflection mirror 12 and the optical path of the parallel light reflected by the second reflection mirror 13 are arranged. Since I made the condition that and were bent in parallel,
Even when the first and second reflection mirrors 12 and 13 are misaligned, the reflected light 4 reflected by the second reflection mirror 13 is shifted in parallel, and therefore, even if it is separated from the second reflection mirror 13. The gap is not enlarged. Further, the second reflection mirror 13
Since the parallel light reflected from is formed in a rectangular shape with a cross section having a predetermined width, it is possible to absorb the shift amount of the parallel light reflected by the second reflection mirror 13.

Example 2. In the first embodiment shown in FIG. 1, the case where one image forming lens 14 is used in the transmission type position detecting device has been described, but a plurality of image forming lenses 14 are used as in the second embodiment shown in FIG. May be. Thereby, the position of the DUT 2 can be detected even when the DUT 2 has an elongated shape. Hereinafter, the transmission type position detecting device according to the second embodiment will be described with reference to FIG. In FIG. 3, the same members as those of the first embodiment shown in FIG. 1 are designated by the same reference numerals and the description thereof will be omitted. In FIG. 3, 20 is a light shielding plate, and the light shielding plate 20 is disposed between the imaging lenses 14A, 14B, 14C.

Next, the operation will be described. The parallel light reflected by the second reflecting mirror 13 shown in FIG.
The object to be measured 2 is irradiated from the opposite side of 5. In this case, the parallel light passes through the DUT 2 and forms the imaging lenses 14A, 14B,
An image is formed on the light receiving surface of the line sensor 15 via 14C. In this case, since the light shielding plate 20 is provided between the imaging lenses 14A, 14B and 14C, the imaging lenses 14A, 14B
The light blocking plate 20 blocks the illumination light 4 from each of the imaging lenses 14A, 14B, and 14C so that the images of B and 14C do not overlap. Therefore, as in the first embodiment, the line sensor 15
Based on the input signal from the
The position detection signal of is output. Since the image forming lenses 14A, 14B and 14C formed on the light receiving surface of the line sensor 15 are inverted, the signal processor 16 erects the inverted image of each image forming lens 14A, 14B and 14C. Need to restore state.

Example 3. FIG. 4 shows a third embodiment, which is different from that shown in FIG.
2 is different from the second embodiment shown in FIG. Hereinafter, the transmission type position detection device of the third embodiment will be described with reference to FIG. In FIG. 4, the same members as those of the second embodiment shown in FIG. 3 are designated by the same reference numerals and the description thereof will be omitted. In FIG. 4, 21
A, 21B and 21C are image inversion prisms, and the image inversion prisms 21A, 21B and 21C are provided below and facing the imaging lenses 14A, 14B and 14C, respectively. The image inversion prisms 21A, 21B and 21C and the imaging lenses 14A, 14B and 14C form an imaging means. As a result, the image inversion prisms 21A, 21B, 2
Since the optical image of the DUT 2 can be inverted before entering the imaging lenses 14A, 14B, and 14C at 1C,
An erect image can be obtained by the inverted action of the imaging lenses 14A, 14B, 14C. Therefore, the inverted image restoration processing by the signal processor 16 required in the second embodiment can be eliminated. An Amity prism is known as the image inversion prism.

Further, for example, the imaging lenses 14A, 14B,
When the magnification of 14C is 1, the plurality of imaging lenses 14
In the method of arranging A, 14B, and 14C in parallel, the portion corresponding to the periphery of each imaging lens 14A, 14B, and 14C becomes dark. However, as in the third embodiment, the light blocking plate 2
When 0 is removed, each imaging lens 14A, 14B, 1
It is possible to prevent the portion corresponding to the peripheral edge of 4C from becoming dark. Therefore, it is possible to suppress unevenness in the intensity distribution of the light image obtained on the light receiving surface of the line sensor 15.

Example 4. Example 4 is shown in FIG. 5, and Example 4 differs from Example 3 in that a gradient index lens is used. Hereinafter, the transmission type position detection device according to the fourth embodiment will be described with reference to FIG. In FIG. 5, the same members as those of the third embodiment shown in FIG. 4 are designated by the same reference numerals and the description thereof will be omitted. In FIG. 5, reference numeral 22 denotes a gradient index lens, and the gradient index lens 22 can obtain an erect image with a magnification of 1. Therefore, when the magnification of the imaging lenses 14A, 14B, and 14C of Example 3 is 1, the use of the gradient index lens 22 allows
It is possible to obtain the same effect as in the case where the image inversion prisms 21A, 21B and 21C and the imaging lenses 14A, 14B and 14C of Example 3 are used.

[0027]

As described above, according to the invention of claim 1, the first and second reflection mirrors are provided in a V shape on the other side of the object to be measured, and the reflected light of the second reflection mirror is provided. Since it is configured to be bent by 180 ° with respect to the incident light on the first reflection mirror, it is not necessary to provide a light source or a condenser lens on the other side of the object to be measured, and it is not necessary to secure a sufficient space. . Further, when an adjustment deviation occurs in the first and second reflection mirrors, the reflected light of the second reflection mirror shifts in the parallel direction with respect to the regular reflection light, so the deviation amount of the parallel light is the distance from the second reflection mirror. Does not expand even if they are far apart. Therefore, the adjustment of the first and second reflecting mirrors can be performed relatively easily, and the adjustment of the first and second reflecting mirrors can be facilitated.

Further, according to the second aspect of the invention, since the single imaging lens is configured so that the position of the object to be measured can be detected within a relatively short range, the transmission position detecting device It can be simplified.

Further, according to the third aspect of the invention, the inverted light image formed on the light receiving surface of the optical sensor through each of the image forming lenses is restored to the upright state by the position detecting means, and is relatively moved. Since the position of the object to be measured is detected within the elongated range, the position of the object to be measured having an elongated shape can be detected.

According to the invention of claim 4, since the image inversion prism is provided in front of each image forming lens and the light shielding plate between each image forming lens is removed, the optical sensor It is possible to form an erect light image on the light receiving surface, and it is possible to prevent the portion corresponding to the peripheral edge of the imaging lens from becoming dark. Therefore, since it is not necessary to restore the signal of the inverted light image to the erect image by the position detecting means, the signal processing can be facilitated and the unevenness of the intensity distribution of the light image on the light receiving surface of the photosensor can be reduced. it can.

Further, according to the invention of claim 5, since the gradient index lens for forming an erect light image on the light receiving surface of the optical sensor is used, the inverted light image is formed by the position detecting means. Since it is not necessary to restore the signal of 1 to the erect image, the signal processing can be facilitated, and the unevenness of the intensity distribution of the optical image on the light receiving surface of the optical sensor can be reduced.

[Brief description of drawings]

FIG. 1 is a first embodiment of a transmission type position detection device according to the present invention.
FIG.

FIG. 2 is an explanatory diagram for explaining the adjustment of the angles of the first and second reflection mirrors of the transmission type position detection device according to the present invention.

FIG. 3 is a second embodiment of the transmission type position detecting device according to the present invention.
It is a principal part enlarged view which shows.

FIG. 4 is a third embodiment of the transmission type position detecting device according to the present invention.
It is a principal part enlarged view which shows.

FIG. 5 is a fourth embodiment of the transmission type position detecting device according to the present invention.
It is a principal part enlarged view which shows.

FIG. 6 is an overall view of a conventional transmissive position detection device.

FIG. 7 is an overall view showing another embodiment of a conventional transmission type position detecting device.

8 is an explanatory diagram for explaining adjustment of an angle of a reflection mirror of the transmission type position detection device shown in FIG.

[Explanation of symbols]

2 DUT 4 Illumination light 10 Linear light source (light source) 11 Cylindrical lens (condensing lens) 12 First reflecting mirror 13 Second reflecting mirror 14, 14A, 14B, 14C Imaging lens (imaging means) 15 Line sensor (Optical sensor) 16 Signal processor (position detection means) 20 Light-shielding plates 21A, 21B, 21C Image inversion prism 22 Refractive index distribution type lens

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[Procedure amendment]

[Submission date] August 19, 1993

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] Full text

[Correction method] Change

[Correction content]

[Document name] Statement

Title: Transmissive position detection device

[Claims]

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transmission used for detecting the position of a drive system of plant equipment in an electric power plant, a public plant, a steel plant, etc., and in the FA (factory automation) field for detecting the position of a work member, etc. The present invention relates to a mold position detecting device.

[0002]

2. Description of the Related Art FIG . 7 shows, for example, "visual inspection automation technology".
(Nikkan Kogyo Shimbun, published on January 13, 1987) is an overall view showing a conventional transmission type position detecting device, in which 1 is a transparent plate, 2 is an object to be measured, and 3 is a diffusion plate. Four
Is illumination light, and 5 is an optical sensor.

Next, the operation will be described. The illumination light 4 projected from below the diffusion plate 3 is guided to the transparent plate 1 via the diffusion plate 3. In this case, since the DUT 2 is placed on the transparent plate 1, the illumination light 4 guided to the transparent plate 1 is the
It is incident on the optical sensor 5 via. Therefore, the optical sensor 5 captures a portion of the DUT 2 as a dark image,
The outer part of is captured as a bright image. Then, the position of the DUT 2 is detected based on the bright and dark image captured by the optical sensor 5.

As described above, the transmissive position detecting device shown in FIG. 7 projects the illumination light 4 from the opposite side of the optical sensor 5, but the transmissive position detecting device shown in FIG. The reflection mirror 6 is arranged on the opposite side to illuminate the illumination light 4 into the optical sensor 5
It is arranged on the same side as. As a result, the transmission type position detection device shown in FIG. 8 can be applied even when a sufficient space cannot be secured on the opposite side of the optical sensor 5. In FIG. 8 , the same members as those in FIG. 7 are designated by the same reference numerals and the description thereof will be omitted.

Next, the operation will be described. The illumination light 4 projected from the optical sensor 5 side is reflected by the reflection mirror 6 (see FIG. 9A ), and is guided to the transparent plate 1 via the diffusion plate 3. As a result, the position of the DUT 2 can be detected as in the transmission type position detection device shown in FIG .

[0006]

Since the conventional transmission type position detecting device is constructed as described above, in the device for projecting the illumination light 4 from the side opposite to the optical sensor 5 shown in FIG.
As shown in FIG. 9B, the set angle of the reflection mirror 6 is θ.
If there is an error of, the illumination light 4 reflected by the reflection mirror 6
2θ error occurs. Therefore, the illumination light 4 reflected by the reflection mirror 6 has a larger error in the irradiation position as the illumination light 4 moves away from the reflection mirror 6, so that there is a problem in that positioning of the reflection mirror 6 requires highly accurate adjustment. .

The inventions of claims 1 to 5 were made in order to solve such a problem, and an object thereof is to provide a transmission type position detecting device which can easily adjust the positioning of the reflecting mirror 6. And

[0008]

According to a first aspect of the present invention, there is provided a transmission type position detecting device which refracts and spreads a light source provided on one side of an object to be measured and illumination light emitted from the light source.
And, Relais lens to a small illumination light corners, the provided on the other side of the object to be measured, a first reflecting mirror for bending Ri folding the optical path of the illumination light, provided on the other side of the object to be measured , said first optical path of the illumination light reflected by the reflecting mirror in fold <br/> bent further, the first to radiate the illumination <br/> light to the object to be measured from the opposite side of the light source It is placed at an angle of 90 ° with the reflection mirror.
A second reflecting mirror that is placed, an image forming unit that is provided on one side of the object to be measured, and forms an image of the illumination light with which the object to be measured is irradiated, and a light receiving surface at the image formation position of the illumination light. And an optical sensor for photoelectrically converting an optical image formed on the light receiving surface, and a position detecting means for detecting the position of the object to be measured based on an electric signal output from the optical sensor. It is a thing.

According to a second aspect of the present invention, there is provided a transmission type position detecting device, wherein the illumination light emitted from a linear light source is used as a cylindrical light .
It is refracted by a cull lens and has a rectangular cross section with a small divergence angle.
To bright light, irradiating the illumination light to the first, the object to be measured is reflected by the second reflecting mirror. Then, the object to be measured was irradiated
The illumination light forms an image on the light receiving surface of the optical sensor through one image forming lens.

In the transmission type position detecting device according to the third aspect of the invention, the object to be measured is reflected by the second reflecting mirror.
A plurality of image forming lenses that form an inverted image of the illumination light on the light receiving surface of the optical sensor are arranged in parallel.

In the transmission type position detecting device according to the invention of claim 4, an image inversion prism is provided in front of or behind the plurality of imaging lenses so as to face each of the imaging lenses.

In the transmission type position detecting device according to the invention of claim 5, a gradient index lens is used as the image forming means.

[0013]

[Action] transmission type position detecting device in the first aspect of the present invention, a light source on one side of the object to be measured is refracted to a small illumination light spread angle the illumination light irradiated from the light source with a lens. The first and second reflection mirrors are on the other side of the DUT.
Provided the form of a slanted roof forming 90 degree angle, the first reflecting mirror in fold song <br/> up the optical path of the emitted illumination light from the condenser lens, the second reflecting mirror is bent Ri folding bending Ri fold in the optical path of the illumination light is <br/> et al. Thereby, the illumination light reflected by the second reflecting mirror is set parallel to the illumination light emitted from the lenses. Then, the illumination reflected by the second reflection mirror
Bright light is incident on the imaging means through the object to be measured, is formed on the light receiving surface of the optical sensor via the imaging means. The optical sensor photoelectrically converts the received optical image and outputs an electric signal to the position detecting means. The position detecting means detects the position of the object to be measured based on the input electric signal.

Thus, the irradiation light emitted from the light source is
Since the light is guided to the object to be measured through the first and second reflecting mirrors provided in the shape of a V forming an angle of 90 ° , the first and second spaces are provided in the narrow space on the other side of the object to be measured. By disposing a reflecting mirror, the reflected light of the second reflecting mirror and the incident light to the first reflecting mirror can be set in parallel. Therefore, when the first and second reflecting mirrors are misaligned, the reflected light of the second reflecting mirror shifts in a direction parallel to the regular reflected light, so that the illumination light is separated even if the distance from the second reflecting mirror is large. The amount of deviation does not increase.

In the transmission type position detecting device according to the second aspect of the present invention, the illumination light emitted from the linear light source is refracted by the cylindrical lens and has a small divergence angle with a rectangular cross section.
Use illumination light. Then, this illumination light is reflected by the first and second reflection mirrors and illuminates the object to be measured. The illumination light that irradiates the object to be measured is imaged on the light receiving surface of the optical sensor through one imaging lens. Therefore, it is possible to detect the position of the object within the relatively elongate extent.

In the transmission type position detecting device according to the invention of claim 3, a plurality of image forming lenses are arranged in parallel . Its to and inverted formed on the light receiving surface of the light sensor by the second reflecting mirror reflected a plurality of imaging lenses the illumination light irradiated to the measurement object. Therefore, the inverted light image formed on the light receiving surface of the optical sensor is restored by the position detecting means, whereby the invention according to claim 2 is achieved.
The position of the object to be measured can be detected within a narrower range (wider range) than the case .

In the transmission type position detecting device according to the fourth aspect of the invention, since the image inversion prism is provided in front of or behind each of the imaging lenses, the optical image is inverted in front of each of the imaging lenses. Therefore, Ru can image the erect optical image on the light receiving surface of the optical sensor via the respective imaging lenses.

In the transmission type position detecting device according to the fifth aspect of the present invention, since the gradient index lens is used as the image forming means, an erecting light image can be formed on the light receiving surface of the optical sensor.

[0019]

EXAMPLES Example 1. An embodiment of the present invention will be described below. Claim 1 corresponds to the first to fourth embodiments, and claim 2 corresponds to the first embodiment. Further, claim 3 corresponds to the second embodiment,
Claim 4 corresponds to Example 3. Further, claim 5 corresponds to the fourth embodiment. FIG. 1 is a perspective view of a transmission type position detecting device according to the present invention. In the figure, 10 is a linear light source (light source), 11 is a cylindrical lens ( lens ),
12 is a first reflection mirror, 13 is a second reflection mirror,
The first and second reflection mirrors 12 and 13 have an angle of 90 ° with each other.
And the linear light source 10 with respect to the DUT 2 as a reference.
Is located on the opposite side of. Further, 14 is an imaging lens (imaging means), 15 is a line sensor (optical sensor), and the line sensor 15 is arranged on the same side as the linear light source 10 with the DUT 2 as a reference. Reference numeral 16 is a signal processor (position detecting means). In addition, in FIG .
7, the same members as those of the conventional transmissive position detecting device shown in FIG. 8 are designated by the same reference numerals and the description thereof will be omitted.

Next, the operation will be described. The illumination light 4 emitted from the line light source 10 is a cylindrical lens 1
The light is condensed by 1 and has a rectangular cross section, and becomes illumination light with a small spread angle . The illumination light optical path in fold <br/> bent at the first reflecting mirror 12, the optical path is bent Ri folded further by the second reflecting mirror 13. As a result, the optical path of the illumination light emitted from the cylindrical lens 11 and the optical path of the illumination light reflected by the second reflection mirror 13 are bent 180 ° and are parallel to each other (see FIGS. 2 (a) and 2 (b)) . ). Then, the illumination light reflected by the second reflecting mirror 13 irradiates the DUT 2 from the opposite side of the line sensor 15. The illumination light applied to the DUT 2 passes through the DUT 2, passes through the imaging lens 14, and forms an image on the light receiving surface of the line sensor 15. Therefore, the line sensor 15 images the portion of the DUT 2 as a dark image and the portion outside the DUT 2 as a bright image. Next, an image signal is output from the line sensor 15 to the signal processor 16, and the signal processor 16 detects the position of the DUT 2 based on the input image signal. Then, the signal processor 16 outputs a position detection signal of the DUT 2.

As described above, by arranging the first reflecting mirror 12 and the second reflecting mirror 13 on the opposite side of the line sensor 15 with respect to the object to be measured 2 in the shape of a V with an angle of 90 °. The linear light source 10 can be arranged on the same side as the line sensor 15. In addition, by arranging the first and second reflection mirrors 12 and 13 in a V shape having an angle of 90 ° , the optical path of the parallel light incident on the first reflection mirror 12 and the second reflection mirror 13 are reflected. Since the optical path of the collimated parallel light is bent in parallel, when the first and second reflection mirrors 12 and 13 are misaligned (see FIG. 2).
(See (b)) , since the reflected light 4 reflected by the second reflecting mirror 13 is shifted in parallel, the second reflecting mirror 13
The gap does not expand even if you move away from. Further, since the illumination light reflected from the second reflection mirror 13 is formed in a rectangular shape with a cross section having a predetermined width, the deviation amount of the illumination light reflected by the second reflection mirror 13 can be absorbed. It is possible. In Example 1, the line sensor was used as the detector.
However, even if a two-dimensional optical sensor such as a camera is used,
The effect is obtained.

Example 2. In the first embodiment shown in FIG. 1, the case where one image forming lens 14 is used in the transmission type position detecting device has been described, but a plurality of image forming lenses 14 are used as in the second embodiment shown in FIG. May be. By this
Ri, it is possible to detect the position of the object 2 also fine long range. Hereinafter, the transmission type position detecting device according to the second embodiment will be described with reference to FIG. Note that you omit will be denoted by the same reference numerals are given to the same similar components in the embodiment 1 in FIG. 1 on FIG.

Next, the operation will be described. The illumination light having a small spread angle reflected by the second reflecting mirror 13 shown in FIG. 3 irradiates the DUT 2 from the opposite side of the line sensor 15. In this case, the illumination light you formed on the light receiving surface of the line sensor 15 through the imaging lens 14A is transmitted through the object to be measured 2, 14B, and 14C. Slave I, the signal processor 16 based on an input signal from Similarly the line sensor 15 as in Example 1 to output a position detection signal of the object 2. The image forming lenses 14A, 14B, 1 formed on the light receiving surface of the line sensor 15
Since 4C is inverted, it is necessary for the signal processor 16 to restore the inverted image for each imaging lens 14A, 14B, 14C to the upright state. The imaging lens 14A,
The images of 14B and 14C are received by the line sensor 15.
If the surfaces overlap, use the light shield 20 as shown in FIG.
By configuring the images so that they do not overlap, the DUT
The position of 2 can be detected.

Example 3. FIG. 5 shows a third embodiment, and the third embodiment includes an image inversion prism.
2 is different from the second embodiment shown in FIG. Hereinafter, the transmission type position detecting device of the third embodiment will be described with reference to FIG. Note that the figure
5 , the same members as those of the second embodiment of FIG. 3 are designated by the same reference numerals and the description thereof will be omitted. In FIG. 5 , 21
A, 21B and 21C are image inversion prisms, and the image inversion prisms 21A, 21B and 21C are provided below and facing the imaging lenses 14A, 14B and 14C, respectively. The image inversion prisms 21A, 21B and 21C and the imaging lenses 14A, 14B and 14C form an imaging means. As a result, the image inversion prisms 21A, 21B, 2
Since the optical image of the DUT 2 can be inverted before entering the imaging lenses 14A, 14B, and 14C at 1C,
An erect image can be obtained by the inverted action of the imaging lenses 14A, 14B, 14C. Therefore, the inverted image restoration processing by the signal processor 16 required in the second embodiment can be eliminated. An Amity prism is known as the image inversion prism. In addition, in Figure 5, the image is inverted
Prisms 21A, 21B, and 21C are for imaging lens 14
It is provided below A, 14B, 14C, but above
The same effect can be obtained by providing them facing each other.

[0025], For example, several of the imaging lens 14A,
In the system in which 14B and 14C are arranged in parallel, the portions corresponding to the peripheral edges of the respective imaging lenses 14A, 14B and 14C may become dark . However, in Example 3 , the result is
Image lenses 14A, 14B and 14C are magnified to 1 ×
The weight on the line sensor 15 made by the matching lenses
When configured so that each of the imaging lenses 14A, 14
It is possible to prevent the portions corresponding to the peripheral edges of B and 14C from becoming dark. Therefore, it is possible to suppress unevenness in the intensity distribution of the light image obtained on the light receiving surface of the line sensor 15.

Example 4. Example 4 is shown in FIG. 6, and Example 4 differs from Example 3 in that a gradient index lens is used. Hereinafter, the transmission type position detecting device of the fourth embodiment will be described with reference to FIG. In FIG. 6 , the same members as those of the third embodiment shown in FIG. 5 are designated by the same reference numerals and the description thereof will be omitted. In FIG. 6 , reference numeral 22 denotes a gradient index lens, and the gradient index lens 22 can obtain an erect image with a magnification of 1. Therefore, when the magnification of the imaging lenses 14A, 14B, and 14C of Example 3 is 1, the use of the gradient index lens 22 allows
It is possible to obtain the same effect as in the case where the image inversion prisms 21A, 21B and 21C and the imaging lenses 14A, 14B and 14C of Example 3 are used.

[0027]

As described above, according to the first aspect of the invention, the first and second reflecting mirrors 90 are provided on the other side of the object to be measured.
Since it is arranged in the shape of a square with an angle of゜ and the reflected light of the second reflecting mirror is bent 180 ° with respect to the incident light to the first reflecting mirror, it is arranged on the other side of the DUT. Since it is not necessary to provide a light source or a condenser lens, it is not necessary to secure a sufficient space. Further, when an adjustment deviation occurs in the first and second reflecting mirrors, the reflected light of the second reflecting mirror is displaced in the parallel direction with respect to the regular reflected light, so the deviation amount of the illumination light is the distance from the second reflecting mirror. Does not expand even if they are far apart.
Therefore, the adjustment of the first and second reflecting mirrors can be performed relatively easily, and the adjustment of the first and second reflecting mirrors can be facilitated.

Further, according to the invention of claim 2, a line shape
Illuminated by a light source and detected by a line sensor.
The position of the object to be measured is
Can be issued.

Further, according to the invention of claim 3, the inverted light image formed on the light receiving surface of the optical sensor through each image forming lens is restored to the upright state by the position detecting means.
Since, it is the Turkish detecting the position of the object to be measured in further elongated within (within a wide range).

According to the invention of claim 4, an image inversion prism is provided in front of or behind each imaging lens.
Since much like an arrangement that, Ru can image the erect optical image on the light receiving surface of the light sensor. What slave, it is not necessary to restore the signal of the inverted light image into an erect image by the position detecting means, it is possible to facilitate signal processing. Furthermore, the magnification of the imaging lens
If is multiplied by 1, the part corresponding to the periphery of the imaging lens becomes dark
This can be prevented, and unevenness in the intensity distribution of the optical image on the light receiving surface of the optical sensor can be reduced.

Further, according to the invention of claim 5, since the gradient index lens for forming an erect light image on the light receiving surface of the optical sensor is used, the inverted light image is formed by the position detecting means. Since it is not necessary to restore the signal of 1 to the erect image, the signal processing can be facilitated, and the unevenness of the intensity distribution of the optical image on the light receiving surface of the optical sensor can be reduced.

[Brief description of drawings]

FIG. 1 is a first embodiment of a transmission type position detection device according to the present invention.
FIG.

FIG. 2 is an explanatory diagram for explaining the adjustment of the angles of the first and second reflection mirrors of the transmission type position detection device according to the present invention.

FIG. 3 is a second embodiment of the transmission type position detecting device according to the present invention.
It is a principal part enlarged view which shows.

FIG. 4 is a second embodiment of the transmission type position detecting device according to the present invention .
It is a principal part enlarged view which shows the other example .

FIG. 5 is a third embodiment of the transmission type position detecting device according to the present invention .
It is a principal part enlarged view which shows.

FIG. 6 is a fourth embodiment of the transmission type position detecting device according to the present invention .
It is a principal part enlarged view which shows.

FIG. 7 is an overall view of a conventional transmission type position detection device.

FIG. 8 is another embodiment of the conventional transmission type position detection device.
FIG.

FIG. 9 shows a reflection mirror of the transmission type position detection device shown in FIG .
It is explanatory drawing for demonstrating adjustment of an angle.

[Description of Reference Signs] 2 DUT 4 Illumination light 10 Linear light source (light source) 11 Cylindrical lens (condensing lens) 12 First reflection mirror 13 Second reflection mirror 14, 14A, 14B, 14C Imaging lens (imaging 15) Line sensor (optical sensor) 16 Signal processor (position detecting means) 20 Light-shielding plate 21A, 21B, 21C Image inversion prism 22 Refractive index distribution type lens

[Procedure Amendment 2]

[Document name to be corrected] Drawing

[Correction target item name] All drawings

[Correction method] Change

[Correction content]

[Figure 7]

[Figure 8]

[Figure 1]

[Fig. 2]

[Figure 3]

[Figure 4]

[Figure 5]

[Figure 6]

[Figure 9]

Claims (5)

[Claims] 1. A light source provided on one side of an object to be measured, a condenser lens for refracting illumination light emitted from the light source to make parallel light, and provided on the other side of the object to be measured. The
A first reflecting mirror that bends the optical path of the parallel light by 90 ° and an optical path of the parallel light that is provided on the other side of the DUT and is refracted by 90 ° by the first reflecting mirror are further bent by 90 °. A second reflecting mirror for irradiating the parallel light to the object to be measured from the opposite side of the light source, and an image forming an image of the parallel light irradiating the object to be measured, which is provided on one side of the object to be measured. Means, an optical sensor provided with a light receiving surface at the image forming position of the parallel light, and photoelectrically converting the optical image formed on the light receiving surface, and the measured object based on an electric signal output from the optical sensor. A transmission type position detecting device, comprising: a position detecting means for detecting the position of an object. 2. A linear light source provided on one side of an object to be measured, a cylindrical lens that refracts illumination light emitted from the light source to form parallel light having a rectangular cross section, and the object to be measured. Is provided on the other side of the
The first reflection mirror that bends by 0 ° and the optical path of the parallel light that is provided on the other side of the object to be measured and is refracted by 90 ° by the first reflection mirror are further bent by 90 °, and are opposite to the linear light source. A second reflecting mirror for irradiating the object to be measured with parallel light from a side, and an image of the parallel light irradiating the object to be measured which is provided on one side of the object to be measured 1
Based on an electric signal output from the optical sensor, an imaging lens, an optical sensor provided with a light receiving surface at the image forming position of the parallel light, and photoelectrically converting an optical image formed on the light receiving surface. And a position detecting means for detecting the position of the object to be measured. 3. A linear light source provided on one side of the object to be measured, a cylindrical lens that refracts illumination light emitted from the light source to form parallel light having a rectangular cross section, and the object to be measured. Is provided on the other side of the
The first reflection mirror that bends by 0 ° and the optical path of the parallel light that is provided on the other side of the object to be measured and is refracted by 90 ° by the first reflection mirror are further bent by 90 °, and are opposite to the linear light source. A second reflecting mirror for irradiating the object to be measured with parallel light from a side, and parallel light provided on one side of the object to be measured, which is parallel to the object to be measured, is formed as an inverted light image. A plurality of image-forming lenses, a light-shielding plate disposed between the image-forming lenses, and a light-receiving surface at the image-forming position of the parallel light, and the inverted light image formed on the light-receiving surface. And a position sensor for detecting the position of the object to be measured by restoring the inverted light image based on an electric signal output from the light sensor. Mold position detector. 4. A line-shaped light source provided on one side of an object to be measured, a cylindrical lens that refracts illumination light emitted from the light source to form parallel light having a rectangular cross section, and the object to be measured. Is provided on the other side of the
The first reflection mirror that bends by 0 ° and the optical path of the parallel light that is provided on the other side of the object to be measured and is refracted by 90 ° by the first reflection mirror are further bent by 90 °, and are opposite to the linear light source. A second reflection mirror for irradiating the object to be measured with parallel light from a side, and an image which is provided in parallel on one side of the object to be measured and which inverts an optical image of the parallel light with which the object to be measured is irradiated. Inverting prisms, a plurality of imaging lenses that are provided so as to face each of the image inversion prisms, and form an optical image inverted by the image inversion prisms as an erected image, and the erected optical image. A light sensor provided with a light receiving surface at an image forming position, and photoelectrically converting an erect light image formed on the light receiving surface,
A position detecting device for detecting the position of the object to be measured based on an electric signal output from the optical sensor. 5. A linear light source provided on one side of an object to be measured, a cylindrical lens that refracts illumination light emitted from the light source to form parallel light having a rectangular cross section, and the object to be measured. Is provided on the other side of the
The first reflection mirror that bends by 0 ° and the optical path of the parallel light that is provided on the other side of the object to be measured and is refracted by 90 ° by the first reflection mirror are further bent by 90 °, and are opposite to the linear light source. A second reflecting mirror for irradiating the object to be measured with parallel light from a side, and a refractive index distribution that is provided on one side of the object to be measured and erect-images the parallel light applied to the object to be measured. A mold lens, an optical sensor having a light-receiving surface provided at the erect image-forming position and photoelectrically converting an erect light image formed on the light-receiving surface, and the optical sensor based on an electric signal output from the optical sensor. A transmission type position detecting device, comprising: a position detecting means for detecting a position of an object to be measured.