JPH06253393A - Ultrasonic probe - Google Patents

Abstract

PURPOSE:To prevent infinitesimal piezoelectric pieces from chipping off at the time of cutting a piezoelectric plate and to maintain good acoustic characteristics by exposing conductive lines on one end side of a flexible substrate, providing a reinforcing plate whose strength is weaker than the piezoelectric plate and interposing it between the piezoelectric plate and a backing material. CONSTITUTION:One end side of the flexible substrate 5 is interposed between the piezoelectric plate 1 and the backing material 2, dividing into infinitesimal piezoelectric pieces 3 is performed and also respective electrodes are led out by the conductive lines 4. Then, for the flexible substrate 5, the conductive lines 4 on one end side are exposed on a main surface side and the reinforcing plate 9 composed of a resin substrate is fixed on a resin film 6b by thermocompression fixing or the like on the other main surface side. Then, one end side (the conductive lines 4) of the flexible substrate 5 is connected to the piezoelectric plate 1 by a conductive adhesive material and then is fixed on the backing material 2, gaps between the respective conductive lines 4 are cut and divided and formation is performed. Thus, since only a conductive adhesive material layer and the reinforcing plate 9 weak strength are cut at the time of cutting the piezoelectric plate 1, the edge of a knife is not shaken.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an application field of an array type ultrasonic probe (referred to as an array type probe), and more particularly to a flexible substrate for leading electrodes of a piezoelectric plate element group.

[0002]

BACKGROUND OF THE INVENTION Array-type probes are widely used in ultrasonic diagnostic equipment for medical use as an ultrasonic wave transmitting / receiving section that is electronically linear or sector driven. In recent years, due to the widespread use of this type of device, it is desired to facilitate designing and manufacturing and to respond immediately.

[0003]

2. Description of the Related Art FIG. 3 is a diagram of an ultrasonic probe for explaining a conventional example. The ultrasonic probe is formed by fixing a piezoelectric plate 1 made of PZT (lead zirconate titanate) or the like on a backing material 2 and then dividing it into a plurality of minute piezoelectric pieces 3. However, electrodes (not shown) are provided on both main surfaces of the piezoelectric plate 1. Specifically, a flexible substrate 5 having a conductive path 4 formed is provided on one end side between the piezoelectric plate 1 and the backing material 2. The flexible substrate 5 has a conductive path 4 formed by printing between the resin films 6 (ab), and a common electric path 7 made of a copper thin plate is provided on the tip side "FIG. 3 (ab)". And the piezoelectric plate 1
A cut 8 that reaches the backing material 2 from above is provided, the piezoelectric plate 1 and the common electric path 7 are cut at the same time, and each electrode is led out by the conductive path 4.

[0004]

However, in the ultrasonic probe having the above-mentioned structure, the piezoelectric plate 1 and the common electric path 7 are simultaneously cut off. Then, since the common electric path 7 is made of a copper thin plate, when the cutting is performed, the blade tip is shaken to cause a defective portion in the minute piezoelectric piece 3, or the gap w is made non-uniform. When an acoustic matching layer made of glass or the like (not shown) is attached to the piezoelectric plate 1 and cut from the acoustic matching layer, the acoustic matching layer is also damaged. Therefore, there is a problem that acoustic characteristics are deteriorated. In addition, without forming the common electric circuit 7,
It is conceivable that the conductive paths 4 of the flexible substrate 5 are connected to the piezoelectric plate 1 at predetermined intervals in advance and then fixed and cut on the backing material 2. However, in this case, due to the fear of disconnection of the conductive path 4 due to the flexibility of the flexible substrate 2 and the difficulty of the connection work at a predetermined interval, it has been impossible to actually employ it.

[0005]

SUMMARY OF THE INVENTION It is an object of the present invention to provide an ultrasonic probe which prevents damage to a minute piezoelectric piece when a piezoelectric plate is cut and maintains good acoustic characteristics.

[0006]

The present invention basically solves the problem that a conductive path is exposed at one end side of a flexible substrate, a reinforcing plate having a strength lower than that of a piezoelectric plate is provided, and the reinforcing plate is interposed between the piezoelectric plate and a backing material. Use it as a means. Hereinafter, one embodiment of the present invention will be described together with its operation.

[0007]

1 is an exploded perspective view of an ultrasonic probe for explaining an embodiment of the present invention. It should be noted that the same parts as those of the previous conventional example are given the same numbers to simplify the description. In the ultrasonic probe, as in the prior art example, one end side of the flexible substrate 5 is interposed between the piezoelectric plate 1 and the backing material 2 to divide it into minute piezoelectric pieces 3 and each electrode is led out by the conductive path 4. To do. Then, in this embodiment, the flexible substrate 5
Exposes the conductive path 4 on one end side on the one main surface side.
On the other main surface side, a reinforcing plate 9 made of a resin substrate is fixed on the resin film 6b by thermocompression bonding or the like. Then, after connecting one end side (conductive path 4) of the flexible substrate 5 to the piezoelectric plate 1 with a conductive adhesive, it is fixed on the backing material 2,
The conductive paths 4 are formed by cutting and dividing.

With such a structure, since the reinforcing plate 9 is provided on the one end side of the flexible member, it is possible to connect the piezoelectric plate 1 while suppressing the flexibility and keeping the conductive paths 4 uniform. When the piezoelectric plate 1 is cut, the common electric path 7 (copper plate) is not cut, and only the conductive adhesive layer and the reinforcing plate having lower strength are cut, so that the blade edge does not shake. Therefore, it is possible to prevent the micro piezoelectric piece 3 from being damaged and to make the gap w uniform. Further, when an acoustic matching layer such as glass is stuck on the piezoelectric plate 1 and cut from the acoustic matching layer, the acoustic matching layer is prevented from being damaged. As a result, the acoustic characteristics of the ultrasonic probe can be favorably maintained.

[0009]

[Other Matters] In the above embodiment, the conductive path 4 of the flexible substrate 5 and the piezoelectric piece plate are connected by a conductive adhesive.
It may be solder or the like. Further, the conductive path 4 is not limited to printing and may be formed of a thin metal plate. In short, the one in which the conductive path 4 is exposed at one end side of the flexible substrate 5 and a reinforcing plate such as a resin is provided in order to increase the strength of the flexible substrate 5 and connected to the piezoelectric plate so as to eliminate the harmful effect at the time of cutting It belongs to the technical scope of the present invention. Although the flexible substrate 5 is interposed only on one end side of the piezoelectric plate 1, it goes without saying that the flexible substrate 5 is interposed on both end sides of the piezoelectric plate 1 and the electrodes are staggered.

[0010]

According to the present invention, the conductive path is exposed at one end side of the flexible substrate, and the reinforcing plate having a strength smaller than that of the piezoelectric plate is provided and interposed between the piezoelectric plate and the backing material.
Prevents the micro piezoelectric piece from being damaged when the piezoelectric plate is cut,
An ultrasonic probe that maintains good acoustic characteristics can be provided.

[Brief description of drawings]

FIG. 1 is an exploded perspective view of an ultrasonic probe for explaining an embodiment of the present invention.

FIG. 2 is a diagram of an ultrasonic probe for explaining a conventional example, where FIG. 2 (a) is a perspective view and FIG. 2 (b) is a front view.

FIG. 3 is a diagram of a flexible substrate for explaining a conventional example,
The figure (a) is a top view and the figure (b) is a side view.

[Explanation of symbols]

1 piezoelectric plate, 2 backing material, 3 small piezoelectric piece, 4
Conductive path, 5 flexible, 6 resin film, 7th class conductive path, 8 notches, 9 reinforcing plate.

Claims (1)

[Claims] 1. A piezoelectric plate having electrodes on both main surfaces thereof is fixed on a backing material with one end side of a flexible substrate on which a conductive path is exposed, and fixed between the piezoelectric plate and the conductive path of the flexible substrate. An ultrasonic probe in which an electrode is led out while being cut and divided into minute piezoelectric pieces, and a reinforcing plate having a strength smaller than that of a piezoelectric plate is provided on one end side of the flexible substrate and is cut. Child.