JPH0625002Y2 - Work transfer device - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work transfer device, and more particularly, to a device for intermittently transferring a lead frame at a constant pitch in a pellet mounting process or the like in semiconductor device manufacturing.

2. Description of the Related Art For example, in a pellet mounting process in manufacturing semiconductor devices such as transistors and ICs, as shown in FIG. 7, a loader unit in which a magazine containing a large number of lead frames (1) (1) ... From the (2), the lead frames (1), (1), ... Are sequentially taken out one by one and supplied to the transport line (3). The transport line (3) comprises a frame guide (4) for guiding the lead frames (1) (1) ... In the longitudinal direction thereof, and the lead frames (1) () fed from the loader section (2). 1) ... are intermittently transferred at a constant pitch. Although not shown, the lead frame (1) is intermittently transferred by fitting a feed claw into a feed hole formed at a side end of the lead frame (1),
This is performed by performing a square motion in which the conveying claw moves up and down and horizontally reciprocates along the frame guide (4).

The lead frame (1) transferred as described above is
It is supplied to the pellet mount part (5), and in this pellet mount part (5), the semiconductor pellets (7) (7) ... Of the wafer ring (6) arranged in the vicinity of the transfer line (3) are patterned. The pattern is recognized, and a desired semiconductor pellet (7) is vacuum-adsorbed by a mount head (not shown) by this pattern recognition. After picking up the semiconductor pellets (7), the mount head is moved to fix the semiconductor pellets (7) to the element mounting portion of the lead frame (1). After the pellet mounting, the lead frame (1) is transferred on the frame guide (4) of the transfer line (3), sequentially stored in the empty magazines arranged in the unloader section (8), and transferred to the next step. It

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention By the way, conventionally, the intermittent transfer of the lead frame (1) in the pellet mounting step has generally been performed by operating a transfer claw by a drive mechanism such as a cam. In the case of this cam drive mechanism, the structure of the apparatus itself becomes complicated, and the weight of the drive portion in which the above-mentioned transporting pawl is assembled is large and the inertia is large, so that the lead frame (1) can be transferred at high speed. Was difficult to achieve. Further, since the lead tab (1) is transferred from the state in which the lead tab (1) is held by the feed tab by fitting the feed tab into the feed hole formed in the side end portion of the lead frame (1), ) The shape of the feed hole according to the product type,
When the size and position were changed, it was not easy to deal with this variety.

Means for Solving the Problems The present invention has been proposed in view of the above-mentioned problems, and a technical means for solving the problems consists of fixed and movable guide rails arranged in parallel, and has a long length. Frame guide for guiding a thin plate-like work along its longitudinal direction, and a guide shaft erected slidably along the movable guide rail in a bearing block fixed to the movable guide rail of the frame guide. And a plurality of openable and closable conveying claws fixed to the guide shaft at a constant pitch, and arranged in parallel with the guide shaft and for opening and closing each conveying claw in conjunction with the work transfer by each conveying claw. A link mechanism, a coupling band that is hung on a pulley that is rotatably supported by the bearing block, and is partially fixed to the guide shaft, and is fixedly mounted on the movable guide rail, and Second, it includes a drive source for rotating the connecting band in the forward and reverse directions.

According to the work transfer device of the present invention, a long thin plate-like work supplied to the frame guide is connected by activating the parallel link mechanism to clamp it by the transfer claw, and operating the drive source from this state. The belt is rotated in a fixed direction, and the guide shaft to which the conveying claw is fixed is slid to move the work at a fixed pitch. Then, the parallel link mechanism and the drive source are reversely operated to open the conveying claw and return the conveying claw to the initial position via the guide shaft. By repeating the above operation, the work is intermittently transferred at high speed along the frame guide.

Embodiment An embodiment in which the work transfer device according to the present invention is applied to a transfer line in a pellet mounting process for manufacturing a semiconductor device will be described with reference to FIGS. 1 to 6. (11) in the work transfer device (10) shown in FIG. 1 is arranged along the work transfer direction, and guides a long thin film-like work, for example, the lead frame (1) described above along the longitudinal direction. In the frame guide, a fixed guide rail (13) fixed to the base (12) and a movable guide rail (14) arranged in parallel with the fixed guide rail (13) at a distance of approximately the lead frame width. Consists of. The movable guide rail (14) is mounted on the base (12) so that the position of the movable guide rail (14) can be adjusted along the width direction by using elongated holes (15) (15) ... It is set so as to be compatible with the type 1). (16a) and (16b) are bearing blocks consisting of ball bushes (17a) and (17b) fixed to two locations on the movable guide rail (14), and (18) is a ball of the bearing blocks (16a) and (16b). Guide shafts slidably installed along the movable guide rails (14) via bushes (17a) and (17b), and (19), (19) and (19) are fixed pitch intervals on the guide shaft (18). A plurality of openable and closable conveying pawls fixed to the end portion and the central portion in the figure (three places in the figure). The conveying pawl (19) has a guide shaft (1
8) fixed block (20) fixed to the fixed block (2
0) and a fixed block (20) and a movable block (21) that is rotatably supported in the approximate center of the fixed block (20). Lower claw (20
a) and the upper claw portion (21a) are provided and the movable block (21) is rotated so that the upper and lower claw portions (21a) (20a) hold the side end portion of the lead frame (1) from the vertical direction. Since the lead claws (21a) and (20a) of the transport claw (19) hold the lead frame (1) from above and below in this manner, the lead frame (1)
There is no restriction on the shape, size or position of the sprocket hole provided in the. The holding force by the upper and lower claws (21a) (20a) is
The fixed block (20) is provided by a spring (22) stretched between the fixed block (20) and the movable block (21). Further, the opening and closing of the conveying claw (19), that is, the opening and closing of the upper claw portion (21a), the rotary roller (23) is pivotally supported at the rear end of the movable block (21), and is arranged above this rotary roller (23) By vertically moving a horizontal link described later, the rotary roller (23) is vertically moved to move the movable block (2
It is performed by rotating 1). (24) is the guide shaft (1
8) is a parallel link mechanism arranged along the parallel link mechanism (24), the lower ends (25a) (25a) of the parallel link mechanism (24) are rotated to the bearing blocks (16a) (16b) as shown in FIG. The upper and lower links (25) and (25) rotatably supported are arranged in parallel with the guide shaft (18) and are pivotally attached to the upper ends (25b) and (25b) of the upper and lower links (25) and (25). The horizontal link (26) is a rotary roller of the movable block (21), (21), (21) of each conveying claw (19) (19) (19). (23) (23) (23) is located above. A vertical rod (27) is erected on one end (26a) of the horizontal link (26).
A cylinder rod of a cylinder (30) fixed to a part of the movable guide rail (14) with a block (29) on which guide rollers (28) and (28) that are held from both sides along (26) are supported. Stick to (30a). (31a) (31b) (32a) are bearing blocks (16a) (16b)
A pulley rotatably supported on the stepping motor. Drive source such as
Output shaft (35a) of (35) and pulley (32a) of bearing block (16a)
It is a timing belt that is a connecting belt hung between the two, which uses very little backlash. Reference numeral (36) is a connecting member for connecting and fixing a part of the timing belt (33) and the guide shaft (18) as shown in FIG. 4, and the circumferential rotation of the timing belt (33) is applied to the guide shaft (18). introduce.

Next, the operation state in the pellet mounting process will be described below. First, the horizontal link (26) of the parallel link mechanism (24) is arranged at the lower end position by the protruding operation of the cylinder rod (30a) of the cylinder (30). As a result, as shown in FIG. 2, the horizontal roller (26) pushes the rotary roller (23) downward, and the movable block (21) is rotated against the elastic force of the spring (22) to move the movable block (21). Raise the upper claw (21a) of the block (21) to raise the transfer claw (1
Hold 9) open.

When the lead frame (1) is supplied from the loader section (2) in this standby state, the cylinder is operated in reverse to the above-described operation.
The horizontal link (26) of the parallel link mechanism (24) is arranged at the rising end position by the withdrawal operation of the cylinder rod (30a) of (30).
As a result, the horizontal link (26) is separated from the rotating roller (23), the movable block (21) is rotated in the opposite direction by the elastic force of the spring (22), and the upper claw portion (21a) of the movable block (21) is rotated. ) Is lowered and the side end portion of the lead frame (1) is held by the lower claw portion (20a) of the fixed block (20).

The drive source (35) is operated in conjunction with the opening / closing operation of the transfer claw (19). That is, after closing the conveying claw (19) and chucking the lead frame (1), the drive source (35) is rotated in a fixed direction by a predetermined amount, and its output shaft (35a) and pulley (31a) are rotated. Timing belt via (31b) (32a) (33) (34)
Rotate around. By the circumferential rotation of the timing belt (33), the guide shaft (18) connected to the connecting member (36) is slid by a constant stroke to advance the conveying pawls (19), (19) and (19), and the conveying pawl is moved.
(19) (19) The lead frame (1) chucked by (19) is transferred at a constant pitch along the frame guide (11).

After the lead frame (1) is transferred at a constant pitch by the transfer claws (19), (19), (19), the cylinder rod (3) of the cylinder (30) is transferred.
(0a) is ejected again to open the conveying claws (19), (19) and (19), and the driving source (35) is reversely rotated to retract the conveying claws (19), (19) and (19). To return to the initial state.
By repeating the above-mentioned operation, the conveying claws (19) (1
9) The lead frame (1) is intermittently transferred at a constant pitch by the forward / backward movement and the opening / closing operation of (19).

In addition, during intermittent transfer of the lead frame (1), a predetermined position, for example, a position where an Ag paste as a mount material is supplied onto the element mounting portion of the lead frame (1), or a semiconductor pellet is mounted onto the element mounting portion. It is necessary to clamp the lead frame (1) in order to ensure the positioning of the lead frame (1) at the position where the lead frame (1) is fixedly mounted. The means for clamping the lead frame (1) is provided at two locations along the movable guide rail (14) together with the bearing blocks (16a) and (16b), and each clamping mechanism is provided with the bearing block as shown in FIG. (16a) (16b)
The clamp mounting member (38) is slidably mounted vertically on the extended portions (16c) (16d) of the cross roller guide (37), and the clamp mounting member (38) and the bearing block (16a) ( A spring (39) is stretched between the extended portions (16c) and (16d) of 16b) to urge the clamp mounting member (38) downward by the elastic force of the spring (39). A clamp claw (40) is fixed to the tip of the clamp attachment member (38), and a rotary roller (41) is pivotally supported at the rear end of the clamp attachment member (38) and is arranged above the horizontal link (26).

The lead frame (1) is clamped and fixed by this clamp mechanism in the following manner. That is, when the lead frame (1) is transferred, the transfer claw (19) is closed and the horizontal link (26) is at the upper ascending end position. Therefore, the clamp mounting member (38) rises against the elastic force of the spring (39), and the clamp claw (40) is in the open state. On the contrary, when the transfer claw (19) is opened, the horizontal link (26) is at the lower end position, the clamp mounting member (38) is lowered by the elastic force of the spring (39), and the movable guide of the clamp claw (40) is moved. The side end of the lead frame (1) is pressed and held between the rails (14).

By the way, as described above, the lead frame (1), which is intermittently transferred at a constant pitch by the forward / backward movement of the transfer claw (19) and the opening / closing operation linked with this, is transferred to the unloader section (8).
In order to cover the time loss up to the unloader unit (8), the lead frame (1) is continuously transferred to the unloader unit (8) after the intermittent transfer.

As shown in FIG. 1, this continuous transfer mechanism rotatably supports the transfer rollers (42a) and (42b) along the movable guide rail (14) at the same pitch as the transfer claw (19), and the shaft thereof is rotated. Edge (43a)
The timing belts (46) and (47) are attached to the pulleys (44a), (44b) and (45b) fixed to the (43b), and the timing belt (47) attached to the pulley (45b) is a movable guide. Rail (1
It is attached to the output shaft (48a) of the drive source (48) such as an induction motor fixed in (4).

The lead frame (1) intermittently transferred by the transfer claws (19), (19), (19) operates the drive source (48) to rotate the timing belts (46) (47) in a fixed direction. The transport rollers (42a) and (42b) which rotate rotate continuously. Here, when the lead frame (1) is directly stored in the empty magazine of the unloader section (8) by continuous transfer by the transport rollers (42a) and (42b), the impact force is large, so that the lead frame (1) is There is a risk of bending.

Therefore, a pusher mechanism is arranged between the continuous transfer mechanism and the unloader section (8). As shown in FIGS. 1 and 6, this pusher mechanism includes a cylinder (50) in which a cylinder rod (50a) can be projected and retracted along a movable guide rail (14) via an L-shaped bracket (49). This cylinder fixed (50)
Attach the L-shaped frame (51) to the cylinder rod (50a). Further, a small cylinder (52) which allows the cylinder rod to project and retract in the vertical direction is fixed to the bent tip of the L-shaped frame (51), and a pusher (53) is attached to the tip of the cylinder rod of the small cylinder (52). .

In this pusher mechanism, the cylinder rod of the small cylinder (52) is projected to lower the pusher (53), and the cylinder rod (50a) of the cylinder (50) is further projected so that the L-shaped frame (51) is passed. Move pusher (53) forward. Thereby, the pusher (53) presses the rear end of the lead frame (1) transferred by the continuous transfer mechanism, and the lead frame (1) is stored in the empty magazine of the unloader section (8) at a low speed. .

The work transfer device according to the present invention can be applied to any long thin film-shaped work other than the lead frame used in the pellet mounting process of semiconductor device manufacturing.

EFFECTS OF THE INVENTION According to the work transfer device of the present invention, since the driving part is only the conveying pawl and the guide shaft, and the other driving mechanism is fixedly arranged, the weight of the driving part is small and the inertia is small. High-speed transfer becomes easier and the yield is significantly improved. In addition, it is easy to handle workpiece types and has great practical value.

[Brief description of drawings]

1 is a plan view showing an embodiment of a work transfer device according to the present invention, FIG. 2 is a side view showing a transfer claw of the device of FIG. 1, and FIG. 3 is a bearing block and parallel links of the device of FIG. FIG. 4 is a side view showing the mechanism, FIG. 4 is a side view showing the connecting member of the apparatus shown in FIG. 1, and FIG. 5 is a side view showing the clamp mechanism of the apparatus shown in FIG.
FIG. 6 is a side view showing the pusher mechanism of the apparatus shown in FIG. FIG. 7 is a plan view showing a pellet mounting process for manufacturing a semiconductor device. (1) ... Thin plate work (lead frame), (11) ... Frame guide, (13) ... Fixed guide rail, (14) ... Movable guide rail, (16a) (16b) ... Bearing block, (18) ... Guide Shaft, (19) ... Conveying claw, (24) ... Parallel link mechanism, (31a) (31b) (32a) ... Pulley, (33) (34) ... Timing belt, (35) ... Drive source.

Claims (1)

[Scope of utility model registration request] 1. A frame guide, which comprises fixed and movable guide rails arranged in parallel, guides a long thin plate-like work along its longitudinal direction, and a bearing block fixed to the movable guide rail of the frame guide. A guide shaft slidably installed along the movable guide rail in the work transfer direction, a plurality of openable and closable conveying pawls fixed to the guide shaft at a constant pitch, and arranged along the guide shaft. In addition, a parallel link mechanism that opens and closes each transfer claw in conjunction with the work transfer by each transfer claw and a pulley that is rotatably supported by the bearing block, and a part is connected and fixed to the guide shaft. And a drive source that is fixed to the movable guide rail and that rotates the connection belt in the forward and reverse directions.