JPH06246719A - Laminate press bonding of ceramic green sheet - Google Patents

Laminate press bonding of ceramic green sheet

Info

Publication number
JPH06246719A
JPH06246719A JP6257993A JP6257993A JPH06246719A JP H06246719 A JPH06246719 A JP H06246719A JP 6257993 A JP6257993 A JP 6257993A JP 6257993 A JP6257993 A JP 6257993A JP H06246719 A JPH06246719 A JP H06246719A
Authority
JP
Japan
Prior art keywords
ceramic green
carrier film
green sheet
green sheets
upper mold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6257993A
Other languages
Japanese (ja)
Inventor
Toshiaki Shibuya
俊明 渋谷
Koichi Hasegawa
宏一 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marcon Electronics Co Ltd
Original Assignee
Marcon Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marcon Electronics Co Ltd filed Critical Marcon Electronics Co Ltd
Priority to JP6257993A priority Critical patent/JPH06246719A/en
Publication of JPH06246719A publication Critical patent/JPH06246719A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a laminated ceramic electronic part not generating the deterioration of characteristics and the lowering of yield by forming a laminate free from the rupture or lamination shift of ceramic green sheets. CONSTITUTION:When the ceramic green sheet 5 held on a carrier film 4 and the ceramic green sheet 11 held on a carrier film 9 and having internal electrodes 10 formed thereto are stacked in a press mold in a mutual contact state to be bonded under pressure, an upper mold 8 having a metal mesh 7 attached to the surface coming into contact with the carrier film 4 or 9 thereof is lowered to be brought into contact with the carrier film 4 or 9 to bond the green sheets under pressure. Thereafter, the upper mold 8 is raised to a prescribed position and, next, operation peeling the carrier film 4 or 9 from the ceramic green sheet 5 or 11 is repeated over the number of times corresponding to the lamination number of green sheets.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、積層セラミック電子部
品の製造過程におけるセラミックグリーンシートの積層
圧着技術を改良したセラミックグリーンシートの積層圧
着方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for laminating and crimping a ceramic green sheet, which is an improved technique for laminating and crimping a ceramic green sheet in the process of manufacturing a laminated ceramic electronic component.

【0002】[0002]

【従来の技術】一般に、積層セラミックコンデンサ、積
層セラミックバリスタ及び積層圧電素子等の積層セラミ
ック電子部品の積層体形成手段としては、最外装となる
所定厚みに形成したグリーンシートと素子機能部を構成
する内部電極を印刷したグリーンシートとを所定枚数積
層圧着するものであり、積層圧着手段としてプレス金型
を用い、グリーンシート上に所定の温度と圧力を加え、
グリーンシート同士を圧着する工程を繰り返し行い、所
定枚数の積層体を構成するようにしている。
2. Description of the Related Art Generally, as a means for forming a laminated body of a laminated ceramic electronic component such as a laminated ceramic capacitor, a laminated ceramic varistor and a laminated piezoelectric element, a green sheet having a predetermined thickness as an outermost package and an element functional portion are formed. A predetermined number of green sheets printed with internal electrodes are laminated and pressure-bonded, and a press die is used as a lamination pressure-bonding means, and a predetermined temperature and pressure are applied onto the green sheets,
The step of pressing the green sheets together is repeated to form a predetermined number of laminated bodies.

【0003】すなわち、プレス金型の下金型を構成する
プレート上に、キャリアフィルムにて保持されたセラミ
ックグリーンシート(最外装となる単なるセラミックグ
リーンシート及び内部電極を形成したセラミックグリー
ンシート)を適宜一枚一枚セラミックグリーンシート同
士を接触させた状態で積み重ね、プレス金型を構成する
加熱された上金型を下降して積み重ねられたセラミック
グリーンシートを保持しているキャリアフィルム上に接
触させ、所定の時間加熱及び加圧を行い接触されたセラ
ミックグリーンシート同士を密着させ、しかる後、上金
型を所定の位置まで上昇させ、次に、キャリアフィルム
をセラミックグリーンシートから剥離させる動作を積層
数に応じた回数繰り返すようにしている。
That is, a ceramic green sheet held by a carrier film (a simple ceramic green sheet as an outermost package and a ceramic green sheet on which internal electrodes are formed) is appropriately placed on a plate constituting a lower die of a press die. The ceramic green sheets are stacked one by one in a state of being in contact with each other, and the heated upper mold forming the press mold is lowered to be brought into contact with the carrier film holding the stacked ceramic green sheets, The ceramic green sheets that have been in contact with each other are heated and pressed for a predetermined period of time to be brought into close contact with each other, and then the upper die is raised to a predetermined position, and then the carrier film is peeled from the ceramic green sheets. It is repeated as many times as possible.

【0004】しかして、上記のような積層圧着技術にお
いて、均一な圧力でセラミックグリーンシート同士を密
着させ、且つ、積層ずれのない加圧を目的として、セラ
ミックグリーンシートを保持しているキャリアフィルム
と、このキャリアフィルムと接触させる上金型の表面は
極めて平滑度の高い状態に仕上げられている。
In the above-mentioned lamination pressure bonding technique, however, a carrier film holding the ceramic green sheets for the purpose of bringing the ceramic green sheets into close contact with each other with a uniform pressure and applying a pressure without stacking deviation. The surface of the upper mold to be brought into contact with this carrier film is finished to have a very high smoothness.

【0005】そのため、圧着時にキャリアフィルムと上
金型の接触面間が真空状態となることから、上金型を所
定の位置まで上昇させる過程でスムースに上金型とキャ
リアフィルムが剥離し難く、上金型上昇時キャリアフィ
ルムを介してセラミックグリーンシートも引っ張られ、
セラミックグリーンシートの破れやずれ等が発生し、歩
留り低下はもとより、積層セラミック電子部品の特性劣
化を引き起こす要因を抱える結果となっていた。
Therefore, since the contact surface between the carrier film and the upper mold is in a vacuum state during pressure bonding, it is difficult for the upper mold and the carrier film to be smoothly peeled off in the process of raising the upper mold to a predetermined position. When the upper mold rises, the ceramic green sheet is also pulled through the carrier film,
As a result, the ceramic green sheets are torn or misaligned, resulting in a decrease in yield as well as a factor that causes characteristic deterioration of the laminated ceramic electronic component.

【0006】[0006]

【発明が解決しようとする課題】以上のように前述した
従来技術では、セラミックグリーンシートの積層化過程
でセラミックグリーンシートを損傷することなくキャリ
アフィルムを効率良く剥離することが困難で、結果とし
て積層セラミック電子部品の特性劣化に結び付き、歩留
りの低下となる要因をもつものとなっていた。
As described above, in the above-mentioned prior art, it is difficult to efficiently peel the carrier film without damaging the ceramic green sheets in the process of laminating the ceramic green sheets, resulting in the lamination. This is a factor that leads to deterioration of the characteristics of ceramic electronic components and a decrease in yield.

【0007】本発明は、上記の課題を解決するために成
されたもので、その目的は、セラミックグリーンシート
を積層圧着する際、キャリアフィルムの剥離を容易と
し、セラミックグリンシートの破れ又はずれを防止し、
特性劣化がなく、且つ、歩留りの安定した積層セラミッ
ク電子部品を得るためのセラミックグリーンシートの積
層圧着方法を提供することである。
The present invention has been made to solve the above-mentioned problems, and an object thereof is to facilitate peeling of a carrier film when laminating and pressing ceramic green sheets, and to prevent the ceramic green sheets from being torn or displaced. Prevent,
It is an object of the present invention to provide a method for laminating and pressing a ceramic green sheet to obtain a laminated ceramic electronic component which is free from characteristic deterioration and has a stable yield.

【0008】[0008]

【課題を解決するための手段】本発明になるセラミック
グリーンシートの積層圧着方法は、キャリアフィルムに
て保持し所定厚に形成したセラミックグリーンシート、
及びキャリアフィルムにて保持し表面に内部電極を形成
したセラミックグリーンシート所定枚数をプレス金型に
て加熱−加圧し積層圧着するセラミックグリーンシート
の積層圧着方法において、前記キャリアフィルムと接す
る前記プレス金型表面にメッシュを取付けて行うことを
特徴とするものである。
A method for laminating and pressing a ceramic green sheet according to the present invention comprises a ceramic green sheet which is held by a carrier film to have a predetermined thickness,
And a ceramic green sheet laminated and pressure-bonded by pressing and heating a predetermined number of ceramic green sheets which are held by a carrier film and have internal electrodes formed on the surface thereof, in the pressure-bonding method of ceramic green sheets, wherein the press die is in contact with the carrier film. It is characterized in that a mesh is attached to the surface.

【0009】[0009]

【作用】以上のような構成によれば、セラミックグリー
ンシートの積層圧着時、セラミックグリーンシートを保
持するキャリアフィルムと接触する上金型表面に取付け
たメッシュの網目によって、上金型とキャリアフィルム
間に空間を作り、上金型表面とキャリアフィルムを完全
に密着することがないため、加熱、圧着後上金型を元の
位置に上昇する過程で、上金型とキャリアフィルムはス
ムースに剥離され、上金型の上昇に追随しキャリアフィ
ルムをも持ち上げ、それによって、セラミックグリーン
シートを損傷する等の危険性解消に大きく貢献する。
With the above structure, when the ceramic green sheets are laminated and pressure-bonded, the mesh between the upper mold and the carrier film is provided by the mesh of the mesh attached to the surface of the upper mold that comes into contact with the carrier film holding the ceramic green sheets. A space is created in the upper mold so that the upper mold surface and the carrier film are not completely adhered to each other.Therefore, the upper mold and the carrier film are smoothly peeled off in the process of raising the upper mold to its original position after heating and pressure bonding. The carrier film is also lifted following the rise of the upper die, which greatly contributes to eliminating the risk of damaging the ceramic green sheet.

【0010】[0010]

【実施例】以下、本発明の実施例につき図面を参照して
説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0011】すなわち、図1に示すように、プレス金型
1の下金型2を構成するプレート3上に、例えば図2に
示すようにキャリアフィルム4にて保持された最外装と
なるセラミックグリーンシート5を配置し、プレス金型
1を構成する例えばヒータ6を具備することによって加
熱され表面に金属メッシュ7を取付けた上金型8を下降
してキャリアフィルム4と接触させて押圧し、次に、前
記上金型8を上昇させて前記セラミックグリーンシート
5から前記キャリアフィルム4を剥離する。
That is, as shown in FIG. 1, on the plate 3 constituting the lower mold 2 of the press mold 1, for example, as shown in FIG. 2, the outermost ceramic green is held by the carrier film 4. The sheet 5 is placed, and the upper die 8 having the metal mesh 7 attached to the surface, which is heated by, for example, a heater 6 which constitutes the press die 1, is lowered to come into contact with the carrier film 4 and press it. Then, the upper die 8 is raised to peel the carrier film 4 from the ceramic green sheet 5.

【0012】次に、前記セラミックグリーンシート5
に、例えば図3に示すようにキャリアフィルム9にて保
持され内部電極10を形成したセラミックグリーンシー
ト11を、このセラミックグリーンシート11面を接触
させて積み重ね、しかる後、前記と同様に前記キャリア
フィルム9上に前記上金型8を下降して接触させて押圧
し、次に、前記と同様に前記上金型8を所定の位置まで
上昇させて、次に、前記セラミックグリーンシート11
から前記キャリアフィルム9を剥離する動作をセラミッ
クグリーンシート11の積層数に応じた回数繰り返し、
最後にキャリアフィルム4にて保持されたセラミックグ
リーンシート5を配置し、前記と同様にして圧着し、結
果として所定の時間加熱及び加圧を行い接触されたセラ
ミックグリーンシート5とセラミックグリーンシート1
1、あるいはセラミックグリーンシート11同士を密着
させ、セラミック積層体(図示せず)を得るようにして
なるものである。
Next, the ceramic green sheet 5
Then, for example, as shown in FIG. 3, the ceramic green sheets 11 which are held by the carrier film 9 and on which the internal electrodes 10 are formed are stacked by bringing the surfaces of the ceramic green sheets 11 into contact with each other. 9, the upper mold 8 is lowered and brought into contact with and pressed, then the upper mold 8 is raised to a predetermined position in the same manner as described above, and then the ceramic green sheet 11 is pressed.
The operation of peeling the carrier film 9 from the substrate is repeated a number of times according to the number of laminated ceramic green sheets 11,
Finally, the ceramic green sheet 5 held by the carrier film 4 is arranged and pressure-bonded in the same manner as described above, and as a result, the ceramic green sheet 5 and the ceramic green sheet 1 which are contacted by heating and pressurizing for a predetermined time.
1 or the ceramic green sheets 11 are brought into close contact with each other to obtain a ceramic laminated body (not shown).

【0013】以上のように構成してなるセラミックグリ
ーンシートの積層圧着方法によれば、セラミックグリー
ンシート5を保持するキャリアフィルム4、又はセラミ
ックグリーンシート11を保持するキャリアフィルム9
と接触する上金型8表面に金属メッシュ7が取り付けら
れているため、キャリアフィルム4上に前記メッシュ7
部が接触した状態でキャリアフィルム4表面が網目状と
なり、上金型8とキャリアフィルム4、又はキャリアフ
ィルム9の間に複数の微細空間を作り、キャリアフィル
ム4、又は9と上金型8の密着性を防止することがで
き、上金型8の上昇時、上金型8とキャリアフィルム4
又は9はスムースに剥離され、上金型8の上昇に追随し
キャリアフィルム4、又は9の持ち上げはなく、セラミ
ックグリーンシート5やセラミックグリーンシート11
の破れや積層ずれの危険性は解消され、所望の積層体形
成が可能となり、積層セラミック電子部品の特性劣化や
歩留り低下の解消に大きく貢献できる優れた効果を得る
ことができる。
According to the method for laminating and pressing the ceramic green sheets having the above structure, the carrier film 4 holding the ceramic green sheet 5 or the carrier film 9 holding the ceramic green sheet 11 is formed.
Since the metal mesh 7 is attached to the surface of the upper die 8 that comes into contact with the mesh 7, the mesh 7 is placed on the carrier film 4.
The surface of the carrier film 4 becomes a mesh shape in a state where the parts are in contact with each other, and a plurality of fine spaces are formed between the upper mold 8 and the carrier film 4 or the carrier film 9, and the carrier film 4 or 9 and the upper mold 8 are Adhesion can be prevented, and when the upper die 8 is raised, the upper die 8 and the carrier film 4
Or 9 is peeled off smoothly, and the carrier film 4 or 9 is not lifted following the rise of the upper mold 8, and the ceramic green sheet 5 or the ceramic green sheet 11 is removed.
The risk of breakage and stacking deviation is eliminated, a desired laminate can be formed, and it is possible to obtain an excellent effect that can greatly contribute to elimination of characteristic deterioration and yield reduction of laminated ceramic electronic components.

【0014】なお、上記実施例ではメッシュとして金属
メッシュを用いたものを例示したが、これに限定される
ことなく、その他の材質、例えば樹脂又はセラミックか
らなるものであっても同様の効果を得ることができる。
Although the metal mesh is used as the mesh in the above embodiment, the present invention is not limited to this, and the same effect can be obtained even if the material is made of other material such as resin or ceramic. be able to.

【0015】[0015]

【発明の効果】本発明によれば、セラミックグリーンシ
ートの積層圧着の際、セラミックグリーンシートの破れ
や積層ずれのない積層圧着が可能となり、積層セラミッ
ク電子部品における特性劣化のない歩留りの良好な実用
的価値の高いセラミックグリーンシートの積層圧着方法
を得ることができる。
According to the present invention, when the ceramic green sheets are laminated and pressure-bonded, it is possible to perform the laminated pressure-bonding without tearing of the ceramic green sheets and misalignment of the layers. It is possible to obtain a method of laminating and crimping ceramic green sheets having a high biological value.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例に係るセラミックグリーンシ
ートの積層圧着方法の説明図。
FIG. 1 is an explanatory diagram of a method for laminating and pressing a ceramic green sheet according to an embodiment of the present invention.

【図2】本発明の一実施例に係るセラミックグリーンシ
ートを示す斜視図。
FIG. 2 is a perspective view showing a ceramic green sheet according to an embodiment of the present invention.

【図3】本発明の一実施例に係る図2と異なった構成か
らなるセラミックグリーンシートを示す斜視図。
FIG. 3 is a perspective view showing a ceramic green sheet having a configuration different from that of FIG. 2 according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 プレス金型 2 下金型 3 プレート 4 キャリアフィルム 5 セラミックグリーンシート 6 ヒータ 7 金属メッシュ 8 上金型 9 キャリアフィルム 10 内部電極 11 セラミックグリーンシート 1 Press Mold 2 Lower Mold 3 Plate 4 Carrier Film 5 Ceramic Green Sheet 6 Heater 7 Metal Mesh 8 Upper Mold 9 Carrier Film 10 Internal Electrode 11 Ceramic Green Sheet

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 キャリアフィルムにて保持し所定厚に形
成したセラミックグリーンシート、及びキャリアフィル
ムにて保持し表面に内部電極を形成したセラミックグリ
ーンシート所定枚数をプレス金型にて加熱−加圧し積層
圧着するセラミックグリーンシートの積層圧着方法にお
いて、前記キャリアフィルムと接する前記プレス金型表
面にメッシュを取付けて行うことを特徴とするセラミッ
クグリーンシートの積層圧着方法。
1. A ceramic green sheet held by a carrier film and having a predetermined thickness, and a predetermined number of ceramic green sheets held by a carrier film and having internal electrodes formed on the surface thereof are heated and pressed by a press die to be laminated. A method for laminating and crimping a ceramic green sheet, which comprises performing a method of laminating and crimping a ceramic green sheet to be crimped by attaching a mesh to the surface of the press die in contact with the carrier film.
JP6257993A 1993-02-25 1993-02-25 Laminate press bonding of ceramic green sheet Pending JPH06246719A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6257993A JPH06246719A (en) 1993-02-25 1993-02-25 Laminate press bonding of ceramic green sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6257993A JPH06246719A (en) 1993-02-25 1993-02-25 Laminate press bonding of ceramic green sheet

Publications (1)

Publication Number Publication Date
JPH06246719A true JPH06246719A (en) 1994-09-06

Family

ID=13204372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6257993A Pending JPH06246719A (en) 1993-02-25 1993-02-25 Laminate press bonding of ceramic green sheet

Country Status (1)

Country Link
JP (1) JPH06246719A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100862342B1 (en) * 2007-01-04 2008-10-13 삼성전기주식회사 laminated unit of ceramic sheet
CN106239701A (en) * 2016-07-26 2016-12-21 江苏省陶瓷研究所有限公司 A kind of thermal sensitive ceramics substrate forming method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100862342B1 (en) * 2007-01-04 2008-10-13 삼성전기주식회사 laminated unit of ceramic sheet
US7861759B2 (en) 2007-01-04 2011-01-04 Samsung Electro-Mechanics Co., Ltd. Lamination unit of ceramic green sheets
CN106239701A (en) * 2016-07-26 2016-12-21 江苏省陶瓷研究所有限公司 A kind of thermal sensitive ceramics substrate forming method

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