JPH06244606A - Laminated dielectric filter and manufacture of the same - Google Patents

Abstract

PURPOSE:To stabilize quality/characteristics by reducing the number of parts, efficiently manufacturing it according to a multiple production system and eliminating assembly shift among respective members. CONSTITUTION:Outside resonators 10a and 10b, for which inner electrodes 14 are formed inside grooves extended in the lengthwise direction on one side of a dielectric element piece, are laminated and integrated by interposing a member 12 for coupling adjustment between them so that the side edges of those internal electrodes can be faced each other, and external electrode 18 and island-shaped electrodes 19 for input/output coupling are formed on the outer surfaces. This filter can be manufactured by forming parallel grooves on one side of a dielectric substrate, forming outside resonator substrates formed the internal electrodes 14 inside the groove, laminating/integrating them with a substrate 12 for coupling adjustment between so as to face the internal electrode forming planes each other, cutting/separating them parallelly to the internal electrodes 14 at the intermediate position and forming the electrodes 18 on the outer surface. Over three steps of filters can be constituted by intermediately arranging over one resonators.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated dielectric filter having a 1/4 wavelength resonance type strip line and a method for manufacturing the same. More specifically, the outer resonator substrate having the internal electrodes formed in the parallel grooves, the coupling adjusting substrate, and the intermediate resonator substrate having the internal electrodes as necessary are laminated and adhered, and then cut and separated to form an outer surface. The present invention relates to a method for manufacturing a laminated dielectric filter in which an electrode is provided on the substrate, the number of parts is reduced, and the number of steps is reduced to reduce the number of steps. This laminated dielectric filter is suitable for various types of radio equipment for microwaves, for example.

[0002]

2. Description of the Related Art As a microwave filter, there is a type in which a resonator is composed of a strip line. For example, in the case of a quarter-wave resonator, a linear stripline resonator conductor is provided on a dielectric substrate, one end of which is open and the other end is short-circuited to an external electrode. Here, the resonator conductor is set to have a length that is an odd multiple of a quarter wavelength of the resonance wavelength.
When constructing an actual filter, a plurality of the above-mentioned resonator conductors are arranged on the dielectric substrate and the short-circuit surfaces are commonly connected, and the distance between the adjacent resonator conductors is a predetermined value that provides a coupling strength corresponding to the filter characteristics. Set to distance.

In such a strip line type filter, for example, a conductive paste is attached on a dielectric substrate in a predetermined shape by screen printing, or an electrode forming portion is formed on the surface of the dielectric substrate so as to have a predetermined shape. A process of making it slightly depressed is performed, and the inside is filled with a conductive paste. After that, the dielectric substrate is heat-treated to bake the conductive paste to form a desired electrode pattern. As another example, there is also a tri-plate structure in which a thin conductive plate (resonator conductor) which is previously formed into a predetermined shape by punching or etching is sandwiched between two dielectric substrates.

[0004]

In any of these conventional stripline filters, the resonator conductor is formed in a plane on the same dielectric substrate, and the band of the filter is the resonator conductor. Since it is determined by the coupling state due to the spacing, it is difficult to control to a desired band, especially when the filter is miniaturized.

The formation of the resonator pattern by the screen printing method generally cannot be said to have sufficient printing accuracy, and the resonance frequency and the coupling change, so that trimming is necessary. Further, when forming a concave portion on the dielectric substrate and filling the conductive material with the conductive material, the conductive material adheres to unnecessary portions as well, so that it must be removed and complicated work is required. Further, in the case of the triplate structure, the presence of the conductive plate causes a gap between the two dielectric substrates by the thickness of the conductive plate, so that the equivalent dielectric constant is lowered and the size cannot be reduced so much. In addition, it is necessary to take measures to shield the thickness of the conductive plate. When the dielectric substrates are superposed, a dimensional deviation is likely to occur, and it is difficult to obtain desired characteristics.

To solve these drawbacks, the present inventors previously proposed a laminated dielectric filter (for example, Japanese Patent Application No. 4-158578). Here, it is manufactured by stacking a plurality of resonators each having a strip line inside with a coupling adjustment member between them, providing outer members on both sides in the stacking direction, and forming external electrodes on the outer surface. is doing.

It is an object of the present invention to provide a laminated dielectric filter having a smaller number of parts than the above structure,
Another object of the present invention is to provide a method for efficiently manufacturing the multi-layered dielectric filter thereof by a multi-cavity method.

[0008]

The present invention is a laminated dielectric filter having a 1/4 wavelength resonance type strip line and a method of manufacturing the same. The laminated dielectric filter is divided into a case of two stages and a case of three stages or more depending on the number of resonators used. In the case of a two-stage laminated dielectric filter, two outer resonators each having an internal electrode formed in a groove extending in the longitudinal direction on one surface of the dielectric element are arranged so that the side edges of the internal electrodes face each other. It has a structure in which a bonding adjusting member is interposed between the layers to form an integrated body, and external electrodes and input / output coupling island electrodes are formed on the outer surface thereof. Further, in the case of a laminated dielectric filter having three or more stages, one or more intermediate resonators having a structure in which the internal electrodes are sandwiched by two dielectric pieces and one or more intermediate resonators are provided in the longitudinal direction of one surface of the dielectric piece. The two outer resonators having internal electrodes formed in the grooves are laminated and integrated so that the coupling adjusting members are interposed between them and the side edges of the internal electrodes are in contact with the coupling adjusting members. An external electrode and an island-shaped electrode for input / output coupling are formed in the structure.

The method of manufacturing the laminated dielectric filter according to the present invention is as follows. In the case of the two-stage configuration, a step of forming a plurality of grooves in parallel on one main surface of the dielectric substrate, and manufacturing an outer resonator substrate in which internal electrodes of the strip line type resonator are formed in the grooves; The outer resonator substrates are laminated and integrated by sandwiching the coupling adjustment substrate between them so that the inner electrode forming surfaces face each other, and the integrated structure is parallel to the inner electrode and the inner electrode is positioned in the middle. It is cut and separated as described above, and an electrode is formed on the outer surface of the separated filter element body. In the case of three or more stages, a step of forming a plurality of grooves in parallel on one main surface of the dielectric substrate, and manufacturing an outer resonator substrate in which internal electrodes of a stripline resonator are formed in the grooves, A process of laminating and bonding a plurality of dielectric substrates having electrodes serving as internal electrodes of a stripline resonator formed on the main surface and cutting the laminate perpendicular to the main surface to produce an intermediate resonator substrate. And a plurality of coupling adjustment substrates between which an intermediate resonator substrate is sandwiched, and an outer resonator substrate is arranged further outside in the stacking direction to be bonded and integrated, and the integrated structure is formed into the internal electrode. And the electrode is formed on the outer surface of the separated filter element body by cutting and separating so that the internal electrode is located in the middle.

Here, a part of the external electrodes and the input / output electrodes are formed in advance on the outer main surface (the surface not grooved) of the outer resonator substrate, and the outer substrate with the electrodes is used for integration. A preferred method is to prepare a structured structure and form necessary electrodes (island-shaped electrodes that are electrically connected to the rest of the external electrodes and the input / output electrodes) on the remaining outer surfaces (four surfaces) of the separated filter body. Alternatively, a method may be used in which an integrated structure is manufactured using an outer substrate without electrodes, and then necessary electrodes are formed on the entire outer surfaces (6 surfaces) of the separated filter body. The number of intermediate resonator substrates used is the number corresponding to the required number of filter stages, and these are stacked to assemble a filter.

Further, a plurality of outer resonators each having an inner electrode formed therein are stacked in a groove extending in the longitudinal direction on one surface of the dielectric element, and an outer member is arranged and integrated, and the outer electrode and the inner electrode are inserted on the outer surface thereof. It is also possible to form an island-shaped electrode for output coupling to form a laminated dielectric filter. In that case, manufacture as follows. A plurality of grooves are formed in parallel on one main surface of a dielectric substrate, and a resonator substrate in which internal electrodes of a strip line type resonator are provided in the grooves is manufactured. Then, a plurality of resonator substrates are laminated, an outer substrate is arranged on the outer side to be integrated, and the integrated structure is cut and separated so that the inner electrode is parallel to the inner electrode and the inner electrode is located in the middle, and the separated filter An electrode is formed on the outer surface of the element body.

[0012]

The outer resonator has the internal electrode in the groove and has the functions of both the resonator and the outer member. Therefore, the number of necessary parts is reduced and the assembly becomes easy. If another coupling adjusting member is sandwiched between them, the degree of coupling between the resonators can be freely adjusted by selecting the material and shape thereof. Further, by using the intermediate resonator, a filter having an arbitrary number of stages can be constructed.

In the step of manufacturing the outer resonator substrate, the dielectric substrate may be grooved by using a slicer or the like.
Grooves having a constant pitch and a constant width can be formed, the manufacturing accuracy of the internal electrodes is improved, and a large number of the same outer resonator substrates can be obtained. Further, in the step of manufacturing the intermediate resonator substrate, the laminated body is cut, so that a large number of substrates having the same shape in which a large number of resonators are aligned in the lateral direction and integrated are obtained. In the next step, the outer resonator substrate and the intermediate resonator substrate are stacked via the coupling adjustment substrate, so that the positional displacement of the overlapping resonators is small. And because it disconnects,
This makes it possible to easily obtain a large number of laminated dielectric filters having uniform characteristics.

[0014]

FIG. 1 is a perspective view showing an embodiment of a laminated dielectric filter (in the case of a two-stage structure) according to the present invention, in which A and B in FIG. 1 are viewed from opposite sides. Is represented. In this laminated dielectric filter, two quarter-wave resonant stripline type outer resonators 10a and 10b are laminated and integrated so that a coupling adjusting member 12 is sandwiched therebetween, and input / output electrodes are formed on the outer surfaces thereof. This is a structure in which necessary electrodes such as 16 and external electrodes 18 are formed. Both outer resonators 10a, 10
b has the same structure in which the internal electrodes 14 are formed in grooves provided in the longitudinal direction of one surface of the dielectric piece, and the side edges of these internal electrodes 14 face each other (contact the coupling adjusting member 12).
So that it is laminated. In both outer resonators 10a and 10b, the end surface on the electrodeless side is an open surface and the end surface on the electrode forming side is a short circuit surface. Here, the directions of the outer resonators 10a and 10b (positions of the open surface and the short-circuit surface) are set exactly opposite to each other. Then, an independent island-shaped electrode 19 for input / output coupling is located on the outer surface in the vicinity of the electrodeless end face, and it is electrically connected to the input / output electrode 16. In addition, in order to make the drawings easy to understand, in each of the drawings, the electrode forming portion is shaded, and the non-electrode portion (the portion where the base material of the dielectric is exposed) is shown with fine dots.

In the strip line type resonator as described above, the quarter-wave resonator is formed by the internal electrode formed in the dielectric material, and is short-circuited by the external electrode. Therefore, the resonance wavelength (resonance frequency) is basically determined by the length dimension of the resonator. Further, the larger the width (dimension in the stacking direction) of the resonator, the lower the resonance frequency, and the smaller the height (interval between the inner electrode and the outer electrode), the lower the resonance frequency. The resonance frequency of the resonator can be finely adjusted by trimming its external electrodes.

In both outer resonators 10a and 10b, coupling adjustment between the stages is performed by the coupling adjusting member 12 between them, thereby realizing a desired filter. Input / output coupling is performed by the capacitance between the internal electrode 14 and the island-shaped electrode 19 of the resonator. Therefore, the input / output coupling can be finely adjusted by trimming the island electrodes 19. In this embodiment, the input / output electrode 16 is formed in the outer resonator, but the influence of the input / output electrode portion on the capacitance is small. By the input / output electrodes 16 provided on the side surface of the filter, the soldering part (fillet) can be visually confirmed at the time of surface mounting, and the mounting reliability can be improved.
The work can be facilitated.

In the laminated dielectric filter of this embodiment, since the input / output electrodes 16 are diagonally located and are separated from each other, the radio wave skip between the input and the output is reduced, and as a result, it is not always made of metal. There is no need to cover the case. As described above, this filter can be directly surface-mounted on the circuit board. On the circuit board, the input / output electrode 16 is connected to the input / output pattern of the circuit board, and the external electrode 18 is soldered to the ground pattern of the circuit board for electrical connection and mechanical fixing. Of course, this filter may be covered with a metal case.

The manufacturing process of this laminated dielectric filter is as follows. First, the outer resonator substrate is manufactured. Figure 2
As indicated by A, a large number of parallel grooves 24 are formed in one main surface of the flat dielectric substrate 22 at equal intervals by machining with a slicer or the like. The groove 24 has a narrow width and a depth up to the middle of the thickness of the substrate, and the groove shape defines the cross-sectional shape of the internal electrode. Dielectric substrate 22
Is a material of a resonator, and is a sintered body of a high dielectric constant material for microwaves which is usually used for a microwave filter, such as barium titanate. Next in FIG.
As indicated by B, the electrode material 26 is filled in the groove by a printing method, a dispenser injection method, or the like and baked (this becomes the internal electrode 14 of the strip line resonator). The outer resonator substrate 20 thus obtained has a structure in which the inner electrode 14 and the outer resonator including the outer member are laterally aligned and integrally coupled.

As shown in FIG. 3A, two outer resonator substrates 20a and 20b are laminated with a coupling adjusting substrate 32 sandwiched therebetween, and are integrated by an adhesive such as glass. At that time, the outer resonator substrates 20a and 20b are connected to each other by the inner electrode 14
It is needless to say that the side edges are aligned so that they are in contact with the coupling adjusting substrate 32, and that the corresponding internal electrodes 14 are aligned so that they are located in the same plane. Coupling adjustment substrate 32
Is not necessarily the same as the material of the dielectric substrate 22 (dielectric material forming the resonator). A material having a dielectric constant lower than that of the resonator material (for example, forsterite) may be used.

In this embodiment, the outer resonator substrate 20a,
On the outer main surface of 20b, an electrode pattern composed of a part 18a of the external electrode and the input / output electrode 16 is formed in advance. Although not shown, one outer resonator substrate 20 is shown here.
a and the input / output electrode 16 of the other outer resonator substrate 20b are formed at opposite positions (in the figure, the input / output electrode of the outer resonator substrate 20a is on the front side, and the input / output electrode of the outer resonator substrate 20b is on the rear side). ing. As shown in FIG. 3B, the integrated structure 34
Are cut and separated at positions indicated by imaginary lines. This cutting position (cutting surface) corresponds to the internal electrode 1 of the outer resonator substrates 20a and 20b.
4 is parallel to 4 and the internal electrode 14 is located in the middle. In addition, in order to adjust the shape, the entire circumference of the integrated structure 34 is cut off as shown by an imaginary line. As a result,
A filter element body 36 as shown in C is obtained. In this step of cutting and separating, the outer resonator substrates 20a, 20b
The electrode pattern of the outer main surface of the
And the input / output electrode 16 are separated.

Outer surfaces of the filter element body 36 (four sides)
In addition, as shown in FIG.
And are formed by metallization. The remaining part of the external electrode is electrically connected to the part 18a of the external electrode described above, and the external electrode 1 as a whole.
8, the island-shaped electrode 19 is provided in the outer resonators 10a and 10b and is electrically connected to the input / output electrode 16. In this way, a laminated dielectric filter having a two-stage structure is obtained.

In the laminated dielectric filter according to the present invention,
By changing the material (dielectric constant) and size of the coupling adjusting member located between them, the coupling degree can be easily controlled and the specific bandwidth can be adjusted. This is shown in FIGS. 4 and 5. Figure 4
When the width (dimension in the stacking direction) of the coupling adjusting member is set to 1 mm, the relative bandwidth (ΔB _T / f) to the dielectric constant εr of the material
₀ ) shows the relationship. Further, FIG. 5 shows the relationship between the width and the specific bandwidth, using a material having a dielectric constant εr of 7 as the coupling adjusting member.

FIG. 6 is a perspective view showing another embodiment of the laminated dielectric filter according to the present invention, which is a case of a three-stage filter. 6A and 6B show a state viewed from the surfaces opposite to each other. In this laminated dielectric filter, one intermediate resonator 50 and two outer resonators 40a and 40b are integrally laminated so as to sandwich a coupling adjusting member 42 between them, and input / output is performed on the outer surfaces thereof. This is a structure in which necessary electrodes such as the electrode 46 and the external electrode 48 are formed. Both outer resonators 40a and 40b have a structure in which an internal electrode 44 is provided in the groove, as in the case of the above-described embodiment. The intermediate resonator 50 is
The internal electrode 54 is sandwiched between two dielectric pieces 52. The resonators are stacked in such a manner that the side edges of the internal electrodes 44 and 54 are in contact with the coupling adjusting member 42. In each resonator, the end surface on the electrodeless side is an open surface and the end surface on the electrode formation side is a short circuit surface. Here, both outer resonators 40a, 40b
Are the same (the positions of the open surface and the short circuit surface), and the intermediate resonator 50 is in the opposite direction. An independent island-shaped electrode 49 is provided on the outer surfaces of the outer resonators 40a and 40b in the vicinity of the electrodeless end surfaces. The island-shaped electrode 49 is electrically connected to the input / output electrode 46.

The manufacturing process of this laminated dielectric filter is as follows. The fabrication of the outer resonator substrate is the same as that shown in FIG. 2, so description thereof will be omitted. The intermediate resonator substrate is manufactured as follows. As shown in FIG. 7A, an electrode 64 is formed on the main surface of the dielectric substrate 62, and a large number of these are laminated and bonded. The dielectric substrate 64 is a material of the resonator, like the outer resonator substrate,
For example, it is a sintered body of a high-dielectric-constant material for microwaves that is usually used for a microwave filter, such as barium titanate-based material. Silver paste is applied to the entire main surface of a flat plate-shaped dielectric substrate 62 having a predetermined thickness to form a baking electrode 64 (this electrode 64 becomes the internal electrode 54 of the strip line resonator). A silver paste for adhesion is applied thereto, and a large number of them are laminated and baked to form a laminated body 66. Next, as indicated by imaginary lines, the dielectric substrate 62 is vertically sliced into thin slices having a predetermined thickness (width dimension of the resonator), and the resonator substrate as shown in FIG. 7B. Get 60. Therefore, the intermediate resonator substrate 60 has a structure in which a large number of resonators having the internal electrodes 54 are laterally aligned and integrally coupled.

Then, as shown in FIG. 8A, two coupling adjusting substrates 72 are laminated with the intermediate resonator substrate 60 interposed therebetween, and the outer resonator substrate 70 is further outside in the laminating direction.
a and 70b are arranged and integrated with an adhesive such as glass. At that time, each resonator substrate has a corresponding internal electrode 4
It goes without saying that the layers 4 and 54 are aligned and stacked so that they are located in the same plane. In this embodiment, a part 4 of the external electrode is previously formed on the outer main surfaces of the outer resonator substrates 70a and 70b.
An electrode pattern composed of 8a and the input / output electrode 46 is formed. Although not shown, the input / output electrodes 46 of one outer resonator substrate 70a and the other outer resonator substrate 70b are formed on the same side here. As shown in FIG. 8B,
The integrated structure 74 is cut and separated at a position indicated by an imaginary line. The cutting position (cutting surface) is a surface parallel to the internal electrodes 44 and 54 of each resonator substrate, and the internal electrodes 44 and 54 are located in the middle. In addition, in order to adjust the shape, the entire circumference of the integrated structure 74 is cut off as shown by an imaginary line.
As a result, a filter element body 76 as shown in C of FIG. 8 is obtained. In this step of cutting and separating, the electrode patterns on the outer main surfaces of the outer resonator substrates 70a and 70b have a shape in which a part of the outer electrode 48a and the input / output electrode 46 are separated.

Outer surfaces (4 surfaces) of the filter element assembly 76
In addition, as shown in FIG.
And are formed by metallization. The rest of the external electrode is electrically connected to a part of the external electrode described above to form the external electrode 48 as a whole, and the island-shaped electrode 49 is provided at the resonator portion and electrically connected to the input / output electrode 46. Thus, a laminated dielectric filter having a three-stage structure is obtained.

Although the preferred embodiment of the present invention has been described in detail above, the present invention is not limited to this configuration. The present invention can be applied to a filter having four or more stages. In that case, a required number of intermediate resonator substrates may be laminated with a coupling adjustment substrate interposed therebetween. The position of the input / output electrodes and the orientation of the resonator can be set freely. In addition, in the above-mentioned embodiment, a part of the external electrodes and the input / output electrodes are formed on the outer resonator substrate in advance, but the integrated structure is produced by using the electrodeless outer resonator substrate, and each separated structure is separated. Necessary electrodes may be formed on the outer surfaces (six surfaces) of the filter body. However, workability is better when electrodes are formed on the outer resonator substrate in advance.

The resonator substrate having the internal electrode formed in the groove may be used in another combination to form a laminated dielectric filter. For example, in the case of two stages, it is also possible to construct a filter by arranging the surfaces not having the grooves back to back and providing the outer substrate on the outer side. Alternatively, in the case of two or more stages, the resonator substrate as described above may be laminated in the same direction, and the outer substrate may be provided on the main surface where the side edges of the internal electrodes are exposed to form a filter. . All of these can be taken in large numbers by cutting and separating the integrated structure. However, in these cases, since the resonator substrate itself also functions for coupling adjustment, the degree of freedom in coupling adjustment is reduced.

[0029]

As described above, according to the present invention, since the resonator having the internal electrode in the groove also functions as a member such as an outer member, the number of necessary parts is small and the manufacturing is easy. Also, since the resonator substrates are laminated, the integrated structure is cut to form a filter element body, and external electrodes and the like are provided, it is possible to efficiently manufacture a multi-layer dielectric filter by a multi-piece manufacturing method. Also, in each resonator substrate, the shape and position of the internal electrodes are determined by groove processing,
Moreover, since the position is determined by the thickness of the dielectric substrate used, the accuracy is good, and the assembly misalignment between each member (particularly the misalignment between the resonators during stacking) can be reduced, and the quality and characteristics are stabilized. .

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a laminated dielectric filter according to the present invention.

FIG. 2 is an explanatory view of a manufacturing process of an outer resonator substrate.

FIG. 3 is an explanatory view of a stacked state of an outer resonator substrate and a coupling adjustment substrate.

FIG. 4 is a graph showing the relationship between the dielectric constant of the coupling adjusting member and the specific bandwidth.

FIG. 5 is a graph showing the relationship between the thickness of the coupling adjusting member member and the specific bandwidth.

FIG. 6 is a perspective view showing another embodiment of the laminated dielectric filter according to the present invention.

FIG. 7 is an explanatory diagram of a manufacturing process of an intermediate resonator substrate.

FIG. 8 is an explanatory diagram of a stacked state of an outer resonator substrate, an intermediate resonator substrate, and a coupling adjustment substrate.

[Explanation of symbols]

 10a, 10b Outer resonator 12 Coupling adjusting member 14 Internal electrode 16 Input / output electrode 18 External electrode 19 Island electrode 20 Outer resonator substrate

Front Page Continuation (72) Inventor Masaki Ina 5-36-11 Shinbashi, Minato-ku, Tokyo Fuji Electric Chemical Co., Ltd. (72) Teruto Kanno 5-36-11 Shinbashi, Minato-ku, Tokyo Fuji Electric Chemical Co., Ltd. In the company

Claims (7)

[Claims] 1. A coupling adjusting member between two outer resonators each having an internal electrode formed in a groove extending in a longitudinal direction on one surface of a dielectric element piece so that side edges of the internal electrodes face each other. A laminated dielectric filter in which an external electrode and an island-shaped electrode for input / output coupling are formed on the outer surface of the laminated dielectric layer through integration. 2. A step of forming an outer resonator substrate in which a plurality of grooves are formed in parallel on one main surface of a dielectric substrate and an internal electrode of a stripline type resonator is formed in the grooves, and two steps. The outer resonator substrate is laminated and integrated by sandwiching the coupling adjustment substrate so that the inner electrode forming surfaces face each other, and the integrated structure is parallel to the inner electrode and the inner electrode is positioned in the middle. A method for manufacturing a laminated dielectric filter, comprising the steps of cutting and separating, and forming an electrode on the outer surface of the separated filter body. 3. One or more intermediate resonators having a structure in which an internal electrode is sandwiched by two dielectric pieces, and an internal electrode is formed in a groove extending in the longitudinal direction of one surface of the dielectric piece. The outer resonators are laminated and integrated so that the coupling adjusting members are interposed between them and the side edges of the internal electrodes are in contact with the coupling adjusting members. A laminated dielectric filter having island electrodes. 4. A step of producing an outer resonator substrate in which a plurality of grooves are formed in parallel on one main surface of a dielectric substrate and internal electrodes of a stripline resonator are formed in the grooves, and a stripline. A step of laminating and bonding a plurality of dielectric substrates each having an electrode serving as an internal electrode of the cavity resonator formed on the main surface, and cutting the laminate perpendicularly to the main surface to produce an intermediate resonator substrate; A plurality of coupling adjusting substrates are laminated with an intermediate resonator substrate sandwiched therebetween, and an outer resonator substrate is arranged further outside in the laminating direction to be bonded and integrated, and the integrated structure is used as the internal electrode. A method of manufacturing a laminated dielectric filter, comprising the steps of cutting and separating so that the inner electrodes are parallel to each other and located in the middle, and forming electrodes on the outer surface of the separated filter element body. 5. A part of an external electrode and an input / output electrode are previously formed on the outer main surface of the outer resonator substrate, and an integrated structure is produced by using the outer resonator substrate with the electrode, and separated. 5. The manufacturing method according to claim 2, wherein an island-shaped electrode is formed on the remaining outer surface 4 of the filter element body, the island-shaped electrode being electrically connected to the rest of the external electrode and the input / output electrode. 6. A plurality of outer resonators, each having an internal electrode formed therein, are stacked in a groove extending in a longitudinal direction on one surface of a dielectric piece, an outer member is arranged and integrated, and the outer electrode and the inner electrode are formed on the outer surface. A laminated dielectric filter having an island-shaped electrode for output coupling. 7. A step of producing a resonator substrate in which a plurality of grooves are formed in parallel on one main surface of a dielectric substrate, and internal electrodes of a stripline resonator are provided in the grooves, and a plurality of resonances. Device substrate is laminated, the outer substrate is placed on the outside and integrated,
A laminated dielectric filter comprising a step of cutting and separating the integrated structure so as to be parallel to the internal electrodes and with the internal electrodes positioned in the middle, and forming electrodes on the outer surface of the separated filter element body. Manufacturing method.