JPH06243951A - Electrode for ionizer - Google Patents
Electrode for ionizerInfo
- Publication number
- JPH06243951A JPH06243951A JP4868593A JP4868593A JPH06243951A JP H06243951 A JPH06243951 A JP H06243951A JP 4868593 A JP4868593 A JP 4868593A JP 4868593 A JP4868593 A JP 4868593A JP H06243951 A JPH06243951 A JP H06243951A
- Authority
- JP
- Japan
- Prior art keywords
- discharge electrode
- corona discharge
- discharge
- ionizer
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Elimination Of Static Electricity (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、イオナイザーに用いら
れる電極に関する。FIELD OF THE INVENTION The present invention relates to electrodes used in ionizers.
【０００２】[0002]
【従来の技術】米国特許３，５８５，４４８号に開示さ
れているように、イオナイザーは放電電極を有してい
る。この放電電極に高電圧を付与することにより、放電
電極の先端でコロナ放電を起こさせ、この先端近傍の空
気の分子をイオン化させる。これらイオンは空気中に浮
遊し、物体の表面に生じた静電気を除去する。すなわ
ち、上記浮遊イオンのうち静電気と極性が異なるイオン
が、この静電気と結び付いて静電気を中和するのであ
る。上記放電電極は、一般的に、導電性に優れたステン
レス、タングステン、チタン等の金属材料により形成さ
れている。BACKGROUND OF THE INVENTION As disclosed in U.S. Pat. No. 3,585,448, an ionizer has a discharge electrode. By applying a high voltage to this discharge electrode, a corona discharge is caused at the tip of the discharge electrode, and air molecules near the tip are ionized. These ions float in the air and remove the static electricity generated on the surface of the object. That is, among the floating ions, ions having a polarity different from that of the static electricity are combined with the static electricity to neutralize the static electricity. The discharge electrode is generally formed of a metal material having excellent conductivity such as stainless steel, tungsten and titanium.
【０００３】[0003]
【発明が解決しようとする課題】上記放電電極の先端
は、コロナ放電によって消耗する。換言すれば、放電電
極の先端から放電電極を構成する物質が飛散する。この
飛散物質は室内環境に悪影響を及ぼすことがある。例え
ば、上記イオナイザーを半導体製造工場のクリーンルー
ム内で用いると、上記飛散物質が半導体に混入したり付
着し、半導体の品質低下を招く。本発明者は研究の結
果、この飛散の主たるメカニズムを突き止めることがで
きた。すなわち、放電電極の先端の金属がコロナ放電に
伴う熱で酸化され、酸化膜を形成する。次にこの酸化膜
がコロナ放電に伴う絶縁破壊により空中に飛散する。こ
の酸化膜形成と絶縁破壊の繰り返しにより飛散物質が生
成され続けるのである。The tip of the discharge electrode is consumed by corona discharge. In other words, the substance forming the discharge electrode is scattered from the tip of the discharge electrode. This scattered substance may adversely affect the indoor environment. For example, when the ionizer is used in a clean room of a semiconductor manufacturing factory, the scattered substances are mixed or adhered to the semiconductor, resulting in deterioration of semiconductor quality. As a result of research, the present inventor was able to find out the main mechanism of this scattering. That is, the metal at the tip of the discharge electrode is oxidized by the heat accompanying the corona discharge to form an oxide film. Next, this oxide film is scattered in the air due to dielectric breakdown due to corona discharge. By repeating the oxide film formation and the dielectric breakdown, scattered substances are continuously generated.
【０００４】[0004]
【課題を解決するための手段】この発明の要旨は、導電
性酸化物からなるイオナイザー用電極にある。The gist of the present invention resides in an ionizer electrode made of a conductive oxide.
【０００５】[0005]
【作用】導電性酸化物を用いるため、コロナ放電に伴う
酸化膜形成，絶縁破壊のサイクルが生じず、飛散物質の
生成を抑制することができる。Since the conductive oxide is used, the cycle of oxide film formation and dielectric breakdown due to corona discharge does not occur, and the generation of scattered substances can be suppressed.
【０００６】[0006]
【実施例】以下、本発明の一実施例を図面を参照して説
明する。図１に示すように、イオナイザー用放電電極１
０は、円柱形状の基部１１と、円錐形状の先端部１２と
を備えている。この基部１１は、イオナイザーのコネク
タに接続される。このコネクタから基部１１の外周面に
高電圧が印加されると、この放電電極１０の先端でコロ
ナ放電が生じ、空気中の分子がイオン化される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. As shown in FIG. 1, a discharge electrode 1 for an ionizer
Reference numeral 0 has a columnar base portion 11 and a conical tip portion 12. This base 11 is connected to the connector of the ionizer. When a high voltage is applied to the outer peripheral surface of the base portion 11 from this connector, corona discharge occurs at the tip of the discharge electrode 10 and the molecules in the air are ionized.
【０００７】上記放電電極１０は酸素欠損を有する酸化
チタンの焼結体すなわちセラミックによって形成され、
導電性を有している。なお、酸素欠損を有する酸化チタ
ンとは、正規の酸化チタン（ＴｉＯ2）に比べて酸素の
量が少ない酸化チタンを意味する。上記放電電極１０の
組成の具体例を述べると、酸素欠損を有する酸化チタン
が９９.８重量％（以下、単に％と記載する）、Ｈ2Ｏが
０.０４％、ＳｉＯ2が０.０２％、Ｎａ2Ｏが０.００５
％、Ｆｅ2Ｏ3が０．００３％、Ａｌ2Ｏ3が０．００２％
である。この組成の材料の体積抵抗率は１０Ω・ｃｍよ
り小さい。The discharge electrode 10 is made of a titanium oxide sintered body having oxygen deficiency, that is, a ceramic,
It has conductivity. The titanium oxide having oxygen deficiency means titanium oxide having a smaller amount of oxygen than regular titanium oxide (TiO 2 ). As a specific example of the composition of the discharge electrode 10, titanium oxide having oxygen deficiency is 99.8% by weight (hereinafter, simply referred to as%), H 2 O is 0.04%, and SiO 2 is 0.02. %, Na 2 O is 0.005
%, Fe 2 O 3 is 0.003%, Al 2 O 3 is 0.002%
Is. The volume resistivity of the material having this composition is smaller than 10 Ω · cm.
【０００８】上記組成の放電電極１０をイオナイザーに
装着して陽極，陰極としてそれぞれ用い、高い直流電圧
（２０ＫＶ）をパルス幅０.２ｓｅｃ，周期０.４ｓｅｃ
で印加してコロナ放電を生じさせ、これを１８０時間継
続して行った。その後で、放電電極１０の先端の表面状
態を観察したところ、満足すべきものであった。詳述す
ると、図２は、上記放電電極１０を陽極として用いた場
合の電子顕微鏡写真であり、（Ａ）はコロナ放電前の状
態を示し、（Ｂ）はコロナ放電後の状態を示す。図２か
ら明らかなように、放電電極１０の表面はコロナ放電に
よって若干荒らされ、先端から物質の飛散があったが、
表面状態はまだ良好であり、飛散量が極めて微量であり
許容すべきものであった。図３は上記放電電極１０を陰
極として用いた場合の電子顕微鏡写真であり、（Ａ）は
コロナ放電前の状態を示し、（Ｂ）はコロナ放電後の状
態を示す。図３から明らかなように、コロナ放電後の放
電電極１０の表面は、陽極として用いた場合よりも良好
であり、飛散量はほとんどゼロに等しい。The discharge electrode 10 having the above composition was attached to an ionizer and used as an anode and a cathode, respectively, and a high DC voltage (20 KV) was applied for a pulse width of 0.2 sec and a period of 0.4 sec.
Was applied to generate corona discharge, which was continuously performed for 180 hours. After that, when the surface condition of the tip of the discharge electrode 10 was observed, it was satisfactory. More specifically, FIG. 2 is an electron micrograph when the discharge electrode 10 is used as an anode, (A) shows a state before corona discharge, and (B) shows a state after corona discharge. As is clear from FIG. 2, the surface of the discharge electrode 10 was slightly roughened by the corona discharge, and the substance was scattered from the tip,
The surface condition was still good, and the amount of scattering was extremely small, which was acceptable. 3A and 3B are electron micrographs when the discharge electrode 10 is used as a cathode. FIG. 3A shows a state before corona discharge, and FIG. 3B shows a state after corona discharge. As is clear from FIG. 3, the surface of the discharge electrode 10 after corona discharge is better than when used as the anode, and the amount of scattering is almost equal to zero.
【０００９】上記図２，図３から、本発明の放電電極１
０によれば、コロナ放電によるスパッタリングで飛散物
質が生じるものの、その量はわずかであり、酸化膜形
成、酸化膜の絶縁破壊のサイクルによる飛散物質発生が
無いことが分かる。なお、表面の荒れを判断し易いよう
に、放電電極１０は予め鏡面仕上げしたが、通常の使用
に際しては鏡面仕上げをしなくてもよい。From the above FIGS. 2 and 3, the discharge electrode 1 of the present invention is shown.
According to 0, although the scattered substance is generated by the sputtering due to the corona discharge, the amount thereof is small, and it is understood that the scattered substance is not generated by the cycle of oxide film formation and dielectric breakdown of the oxide film. The discharge electrode 10 is mirror-finished in advance so that the surface roughness can be easily determined, but the mirror-finish may not be performed during normal use.
【００１０】図４，図５は比較例としてのタングステン
製放電電極の電子顕微鏡写真である。図４（Ａ）は陽極
として用いた場合のコロナ放電前の状態を示し、図４
（Ｂ）はコロナ放電後の状態を示す。図４から明らかな
ように、放電電極の表面はコロナ放電によって著しく荒
らされており、先端から室内環境に悪影響を及ぼす量の
物質の飛散があったことが分かる。図５（Ａ）は陰極と
して用いた場合のコロナ放電前の状態を示し、図５
（Ｂ）はコロナ放電後の状態を示す。図５から明らかな
ように、陰極で用いた場合でも、放電電極の表面はかな
り荒らされており、無視できない量の物質の飛散があっ
たことが分かる。これは、主に酸化膜形成、酸化膜の絶
縁破壊のサイクルに起因している。4 and 5 are electron micrographs of a tungsten discharge electrode as a comparative example. FIG. 4A shows a state before corona discharge when used as an anode.
(B) shows the state after corona discharge. As is clear from FIG. 4, the surface of the discharge electrode was significantly roughened by the corona discharge, and it was found that the amount of the substance that had an adverse effect on the indoor environment was scattered from the tip. FIG. 5A shows a state before corona discharge when used as a cathode.
(B) shows the state after corona discharge. As is clear from FIG. 5, even when used as a cathode, the surface of the discharge electrode was considerably roughened, and it was found that a considerable amount of substance was scattered. This is mainly due to the cycle of oxide film formation and oxide film dielectric breakdown.
【００１１】本発明は上記実施例に制約されず、種々の
態様が可能である。例えば、導電性酸化物として、チタ
ン酸バリウム（ＢａＴｉ０3）、酸化鉛（Ｐｂ2Ｏ3），
酸化錫（ＳｎＯ2）、酸化亜鉛（ＺｎＯ）のセラミック
を用いることができる。ただし、これら材料には、酸素
欠損または不純物混入により導電性が付与されている。
また、酸素欠損がなくても導電性を有する酸化物、例え
ばＴｉ2Ｏ3，Ｆｅ3Ｏ4等のセラミックを用いてもよい。
また、これらすべての酸化物は、セラミックではなく、
単結晶であってもよい。The present invention is not limited to the above embodiment, and various modes are possible. For example, as the conductive oxide, barium titanate (BaTi0 3 ), lead oxide (Pb 2 O 3 ),
Ceramics of tin oxide (SnO 2 ) and zinc oxide (ZnO) can be used. However, conductivity is imparted to these materials due to oxygen deficiency or inclusion of impurities.
Further, an oxide having conductivity without oxygen deficiency, for example, a ceramic such as Ti 2 O 3 or Fe 3 O 4 may be used.
Also, all these oxides are not ceramic,
It may be a single crystal.
【００１２】[0012]
【発明の効果】以上説明したように、導電性酸化物を用
いるため、コロナ放電に伴う酸化膜形成，絶縁破壊のサ
イクルが生じず、飛散物質の生成を抑制することができ
る。As described above, since the conductive oxide is used, the cycle of oxide film formation and dielectric breakdown due to corona discharge does not occur, and the generation of scattered substances can be suppressed.
【図１】本発明に係わる放電電極の全体を示す側面図で
ある。FIG. 1 is a side view showing an entire discharge electrode according to the present invention.
【図２】本発明に係わる導電性酸化チタン製の放電電極
を陽極として用いた場合の先端表面組織を示す電子顕微
鏡写真であり、（Ａ）はコロナ放電前の状態、（Ｂ）は
コロナ放電を継続して実行した後の状態である。FIG. 2 is an electron micrograph showing a tip surface texture when a conductive titanium oxide discharge electrode according to the present invention is used as an anode, (A) showing a state before corona discharge, and (B) showing a corona discharge. This is the state after continuously executing.
【図３】本発明に係わる導電性酸化チタン製の放電電極
を陰極として用いた場合の先端の表面組織を示す電子顕
微鏡写真であり、（Ａ）はコロナ放電前の状態、（Ｂ）
はコロナ放電を継続して実行した後の状態である。FIG. 3 is an electron micrograph showing the surface texture of the tip when a discharge electrode made of a conductive titanium oxide according to the present invention is used as a cathode, (A) a state before corona discharge, and (B).
Is the state after continuous execution of corona discharge.
【図４】比較例としてのタングステン製放電電極を陽極
として用いた場合の先端表面組織を示す電子顕微鏡写真
であり、（Ａ）はコロナ放電前の状態、（Ｂ）はコロナ
放電を継続して実行した後の状態である。FIG. 4 is an electron micrograph showing a tip surface texture when a tungsten discharge electrode is used as an anode as a comparative example. (A) shows a state before corona discharge, and (B) shows corona discharge continuously. This is the state after execution.
【図５】比較例としてのタングステン製放電電極を陰極
として用いた場合の先端表面組織を示す電子顕微鏡写真
であり、（Ａ）はコロナ放電前の状態、（Ｂ）はコロナ
放電を継続して実行した後の状態である。FIG. 5 is an electron micrograph showing a tip surface texture when a tungsten discharge electrode is used as a cathode as a comparative example, (A) shows a state before corona discharge, and (B) shows corona discharge continuously. This is the state after execution.
１０ 放電電極 10 Discharge electrode
Claims (2)
極。1. An ionizer electrode comprising a conductive oxide.
チタン製セラミックである請求項１のイオナイザー用電
極。2. The electrode for an ionizer according to claim 1, wherein the conductive oxide is a titanium oxide ceramic having oxygen deficiency.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4868593A JPH06243951A (en) | 1993-02-15 | 1993-02-15 | Electrode for ionizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4868593A JPH06243951A (en) | 1993-02-15 | 1993-02-15 | Electrode for ionizer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06243951A true JPH06243951A (en) | 1994-09-02 |
Family
ID=12810176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4868593A Pending JPH06243951A (en) | 1993-02-15 | 1993-02-15 | Electrode for ionizer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06243951A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010104141A1 (en) * | 2009-03-12 | 2010-09-16 | 国立大学法人 熊本大学 | Lower order titanium oxide and process for producing same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04334890A (en) * | 1991-05-10 | 1992-11-20 | Showa Denko Kk | Discharge electrode needle and manufacture thereof |
-
1993
- 1993-02-15 JP JP4868593A patent/JPH06243951A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04334890A (en) * | 1991-05-10 | 1992-11-20 | Showa Denko Kk | Discharge electrode needle and manufacture thereof |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010104141A1 (en) * | 2009-03-12 | 2010-09-16 | 国立大学法人 熊本大学 | Lower order titanium oxide and process for producing same |
| CN102348836A (en) * | 2009-03-12 | 2012-02-08 | 国立大学法人熊本大学 | Lower order titanium oxide and process for producing same |
| JP5505738B2 (en) * | 2009-03-12 | 2014-05-28 | 国立大学法人 熊本大学 | Low-order titanium oxide and method for producing the same |
| TWI513661B (en) * | 2009-03-12 | 2015-12-21 | Univ Kumamoto Nat Univ Corp | Process for manufacturing low-level titanium oxide |
| US9302917B2 (en) | 2009-03-12 | 2016-04-05 | National University Corporation Kumamoto University | Low valence titanium oxides and method of producing the same |
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