JPH0624304B2 - Piezoelectric resonator - Google Patents
Piezoelectric resonatorInfo
- Publication number
- JPH0624304B2 JPH0624304B2 JP63028426A JP2842688A JPH0624304B2 JP H0624304 B2 JPH0624304 B2 JP H0624304B2 JP 63028426 A JP63028426 A JP 63028426A JP 2842688 A JP2842688 A JP 2842688A JP H0624304 B2 JPH0624304 B2 JP H0624304B2
- Authority
- JP
- Japan
- Prior art keywords
- slit
- electrode
- piezoelectric substrate
- piezoelectric resonator
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、圧電共振子の構造に係り、特にフォーク型、
乃至は音叉型圧電共振子と呼ばれる圧電共振子の改良に
関するものである。Description: TECHNICAL FIELD The present invention relates to a structure of a piezoelectric resonator, particularly a fork type,
The present invention relates to improvement of a piezoelectric resonator called a tuning fork type piezoelectric resonator.
第１図はフォーク型圧電共振子の一例を示すもので、同
図(a)は表面側から見た正面図、同図(b)は裏面側から見
た正面図である。FIG. 1 shows an example of a fork type piezoelectric resonator. FIG. 1 (a) is a front view seen from the front side, and FIG. 1 (b) is a front view seen from the back side.
このような圧電共振子１は、母基板からの切り出しを容
易にするように平面視で略直角四角形状に形成された圧
電基板２の対称中心線上に、圧電基板２の長手方向に沿
ったスリット３を形成し、翼部１２，１２が形成されて
いる。従ってこの翼部１２，１２はスリット３の形成さ
れていない支持部２′（基部）により支持されることと
なる。そして第１図(a)に示す上記圧電基板２の表面側
に、上記スリット３の両側縁に沿ったＵ字状の第１電極
４と、この第１電極４に対して所定の間隔を隔てて、第
２電極５，５が形成され、第１図(b)に示す裏面側に上
記第１電極４及び第２電極５の両方に共通して対向する
第３電極６が形成されている。Such a piezoelectric resonator 1 has slits along the longitudinal direction of the piezoelectric substrate 2 on the symmetrical center line of the piezoelectric substrate 2 which is formed in a substantially right-angled quadrangular shape in a plan view so as to facilitate cutting from the mother substrate. 3 is formed, and the wings 12, 12 are formed. Therefore, the wings 12, 12 are supported by the supporting portion 2 '(base portion) in which the slit 3 is not formed. Then, on the surface side of the piezoelectric substrate 2 shown in FIG. 1 (a), a U-shaped first electrode 4 along both side edges of the slit 3 and a predetermined distance from the first electrode 4 are provided. Then, the second electrodes 5 and 5 are formed, and the third electrode 6 facing both the first electrode 4 and the second electrode 5 in common is formed on the back surface side shown in FIG. 1 (b). .
前記第２電極５，５はその脚部５ａ，５ｂに半田付けさ
れたリード端子７ａ，７ｂを介して共通電極９に接続さ
れ、第１電極４の脚部４ａは、リード端子８を介して電
極１０に接続されている。尚、前記第３電極６は、オー
プン状態、即ち何も接続されていない状態となってい
る。The second electrodes 5 and 5 are connected to the common electrode 9 via the lead terminals 7 a and 7 b soldered to the legs 5 a and 5 b, and the legs 4 a of the first electrode 4 are connected to the leads. It is connected to the electrode 10 via the terminal 8. The third electrode 6 is in an open state, that is, a state in which nothing is connected.
このような圧電共振子１では、前記共通電極９と電極１
０との間に励振信号が印加されると、第１電極４から第
３電極６を経て第２電極５に向かう電界とその逆方向の
電界が交互に形成され、前記スリット３によって隔てら
れた部分である翼部１２，１２が点１１，１１（節）を
節目として上記スリット３の幅が開いたり、閉じたりす
るように振動する。In such a piezoelectric resonator 1, the common electrode 9 and the electrode 1 are
When an excitation signal is applied between 0 and 0, an electric field directed from the first electrode 4 to the second electrode 5 via the third electrode 6 and an electric field in the opposite direction are alternately formed and separated by the slit 3. The wing portions 12, 12 that are portions vibrate such that the width of the slit 3 opens or closes with the points 11, 11 (nodes) as nodes.
このような振動の状態が第１図(a)に２点鎖線により示
されている。Such a vibration state is shown by a two-dot chain line in FIG.
上記のような第１図に示した圧電共振子では、上記スリ
ット３の長さや、第１電極４，第２電極５を形成した部
分の幅等の寸法に応じて、その振動周波数が調整され
る。In the piezoelectric resonator shown in FIG. 1 as described above, its vibration frequency is adjusted in accordance with the length of the slit 3 and the width of the portion where the first electrode 4 and the second electrode 5 are formed. It
上記したような従来のフォーク型圧電共振子では、イン
ピーダンス特性の山谷比が比較的小さく、その改善が求
められていた。そのため、本発明者らは、上記したフォ
ーク型圧電共振子の形状について寸法を変更した多数の
試作品を作り、そのインピーダンス特性をそれぞれにつ
いて測ったところ、ある種の寸法条件下でインピーダン
ス特性の山谷比が大きく上昇するという知見を得た。In the conventional fork type piezoelectric resonator as described above, the peak-valley ratio of the impedance characteristic is relatively small, and its improvement has been demanded. Therefore, the inventors of the present invention made a number of prototypes of which the dimensions were changed with respect to the shape of the fork-type piezoelectric resonator described above, and measured the impedance characteristics of the prototypes. We have found that the ratio increases significantly.
本発明は上記した知見に基づくもので、その要旨とする
ところが、平面略長方形状の圧電基板の対称中心線上
に、その長辺に平行のスリットがこの圧電基板の基部側
を残して形成され、スリットによって分離された圧電基
板の両翼部の片面側に、上記スリットの両側縁に沿った
第１電極と、この第１電極の両側に間隔を隔てて設けら
れた第２電極とが形成され、上記圧電基板の他面側に上
記第１，第２電極の両方に共通して対向する第３電極が
形成されてなる圧電共振子において、上記両翼部が振動
する際の節の位置がこの振動を上記基部側へ略伝達しな
い部位に設定されるように、上記スリットの幅寸法ｅを
上記翼部の幅寸法ｄの1/3以上となした点に係る圧電共
振子である。The present invention is based on the above-mentioned findings, and the gist thereof is that, on a symmetrical center line of a substantially rectangular piezoelectric substrate in a plane, a slit parallel to its long side is formed leaving the base side of this piezoelectric substrate, A first electrode along both side edges of the slit and a second electrode provided on both sides of the first electrode at a distance are formed on one side of both wing portions of the piezoelectric substrate separated by the slit. In a piezoelectric resonator in which a third electrode facing both the first and second electrodes is formed on the other surface side of the piezoelectric substrate, the position of a node when the both wings vibrate is the vibration. Is set to a portion that does not substantially transmit to the base portion side, the width dimension e of the slit is 1/3 or more of the width dimension d of the blade portion.
上記スリットの幅を上記翼部の1/3以上とすることによ
り、上記山谷比が上昇した。これは、上記翼部の振動に
おける節の位置が翼部における振動を基部側へ殆ど伝達
しないような適正な位置に設定されたため、その結果、
山谷比の上昇が可能となったものと考えられる。By setting the width of the slit to 1/3 or more of the blade, the ridge / valley ratio increased. This is because the position of the node in the vibration of the wing is set to an appropriate position so that the vibration in the wing is hardly transmitted to the base side, and as a result,
It is considered that the Yamatani ratio could be increased.
続いて、第１図及び第２図を参照して本発明を具体化し
た実施例につき説明し、本発明の理解に供する。ここに
第１図は本発明の一実施例に係るフォーク型圧電共振子
を示すもので、同図(a)はその正面図、同図(b)はその背
面図、第２図(a)は実験例を示す概念図で、第２図(b)は
実験の結果得られたスリット幅と山谷比との関係を示す
グラフである。Subsequently, an embodiment embodying the present invention will be described with reference to FIGS. 1 and 2 to provide an understanding of the present invention. FIG. 1 shows a fork-type piezoelectric resonator according to an embodiment of the present invention. FIG. 1 (a) is its front view, FIG. 1 (b) is its rear view, and FIG. 2 (a). Is a conceptual diagram showing an experimental example, and FIG. 2 (b) is a graph showing the relationship between the slit width and the peak-to-valley ratio obtained as a result of the experiment.
この実施例では、前記スリット３の幅ｅが翼部１２の幅
ｄの1/3以上となっている。このような実施例の典型例
として、上記翼部１２の幅ｄを0.７mm（一定）とし、ス
リット３の幅ｅを種々変化させた時のインピーダンス特
性における山谷比の変化を計測した実験についてのグラ
フが第２図(b)に示されている。In this embodiment, the width e of the slit 3 is 1/3 or more of the width d of the blade portion 12. As a typical example of such an embodiment, an experiment in which the width d of the wing 12 is set to 0.7 mm (constant) and the change in the peak-valley ratio in the impedance characteristic when the width e of the slit 3 is variously changed is measured. The graph of is shown in FIG. 2 (b).
従来のフォーク型圧電共振子におけるスリット幅ｅは、
例えば翼部の幅が0.７mmの時、0.１５mm程度で、その時
の山谷比は２５dB程度であったが、第２図(b)に示すよ
うに上記スリット幅ｅを上記翼部１２の幅の1/3（0.２
３mm）にした時、山谷比は４０dBにも上昇し、しかもこ
の比率を更に上昇させることにより、山谷比を４５dB程
度まで上昇させることに成功した。The slit width e in the conventional fork type piezoelectric resonator is
For example, when the width of the wing is 0.7 mm, it was about 0.15 mm, and the peak-valley ratio at that time was about 25 dB. However, as shown in FIG. 1/3 of the width (0.2
3mm), the valley-to-valley ratio increased to 40 dB, and by further increasing this ratio, we succeeded in raising the valley-to-valley ratio to about 45 dB.
上記従来の低い山谷比の場合におけるインピーダンス特
性は第３図(a)に示す如くであり、谷部及び山部におい
て鈍い変化を示しているが、第３図(b)に示したように
本考案にかかる山谷比が４０dBを越えるような圧電共振
子では、そのインピーダンス特性が第３図(b)に示す如
く変化し、山部及び谷部における変化がシャープとなっ
て、両者の山谷比が４０dBを越えるようになった。The impedance characteristics in the case of the conventional low peak-to-valley ratio are as shown in Fig. 3 (a), and the valleys and peaks show a gradual change, but as shown in Fig. 3 (b), In a piezo-resonator having a peak-to-valley ratio of over 40 dB according to the present invention, its impedance characteristic changes as shown in Fig. 3 (b), and the peak-valley and valley-valve changes sharply. It came to exceed 40 dB.
これは、両翼部１２，１２が振動する際の節（点１１）
の位置が、この振動を支持部２′へほとんど伝達しない
ような適正な部位に設定されたことによる。This is a node (point 11) when both wings 12, 12 vibrate.
This is because the position of is set to an appropriate portion so that this vibration is hardly transmitted to the support portion 2 '.
本発明は、以上述べたように、平面略長方形状の圧電基
板の対称中心線上に、その長辺に平行のスリットがこの
圧電基板の基部側を残して形成され、スリットによって
分離された圧電基板の両翼部の片面側に、上記スリット
の両側縁に沿った第１電極と、この第１電極の両側に間
隔を隔てて設けられた第２電極とが形成され、上記圧電
基板の他面側に上記第１，第２電極の両方に共通して対
向する第３電極が形成されてなる圧電共振子において、
上記両翼部が振動する際の節の位置がこの振動を上記基
部側へ略伝達しない部位に設定されるように、上記スリ
ットの幅寸法ｅを上記翼部の幅寸法ｄの1/3以上となし
たことを特徴とする圧電共振子であるから、従来のフォ
ーク型圧電共振子と比べて、インピーダンス特性の山谷
比を著しく向上させることに成功した。As described above, according to the present invention, a piezoelectric substrate formed by forming a slit parallel to its long side on the symmetric center line of a substantially rectangular planar piezoelectric substrate, leaving the base side of the piezoelectric substrate, and separating the slit by the slit. A first electrode along both side edges of the slit and a second electrode provided on both sides of the first electrode and spaced apart from each other are formed on one side of both wing portions of the piezoelectric substrate. In a piezoelectric resonator in which a third electrode facing both the first and second electrodes in common is formed,
The width dimension e of the slit is set to 1/3 or more of the width dimension d of the wing portion so that the position of the node when the both wing portions vibrate is set to a portion that does not substantially transmit this vibration to the base side. Since it is a piezoelectric resonator characterized by what has been done, we succeeded in significantly improving the peak-valley ratio of the impedance characteristic as compared with the conventional fork-type piezoelectric resonator.
第１図は本発明の一実施例に係るフォーク型圧電共振子
を示すもので、同図(a)はその正面図、同図(b)はその背
面図、第２図(a)は実験例を示す概念図で、第２図(b)は
実験の結果得られたスリット幅と山谷比との関係を示す
グラフ、第３図はフォーク型圧電共振子のインピーダン
ス特性を示すグラフで、同図(a)は従来のフォーク型圧
電共振子に関するもの、同図(b)は本発明を実施した場
合の圧電共振子に関するものでる。 〔符号の説明〕 １……フォーク型圧電共振子、２……圧電基板、２′…
…支持部（基部）、３……スリット、１１……点
（節）、１２……翼部、ｅ……スリットの幅、ｄ……翼
部の幅FIG. 1 shows a fork-type piezoelectric resonator according to an embodiment of the present invention. FIG. 1 (a) is its front view, FIG. 1 (b) is its rear view, and FIG. 2 (a) is an experiment. FIG. 2 (b) is a graph showing the relationship between the slit width and the peak-to-valley ratio obtained as a result of the experiment, and FIG. 3 is a graph showing the impedance characteristics of the fork-type piezoelectric resonator. FIG. 1 (a) relates to a conventional fork type piezoelectric resonator, and FIG. 1 (b) relates to a piezoelectric resonator when the present invention is implemented. [Explanation of reference symbols] 1 ... Fork type piezoelectric resonator, 2 ... Piezoelectric substrate, 2 '...
… Support (base), 3 ... Slit, 11 ... Point (joint), 12 ... Wing, e ... Slit width, d ... Wing width
Claims (1)
に、その長辺に平行のスリットがこの圧電基板の基部側
を残して形成され、スリットによって分離された圧電基
板の両翼部の片面側に、上記スリットの両側縁に沿った
第１電極と、この第１電極の両側に間隔を隔てて設けら
れた第２電極とが形成され、上記圧電基板の他面側に上
記第１，第２電極の両方に共通して対向する第３電極が
形成されてなる圧電共振子において、 上記両翼部が振動する際の節の位置がこの振動を上記基
部側へ略伝達しない部位に設定されるように、上記スリ
ットの幅寸法ｅを上記翼部の幅寸法ｄの1/3以上となし
たことを特徴とする圧電共振子。1. A piezoelectric substrate having a substantially rectangular planar shape, in which a slit parallel to the long side of the piezoelectric substrate is formed, leaving the base side of the piezoelectric substrate, and both sides of the piezoelectric substrate are separated by the slit. A first electrode along both side edges of the slit and a second electrode provided on both sides of the first electrode and spaced apart from each other, and the first and second electrodes are formed on the other side of the piezoelectric substrate. In a piezoelectric resonator in which a third electrode that is commonly opposed to both of the second electrodes is formed, the position of the node when the both wings vibrate is set to a portion that does not substantially transmit this vibration to the base side. Thus, the width dimension e of the slit is 1/3 or more of the width dimension d of the wing portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63028426A JPH0624304B2 (en) | 1988-02-09 | 1988-02-09 | Piezoelectric resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63028426A JPH0624304B2 (en) | 1988-02-09 | 1988-02-09 | Piezoelectric resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01202912A JPH01202912A (en) | 1989-08-15 |
| JPH0624304B2 true JPH0624304B2 (en) | 1994-03-30 |
Family
ID=12248331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63028426A Expired - Fee Related JPH0624304B2 (en) | 1988-02-09 | 1988-02-09 | Piezoelectric resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0624304B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02112311A (en) * | 1988-10-20 | 1990-04-25 | Matsushima Kogyo Co Ltd | Twisted crystal resonator |
| WO2016043205A1 (en) * | 2014-09-19 | 2016-03-24 | 株式会社村田製作所 | Resonator and resonance device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51109785A (en) * | 1975-03-20 | 1976-09-28 | Seiko Instr & Electronics | ONSAGATASUISHOSHINDOSHI |
-
1988
- 1988-02-09 JP JP63028426A patent/JPH0624304B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01202912A (en) | 1989-08-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |