JP3395861B2 - Manufacturing method of piezoelectric resonator - Google Patents
Manufacturing method of piezoelectric resonatorInfo
- Publication number
- JP3395861B2 JP3395861B2 JP19559094A JP19559094A JP3395861B2 JP 3395861 B2 JP3395861 B2 JP 3395861B2 JP 19559094 A JP19559094 A JP 19559094A JP 19559094 A JP19559094 A JP 19559094A JP 3395861 B2 JP3395861 B2 JP 3395861B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- extraction
- motherboard
- ground
- extraction electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【発明の詳細な説明】
【０００１】
【産業上の利用分野】本発明は、圧電共振子の製造方
法、特にトラップ回路やフィルタ回路等に使用される圧
電共振子の製造方法に関する。
【０００２】
【従来の技術と課題】従来の圧電共振子としては、例え
ば図５に示すように、圧電体基板３１の表面に振動電極
３２，３３と引出し電極３５，３６とを設け、裏面に振
動電極３４と引出し電極３７ａ，３７ｂとを設けたもの
が知られている。引出し電極３５，３６，３７ａ，３７
ｂは圧電体基板３１の中央寄りに配設されており、圧電
体マザーボードから圧電共振子を切り出す際に引出し電
極３５〜３７ｂが切断されにくいように工夫されてい
る。
【０００３】ところが、この圧電共振子において、引出
し電極３５を入力電極、引出し電極３６を出力電極、引
出し電極３７ａ，３７ｂをグランド電極とすると、入力
引出し電極３５とグランド引出し電極３７ａの接近、あ
るいは出力引出し電極３６とグランド引出し電極３７ｂ
の接近は不要振動の発生を招き、共振周波数特性を劣化
させる。このため、引出し電極の導体幅を細くしている
が、細い導体幅は欠けや断線等の加工不良が生じ易く、
生産性の向上を阻害していた。
【０００４】そこで、本発明の課題は、入出力引出し電
極とグランド引出し電極の間隔が広く、かつ生産性に優
れた圧電共振子の製造方法を提供することにある。
【０００５】
【課題を解決するための手段と作用】以上の課題を解決
するため、本発明に係る圧電共振子の製造方法は、長尺
形状の圧電体マザーボードの表裏面のそれぞれの略中央
部にマザーボードの長辺方向に延びる帯状の振動電極を
設けると共に、前記マザーボードの表面に設けた振動電
極からマザーボードの短辺方向にそれぞれ延びた入力引
出し電極および出力引出し電極を、所定の引出しピッチ
で、マザーボードの短辺方向の対向する二つの端部に向
けて交互に延設し、前記マザーボードの裏面に設けた振
動電極からマザーボードの短辺方向に延びたグランド引
出し電極を、前記入力引出し電極もしくは出力引出し電
極の延設方向と前記グランド引出し電極の延設方向とが
同一の切り出し線上において逆方向になるように、前記
所定の引出しピッチで、マザーボードの短辺方向の対向
する二つの端部に向けて交互に延設し、前記マザーボー
ドを前記引出しピッチで前記入力引出し電極、出力引出
し電極およびグランド引出し電極を２分割するように前
記切り出し線に沿って短辺方向に切り、前記２分割され
た入力引出し電極、出力引出し電極およびグランド引出
し電極のそれぞれの一方の入力引出し電極、出力引出し
電極およびグランド引出し電極を圧電体基板の側縁に形
成すると共に、入力引出し電極とグランド引出し電極、
並びに、出力引出し電極とグランド引出し電極をそれぞ
れ互いに圧電体基板の厚み方向に対向しないように圧電
体基板の異なる側縁に配設した圧電共振子を切り出し、
前記マザーボードから隣り合わせで切り出された二つの
圧電共振子相互の入力引出し電極、出力引出し電極およ
びグランド引出し電極の配置が左右対称であることを特
徴とする。
【０００６】以上の方法により、切り出された圧電共振
子は、常に圧電体基板の側縁に沿って引出し電極が設け
られる。従って、入出力引出し電極とグランド引出し電
極の間隔が従来の圧電共振子と比較して広くなる。しか
も、マザーボードの表裏面に形成される引出し電極の電
極幅は、圧電共振子の引出し電極の電極幅の少なくとも
２倍の寸法となるため、引出し電極の形成がし易く、欠
けや断線等の加工不良が低減する。
【０００７】
【実施例】以下、本発明に係る圧電共振子の製造方法の
一実施例について添付図面を参照して説明する。本実施
例は３端子の圧電共振子の場合について説明する。図１
に示すように、圧電体マザーボード１は長尺形状をして
おり、表面中央部にはボード１の長辺方向に延びる帯状
の振動電極２，３が対置して設けられ、この振動電極
２，３からボード１の短辺方向に引き出された引出し電
極５，６がボード１の縁部にまで延設されている。同様
に、ボード１の裏面中央部にはボード１の長辺方向に延
びる帯状の振動電極４が設けられ、この振動電極４から
ボード１の短辺方向に引き出された引出し電極７ａ，７
ｂがボード１の縁部にまで延設されている。圧電体マザ
ーボード１の材料としては、例えばチタン酸バリウムや
ＰＺＴ等のセラミックスが使用される。この圧電体マザ
ーボード１の材料としては、セラミックス以外に水晶や
ＬｉＴａＯ3等でもよい。各電極２〜７ｂはＣｕ，Ａ
ｇ，Ａｇ−Ｐｄ等の導電性材料からなり、印刷乾燥、ス
パッタリングあるいは蒸着等の手段にて形成される。
【０００８】ここに、引出し電極５，６，７ａ，７ｂの
引出しピッチをＰ1とする。ボード１に形成される引出
し電極５〜７ｂの電極幅は、後述の圧電共振子１１1，
１１2の引出し電極５〜７ｂの電極幅の２倍の寸法と切
出しカッターの刃厚寸法とを合計した値に設定される。
従って、ボード１の表裏面に形成される引出し電極５〜
７ｂの電極幅は従来の圧電共振子と比較して著しく大き
くなり、欠けや断線等の加工不良が低減される。
【０００９】次に、ボード１が図示しない切出しカッタ
ーによって引出しピッチＰ1で引出し電極５〜７ｂの中
央線、すなわち、一点鎖線１０に沿って切断される。こ
のとき、切り出しカッターの基準位置出しは、引出し電
極４〜７ｂを利用して行われるが、引出し電極５〜７ｂ
の導体幅が大きいので精度の良い基準位置出しができ、
また作業性もよい。
【００１０】切り出された圧電共振子１１1は、図２に
示すように、圧電体基板１２の表面中央部に振動電極
２，３が対置し、この振動電極２，３からそれぞれ圧電
体基板１２の右側縁及び左側縁に沿って引出し電極５，
６が圧電体基板１２の端部にまで延設されている。同様
に、圧電体基板１２の裏面中央部に振動電極４が設けら
れ、この振動電極４から圧電体基板１２の左側縁及び右
側縁に沿って引出し電極７ａ，７ｂが圧電体基板１２の
端部に延設されている。
【００１１】また、圧電共振子１１1と伴に切り出され
た圧電共振子１１2は、図３に示すように、引出し電極
５〜７ｂの配置が圧電共振子１１1に対して左右対称に
なっている。マザーボード１の状態で、圧電共振子１１
1と１１2は隣接しており、圧電共振子１１2の入力引出
し電極５は圧電共振子１１1の入力引出し電極５と一体
化している。同様に、圧電共振子１１2の出力引出し電
極６は圧電共振子１１1の出力引出し電極６と一体化
し、圧電共振子１１2のグランド引出し電極７ａ，７ｂ
はそれぞれ圧電共振子１１1のグランド引出し電極７
ａ，７ｂと一体化している。
【００１２】この圧電共振子１１1，１１2において、引
出し電極５を入力電極、引出し電極６を出力電極、引出
し電極７ａ，７ｂをグランド電極とすると、入力引出し
電極５とグランド引出し電極７ａの間隔、あるいは出力
引出し電極６とグランド引出し電極７ｂの間隔は、従来
の圧電共振子と比較して広いので、不要振動が発生しに
くく、共振周波数特性が向上する。図４はこうして得ら
れた圧電共振子１１1、１１2の電気等価回路図である。
【００１３】なお、本発明に係る圧電共振子の製造方法
は前記実施例に限定するものではなく、その要旨の範囲
内で種々に変形することができる。特に、振動電極の形
状等については任意である。
【００１４】
【発明の効果】以上の説明で明らかなように、本発明に
よれば、圧電体マザーボードの表裏面に形成する引出し
電極の電極幅が圧電共振子の引出し電極の電極幅の少な
くとも２倍の寸法になるので、引出し電極の形成が容易
となり、欠けや断線等の加工不良を低減することができ
る。
【００１５】さらに、引出し電極の導体幅が大きいの
で、圧電体マザーボードから圧電共振子を切り出す際の
切出し基準位置出しが精度良くでき、また作業性もよく
なる。また、常に圧電体基板の側縁に沿って引出し電極
が設けられるので、入出力引出し電極とグランド引出し
電極の間隔を従来の圧電共振子と比較して広くすること
ができ、共振周波数特性を向上させることができる。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a piezoelectric resonator.
More particularly, the present invention relates to a method for manufacturing a piezoelectric resonator used in a trap circuit, a filter circuit, and the like. 2. Description of the Related Art As a conventional piezoelectric resonator, for example, as shown in FIG. 5, vibration electrodes 32, 33 and extraction electrodes 35, 36 are provided on the surface of a piezoelectric substrate 31, and on the back surface. The one provided with the vibration electrode 34 and the extraction electrodes 37a and 37b is known. Extraction electrodes 35, 36, 37a, 37
“b” is disposed near the center of the piezoelectric substrate 31 and is designed so that the extraction electrodes 35 to 37b are not easily cut when cutting out the piezoelectric resonator from the piezoelectric mother board. However, in this piezoelectric resonator, if the extraction electrode 35 is an input electrode, the extraction electrode 36 is an output electrode, and the extraction electrodes 37a and 37b are ground electrodes, the approach between the input extraction electrode 35 and the ground extraction electrode 37a or the output of the ground electrode 37a. Extraction electrode 36 and ground extraction electrode 37b
Approaching causes unnecessary vibration and degrades resonance frequency characteristics. For this reason, the conductor width of the extraction electrode is reduced, but the narrow conductor width tends to cause processing defects such as chipping or disconnection,
This hindered productivity. It is an object of the present invention to provide a method of manufacturing a piezoelectric resonator in which the distance between an input / output lead electrode and a ground lead electrode is wide and excellent in productivity. [0005] In order to solve the above problems, a method of manufacturing a piezoelectric resonator according to the present invention is directed to a method of manufacturing a piezoelectric mother board having a long shape in a substantially central portion of each of front and rear surfaces of a long-sized piezoelectric motherboard. A strip-shaped vibration electrode extending in the long side direction of the motherboard, and a vibration electrode provided on the surface of the motherboard.
Input pulls that extend from the pole to the short side of the motherboard
Set the extraction electrode and output extraction electrode to the specified extraction pitch.
To the two opposite ends of the motherboard in the short side direction.
And alternately extend the
Ground pull extending from the working electrode to the short side of the motherboard
The extraction electrode is connected to the input extraction electrode or the output extraction electrode.
The direction in which the pole extends and the direction in which the ground extraction electrode extends
So that the opposite direction on the same cut line
Opposite the short side of the motherboard at a predetermined draw pitch
To towards the two ends to extend alternately, the input lead-out electrode of the motherboard the drawer pitch, output lead-out electrodes and before the ground lead electrode as divided into two
Cut in the short side direction along the cutout line, and divide the input lead electrode, the output lead electrode, and the ground lead electrode into the two divided input lead electrodes, output lead electrodes, and ground lead electrodes on the side of the piezoelectric substrate. Formed on the edge, input lead electrode and ground lead electrode,
In addition, a piezoelectric resonator in which the output extraction electrode and the ground extraction electrode are arranged on different side edges of the piezoelectric substrate so as not to face each other in the thickness direction of the piezoelectric substrate is cut out,
Two cut out side by side from the motherboard
The input extraction electrode, output extraction electrode and
And the arrangement of the ground extraction electrodes is bilaterally symmetric . According to the above method , the extracted piezoelectric resonator is always provided with the extraction electrode along the side edge of the piezoelectric substrate. Therefore, the distance between the input / output extraction electrode and the ground extraction electrode becomes wider as compared with the conventional piezoelectric resonator. In addition, since the width of the extraction electrode formed on the front and back surfaces of the motherboard is at least twice as large as the width of the extraction electrode of the piezoelectric resonator, it is easy to form the extraction electrode, and processing such as chipping or disconnection is performed. Defects are reduced. An embodiment of a method for manufacturing a piezoelectric resonator according to the present invention will be described below with reference to the accompanying drawings. This embodiment describes a case of a three-terminal piezoelectric resonator. FIG.
As shown in FIG. 1, the piezoelectric mother board 1 has an elongated shape, and band-shaped vibration electrodes 2 and 3 extending in the long side direction of the board 1 are provided opposite to each other at the center of the surface. Extraction electrodes 5 and 6 extending from the reference numeral 3 in the short side direction of the board 1 extend to the edge of the board 1. Similarly, a band-shaped vibrating electrode 4 extending in the long side direction of the board 1 is provided at the center of the back surface of the board 1, and extraction electrodes 7 a and 7 drawn from the vibrating electrode 4 in the short side direction of the board 1.
b extends to the edge of the board 1. As a material of the piezoelectric motherboard 1, for example, ceramics such as barium titanate or PZT is used. The material of the piezoelectric mother board 1 may be quartz, LiTaO 3 or the like, other than ceramics. Each electrode 2-7b is made of Cu, A
g, Ag-Pd or other conductive material, and is formed by means such as printing drying, sputtering or vapor deposition. [0008] Here, the extraction electrode 5,6,7A, the drawer pitch 7b and P 1. The electrode width of the extraction electrodes 5 to 7b formed on the board 1 is determined by the piezoelectric resonators 11 1 , described later.
It is set to 11 2 value which is the sum of the blade thickness dimension of 2 times the dimension and cut cutter electrode width of the lead electrode 5～7B.
Therefore, the extraction electrodes 5 formed on the front and back surfaces of the board 1
The electrode width of 7b is significantly larger than that of the conventional piezoelectric resonator, and processing defects such as chipping and disconnection are reduced. [0009] Next, the center line of the extraction electrode 5~7b in drawer pitch P 1 by clipping cutter board 1 is not shown, i.e., is cut along the dashed line 10. At this time, the reference position of the cutting cutter is determined using the extraction electrodes 4 to 7b.
The width of the conductor is large, so accurate reference position
Also, workability is good. [0010] The piezoelectric resonator 11 1 cut out, as shown in FIG. 2, the vibrating electrodes 2 and 3 are opposed to the central surface portion of the piezoelectric substrate 12, piezoelectric substrate 12 from each of the vibration electrodes 2 and 3 Extraction electrodes 5 along the right and left edges of
6 extends to the end of the piezoelectric substrate 12. Similarly, a vibration electrode 4 is provided at the center of the back surface of the piezoelectric substrate 12, and lead electrodes 7 a and 7 b are drawn from the vibration electrode 4 along the left edge and the right edge of the piezoelectric substrate 12 to the end of the piezoelectric substrate 12. Has been extended. Further, the piezoelectric resonator 11 2 cut out in the piezoelectric resonator 11 1 and companion, as shown in FIG. 3, the arrangement of the extraction electrode 5~7b becomes symmetrical with respect to the piezoelectric resonator 11 1 ing. In the state of the motherboard 1, the piezoelectric resonator 11
1 and 11 2 are adjacent, an input lead-out electrode 5 of the piezoelectric resonator 11 2 is integral with the input lead-out electrode 5 of the piezoelectric resonator 11 1. Similarly, the output lead-out electrode 6 of the piezoelectric resonator 11 2 is integrated with the output lead-out electrode 6 of the piezoelectric resonator 11 1, the piezoelectric resonator 11 second ground lead electrode 7a, 7b
Are the ground extraction electrodes 7 of the piezoelectric resonator 11 1 respectively.
a, 7b. In the piezoelectric resonators 11 1 and 11 2 , if the extraction electrode 5 is an input electrode, the extraction electrode 6 is an output electrode, and the extraction electrodes 7 a and 7 b are ground electrodes, the distance between the input extraction electrode 5 and the ground extraction electrode 7 a is set. Alternatively, since the distance between the output extraction electrode 6 and the ground extraction electrode 7b is wider than that of the conventional piezoelectric resonator, unnecessary vibration hardly occurs and resonance frequency characteristics are improved. FIG. 4 is an electric equivalent circuit diagram of the piezoelectric resonators 11 1 and 11 2 thus obtained. The method of manufacturing a piezoelectric resonator according to the present invention is not limited to the above embodiment, but can be variously modified within the scope of the invention. In particular, the shape and the like of the vibration electrode are arbitrary. As is apparent from the above description, according to the present invention, the electrode width of the extraction electrode formed on the front and back surfaces of the piezoelectric motherboard is at least two times the electrode width of the extraction electrode of the piezoelectric resonator. Since the size is doubled, the formation of the extraction electrode is facilitated, and processing defects such as chipping and disconnection can be reduced. Further, since the conductor width of the extraction electrode is large, the extraction reference position for extracting the piezoelectric resonator from the piezoelectric motherboard can be accurately set, and the workability is improved. In addition, since the extraction electrode is always provided along the side edge of the piezoelectric substrate, the distance between the input / output extraction electrode and the ground extraction electrode can be made wider than that of the conventional piezoelectric resonator, improving the resonance frequency characteristics. Can be done.
【図面の簡単な説明】
【図１】本発明に係る圧電共振子の製造方法に使用され
る圧電体マザーボードを示す平面図。
【図２】図１に示した圧電体マザーボードから切り出さ
れた圧電共振子を示す平面図。
【図３】図１に示した圧電体マザーボードから切り出さ
れた別の圧電共振子を示す平面図。
【図４】圧電共振子の電気等価回路図。
【図５】従来の圧電共振子を示す平面図。
【符号の説明】
１…圧電体マザーボード
２，３，４…振動電極
５，６，７ａ，７ｂ…引出し電極
１１1，１１2…圧電共振子
１２…圧電体基板
Ｐ1…引出しピッチBRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is used in a method for manufacturing a piezoelectric resonator according to the present invention.
Plan view illustrating the piezoelectric motherboard that. FIG. 2 is a plan view showing a piezoelectric resonator cut out from the piezoelectric mother board shown in FIG. 1; FIG. 3 is a plan view showing another piezoelectric resonator cut out from the piezoelectric mother board shown in FIG. 1; FIG. 4 is an electric equivalent circuit diagram of the piezoelectric resonator. FIG. 5 is a plan view showing a conventional piezoelectric resonator. [Description of Reference Numerals] 1 ... piezoelectric motherboard 2,3,4 ... vibrating electrode 5,6,7A, 7b ... lead electrodes 11 1, 11 2 ... piezoelectric resonator 12 ... piezoelectric substrate P 1 ... drawer pitch
Claims (1)
のそれぞれの略中央部にマザーボードの長辺方向に延び
る帯状の振動電極を設けると共に、前記マザーボードの表面に設けた振動電極からマザーボ
ードの短辺方向にそれぞれ延びた入力引出し電極および
出力引出し電極を、所定の引出しピッチで、マザーボー
ドの短辺方向の対向する二つの端部に向けて交互に延設
し、 前記マザーボードの裏面に設けた振動電極からマザーボ
ードの短辺方向に延びたグランド引出し電極を、前記入
力引出し電極もしくは出力引出し電極の延設方向と前記
グランド引出し電極の延設方向とが同一の切り出し線上
において逆方向になるように、前記所定の引出しピッチ
で、マザーボードの短辺方向の対向する二つの端部に向
けて交互に延設し、 前記マザーボードを前記引出しピッチで前記入力引出し
電極、出力引出し電極およびグランド引出し電極を２分
割するように前記切り出し線に沿って短辺方向に切り、
前記２分割された入力引出し電極、出力引出し電極およ
びグランド引出し電極のそれぞれの一方の入力引出し電
極、出力引出し電極およびグランド引出し電極を圧電体
基板の側縁に形成すると共に、入力引出し電極とグラン
ド引出し電極、並びに、出力引出し電極とグランド引出
し電極をそれぞれ互いに圧電体基板の厚み方向に対向し
ないように圧電体基板の異なる側縁に配設した圧電共振
子を切り出し、 前記マザーボードから隣り合わせで切り出された二つの
圧電共振子相互の入力引出し電極、出力引出し電極およ
びグランド引出し電極の配置が左右対称であること、 を特徴とする圧電共振子の製造方法。(57) front and back surfaces of the piezoelectric motherboard Claims 1. A long shape
At substantially the center of each of the motherboards, a band-shaped vibrating electrode extending in the long side direction of the motherboard is provided.
Input extraction electrodes extending in the short side direction of the
Connect the output extraction electrode to the motherboard at a predetermined extraction pitch.
Alternately extend toward two opposite ends in the short side direction
And a motherboard from the vibrating electrode provided on the back of the motherboard.
The ground extraction electrode extending in the short side direction of the
The extension direction of the force extraction electrode or output extraction electrode
On the cutout line where the extension direction of the ground extraction electrode is the same
The predetermined draw pitch so as to be in the opposite direction at
To the two opposite ends of the motherboard in the short side direction.
The mother board is cut in the short side direction along the cut line so as to divide the input lead electrode, the output lead electrode and the ground lead electrode into two at the lead pitch,
One of the two divided input lead electrodes, output lead electrodes and ground lead electrodes is formed on a side edge of the piezoelectric substrate, and one input lead electrode, output lead electrode and ground lead electrode are formed. Piezoelectric resonance in which the electrodes and the output extraction electrode and the ground extraction electrode are arranged on different side edges of the piezoelectric substrate so that they do not face each other in the thickness direction of the piezoelectric substrate.
Cut out the child, two cut out side by side from the motherboard
The input extraction electrode, output extraction electrode and
And a layout of the ground extraction electrodes is bilaterally symmetric .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19559094A JP3395861B2 (en) | 1994-08-19 | 1994-08-19 | Manufacturing method of piezoelectric resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19559094A JP3395861B2 (en) | 1994-08-19 | 1994-08-19 | Manufacturing method of piezoelectric resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0865075A JPH0865075A (en) | 1996-03-08 |
| JP3395861B2 true JP3395861B2 (en) | 2003-04-14 |
Family
ID=16343683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19559094A Expired - Fee Related JP3395861B2 (en) | 1994-08-19 | 1994-08-19 | Manufacturing method of piezoelectric resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3395861B2 (en) |
-
1994
- 1994-08-19 JP JP19559094A patent/JP3395861B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0865075A (en) | 1996-03-08 |
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