JPH06242356A - Device for adjusting angle of optical parts - Google Patents

Abstract

PURPOSE:To provide a device for adjusting the angle of optical parts capable of correcting angular deviation without manually correcting angles around an X-axis and a Y-axis and without elastically deforming the holder of 1st and 2nd optical parts even when the 1st and the 2nd optical parts are brought into press contact with each other. CONSTITUTION:The device for adjusting the angle of the optical parts which adjusts the angle of the opposed surfaces of the optical parts 11 and 12 by attaching the 1st optical part 11 to a fixed stage 2 and attaching the 2nd optical part 12 opposed to the optical part 11 to a moving stage is equipped with a fixed ball 6 which is attached to the fixed or the moving stage and has a sliding surface, and a movable ball 8 which is attached to the fixed ball 6, holds the optical parts 11 and 12 and adjusts the angle of the opposed surfaces of the optical parts while it slides along a sliding surface 6a in a state where a shaft 102 is set as a rotary shaft by bringing the optical parts 11 and 12 into press- contact with each other.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an angle adjusting device for adjusting the angle of opposing surfaces of optical components, which is performed prior to aligning the optical axes of two optical components which are joined with their end faces facing each other.

[0002]

2. Description of the Related Art When constructing an optical fiber system,
Optical components for connection are indispensable because it is necessary to connect each device with a cable or the like.

Optical fibers are connected differently from metal wires 2
It is necessary that the core surfaces of the book fibers are closely attached to each other without being displaced, and furthermore, since the core diameter of the single mode optical fiber is as thin as about 10 μm, it is necessary to reduce the connection loss. Therefore, when connecting the optical components, the optical axis of the optical fiber is aligned by the aligning device before the connection.

That is, firstly, the fixing stage of the aligning device is the first.
Optical component is attached, the second optical component is attached to the moving stage, and the first and second optical components are opposed to each other through an XY plane formed by orthogonal X and Y axes.

However, by moving the moving stage while fixing the position in the Z-axis direction orthogonal to the XY plane, the optimum position of the optical fiber is searched for in the XY plane and the optical axis is aligned. It is like this.

Incidentally, prior to the above-mentioned alignment, it is necessary to correct the angles around the X-axis and the Y-axis so that the facing boundary surfaces of the first and second optical components are parallel to each other.

In the case of performing this angle correction, conventionally, the optical component is small (for example, about 7 mm in length and 4 to 5 in width).
mm, height 1-2 mm), so the end surface of the optical component is magnified and displayed on the monitor with a CCD camera from the X and Y directions, and the operator manually operates the operation screw while looking at the monitor. The end faces of the first and second optical components are made parallel by operating the above.

[0008]

However, in the conventional angle correcting method by manual before alignment, it is very difficult and time-consuming to make the boundary surfaces parallel to each other. In addition, even if the image is enlarged and displayed on the monitor screen by using a CCD camera or the like, it is impossible to make the image completely parallel.

Therefore, when alignment is performed with a space provided on the boundary surface between two optical components (usually, alignment is performed with a space), the accuracy of light quantity measurement is reduced due to an angular error. .

When aligning the boundary surfaces of the first and second optical components with a constant force,
Although elastic deformation occurs in each optical component holder and the boundary surfaces are in a parallel state, an unreasonable force acts on the optical component holder.

Therefore, in addition to requiring an unnecessarily large amount of force during alignment, after the alignment is completed, when the first and second optical components are joined together, for example, a laser or the like is used for heating and fusion bonding. In particular, when such a process is performed, distortion is caused, and as a result, a position shift occurs after the coupling, and the optimum light amount reached by the alignment changes.

Also, when alignment is performed with a gap between the boundary surfaces of the two optical components and then heating and fusion bonding are performed, if the boundary surfaces are not parallel, distortion may occur. As a result, a change in the optimum light amount occurs. Incidentally, here, the optical components are a branch coupler, an optical connector,
LD module etc. These optical components include those in which an optical fiber is hardened with glass and those in which the outside is covered with a Koval alloy.

Therefore, according to the present invention, in order to make the boundary surfaces of two optical components facing each other parallel to each other, the boundary surfaces are brought into pressure contact with each other without manually correcting the angles around the X axis and the Y axis. Even so, it is an object of the present invention to provide an angle adjusting device for an optical component capable of correcting the angular deviation around the X axis and the Y axis without elastically deforming the holder of the optical component.

[0014]

In order to solve the above-mentioned problems, the present invention attaches a first optical component to a fixed stage,
A second optical component facing the first optical component is attached to the moving stage through an XY plane composed of an X axis and a Y axis orthogonal to the X axis, and the second optical component of the first and second optical components is attached. In an angle adjusting device for an optical component for adjusting an angle of a facing surface, a fixing member attached to the fixed or moving stage and having a sliding surface, and the first or second optical member attached to the fixing member. A component is held and the end faces of the first and second optical components are pressed against each other, so that the first and second axes parallel to the X-axis and the Y-axis are set as rotation axes along the sliding surface. And a movable member that slides to adjust the angle of the facing surfaces of the first and second optical components.

Further, a fixing member attached to the fixed or movable stage and having a first guide portion, and a first guide portion of the fixing member which is in contact with the first guide portion and is parallel to the X axis. A first movable member that rotates while having the shaft as a rotation axis while being guided by the first guide portion, a second guide portion provided on the first movable member, and abutting on the second guide portion. Is held to hold the first or second optical component, and the first and second optical components are pressed into contact with each other, so that the second guide is rotated about a second axis parallel to the Y axis. A second movable member that rotates together with the first movable member while being guided by a section to adjust the angle of the facing surfaces of the first and second optical components.

[0016]

The first and second optical components are attached to the fixed stage and the movable stage, and the movable stage is moved to bring the end faces of the first and second optical components into pressure contact. At this time, when the end surfaces of the first and second optical components are not parallel, the movable member rotates while sliding along the sliding surface of the fixed member with the first and second shafts as rotation axes. . Thereby, the angles of the facing surfaces of the first and second optical components are adjusted in parallel without elastically deforming the holding member of the optical component.

Further, the fixed stage and the movable stage.
Attach the first and second optical components to the
The end faces of the first and second optical components are pressed against each other by moving the jig. At this time, when the end surfaces of the first and second optical components are not parallel, the first and second movable members use the first and second shafts as rotation shafts and the first guide portion and the first guide member of the fixed member. The first movable member 1 is rotated by being guided by the second guide portion. Thereby, the angles of the facing surfaces of the first and second optical components are adjusted in parallel without elastically deforming the holding member of the optical component.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to an embodiment shown in FIGS. FIG. 2 shows the overall configuration of the aligning device. In the figure, 11 and 12 are the first and second cores to be aligned.
Is an optical component.

The first optical component 11 is the fixed stage 2
It is fixed to. The second optical component 12 is XYZθ.
It is mounted on a stage (moving stage) 1 and its position is controlled by the XYZθ stage 1 to align it with the first optical component 11. The configuration of the XYZθ stage 1 is not directly related to the present invention, and may be any structure capable of adjusting the X direction, Y direction, Z direction, and θ direction described later.

The XYZθ stage 1 has a base 13, and an X guide portion 14 is provided on the base 13. An X stage 15 is mounted on the X guide unit 14,
The X stage 15 is moved in the X direction which is a direction perpendicular to the paper surface. A Z stage 16 is mounted on the X stage 15 and is moved by a Z motor 17 in the Z direction (left and right direction in the drawing). The vertical surface of the Z stage 16 constitutes a guide surface of the Y stage 18.
Direction (vertical direction in the figure). Above Y stage 1
A θ stage 20 is mounted on the front surface of 8 to provide rotation about the Z axis. The θ stage 20 is provided with a workpiece mounting scale 21, and the second optical component 12 is mounted on the work mounting scale 21.
Are fixed using a clamp mechanism (not shown).

Reference numeral 29 in the drawing denotes a control device which is provided in the power supply unit and controls the whole in the XYZθ directions. The control unit 29 is provided with a display unit 29a for displaying the current position of each axis.

A wiring 27 indicates a control signal and power from the control device 29 to each of the motors 17 and 19 and a feedback signal path from the position and rotation sensor, and a wiring 28.
Indicates an ON / OFF signal path from the main body side (for example, an origin signal of each axis, an interlock signal of each part, etc.).

Further, the power source section includes a light source section 24 and an optical power source.
A measuring unit 25 is provided. The light source unit 24 is connected to the first optical component 11 via an optical fiber 22,
The optical power measuring unit 25 is connected to the second optical component 12 via an optical fiber 23.

A CPU 26 is connected to the optical power measuring unit 25, and receives a signal from the optical power measuring unit 25 to generate a first signal.
And determining the alignment state of the second optical components 11 and 12,
The following new command is sent to the control device 29.

FIG. 3 is a detailed view showing a pair of branch couplers, one end of which is connected to the LD module and the other end of which is to be connected. The branch coupler is the first optical component 11.
And the second optical component 12. More specifically, one end of the optical fiber 22 is connected to the light source section 24 of the LD module, and the other end is a one-core port A0 on the incident side of the optical component 11.
It is 1. And the 1-core port A01 has 8 inside.
It is divided into two emission side ports A11 to A18. The optical component 12 to be connected to the optical component 11 is provided with eight-core incident ports B01 to B08, and eight optical fibers B11 to B18 on the emission side.

The light source section 24 is provided with a semiconductor laser 91 in a first cylindrical body 93, and laser light oscillated from this semiconductor laser 91 is provided in a second cylindrical body 94. Lens 9
It is converged at 2 and sent out. The first cylindrical body 93 and the second cylindrical body 94 are fixed to each other by laser welding or an ultraviolet curing adhesive.

Similarly, the second optical component 12 also has an 8-core incident portion, and the X stage 15, Z stage 16, and
When the Y stage 18 and the θ stage 20 are operated, the first
The eight-core emission side of the optical component 11 and the second optical component 1
The aligning operation is to bring the two 8-side incident sides to the optimum positions with respect to each other.

In FIG. 1, the angles of the facing surfaces of the first and second optical components 11 and 12 are made parallel before the alignment of the facing boundary surfaces of the first and second optical components 11 and 12 described above. 2 shows an angle adjusting device 30 for this.

The angle adjusting device 30 is attached to the fixed stage 2 via a mounting plate 4, and a plurality of fixing tools 5 are used to mount a fixed ball 6 as a fixing member on the mounting plate 4.
Is fixed. A movable ball 8 as a movable member is slidably fitted to the fixed ball 6.

First and second clamp pieces 9 and 10 are arranged on the upper surface of the movable sphere 8 at a predetermined interval, and the first and second clamp pieces 9 and 10 are provided between the first and second clamp pieces 9 and 10. 1
The optical component 11 is located. An operation screw 31 and a wedge-shaped slider 32 are attached to the first clamp piece 9, and the forward / reverse rotation of the operation screw 31 causes the slider 32 to slide back and forth to move the first optical component 11 to the above-mentioned position. The second clamp piece 10 is pressed and held or released.

FIG. 4 is a sectional view taken along the line A--A in FIG. 1. The inner surface of the fixed sphere 6 has a sliding surface 6 curved inward.
a is formed. On the outer peripheral surface of the movable sphere 8, there is formed a spherical surface portion 8a protruding outward. The movable sphere 8 is a first parallel to the X and Y axes of the XY plane M (see FIG. 3).
And rotating about the second shafts 101 and 102 as rotation axes,
At this time, the spherical surface portion 8a slides along the sliding surface 6a.

FIG. 5 is a sectional view taken along the line BB in FIG. 1, in which the fixing balls 6 are formed with insertion holes 33, 33, and the fixing bolts 34, 33 are inserted in the insertion holes 33, 33. 34 is inserted. The movable ball 8 is provided with screw holes 8b and 8b, and the fixing bolt 3 is inserted into the screw holes 8b and 8b.
The movable balls 8 are fixed to the fixed balls 6 by screwing the screws 4, 34. When the fixing bolts 34, 34 are loosened, the movable ball 8 can be rotated by the gap between the insertion holes 33, 33 and the fixing bolts 34, 34.

However, prior to the alignment, the first and second
In order to obtain the parallelism of the end faces of the optical components 11 and 12 of FIG. 1, first, the work for mounting the work of the XYZθ stage 1 is installed.
The second optical component 12 is fixed to the cable 21. Next, FIG.
As shown in FIG. 5, the second optical component 11 is set between the first and second clamp pieces 9 and 10 of the angle adjusting device 30 of the fixed stage 2. Then, the operation screw 31 is rotated to move the slider 32. By the movement of the slider 32, the second optical component 11 is pressed against the second clamp piece 10 and is pressed and held. Then, fixing bolt 3
After loosening 4, 34, XYZθ stage 1
The Z stage 16 is moved by the Z motor 17 in the Z direction, and the end face of the second optical component 12 is moved to the first stage of the fixed stage 2.
It is pressed against the end surface of the optical component 11. This makes the first
Then, the boundary surfaces of the second optical components 11 and 12 are brought into pressure contact with each other.

Due to this pressure contact, when the boundary surfaces of the first and second optical components 11 and 12 are not parallel, the movable sphere 8
Rotates about a point in the boundary surface between the first and second optical components 11 and 12 as a center of rotation, and slides the spherical surface portion 8a along the sliding surface 6a of the fixed ball 6. By this rotation of the movable sphere 8, the facing surfaces of the first and second optical components 11 and 12 are parallelized, and the optimum position is determined. Thus, when the optimum position is determined, the fixing bolts 34, 34 are tightened to connect and fix the movable ball 8 and the fixed ball 6 to prepare for alignment.

As described above, the boundary surface can be automatically parallelized only by pressing the second optical component 12 into pressure contact with the end surface of the first optical component 11, and, as in the conventional case, it is manually parallelized. The adjustment work is significantly facilitated as compared with the case.

When the second optical component 12 is pressed against the end face of the first optical component 11, the movable sphere 8 slides its spherical surface portion 8a along the sliding surface 6a of the fixed sphere 6. Because of the rotation, the first optical component 11 and the second optical component 12
The pressure contact force with and does not act on the holding member of the optical component to cause elastic deformation, and the parallel state can be reliably maintained.

Further, after the boundary surface between the first optical component 11 and the second optical component 12 is made parallel, the movable sphere 8 is fixed to the fixed sphere 6, so that the first optical component 11 and the second optical component 12 are fixed. Even when aligning with a gap between the end faces of the optical component 12, the optimum position does not change.

Although the angle adjusting device 30 is provided on the fixed stage 2 side in the above embodiment, the present invention is not limited to this, and it may be provided on the XYZθ stage 1 side. Further, the optical component is not limited to the branch coupler, and may be an optical connector or an LD module. These optical components include those obtained by hardening the optical fiber 36 with glass, and those whose outside is covered with a Koval alloy 37, as shown in FIG.

As shown in FIG. 7, the optical fiber 36 comprises a core 38 and a covering material 39 for covering the core 38, and has a diameter of 0.125 mm, and the diameter of the core 38 is 0.0.
It is 1 mm. Further, the present invention is not limited to the above-mentioned embodiment, but may be an angle adjusting device 40 as shown in FIGS. 8 and 9.

That is, reference numeral 41 in the drawing denotes a fixing plate as a fixing member fixed to the fixing stage 2 by fixing bolts 42. As shown in FIGS. 10 and 11, the fixing plate 41 has mounting pieces 51 and 52 integrally formed on the upper and lower portions of both sides thereof. Mounting piece 51 on the upper side,
Mounting holes 53 are formed in the side surface portions of 51, and mounting holes 54 are formed in the side surface portions of the mounting pieces 52, 52 on the lower side.

A screw hole 55 is formed in one side surface portion of the mounting pieces 52, 52 on the lower side. Further, screw holes 56 are formed on the tip end sides of the upper mounting pieces 51, 51, respectively, and mounting holes 57 are formed on the tip end sides of the lower mounting pieces 52, 52, respectively. .

Mounting holes 53, 54 of the mounting pieces 51, 52
Roller bearings 44 are rotatably mounted on the respective shafts, and a clamp screw 65 is screwed into a screw hole 55 on the side surface of the mounting piece 52.

Mounting holes 5 of the lower mounting pieces 52, 52
A spring 67 is attached to 7, and a stopper 60 is screwed into the screw hole 56 of the attachment pieces 51, 51 on the upper side.

Further, a first movable plate 45 as a first movable member is attached to the fixed plate 41. This first movable plate 45, as shown in FIGS. 12 and 13,
A plurality of screw holes 60, 60, 61 are provided on the upper surface portion thereof, and side wall portions 57, 57 are provided on both side portions thereof. An arc-shaped guide surface 58 is formed on the end surfaces of the side wall portions 57, 57, and a long hole 59 is formed in the side surface portion. The first movable plate 45 is urged by the springs 67, 67 at the lower sides of the side wall portions 57, 57 thereof.
This urging force causes the guide surfaces 58, 58 to move to the fixing plate 41.
The roller bearings 44 and 44 as the first guide portions attached to the attachment pieces 51 and 52 of the above are rotated and rotated, and the upper portions of the side wall portions 57 and 57 are attached to the attachment pieces 51 and 51. It abuts on the stoppers 60, 60 and is stopped.

The screw hole 6 of the first movable plate 45 is also provided.
0 and 60 are roller bearings 62 as a second guide portion,
62 is rotatably attached. Further, a second movable plate 48 serving as a second movable member is provided on the upper surface of the first movable plate 45.

As shown in FIG. 14, an arcuate guide surface 47 is formed on the second movable plate 48, and the guide surface 47 is mounted on the first movable plate 45 and has roller bearings 62, 62. Have been transferred to. The second movable plate 48
As shown in FIG. 15, a protrusion 71 is provided at the central portion of the upper surface of the device, and a plurality of screw holes 72 ... And one through hole 73 are provided.

First and second clamp pieces 75 and 76 are arranged on the second movable plate 48, and the first and second clamp pieces 75 and 76 are provided via the protrusion 71. Faced apart from each other. As shown in FIG. 16, the first clamp piece 75 has through holes 82, 82 and a through hole 83.
Has been drilled. Through holes 84, 84 and a through hole 90 are formed in the second clamp piece 76.

Through holes 82, 8 of the first clamp piece 75.
Fixing screws 85 and 85 are inserted into the screw 2, and these fixing screws 85 and 85 are screw holes 72 and 72 of the second movable plate 48.
The first clamp piece 75 is fixed by being screwed into. Through holes 84, 84 of the second clamp piece 76
The fixing screws 86, 86 are inserted through the
The second clasp piece 76 is fixed by screwing 6, 6 into the screw holes 72, 72 of the second movable plate 48.

The first and second clamp pieces 7 are also provided.
A wedge-shaped slider 79 is provided between the sliders 5 and 76, and a screw hole 87 is formed in the slider 79. First above
The operation screw 95 is inserted into the through hole 83 of the clap piece 75 of the slider 79, and the operation screw 95 is formed in the screw hole 8 of the slider 79.
Screwed to 7.

A clamp screw 88 is inserted into the through hole 90 of the second clamp piece 76, and the clamp screw 88 is inserted through the through hole 73 of the second movable plate 48 into the first movable plate 45.
The second movable plate 48 is fixed by being screwed into the screw hole 61. Next, the first and second optical components 11, 12 described above
A case will be described in which the angle of the facing surface is adjusted by the angle adjusting device 40.

In this case, first, the XYZθ stage 1
The second optical component 12 is attached to the Z stage 16 of the second stage, and then the operating screw 95 of the first clamp piece 75 of the angle adjusting device 40 of the fixed stage 2 is loosened to move the slider 79 and the second stage.
After interposing the first optical component 11 between the first optical component 11 and the clamp piece 76, the operation screw 95 is tightened to move the slider 79, and the slider 79 pushes the first optical component 11 to the second clamp piece 76. Press and hold. After that, the Z stage 16 is moved in the Z axis direction toward the first optical component 11 side. By this movement, the end surface of the second optical component 12 is brought into contact with the end surface of the first optical component 11. At this time, if the end surfaces of the first and second optical components 11 and 12 are not parallel, the second movable plate 48 is centered on the turning center of the boundary surface between the first and second optical components 11 and 12. The guide surface 47 is provided around the Y axis with the roller bearings 62, 6
Rotate to 2 and rotate.

Further, at the same time, the first rotating plate 45 rotates the guide surface 58, 58 around the X-axis about the center of rotation of the boundary surface between the first and second optical components 11, 12 to form the roller bearing 44. , 44 and rotate against the biasing force of the springs 67, 67. By the rotation of the first and second movable plates 45 and 48 described above, the angles of the facing surfaces of the first and second optical components 11 and 12 are adjusted and parallelized.
After parallelizing in this way, the clamp screws 65 and 88 are tightened to fix the first and second movable plates 45 and 48. Also in this embodiment, the same operational effects as those of the above-described first embodiment are obtained.

[0053]

As described above, according to the present invention, the boundary surfaces can be automatically parallelized only by pressing the first optical component and the second optical component into contact with each other. The adjustment work becomes significantly easier than the case where it is changed.

Further, when the first optical component 11 and the second optical component 12 are brought into pressure contact with each other, the pressure contact force between the first optical component and the second optical component acts on the holding member of the optical component to cause elasticity. The parallel state can be reliably maintained without being deformed.

Therefore, an unnecessary force is not required during alignment, and after the alignment is completed, when the first and second optical components are joined together, distortion does not occur and no positional deviation occurs after the joining. , It is possible to maintain the optimum amount of light reached by the alignment.

Further, even if heating, fusion bonding or the like is performed after aligning the boundary surfaces of the first and second optical components with a space therebetween, distortion does not occur and the optimum amount of light can be maintained. .

[Brief description of drawings]

FIG. 1 is a plan view showing an angle adjusting device for an optical component according to an embodiment of the present invention.

FIG. 2 is a schematic configuration diagram showing an aligning device including the angle adjusting device of FIG.

3 is a perspective view showing an optical component whose angle is adjusted and aligned by the aligning device of FIG.

FIG. 4 is a sectional view taken along line AA in FIG.

5 is a cross-sectional view taken along line BB in FIG.

6 is a cross-sectional view showing the optical component of FIG.

7 is an enlarged sectional view showing an optical fiber of the optical component of FIG.

FIG. 8 is a plan view showing an angle adjusting device which is another embodiment of the present invention.

9 is a side view showing the angle adjusting device of FIG. 8. FIG.

10 is a plan view showing a fixing plate of the angle adjusting device of FIG.

11 is a side view showing the fixing plate of FIG.

12 is a plan view showing a first movable plate of the angle adjusting device of FIG.

FIG. 13 is a side view showing the first movable plate of FIG.

14 is a plan view showing a second movable plate of the angle adjusting device of FIG.

FIG. 15 is a side view showing the second movable plate of FIG.

16 is a plan view showing a clamper attached to the second movable plate of FIG.

FIG. 17 is a front view showing first and second clamper pieces of the clamper of FIG.

FIG. 18 is a front view showing a slider of the clamper shown in FIG.

[Explanation of symbols]

2 ... Fixed stage, 6 ... Fixed ball (fixed member), 6a ... Sliding surface, 8 ... Movable ball (movable member), 11 ... First optical component, 12 ... Second optical component, 16 ... Z Stage, M ... X
Y plane, 30, 40 ... Angle adjusting device, 41 ... Fixed plate (fixed member), 44 ... Roller bearing (first guide portion), 45
... first movable plate (first movable member), 48 ... second movable plate (second movable member), 62 ... roller bearing (second guide portion), 101 ... first shaft, 102 ... Second axis.

Claims (3)

[Claims] 1. A first optical component is attached to a fixed stage, and the first optical component is opposed to the movable stage through an XY plane composed of an X axis and a Y axis orthogonal to the X axis. An angle adjusting device for an optical component, wherein a second optical component is attached to adjust an angle between facing surfaces of the first and second optical components, wherein a fixing having a sliding surface is attached to the fixing or moving stage. A member and a first member parallel to the X-axis and the Y-axis, which are attached to the fixing member to hold the first or second optical component and press-contact the first and second optical components.
And a movable member that slides along the sliding surface with the second shaft as a rotation axis and adjusts the angle of the facing surfaces of the first and second optical components. Optical component angle adjusting device. 2. The sliding surface of the fixing member has a spherical shape,
The angle adjusting device for an optical component according to claim 1, wherein the movable member has a spherical portion having a radius of curvature equal to that of a spherical sliding surface of the fixed member on a part of an outer periphery thereof. 3. A first optical component is attached to a fixed stage, and the first optical component is opposed to the movable stage through an XY plane composed of an X axis and a Y axis orthogonal to the X axis. An optical component angle adjusting device for attaching a second optical component and adjusting an angle of a facing surface of the first and second optical components, comprising: a first guide portion attached to the fixed or movable stage. Fixed member, and a first movable member that is in contact with a first guide portion of the fixed member and that rotates while being guided by the first guide portion with a first axis parallel to the X axis as a rotation axis. A second guide portion provided on the first movable member, and the first or second contact portion abutting on the second guide portion.
Holding the optical component, and pressing the first and second optical components into pressure contact with each other while being guided by the second guide portion with the second axis parallel to the Y axis as a rotation axis. A second movable member that rotates together with the movable member to adjust the angle of the facing surfaces of the first and second optical components;
A device for adjusting an angle of an optical component, comprising: