JPH06237138A - Piezoelectric resonance component - Google Patents

Piezoelectric resonance component

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Publication number
JPH06237138A
JPH06237138A JP5045798A JP4579893A JPH06237138A JP H06237138 A JPH06237138 A JP H06237138A JP 5045798 A JP5045798 A JP 5045798A JP 4579893 A JP4579893 A JP 4579893A JP H06237138 A JPH06237138 A JP H06237138A
Authority
JP
Japan
Prior art keywords
resonator element
resonance component
piezoelectric resonance
piezoelectric
terminals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5045798A
Other languages
Japanese (ja)
Other versions
JP3290736B2 (en
Inventor
Ryuhei Yoshida
竜平 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP04579893A priority Critical patent/JP3290736B2/en
Publication of JPH06237138A publication Critical patent/JPH06237138A/en
Application granted granted Critical
Publication of JP3290736B2 publication Critical patent/JP3290736B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To provide the piezoelectric resonance component comparatively inexpensively on which the effect of thermal contraction and secular change of an outer package resin is hardly caused. CONSTITUTION:In the piezoelectric component 11 comprising a resonator element 2 in which an electrode 4 extended from one end of one major side of two front and rear major sides of a piezoelectric substrate and an electrode 5 extended from the other end of the other major side are formed to be partly opposite to each other, terminals 12, 13 in electrically continuity with each electrode 4(5) of the resonator element 2, and an outer package resin 14 sealing the resonator element 2 while forming a vibration cavity 15 in a vibration part formed by the opposed part of the electrodes 4 (5), it is featured that the terminals 12, 13 are extended along the piezoelectric substrate and almost surround the piezoelectric substrate.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、共振子素子を端子で挟
持し樹脂ディップして外装樹脂により封止してなる圧電
共振部品に関し、特に6.5MHz 以上の高周波数のエネ
ルギー閉じ込め型厚み縦振動モードの共振子素子からな
る圧電共振部品に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric resonance component in which a resonator element is sandwiched between terminals, resin-dipped, and sealed with an exterior resin. The present invention relates to a piezoelectric resonance component including a vibration mode resonator element.

【0002】[0002]

【従来の技術】従来より、圧電共振部品として、共振子
素子を端子で挟持し、樹脂ディップして形成した図6に
示す構造のものがある。図6において1は圧電共振部品
である。この圧電共振部品1は、共振子素子2とカップ
状の端子6,7と外表面の外装樹脂9とから構成してい
る。共振子素子2は、図5に示すように、圧電体セラミ
ックス製の矩形の圧電基板3の、一方の主面(表面)に
電極4を一端側から中央部に延ばして設け、他方の主面
(裏面)に電極5を他端側から中央部に延ばして設け、
一部が対向するように形成されている。そして、この共
振子素子2を両側からカップ状の端子6,7で挟み付
け、はんだ付けして、電極4,5の対向する振動部にワ
ックスを塗布する。次いで、共振子素子2を樹脂にディ
ップして外表面を被覆し、これを焼付けることにより外
装樹脂9を形成して共振子素子2を封止する。この焼付
けのとき、上記ワックスが外装樹脂9内に溶融含浸し、
これにより上記電極4,5の対向する振動部に振動用の
空洞8が形成される。
2. Description of the Related Art Conventionally, there is a piezoelectric resonance component having a structure shown in FIG. 6 in which a resonator element is sandwiched between terminals and formed by resin dipping. In FIG. 6, reference numeral 1 is a piezoelectric resonance component. This piezoelectric resonance component 1 is composed of a resonator element 2, cup-shaped terminals 6 and 7, and an exterior resin 9 on the outer surface. As shown in FIG. 5, the resonator element 2 is provided with an electrode 4 extending from one end side to a central portion on one main surface (front surface) of a rectangular piezoelectric substrate 3 made of piezoelectric ceramic, and the other main surface. The electrode 5 is provided on the (rear surface) so as to extend from the other end side to the central portion,
The parts are formed so as to face each other. Then, the resonator element 2 is sandwiched between the cup-shaped terminals 6 and 7 from both sides and soldered, and wax is applied to the vibrating portions of the electrodes 4 and 5 facing each other. Next, the resonator element 2 is dipped in resin to cover the outer surface thereof, and the outer surface of the resonator element 2 is baked to form the exterior resin 9 to seal the resonator element 2. At the time of this baking, the wax is melt-impregnated into the exterior resin 9,
As a result, the vibrating cavity 8 is formed in the vibrating portions of the electrodes 4 and 5 facing each other.

【0003】[0003]

【発明が解決しようとする課題】上記の圧電共振部品の
周波数を6.5MHz 以上に高めるためには共振子素子の
寸法を小さくしなければならないが、寸法を小さくする
と、強度が小さくなる。また、上記のようなエネルギー
閉じ込め型厚みすべり振動モードの共振子素子では、通
常、分極軸の方向を図5に示すようにP方向にとってい
る。圧電共振部品1の外装樹脂9は、焼付けの後冷却の
とき熱収縮するとともに、経時変化により変化する。収
縮量は寸法の大きい方が大きいので、図6に示すように
Pに平行な方向に大きな力Fが働き共振子素子の温度特
性や電気特性を悪化するという問題点があった。そこ
で、この問題点を解決するために、図7に示すように絶
縁基板10に共振子素子2を載置し、はんだ付け、導電
接着剤等により接着して補強素子1aとした後、絶縁基
板10の両端から端子で挟持するものが提案されてい
る。しかしながら、絶縁基板10に共振子素子2を載置
する構造のものは、製造工程が複雑になり、コストアッ
プになるという問題点があった。
In order to increase the frequency of the above-mentioned piezoelectric resonance component to 6.5 MHz or more, the size of the resonator element must be reduced, but the smaller the size, the smaller the strength. In the energy trap type thickness shear vibration mode resonator element as described above, the direction of the polarization axis is normally set to the P direction as shown in FIG. The exterior resin 9 of the piezoelectric resonance component 1 thermally contracts during cooling after baking and changes with time. Since the larger the contraction amount is, the larger the force F acts in the direction parallel to P as shown in FIG. 6 to deteriorate the temperature characteristics and electrical characteristics of the resonator element. Therefore, in order to solve this problem, as shown in FIG. 7, after mounting the resonator element 2 on the insulating substrate 10 and soldering or bonding with a conductive adhesive or the like to form the reinforcing element 1a, the insulating substrate It is proposed that the terminals 10 are sandwiched by the terminals from both ends. However, the structure in which the resonator element 2 is mounted on the insulating substrate 10 has a problem that the manufacturing process is complicated and the cost is increased.

【0004】本発明は上記従来技術の有する問題点を解
決するためになされたもので、外装樹脂の熱収縮及び経
時変化の影響を受け難くした圧電共振部品を比較的安価
に提供することを目的としている。
The present invention has been made to solve the above-mentioned problems of the prior art, and an object thereof is to provide a piezoelectric resonance component which is less susceptible to the thermal shrinkage of the exterior resin and the change over time at a relatively low cost. I am trying.

【0005】[0005]

【課題を解決するための手段】本発明に係る圧電共振部
品は、圧電基板の表裏2主面の一方主面の一端側から延
びる電極と他方主面の他端側から延びる電極とが一部で
対向するように形成されてなる共振子素子と、この共振
子素子の各電極に導通する端子と、前記電極の対向する
部分で形成する振動部に振動用の空洞を形成して共振子
素子を封止する外装樹脂からなる圧電共振部品におい
て、前記端子に圧電基板に沿って延ばした延長部を設
け、この延長部で圧電基板を包囲するように両端子を配
置することを特徴とする。
In a piezoelectric resonance component according to the present invention, an electrode extending from one end of one main surface of the front and back 2 main surfaces of the piezoelectric substrate and an electrode extending from the other end of the other main surface are partially formed. A resonator element formed so as to face each other, a terminal electrically connected to each electrode of the resonator element, and a cavity for vibration formed in a vibrating portion formed at a portion where the electrodes face each other. In a piezoelectric resonance component made of an exterior resin for encapsulating, the terminal is provided with an extension extending along the piezoelectric substrate, and both terminals are arranged so that the extension surrounds the piezoelectric substrate.

【0006】[0006]

【作用】本発明の圧電共振部品は、共振子素子と、一対
の端子と、外装樹脂等から構成する。共振子素子を、圧
電基板の表裏の各主面の一端側から延びる電極と、他方
主面の他端側から延びる電極とを一部で対向するように
設けて形成する。各端子を圧電基板に沿って延びるよう
な延長部を設け、この延長部の終端を接近させて作成す
る。そして、次のように圧電共振部品を製造する。先
ず、端子の延長部に沿って共振子素子を配置するととも
に保持し、端子に電極を導通させて共振子素子をはんだ
又は導電ペースト等により接着する。次いで、この共振
子素子の電極が対向する部分で形成した振動部に、振動
を阻害しないように振動用の空洞を形成するためのワッ
クスを塗布した後、溶融樹脂にディップすることにより
外装樹脂を形成し共振子素子を封止する。外装樹脂を焼
付け硬化させることにより外装樹脂内にワックスを溶融
含浸させ、振動部に空洞を形成し、圧電共振部品を製造
する。上記のように、端子に圧電基板に沿って延ばした
延長部を設けるのみであるので、比較的安価に圧電共振
部品を製造できる。また、一対の端子の延長部により共
振子素子を包囲するように配置したので、端子により共
振子素子が強化されるとともに外装樹脂の量を減少で
き、熱収縮及び経時変化の影響を受け難くできる。上記
延長部の端面を延長部の長手軸直角方向に曲線状に形成
すると、圧電共振部品の抗折強度を一層大きくできる。
The piezoelectric resonance component of the present invention comprises a resonator element, a pair of terminals, an exterior resin and the like. The resonator element is formed by providing an electrode extending from one end side of each main surface of the front and back surfaces of the piezoelectric substrate and an electrode extending from the other end side of the other main surface so as to partially oppose each other. An extension is provided so that each terminal extends along the piezoelectric substrate, and the ends of the extension are brought close to each other. Then, the piezoelectric resonance component is manufactured as follows. First, the resonator element is arranged and held along the extension of the terminal, the electrode is electrically connected to the terminal, and the resonator element is bonded by solder or conductive paste. Then, a wax for forming a cavity for vibration is applied to the vibrating portion formed in a portion where the electrodes of the resonator element face each other, and then the exterior resin is dipped in the molten resin. Form and seal the resonator element. Wax is melted and impregnated in the exterior resin by baking and curing the exterior resin to form a cavity in the vibrating portion, and a piezoelectric resonance component is manufactured. As described above, since the terminal is simply provided with the extended portion extending along the piezoelectric substrate, the piezoelectric resonance component can be manufactured at a relatively low cost. Further, since the resonator element is arranged so as to surround the resonator element by the extension portion of the pair of terminals, the resonator element is strengthened by the terminal and the amount of the exterior resin can be reduced, so that it is less susceptible to thermal contraction and aging. . The bending strength of the piezoelectric resonance component can be further increased by forming the end face of the extension portion in a curved shape in the direction perpendicular to the longitudinal axis of the extension portion.

【0007】[0007]

【実施例】以下、本発明を、エネルギー閉じ込め型厚み
すべり振動モードの共振子素子からなる圧電共振部品を
例にして、図面に基づいて説明する。上記従来例に相当
する部分には同一符号を付する。図1ないし図3は、本
発明に係る圧電共振部品の第1の実施例を説明するため
の図である。図において、11は圧電共振部品であり、
この圧電共振部品11は、共振子素子2と、この共振子
素子2の電極4,5にそれぞれ接続した端子12,13
と、外表面の外装樹脂14とから構成し、振動部に空洞
15を形成している。この共振子素子2は図5に示すよ
うに構成し、端子12,13は、それぞれ延長部16,
17を有している。延長部16,17が共振子素子2に
沿って延びてこれを包囲するようにしている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings by taking a piezoelectric resonance component composed of a resonator element of an energy trapping type thickness shear vibration mode as an example. The same reference numerals are given to the parts corresponding to the above conventional example. 1 to 3 are views for explaining a first embodiment of a piezoelectric resonance component according to the present invention. In the figure, 11 is a piezoelectric resonance component,
This piezoelectric resonance component 11 includes a resonator element 2 and terminals 12 and 13 connected to electrodes 4 and 5 of the resonator element 2, respectively.
And the exterior resin 14 on the outer surface, and a cavity 15 is formed in the vibrating portion. The resonator element 2 is constructed as shown in FIG. 5, and the terminals 12 and 13 are respectively extended portions 16 and
Have 17. The extension portions 16 and 17 extend along and surround the resonator element 2.

【0008】図2に示すように、端子12は、板状の材
料からなり、延長部16及びリード部18を有してい
る。延長部16の長手方向に延びる本体部に共振子素子
2を装着する溝16aが設けられ、溝の端部に共振子素
子2を載置し支持する段差が形成された保持部16bが
設けられている。延長部16の端部の中央に溝16aに
沿って切欠き16cを設け、端面を長手直角方向に曲線
状に形成している。リード部18が延長部16と一体に
形成され、長手直角方向に延びている。端子13は、端
子12と同様に、延長部17及びリード部19を有して
いる。延長部17の本体部には共振子素子2を装着する
溝17aが設けられ、溝の端部に共振子素子2を載置し
支持する段差が形成された保持部17bが設けられてい
る。延長部17の端部の中央には長手方向に突出した突
出部17cを設け、上記端子12の延長部16の切欠き
16cに対応して端面を長手直角方向に曲線状に形成し
ている。リード部19が延長部17と一体に形成され、
長手直角方向に延びている。そして、延長部16及び延
長部17の対向する端面間のギャップをG1,G2,G
3としたとき、このギャップを1.0mm程度、又はこれ
より小さくしている。
As shown in FIG. 2, the terminal 12 is made of a plate-shaped material and has an extension portion 16 and a lead portion 18. A groove 16a for mounting the resonator element 2 is provided in a main body portion extending in the longitudinal direction of the extension portion 16, and a holding portion 16b having a step for mounting and supporting the resonator element 2 is provided at an end portion of the groove. ing. A notch 16c is provided at the center of the end of the extension 16 along the groove 16a, and the end face is formed in a curved shape in the direction perpendicular to the longitudinal direction. The lead portion 18 is formed integrally with the extension portion 16 and extends in the direction perpendicular to the longitudinal direction. Like the terminal 12, the terminal 13 has an extension portion 17 and a lead portion 19. A groove 17a for mounting the resonator element 2 is provided in the main body of the extension portion 17, and a holding portion 17b having a step for mounting and supporting the resonator element 2 is provided at the end of the groove. A projecting portion 17c projecting in the longitudinal direction is provided at the center of the end portion of the extension portion 17, and the end face is formed in a curved shape in the direction perpendicular to the longitudinal direction corresponding to the notch 16c of the extension portion 16 of the terminal 12. The lead portion 19 is formed integrally with the extension portion 17,
It extends in the direction perpendicular to the longitudinal direction. Then, the gaps between the facing end faces of the extension 16 and the extension 17 are set to G1, G2, G
When set to 3, this gap is set to about 1.0 mm or smaller.

【0009】以下に、上記実施例の圧電共振部品11の
製造方法を、図3に基づいて説明する。先ず、共振子素
子2を準備するとともに、上記のように、端子12、端
子13を製造する。保持部16b,17bの段差はハー
フエッチング、プレス成形等により形成する。次いで、
図3に示すように、端子12,13のそれぞれの保持部
16b,17bで共振子素子2を保持し、はんだ、導電
接着剤20等により接着するとともに、それぞれ電極
4,5に導通させる。このとき、端子12と端子13の
終端間のギャップを小さく1.0mm以下にとる。次い
で、共振子素子2の振動部に空洞を形成するためにワッ
クス21を点滴等により塗布し、溶融樹脂層にディップ
することにより樹脂被覆する。この樹脂を乾燥し、焼付
硬化させて外装樹脂14を形成し、共振子素子2を封止
すると同時に、外装樹脂14内にワックスを溶融含浸さ
せて空洞15を形成し、圧電共振部品11を得る。
A method of manufacturing the piezoelectric resonance component 11 of the above embodiment will be described below with reference to FIG. First, the resonator element 2 is prepared, and the terminals 12 and 13 are manufactured as described above. The step between the holding portions 16b and 17b is formed by half etching, press molding or the like. Then
As shown in FIG. 3, the resonator element 2 is held by the holding portions 16b and 17b of the terminals 12 and 13, respectively, and is bonded to the electrodes 4 and 5 by soldering, a conductive adhesive 20, or the like. At this time, the gap between the terminal ends of the terminals 12 and 13 is set to a small value of 1.0 mm or less. Next, wax 21 is applied by drip or the like in order to form a cavity in the vibrating portion of the resonator element 2, and the molten resin layer is dipped and coated with the resin. This resin is dried, baked and cured to form the exterior resin 14, and the resonator element 2 is sealed. At the same time, the exterior resin 14 is melt-impregnated with wax to form the cavity 15, thereby obtaining the piezoelectric resonance component 11. .

【0010】本実施例によれば、端子12,13に共振
子素子2に沿って延ばした延長部16,17を設けるの
みであるので、比較的安価に圧電共振部品を製造でき
る。また、延長部で共振子素子2を包囲するように両端
子12,13を配置したので、共振子素子2が強化され
るとともに外装樹脂14の量を減少でき、共振子素子2
が外装樹脂の収縮及び経時変化の影響を受け難くでき
る。その結果、製品の信頼性を向上させることができ
る。上記延長部の端面を延長部の長手軸直角方向に曲線
状に形成すると、圧電共振部品の抗折強度を一層大きく
できる。
According to this embodiment, since the terminals 12 and 13 are provided with only the extension portions 16 and 17 extending along the resonator element 2, the piezoelectric resonance component can be manufactured at a relatively low cost. Further, since the terminals 12 and 13 are arranged so as to surround the resonator element 2 with the extension portion, the resonator element 2 is strengthened and the amount of the exterior resin 14 can be reduced, so that the resonator element 2 can be reduced.
Can be less susceptible to the shrinkage of the exterior resin and the change over time. As a result, the reliability of the product can be improved. The bending strength of the piezoelectric resonance component can be further increased by forming the end face of the extension portion in a curved shape in the direction perpendicular to the longitudinal axis of the extension portion.

【0011】なお、上記実施例では板状の端子に共振子
素子を載置する例で説明したが、本発明は上記実施例に
限定されない。例えば、端子を図4に示すように、一対
のカップ状の端子22,23から構成し、この端子2
2,23をそれぞれ延長部24,25及びリード部2
6,27からなるように形成してもよい。そして、カッ
プ状の端子22,23を用いて上記図5の共振子素子2
を包囲するように挟み、空洞を設けて外装樹脂により封
止して圧電共振部品を製造する。なお、このカップ状の
端子22,23の終端の対向する端面の形状を、上記実
施例のように長手直角方向に曲線としてもよい。その
他、端子の形状、共振子の振動モード等、本発明は上記
実施例に限定されない。要は、共振子素子の長手方向に
延びる延長部を端子に設けたものであればよい。
In the above embodiment, the resonator element is mounted on the plate-shaped terminal, but the present invention is not limited to the above embodiment. For example, the terminal is composed of a pair of cup-shaped terminals 22 and 23 as shown in FIG.
2 and 23 are extended portions 24 and 25 and lead portion 2 respectively.
You may form so that it may consist of 6,27. Then, using the cup-shaped terminals 22 and 23, the resonator element 2 of FIG.
Is provided so as to surround it, and a cavity is provided and sealed with an exterior resin to manufacture a piezoelectric resonance component. The shape of the opposing end faces of the ends of the cup-shaped terminals 22 and 23 may be curved in the direction perpendicular to the longitudinal direction as in the above embodiment. In addition, the present invention is not limited to the above embodiments, such as the shape of the terminal and the vibration mode of the resonator. The point is that the terminal may be provided with an extension extending in the longitudinal direction of the resonator element.

【0012】[0012]

【発明の効果】以上のように本発明に係る圧電共振部品
によれば、端子に共振子素子に沿って延ばした延長部を
設けるのみであるので、比較的安価に圧電共振部品を製
造できる。また、延長部で共振子素子を包囲するように
両端子を配置したので、圧電共振部品に対する外装樹脂
の収縮及び経時変化の影響を受け難くできる。
As described above, according to the piezoelectric resonance component of the present invention, since the terminal is only provided with the extended portion extending along the resonator element, the piezoelectric resonance component can be manufactured relatively inexpensively. Further, since both terminals are arranged so as to surround the resonator element with the extension portion, it is possible to reduce the influence of shrinkage and temporal change of the exterior resin with respect to the piezoelectric resonance component.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る圧電共振部品の実施例を説明する
正面図である。
FIG. 1 is a front view illustrating an embodiment of a piezoelectric resonance component according to the present invention.

【図2】上記実施例の端子を説明する斜視図である。FIG. 2 is a perspective view illustrating a terminal of the above embodiment.

【図3】上記実施例の圧電共振部品の製造方法を説明す
る図である。
FIG. 3 is a diagram illustrating a method of manufacturing the piezoelectric resonance component of the above-described embodiment.

【図4】本発明の他の実施例の端子を説明する斜視図で
ある。
FIG. 4 is a perspective view illustrating a terminal of another embodiment of the present invention.

【図5】共振子素子を説明する斜視図である。FIG. 5 is a perspective view illustrating a resonator element.

【図6】従来の圧電共振部品を説明する斜視図である。FIG. 6 is a perspective view illustrating a conventional piezoelectric resonance component.

【図7】従来の他の圧電共振部品の例を説明する斜視図
である。
FIG. 7 is a perspective view illustrating an example of another conventional piezoelectric resonance component.

【符号の説明】[Explanation of symbols]

2 共振子素子 3 圧電基板 4,5 電極 11 圧電共振部品 12,13 端子 14 外装樹脂 15 空洞 16,17 延長部 16a,17a 溝 16b,17b 保持部 16c 切欠き 17c 突出部 18,19 リード部 20 導電接着剤 21 ワックス 22,23 カップ状の端子 24,25 延長部 26,27 リード部 2 Resonator element 3 Piezoelectric substrate 4,5 Electrode 11 Piezoelectric resonance component 12, 13 Terminal 14 Exterior resin 15 Cavity 16,17 Extension 16a, 17a Groove 16b, 17b Holding 16c Cutout 17c Projection 18,19 Lead 20 Conductive adhesive 21 Wax 22,23 Cup-shaped terminals 24,25 Extensions 26,27 Leads

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 圧電基板の表裏2主面の一方主面の一端
側から延びる電極と他方主面の他端側から延びる電極と
が一部で対向するように形成されてなる共振子素子と、
この共振子素子の各電極に導通する端子と、前記電極の
対向する部分で形成する振動部に振動用の空洞を形成し
て共振子素子を封止する外装樹脂からなる圧電共振部品
において、前記端子を圧電基板に沿って延ばし、両端子
で圧電基板をほぼ包囲するように形成したことを特徴と
する圧電共振部品。
1. A resonator element, wherein an electrode extending from one end of one main surface of the front and back 2 main surfaces of a piezoelectric substrate and an electrode extending from the other end of the other main surface are partially opposed to each other. ,
A piezoelectric resonance component comprising a terminal electrically connected to each electrode of the resonator element and an exterior resin for sealing the resonator element by forming a cavity for vibration in a vibrating portion formed at a portion where the electrodes face each other, A piezoelectric resonance component characterized in that terminals are extended along a piezoelectric substrate so that both terminals substantially surround the piezoelectric substrate.
JP04579893A 1993-02-09 1993-02-09 Piezoelectric resonance components Expired - Fee Related JP3290736B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04579893A JP3290736B2 (en) 1993-02-09 1993-02-09 Piezoelectric resonance components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04579893A JP3290736B2 (en) 1993-02-09 1993-02-09 Piezoelectric resonance components

Publications (2)

Publication Number Publication Date
JPH06237138A true JPH06237138A (en) 1994-08-23
JP3290736B2 JP3290736B2 (en) 2002-06-10

Family

ID=12729298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP04579893A Expired - Fee Related JP3290736B2 (en) 1993-02-09 1993-02-09 Piezoelectric resonance components

Country Status (1)

Country Link
JP (1) JP3290736B2 (en)

Also Published As

Publication number Publication date
JP3290736B2 (en) 2002-06-10

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