JPH06234536A - Device for producing optical fiber preform - Google Patents

Device for producing optical fiber preform

Info

Publication number
JPH06234536A
JPH06234536A JP4589593A JP4589593A JPH06234536A JP H06234536 A JPH06234536 A JP H06234536A JP 4589593 A JP4589593 A JP 4589593A JP 4589593 A JP4589593 A JP 4589593A JP H06234536 A JPH06234536 A JP H06234536A
Authority
JP
Japan
Prior art keywords
muffle
preform
optical fiber
base material
fiber preform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4589593A
Other languages
Japanese (ja)
Inventor
Shigeru Emori
滋 江森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to JP4589593A priority Critical patent/JPH06234536A/en
Publication of JPH06234536A publication Critical patent/JPH06234536A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146Furnaces therefor, e.g. muffle tubes, furnace linings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

PURPOSE:To continuously and efficiently produce an optical fiber preform at the sintering temp. of a sintering furnace when a glass porous preform is vitrified by using the subject device. CONSTITUTION:This optical fiber preform producing device is provided with a sintering furnace 11 to vitrify a glass porous preform 14. Inert gas is introduced into a preform attaching and detaching room R, and the room R is opened or closed to keep a muffle 12 at a specified pressure without being affected by the attachment or detachment of the preform. Consequently, the device is continuously operated at the sintering temp. of the furnace 11, and the productivity is drastically improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光ファイバ母材の製造
装置に係り、特に、ガラス多孔質母材の透明化工程にお
いて、焼結炉の焼結時温度における連続運転を可能にし
て、生産性の向上を図った製造装置に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing an optical fiber preform, and more particularly, it enables continuous operation at a sintering temperature of a sintering furnace in a step of making a glass porous preform transparent. The present invention relates to a manufacturing apparatus that improves productivity.

【0002】[0002]

【従来の技術】VAD法やOVD法によって得られたガ
ラス多孔質母材を透明化するには、従来、図2に示した
如き製造装置を用いて行っていた。つまり、この製造装
置では、焼結炉1のマッフル(石英管)2中に不活性ガ
ス(Heガスなど)を満たすと共に、当該焼結炉1のヒ
ータ3部分の温度を1600℃程度まで高め、この状態
で、透明化しようとするガラス多孔質母材4を上記マッ
フル2の上方から徐々に降下させて、このガラス多孔質
母材4の下端側から順次透明化させていき、透明化が上
端側まで達したところで、引き出して、目的とする透明
化された光ファイバ母材を得ている。
2. Description of the Related Art Conventionally, a glass porous base material obtained by a VAD method or an OVD method is made transparent by using a manufacturing apparatus as shown in FIG. That is, in this manufacturing apparatus, the muffle (quartz tube) 2 of the sintering furnace 1 is filled with an inert gas (He gas or the like), and the temperature of the heater 3 portion of the sintering furnace 1 is raised to about 1600 ° C. In this state, the glass porous preform 4 to be made transparent is gradually lowered from above the muffle 2, and is gradually made transparent from the lower end side of the glass porous preform 4 so that the transparency becomes the upper end. When it reaches the side, it is pulled out to obtain the desired transparent optical fiber preform.

【0003】そして、この製造装置における運転時、上
記焼結炉1のヒータ3部分へも不活性ガスの導入を図っ
て、当該ヒータ3部分への大気の侵入を防いでいる。こ
のヒータ3部分の不活性ガスの内圧としては、外気との
圧力差で示すと、5mmH2O程度の陽圧となるように
設定し保持している。一方、これに対して、上記マッフ
ル2内の充填不活性ガスによる内圧は、やはり外気との
圧力差で示すと、15mmH2 O程度の陽圧となるよう
に設定してあって、上記ヒータ3部分より若干高く維持
している。その理由は、ヒータ3部分の温度が焼結時に
は1600℃程度もの高温となり、この高温によって、
マッフル材料が影響され、その粘度が低下するなどして
当該マッフル2が変形し易くなるわけであるが、上記の
ように若干マッフル内圧をヒータ3部分より高くしてお
くと、外方からの圧力に耐えて、マッフルの変形を防ぐ
ことができるからである。
During operation of this manufacturing apparatus, an inert gas is introduced into the heater 3 portion of the sintering furnace 1 to prevent the invasion of the atmosphere into the heater 3 portion. The internal pressure of the inert gas in the heater 3 is set and maintained so as to be a positive pressure of about 5 mmH 2 O, which is indicated by the pressure difference from the outside air. On the other hand, the internal pressure of the filling inert gas in the muffle 2 is set to be a positive pressure of about 15 mmH 2 O, which is also shown by the pressure difference from the outside air. It keeps slightly higher than the part. The reason is that the temperature of the heater 3 becomes as high as about 1600 ° C. during sintering.
The muffle material is affected and its viscosity decreases, so that the muffle 2 is easily deformed. However, if the muffle internal pressure is slightly higher than that of the heater 3, the pressure from the outside is increased. This is because the muffle can be prevented from being deformed.

【0004】[0004]

【発明が解決しようとする課題】ところが、上記ガラス
多孔質母材4や透明化された光ファイバ母材などをマッ
フル2内に出し入れする場合には、当然マッフル2の上
部を解放する必要があり、この解放によって、マッフル
内圧が外気と同圧となると、マッフル内圧が上記とは逆
にヒータ3部分の内圧によりも若干低くなるため、マッ
フル2が変形し易くなり、ときには潰れたりする恐れが
あった。
However, when the glass porous preform 4 or the transparent optical fiber preform is put in or taken out of the muffle 2, it is necessary to open the upper part of the muffle 2. When the internal pressure of the muffle becomes equal to that of the outside air due to this release, the internal pressure of the muffle becomes a little lower than the internal pressure of the heater 3 contrary to the above, so that the muffle 2 is easily deformed and sometimes crushed. It was

【0005】このため、上記従来の製造方法では、母材
を出し入れする際、マッフル形状が変形しない程度の温
度まで、一旦ヒータ温度を下げてから、マッフル2の上
部を解放して、母材の出し入れをする必要があり、焼結
炉1の焼結時の温度で連続運転することは不可能であっ
て、作業性が悪いなどの問題があった。
Therefore, in the above conventional manufacturing method, when the base material is taken in and out, the heater temperature is once lowered to a temperature at which the shape of the muffle is not deformed, and then the upper portion of the muffle 2 is released to remove the base material. It is necessary to take it in and out, it is impossible to continuously operate the sintering furnace 1 at the temperature at the time of sintering, and there are problems such as poor workability.

【0006】本発明は、このような従来の実情に鑑みて
なされたもので、焼結炉のマッフル上部に母材着脱室部
を設けることにより、焼結時、ヒータ温度を下げる必要
のない、光ファイバ母材の製造装置を提供せんとするも
のである。
The present invention has been made in view of such a conventional situation, and it is not necessary to lower the heater temperature at the time of sintering by providing the base material attaching / detaching chamber section on the upper part of the muffle of the sintering furnace. It is intended to provide an apparatus for manufacturing an optical fiber preform.

【0007】[0007]

【課題を解決するための手段】本発明の特徴とする点
は、ガラス多孔質母材を透明化する焼結炉を有する光フ
ァイバ母材の製造装置において、前記焼結炉のマッフル
上部に当該マッフル内部と開閉自在に連通された母材着
脱室部を設け、当該母材着脱室部への不活性ガスの導入
と当該母材着脱室部の開閉によって、前記マッフル内の
内圧を常時所定の値に維持することができるようにした
光ファイバ母材の製造装置にある。
The feature of the present invention resides in that in a manufacturing apparatus for an optical fiber preform having a sintering furnace for making a glass porous preform transparent, the above-mentioned muffle of the sintering furnace is concerned. A base material attaching / detaching chamber section that is openably / closably communicated with the inside of the muffle is provided, and by introducing an inert gas into the base material attaching / detaching chamber section and opening / closing the base material attaching / detaching chamber section, the internal pressure in the muffle is constantly maintained at a predetermined level. It is in an optical fiber preform manufacturing apparatus capable of maintaining the value.

【0008】[0008]

【作用】上記母材着脱室部を設けることにより、母材の
着脱に左右されることなく、マッフル内の内圧が常時所
定の値に維持することができるため、焼結処理におい
て、焼結炉を所望の焼結温度で連続運転することが可能
となる。
By providing the base material attaching / detaching chamber, the internal pressure in the muffle can be constantly maintained at a predetermined value without being influenced by the attachment / detachment of the base material. Can be continuously operated at a desired sintering temperature.

【0009】[0009]

【実施例】図1は、本発明に係る光ファイバ母材の製造
装置の一実施例を示したものである。この製造装置にお
いて、11は焼結炉、12は石英管などからなるマッフ
ル、13はヒータ、15はマッフル12の上部に当該マ
ッフル内部と開閉自在に連通された母材着脱室部Rをな
す石英管などからなる筒体、16はマッフル12の上端
開口部に固着されて上記筒体15の下端開口部を塞ぐフ
ランジ、17は上記マッフル12の上端開口部を開閉す
る内部仕切り蓋、18は筒体15の上端開口部を開閉す
る外部開閉蓋である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of an optical fiber preform manufacturing apparatus according to the present invention. In this manufacturing apparatus, 11 is a sintering furnace, 12 is a muffle made of a quartz tube, 13 is a heater, and 15 is a quartz forming a base material attachment / detachment chamber R in the upper part of the muffle 12 so as to openably and closably communicate with the inside of the muffle. A tubular body made of a pipe or the like, 16 is a flange fixed to the upper end opening of the muffle 12 to close the lower end opening of the tubular body 15, 17 is an internal partition lid for opening and closing the upper end opening of the muffle 12, and 18 is a tube. It is an external opening / closing lid that opens and closes the upper opening of the body 15.

【0010】また、この製造装置では、例えば図示のよ
うに、マッフル12および母材着脱室部Rの筒体15部
分にそれぞれ不活性ガスの導入管20a,21aと排気
管20b,21bを接続すると共に、焼結炉11のヒー
タ13部分にも不活性ガスの導入管22(排気管を併設
することも可)を接続してある。そして、上記マッフル
12内には、導入管20aおよび排気管20bを通じ
て、その内圧が外気との圧力差で15mmH2 O程度の
陽圧となるように不活性ガスを導入し、また、ヒータ1
3部分には、導入管22を通じて、その内圧が外気との
圧力差で5mmH2 O程度の陽圧となるように不活性ガ
スを導入してある。さらに、上記母材着脱室部Rの筒体
15への不活性ガスの導入は、マッフル12の内部仕切
り蓋17を開成したとき、マッフル12側の内圧が不安
定にならないようにするためのもので、導入管21aお
よび排気管21bを通じて、マッフル12の内圧とほぼ
同じになる(外気との圧力差で15mmH2 O程度の陽
圧)ように不活性ガスを導入するようになっている。
Further, in this manufacturing apparatus, for example, as shown in the drawing, the muffle 12 and the tubular body 15 of the base material attaching / detaching chamber R are connected to the inert gas introducing pipes 20a and 21a and the exhaust pipes 20b and 21b, respectively. At the same time, an inert gas inlet pipe 22 (an exhaust pipe may be provided) is also connected to the heater 13 of the sintering furnace 11. Then, an inert gas is introduced into the muffle 12 through the introduction pipe 20a and the exhaust pipe 20b so that the internal pressure becomes a positive pressure of about 15 mmH 2 O due to the pressure difference with the outside air, and the heater 1
An inert gas is introduced into the three parts through the introduction pipe 22 so that the internal pressure becomes a positive pressure of about 5 mmH 2 O due to the pressure difference from the outside air. Further, the introduction of the inert gas into the cylindrical body 15 of the base material attachment / detachment chamber R prevents the internal pressure on the muffle 12 side from becoming unstable when the internal partition lid 17 of the muffle 12 is opened. Then, the inert gas is introduced through the introduction pipe 21a and the exhaust pipe 21b so that the internal pressure becomes almost the same as the internal pressure of the muffle 12 (a positive pressure of about 15 mmH 2 O due to the pressure difference from the outside air).

【0011】かゝる製造装置によって、ガラス多孔質母
材14を透明化するには、次のようにして行えばよい。
In order to make the glass porous base material 14 transparent by using such a manufacturing apparatus, the following procedure may be carried out.

【0012】(1)先ず、最初(初回)のガラス多孔質
母材14を透明化するには、筒体15内にガラス多孔質
母材14を入れた後、外部開閉蓋18を閉じ、当該筒体
15、マッフル12およびヒータ13部分に不活性ガス
を導入して、上述した所望の不活性ガス圧にすると共
に、ヒータ13部分を1600℃程度まで加熱する。
(1) First, in order to make the first (first) glass porous base material 14 transparent, after putting the glass porous base material 14 in the tubular body 15, the external opening / closing lid 18 is closed, Inert gas is introduced into the cylindrical body 15, the muffle 12, and the heater 13 to make the above-mentioned desired inert gas pressure, and the heater 13 is heated to about 1600 ° C.

【0013】(2)この状態で、筒体15底部の内部仕
切り蓋17を開け、上記ガラス多孔質母材14を徐々に
降下させてマッフル12内に入れ、ヒータ13部分を通
すことにより、その下端側から順次透明化させる。この
とき、内部仕切り蓋17を開けても、上述した不活性ガ
スの供給系統によりマッフル12の内圧は変動すること
がなく、所定値が安定して維持される。
(2) In this state, the inner partition lid 17 at the bottom of the cylindrical body 15 is opened, the glass porous base material 14 is gradually lowered and put into the muffle 12, and the heater 13 portion is passed therethrough. Make it transparent from the lower end side. At this time, even if the internal partition lid 17 is opened, the internal pressure of the muffle 12 does not fluctuate due to the above-mentioned inert gas supply system, and the predetermined value is stably maintained.

【0014】(3)そして、この透明化がガラス多孔質
母材14の上端側に達したら、この全体が透明化された
光ファイバ母材をマッフル12内から筒体15部分に引
き上げると共に、内部仕切り蓋17を閉じる。これによ
り、マッフル12内と母材着脱室部Rは完全に分離さ
れ、しかも、マッフル12内の内圧は、不活性ガスの供
給系統により、そのままの圧力(外気との圧力差で15
mmH2 O程度の陽圧)で維持されるため、ヒータ13
部分の温度をそのままの焼結温度(1600℃程度)で
維持しておいても、マッフル12自体が変形したり、あ
るいは潰れたりする恐れは全くない。一方、母材着脱室
部Rの筒体15では、不活性ガスの導入を停止させると
共に、外部開閉蓋18を開いて、上記引き上げられた光
ファイバ母材をさらに外部に取り出す。
(3) When the transparent material reaches the upper end side of the glass porous preform 14, the optical fiber preform, which is entirely transparent, is pulled up from the inside of the muffle 12 to the cylindrical body 15 portion, The partition lid 17 is closed. As a result, the inside of the muffle 12 and the base material attaching / detaching chamber R are completely separated, and the internal pressure of the inside of the muffle 12 is the same as that of the internal pressure due to the inert gas supply system (15 in terms of pressure difference from the outside air).
Since it is maintained at a positive pressure of about mmH 2 O), the heater 13
Even if the temperature of the part is maintained at the sintering temperature (about 1600 ° C.) as it is, there is no possibility that the muffle 12 itself is deformed or crushed. On the other hand, in the cylindrical body 15 of the base material attachment / detachment chamber R, the introduction of the inert gas is stopped, the external opening / closing lid 18 is opened, and the pulled-up optical fiber base material is further taken out.

【0015】(4)このようにして透明化された光ファ
イバ母材を取り外した製造装置の昇降手段(図示省略)
には、次の透明化されていない未処理のガラス多孔質母
材14を取り付け、筒体15内に入れ、この後、外部開
閉蓋18を閉じる。
(4) Elevating means (not shown) of the manufacturing apparatus from which the optical fiber preform thus made transparent is removed.
Next, an untreated glass porous preform 14 which has not been made transparent is attached to and placed in the tubular body 15, and then the external opening / closing lid 18 is closed.

【0016】(5)このように外部開閉蓋18を閉じた
ら、不活性ガスの供給系統により、筒体15内に不活性
ガスを導入し、上述したようにその圧力を、マッフル1
2の内圧とほぼ同じにする。
(5) When the external opening / closing lid 18 is closed in this way, an inert gas is introduced into the cylindrical body 15 by the inert gas supply system, and the pressure is adjusted to the muffle 1 as described above.
It is almost the same as the internal pressure of 2.

【0017】(6)筒体15内の圧力がマッフル12の
内圧とほぼ同じになったら、上記(2)項に示したよう
に、マッフル12の内部仕切り蓋17を開け、上記ガラ
ス多孔質母材14を徐々に降下させてマッフル12内に
入れ、ヒータ13部分を通すことにより、その下端側か
ら順次透明化させ、この後は、上記(3)項以降の工程
を繰り返せば、焼結時、焼却炉11のヒータ温度を下げ
ることなく、所望の焼結温度で連続運転することができ
る。
(6) When the internal pressure of the cylindrical body 15 becomes substantially the same as the internal pressure of the muffle 12, the inner partition lid 17 of the muffle 12 is opened and the glass porous matrix is opened, as shown in the above (2). The material 14 is gradually lowered and put into the muffle 12, and the heater 13 is passed through to make the material 14 transparent in order from the lower end side. After that, if the steps from the above (3) are repeated, the material is sintered. The continuous operation can be performed at a desired sintering temperature without lowering the heater temperature of the incinerator 11.

【0018】因に、上記構成からなる本発明の製造装置
により、ガラス多孔質母材14の透明化処理を行ったと
ころ、マッフル12内の圧力変動は、設定圧力である、
外気との圧力差15mmH2 Oに対して、±2mmH2
O程度であって、実際の透明化処理にあたって何ら支障
なく、良好な結果が得られた。
When the glass porous preform 14 is made transparent by the production apparatus of the present invention having the above-mentioned structure, the pressure fluctuation in the muffle 12 is a set pressure.
± 2 mmH 2 for pressure difference of 15 mmH 2 O with the outside air
It was about O, and good results were obtained without any hindrance in the actual transparency treatment.

【0019】なお、上記実施例では、筒体15の母材着
脱室部Rがマッフル12の上端部にフランジ16を介し
て固定的に取り付けられる構成であったが、母材着脱室
部R自体が着脱自在に取り付けられる構成とすることも
可能である。また、内部仕切り蓋17も図示の首振り方
式に限定されず、当該部分に狭いスリット(間隙)を設
け、このスリットに抜き差しするプレート方式の蓋とし
たり、あるいは2個の開閉する分割片からなる分割仕切
り蓋としたり、さらに多数の分割片(絞り片)からなる
シャッタ方式(カメラのシャッタと同構造の方式)のよ
うな開閉仕切り蓋としてもよい。この点は、上記外部開
閉蓋18についても同様である。
In the above embodiment, the base material attaching / detaching chamber portion R of the tubular body 15 is fixedly attached to the upper end portion of the muffle 12 via the flange 16, but the base material attaching / detaching chamber portion R itself. It is also possible to attach so that it can be detached. Further, the internal partition lid 17 is not limited to the swinging method shown in the figure, and a narrow slit (gap) is provided in the portion, and the lid is a plate type lid that is inserted into and removed from this slit, or is composed of two pieces that are opened and closed. An open / close partition cover such as a split partition cover or a shutter system (system having the same structure as a shutter of a camera) including a plurality of split pieces (diaphragm pieces) may be used. This also applies to the external opening / closing lid 18.

【0020】[0020]

【発明の効果】以上の説明から明らかなように、本発明
に係る光ファイバ母材の製造装置によれば、ガラス多孔
質母材を透明化する焼結炉を有する光ファイバ母材の製
造装置において、前記焼結炉のマッフル上部に当該マッ
フル内部と開閉自在に連通された母材着脱室部を設け、
当該母材着脱室部への不活性ガスの導入と当該母材着脱
室部の開閉によって、前記マッフル内の内圧を、母材の
着脱に左右されることなく、常時所定の値に維持するこ
とができるため、焼結処理において、焼結炉を所望の焼
結温度で連続運転することが可能となる。この結果、ヒ
ータの加熱温度を一旦下げる必要がなくなり、優れた生
産性が得られる。因に、従来装置において、母材の取り
出し時、一旦ヒータ温度を下げ(1000℃程度)、次
に再度所望の焼結温度(1600℃程度)まで上げるに
要する時間は、全工程の20%程度にも達しており、本
発明では、この時間ロスが全くなくなる。
As is clear from the above description, according to the optical fiber preform producing apparatus of the present invention, the optical fiber preform producing apparatus has the sintering furnace for making the glass porous preform transparent. In, in the upper part of the muffle of the sintering furnace, a base material attaching / detaching chamber part that is openably and closably connected to the inside of the muffle is provided,
The internal pressure in the muffle is constantly maintained at a predetermined value by the introduction of an inert gas into the base material attaching / detaching chamber section and the opening / closing of the base material attaching / detaching section, without being influenced by the attachment / detachment of the base material. Therefore, in the sintering process, the sintering furnace can be continuously operated at a desired sintering temperature. As a result, it is not necessary to once lower the heating temperature of the heater, and excellent productivity can be obtained. By the way, in the conventional equipment, when taking out the base material, the time required to once lower the heater temperature (about 1000 ° C) and then raise it again to the desired sintering temperature (about 1600 ° C) is about 20% of the whole process. In the present invention, this time loss is completely eliminated.

【0021】また、本発明に係るこの製造装置では、初
回立ち上がり時や作業の終業時以外は、上記のようにヒ
ータ温度を上げ下げする必要がないため、マッフルおよ
びヒータ部分に対する熱ストレスが大幅に緩和され、従
来装置に比較して、装置全体の大幅な長寿命化を図るこ
ともできる。
Further, in the manufacturing apparatus according to the present invention, it is not necessary to raise and lower the heater temperature as described above except at the time of initial start-up and at the end of work, so that the thermal stress on the muffle and the heater portion is relieved significantly. Therefore, the life of the entire device can be significantly extended as compared with the conventional device.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る光ファイバ母材の製造装置の一実
施例を示した概略説明図である。
FIG. 1 is a schematic explanatory view showing an embodiment of an optical fiber preform manufacturing apparatus according to the present invention.

【図2】従来の光ファイバ母材の製造装置の一例を示し
た概略説明図である。
FIG. 2 is a schematic explanatory view showing an example of a conventional optical fiber preform manufacturing apparatus.

【符号の説明】[Explanation of symbols]

11 焼結炉 12 マッフル 13 ヒータ 14 ガラス多孔質母材 15 筒体 16 フランジ 17 内部仕切り蓋 18 外部開閉蓋 R 母材着脱室部 11 Sintering furnace 12 Muffle 13 Heater 14 Glass porous base material 15 Cylindrical body 16 Flange 17 Internal partition lid 18 External opening / closing lid R Base material attaching / detaching chamber section

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 ガラス多孔質母材を透明化する焼結炉を
有する光ファイバ母材の製造装置において、前記焼結炉
のマッフル上部に当該マッフル内部と開閉自在に連通さ
れた母材着脱室部を設け、当該母材着脱室部への不活性
ガスの導入と当該母材着脱室部の開閉によって、前記マ
ッフル内の内圧を常時所定の値に維持することができる
ようにしたことを特徴とする光ファイバ母材の製造装
置。
1. A manufacturing apparatus for an optical fiber preform having a sintering furnace for making a glass porous preform transparent, in which a preform detachment chamber openably and closably connected to the inside of the muffle of the sintering furnace. By providing an inert gas into the base material attaching / detaching chamber portion and opening / closing the base material attaching / detaching chamber portion, the internal pressure in the muffle can be constantly maintained at a predetermined value. Optical fiber preform manufacturing equipment.
JP4589593A 1993-02-10 1993-02-10 Device for producing optical fiber preform Pending JPH06234536A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4589593A JPH06234536A (en) 1993-02-10 1993-02-10 Device for producing optical fiber preform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4589593A JPH06234536A (en) 1993-02-10 1993-02-10 Device for producing optical fiber preform

Publications (1)

Publication Number Publication Date
JPH06234536A true JPH06234536A (en) 1994-08-23

Family

ID=12731985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4589593A Pending JPH06234536A (en) 1993-02-10 1993-02-10 Device for producing optical fiber preform

Country Status (1)

Country Link
JP (1) JPH06234536A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1036772A3 (en) * 1999-03-17 2001-03-21 Heraeus Quarzglas GmbH & Co. KG Method for producing optical quartz glass for excimer lasers and vertical-type heating furnace

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1036772A3 (en) * 1999-03-17 2001-03-21 Heraeus Quarzglas GmbH & Co. KG Method for producing optical quartz glass for excimer lasers and vertical-type heating furnace
US6508084B1 (en) 1999-03-17 2003-01-21 Heraeus Quarzglas Gmbh & Co. Kg Method for producing optical quartz glass for excimer lasers and vertical-type heating furnace

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