JPH0622915Y2 - 表面解析装置 - Google Patents
表面解析装置Info
- Publication number
- JPH0622915Y2 JPH0622915Y2 JP15475887U JP15475887U JPH0622915Y2 JP H0622915 Y2 JPH0622915 Y2 JP H0622915Y2 JP 15475887 U JP15475887 U JP 15475887U JP 15475887 U JP15475887 U JP 15475887U JP H0622915 Y2 JPH0622915 Y2 JP H0622915Y2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- scattered
- vacuum
- proton
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001133 acceleration Effects 0.000 claims description 16
- 238000005211 surface analysis Methods 0.000 claims description 11
- 230000005684 electric field Effects 0.000 claims description 7
- 238000005452 bending Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 9
- 238000001228 spectrum Methods 0.000 description 7
- 238000000605 extraction Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15475887U JPH0622915Y2 (ja) | 1987-10-07 | 1987-10-07 | 表面解析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15475887U JPH0622915Y2 (ja) | 1987-10-07 | 1987-10-07 | 表面解析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0160352U JPH0160352U (enrdf_load_stackoverflow) | 1989-04-17 |
| JPH0622915Y2 true JPH0622915Y2 (ja) | 1994-06-15 |
Family
ID=31431775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15475887U Expired - Lifetime JPH0622915Y2 (ja) | 1987-10-07 | 1987-10-07 | 表面解析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0622915Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-10-07 JP JP15475887U patent/JPH0622915Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0160352U (enrdf_load_stackoverflow) | 1989-04-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7211794B2 (en) | Mass spectrometer | |
| CA1249381A (en) | Low noise tandem quadrupole mass spectrometers and method | |
| JPH03503815A (ja) | 質量分析計 | |
| JPWO2006098086A1 (ja) | 飛行時間質量分析計 | |
| US5464975A (en) | Method and apparatus for charged particle collection, conversion, fragmentation or detection | |
| EP0490626B1 (en) | Mass spectrometer with electrostatic energy filter | |
| JP4558722B2 (ja) | マススペクトロメータと、それに関係するイオナイザ及び方法 | |
| JPH0378742B2 (enrdf_load_stackoverflow) | ||
| US5621209A (en) | Attomole detector | |
| Limbach et al. | An electrostatic ion guide for efficient transmission of low energy externally formed ions into a Fourier transform ion cyclotron resonance mass spectrometer | |
| US20200234939A1 (en) | Mass spectrometer components including programmable elements and devices and systems using them | |
| Chakraborty et al. | A new time of flight mass spectrometer for absolute dissociative electron attachment cross-section measurements in gas phase | |
| JPH0622915Y2 (ja) | 表面解析装置 | |
| US11791149B2 (en) | Axially progressive lens for transporting charged particles | |
| RU2601294C2 (ru) | Способ анализа примесей в жидкостях при их просачивании через трековую мембрану с формированием и транспортировкой анализируемых ионов через радиочастотную линейную ловушку в масс-анализатор при воздействии сверхзвукового газового потока с возможным содержанием в нём метастабильно возбуждённых атомов | |
| CN218101170U (zh) | 一种可变磁感应强度电子轰击电离源 | |
| Numadate et al. | Development of a Kingdon ion trap system for trapping externally injected highly charged ions | |
| US7164121B2 (en) | Ion attachment mass spectrometry method | |
| US20190326109A1 (en) | Dual chamber electron impact and chemical ionization source | |
| JPH0227651A (ja) | 表面解析装置 | |
| Dietz | Transmission Optics of Focused Ion Beams Used in Mass Spectrometry | |
| CN116666188A (zh) | 多极杆结构、碰撞池装置及质谱仪 | |
| Moran et al. | Tandem Isotope Separator‐Mass Spectrometer for the Study of Ionic Collision Processes | |
| Bapat et al. | Effusive molecular beam from a capillary array for improved resolution time‐of‐flight and collision spectrometry | |
| JP2002162386A (ja) | 気体原子または気体分子の飛行時間型速度測定装置 |