JPH062273Y2 - 板状体の収納カセット - Google Patents

板状体の収納カセット

Info

Publication number
JPH062273Y2
JPH062273Y2 JP15620688U JP15620688U JPH062273Y2 JP H062273 Y2 JPH062273 Y2 JP H062273Y2 JP 15620688 U JP15620688 U JP 15620688U JP 15620688 U JP15620688 U JP 15620688U JP H062273 Y2 JPH062273 Y2 JP H062273Y2
Authority
JP
Japan
Prior art keywords
plate
shaped body
positioning
substrate
horizontal support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15620688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0276842U (cs
Inventor
正義 今村
佳興 横山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP15620688U priority Critical patent/JPH062273Y2/ja
Publication of JPH0276842U publication Critical patent/JPH0276842U/ja
Application granted granted Critical
Publication of JPH062273Y2 publication Critical patent/JPH062273Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Pile Receivers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP15620688U 1988-11-30 1988-11-30 板状体の収納カセット Expired - Lifetime JPH062273Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15620688U JPH062273Y2 (ja) 1988-11-30 1988-11-30 板状体の収納カセット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15620688U JPH062273Y2 (ja) 1988-11-30 1988-11-30 板状体の収納カセット

Publications (2)

Publication Number Publication Date
JPH0276842U JPH0276842U (cs) 1990-06-13
JPH062273Y2 true JPH062273Y2 (ja) 1994-01-19

Family

ID=31434536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15620688U Expired - Lifetime JPH062273Y2 (ja) 1988-11-30 1988-11-30 板状体の収納カセット

Country Status (1)

Country Link
JP (1) JPH062273Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101125011B1 (ko) * 2009-07-09 2012-03-27 주식회사 선익시스템 기판 정렬용 핀세트, 기판 정렬 장치 및 이를 포함하는 박막 증착 장치

Also Published As

Publication number Publication date
JPH0276842U (cs) 1990-06-13

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