JPH06226579A - Minute feed device - Google Patents

Abstract

PURPOSE:To provide a minute feed device in which parallelism is not so required, and an object can be moved precisely and minutely even in case of existence of error of parallelism between the object to be minutely moved such as a stage and a movement axis. CONSTITUTION:A piezoelectric element 16 for clamping as a first actuator, a piezoelectric element 18 for clamping as a second actuator, and a piezoelectric element 40 for movement as a third actuator are drivingly controlled by means of a driving control device 65, and a clamp block 12 as a first supporting member and a clamp block 14 as a second supporting member are minutely fed together with the moving plate 52 of a table device 50 as the object at a prescibed timing, following to a plate spring 28 as a guide means.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an object micro-feeding apparatus, and more particularly to micro-feeding an object such as a stage, and to an assembly jig used for registration of CDD, for example. The present invention relates to a fine feeding device that is suitable for use.

[0002]

2. Description of the Related Art A conventional minute feeding device has a structure as shown in FIGS. In FIG. 6 and FIG. 7, this type of minute feeding device has a so-called worm insect mechanism 9. The scale insect mechanism 9 is fixed to, for example, a stage (not shown).

The scale insect mechanism 9 is movable in a clamp block 1 having a U-shaped cross section, and the clamp block 1 is fixed to a fixing portion 8. The scale insect mechanism 9 has the clamping piezoelectric elements 2 and 3 and the moving piezoelectric element 4, and the clamping piezoelectric elements 2 and 3 are connected by the moving piezoelectric element 4.

Such a conventional minute feeding device moves as shown in FIG. First, referring to FIG. 7A, in this state, both the clamping piezoelectric elements 2 and 3 are in a state of extending in the vertical direction in the drawing, and the moving piezoelectric element 4
Also extends laterally in the figure. In the initial state of FIG. 7A, both end surfaces of the clamping piezoelectric elements 2 and 3 are
The clamp piezoelectric elements 2 and 3 are in contact with the inner surfaces 5 and 6 of the clamp block 1 and are clamped to the inner surfaces 5 and 6, respectively.

Next, as shown in FIG. 7 (b), the clamp piezoelectric element 3 contracts, and thereafter, the moving piezoelectric element 4 contracts as shown in FIG. 7 (c). Then, as shown in FIG. 7D, the clamping piezoelectric element 3 expands again, and conversely the clamping piezoelectric element 2 contracts.

As a result, the clamping piezoelectric element 3 is clamped in a state in which it is slightly moved to the right in the direction of the arrow L, as can be seen by comparing FIGS. 7 (a) and 7 (d).

Next, as shown in FIG. 7E, when the moving piezoelectric element 4 again extends in the lateral direction in the figure, FIG.
As can be seen from comparison with FIG. 7E, the clamping piezoelectric element 2 slightly moves to the right.

Next, the clamping piezoelectric element 2 extends again to a state similar to the initial state as shown in FIG. 7 (a), and the same operation as in FIGS. 7 (b) to 7 (e) is repeated. In this way, the so-called shingling bug mechanism 9 repeats the above-described operation in the groove of the clamp block 1,
An object such as a stage can be moved by a minute amount over a long stroke.

[0009]

Incidentally, FIG. 7 (a)
As described with reference to FIG. 7 (e), in order for the clamping piezoelectric elements 2 and 3 to accurately feed the object by a small amount, the clamping blocks 1 may be moved at any position within the moving range of the inner surfaces 5 and 6. It must be able to be clamped correctly and unclamped.

For this reason, even if the displacement of the clamping piezoelectric elements 5 and 6 is several μm, the clamping piezoelectric elements 2 and 6 are
The inner surfaces 5, 6 must be dimensionally precisely machined so that the inner surface 5, 6 can be positively clamped against the inner surfaces 5, 6 of the clamp block 1. That is, there is a problem that the inner surfaces 5 and 6 defining the groove of the clamp block 1 are required to have high parallelism.

In addition, the clamping piezoelectric elements 2 and 3 and the moving piezoelectric element 4 are accurately assembled to form the worm insect mechanism 9, and the worm insect mechanism 9 is attached to the clamp block 1.
It must be set inside and the fine feed device must be assembled.

In addition, when an object such as a stage is slightly fed, the worm mechanism 9 is fixed to the stage by some method, but the displacement of several μm due to the expansion and contraction of the moving piezoelectric element 4 causes the stage to move. Therefore, it is not possible to flexibly fix the scale insect mechanism 9 and the stage, and it is necessary to firmly fix them so that they do not move relative to each other. Therefore, there is a problem that a high degree of parallelism is required between the moving axis of the stage and the moving axis of the scale insect mechanism 9 (L direction).

The present invention has been made in order to solve the above-mentioned problems. The parallelism is not required so much, and the parallelism with the moving axis of an object such as a stage which is intended to be minutely fed. It is an object of the present invention to provide a micro-feeding device capable of precisely micro-moving an object even if there is an error.

[0014]

According to the present invention, there is provided a first support member fixed to the object, and a first supporting member fixed to the object in a minute feeding device for minutely feeding the object. A second support member connected to the support member, and a second support member arranged between the first support member and the second support member to connect the first support member and the second support member, A first actuator that is capable of expanding and contracting in the direction in which the object is slightly fed, and the first supporting member and the second supporting member are arranged in the direction in which the object is minutely fed. And a second actuator that is set to the first support member and is capable of fixing the first support member to the guide means, and a second actuator that is set to the second support member. The second support member can be fixed to the means And a third actuator, the first
And a drive control device for driving and controlling the second actuator and the third actuator to move the object in a direction in which the object is minutely fed according to the guide means. Achieved by the feeder.

In the present invention, preferably, the first actuator, the second actuator, and the third actuator are piezoelectric elements. In the present invention, preferably, the guide means is a linear leaf spring.

Further, in the present invention, the above object is as follows.
In a minute feeding device for minutely feeding an object, a first supporting member fixed to the object, a second supporting member connected to the first supporting member, and the first supporting member. And a second support member that is disposed between the first support member and the second support member and that is expandable / contractible in a direction in which the object is slightly fed. An actuator, a first guide which is arranged in association with the first support member and the second support member, and which is formed in a curved shape corresponding to a predetermined path direction for minutely feeding the object. A member, a second actuator which is set to the first support member and can fix the first support member to the first guide means, and a second actuator which is set to the second support member, The second support member can be fixed to the first guide means. Functional third actuator, and second guide means for guiding at least one of the first support member and the second support member in the predetermined path direction in which the object is minutely fed. The first actuator, the second actuator, and the third actuator are drive-controlled to attempt to minutely feed the object along the first guide means and the second guide means. And a drive control device for moving in a predetermined path direction.

Further, according to the present invention, the first actuator, the second actuator, and the third actuator are piezoelectric elements. Further, according to the present invention, the first guide means is a leaf spring which is bent and formed in a predetermined path direction for minutely feeding the object.

[0018]

The first actuator, the second actuator, and the third actuator are driven and controlled, and the first support member and the second support member are driven at predetermined timing according to the guide means. Minute feed with the object. In addition, the first actuator, the second actuator, and the third actuator are drive-controlled so that the first guide means and the second guide means move along a predetermined path direction to the first guide means. The second supporting member and the second supporting member are minutely fed together with the object at a predetermined timing.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings. The examples described below are preferred specific examples of the present invention, and therefore, various technically preferable limitations are given, but the scope of the present invention particularly limits the present invention in the following description. Unless otherwise stated, the present invention is not limited to these modes.

FIG. 1 shows a preferred embodiment of the fine feed device of the present invention. In FIG. 1, in this embodiment, the minute feeding device 10 is used for minutely feeding the moving plate 52 of the stage device 50, and constitutes a so-called shredding mechanism. Further, FIG. 2 shows only the minute feeding device in FIG. The moving plate 52 of the stage device 50 can move in the moving direction indicated by the arrow L with respect to the base portion 54. The moving plate 52 can hold a tool or a work, for example, and the base portion 54 is fixed to the fixed portion H.

The minute feeding device 10 is constructed as follows. The clamp block 12 as the first support member is fixed to the moving plate 52 of the stage device 50. The clamp block 14 serving as the second support member is arranged so as to face the first clamp block 12.
Are arranged. The first clamp block 12 and the second clamp block 14 have the same shape and preferably have a substantially U-shaped cross section.

Between the first clamp block 12 and the second clamp block 14, a moving piezoelectric element 40 as a first actuator is arranged.
Clamp block 12 and second clamp block 14
Are connected to the ends of the moving piezoelectric element 40 in an H-shape. The moving piezoelectric element 40 is expandable / contractible in a direction parallel to the direction of the arrow L described above by applying a driving voltage.

In relation to the first clamp block 12 and the second clamp block 14, a leaf spring 28 as guide means is arranged. The strip-shaped leaf spring 28 is preferably arranged in a direction parallel to the arrow L, and
It is arranged so as to pass through the groove of the first clamp block 12 and the groove of the second clamp block 14.

Further, the leaf spring 28 extends along the inner surface of the convex portion 24 of the first clamp block 12 and the inner surface of the convex portion 26 of the second clamp block 14. Both ends of the leaf spring 28 are fixed to the fixing portion H via the members 30 and 32. In the groove of the first clamp block 12, a clamping piezoelectric element 16 as a second actuator is provided. In addition, in the groove of the second clamp block 14, the clamping piezoelectric element 1 as the third actuator is provided.
8 are provided.

One end of the clamp piezoelectric element 16 is fixed to the inner surface of the convex portion 27 of the first clamp block 12. Similarly, the clamp piezoelectric element 18
One end of is fixed to the inner surface of the convex portion 29 of the second clamp block 14. In addition, the clamp piezoelectric element 16
The other end 20 is a free end, and the other end 22 of the clamping piezoelectric element 18 is also a free end.

As a result, when a driving voltage is applied to the clamping piezoelectric element 16 and the clamping piezoelectric element 16 expands, the other end 20 of the clamping piezoelectric element 16 and the convex portion 2 are formed.
The leaf spring 28 can be clamped between the inner surfaces of the four. When a driving voltage is applied to the clamping piezoelectric element 18 and the clamping piezoelectric element 18 expands, the leaf spring 28 is clamped between the other end 22 of the clamping piezoelectric element 18 and the inner surface of the convex portion 26. You can do it.

A drive voltage is applied to the moving piezoelectric element 40 and the clamping piezoelectric elements 16 and 18 at a predetermined timing by the drive control device 65. The drive control device 65 converts, for example, a digital signal into an analog drive voltage to convert the piezoelectric elements 40, 1
6 and 18 can be driven.

Next, referring to FIG. 3, the minute feeding operation of the moving plate 52 by the above-mentioned minute feeding device will be sequentially described.
FIG. 3 is a schematic plan view showing the main part of the minute feeding device,
In the figure, the clamping piezoelectric elements 16 and 18 and the moving piezoelectric element 40 are H-shaped as described above, and move or operate like a so-called worm. FIG. 3 shows an operation example in which the scale insect moves from left to right in the figure.

First, FIG. 3A shows an initial state, in which the clamping piezoelectric elements 16 and 18 have already expanded based on the drive voltage from the drive control device 65. Further, the moving piezoelectric element 40 is also in a state of being expanded by the drive voltage from the drive control device 65.

As a result, the leaf spring 28 is clamped between the clamping piezoelectric element 16 and the convex portion 24, and is also clamped between the clamping piezoelectric element 18 and the convex portion 26. Therefore, in FIG. 3 (a), the clamp blocks 12 and 14 that form the scale insect are the leaf springs 2.
It is in a fixed state with respect to No. 8.

Next, as shown in FIGS. 3 (b) to 3 (e), the scale insect starts to move. First, FIG.
As shown in (b), one clamp piezoelectric element 18 contracts. As a result, the leaf spring 28 is released from the clamp piezoelectric element 18. Next, as shown in FIG. 3C, the moving piezoelectric element 40 contracts. As a result, the clamp block 14 moves in the direction of the arrow, that is, in the right direction by the minute amount of the contracted piezoelectric element 40.

Next, as shown in FIG.
Contrary to the state of (c), the clamping piezoelectric element 18 expands again to clamp the leaf spring 28, and the clamping piezoelectric element 16 contracts to release the leaf spring 28. Next, as shown in FIG. 3E, the moving piezoelectric element 40 expands. As a result, the clamp block 12 moves to the right by a minute amount by which the moving piezoelectric element 40 is extended as indicated by the arrow.

After that, the clamping piezoelectric element 16 is expanded again to return to a state similar to the initial state shown in FIG. 3 (a). That is, the clamping piezoelectric elements 16 and 18 extend to clamp the leaf spring 28. After that, the clamp blocks 12 and 14 of the micro-feeding device are gradually moved slightly to the right by repeating the operations shown in FIGS. 3B to 3E. By repeating this operation, it is possible to obtain a long stroke movement along the leaf spring 28.

In the operation example shown in FIG. 3, the case of moving to the right is shown, but at the timing opposite to that of the example of FIG. 3, the clamping piezoelectric elements 16 and 18 and the moving piezoelectric element 40 are shown. Can be moved to the left side by operating the drive control device 65 of FIG.

As described above, the two-divided type clamp blocks 12 and 14 can be used, and the clamp blocks 12 and 14 can be moved along the leaf spring 28.
At this time, even if the moving plate 52 of the stage device 50 of FIG.
Since it is possible to elastically deform the leaf spring 28 in accordance with the moving direction L of the moving plate 52 without securing a high degree of parallelism between the moving direction L and the longitudinal direction of the plate spring 28.
The clamp blocks 12 and 14 can be finely moved together with the moving plate 52 without difficulty. That is, the stage device 5
The parallelism error between the moving direction L (moving axis) of the moving plate 52 of 0 and the moving axis (moving direction) of the clamp blocks 12 and 14 constituting the worm is absorbed by the plate spring 28. .

Further, in the above-described embodiment of the present invention, the two-divided type clamp blocks 12 and 14 are used, and further, these clamp blocks 12 and 14 are configured to move minutely along the leaf spring 28. It is not necessary to form a long groove in the moving direction as shown in the conventional example of FIG. That is, the clamping piezoelectric element 16 only contacts a fixed portion of the inner surface of the convex portion 24 of the clamp block 12 during clamping, and the clamping piezoelectric element 18 has a constant inner surface of the convex portion 26 of the clamp block 14 during clamping. It does not need to form a groove extending long in the moving direction, unlike the conventional case, since it only hits the portion of.

Next, referring to FIGS. 4 and 5, another preferred embodiment of the fine feeding device of the present invention will be described. The micro-feeding device 100 shown in FIGS. 4 and 5 is capable of micro-feeding an object such as a moving plate of a table device along a more complicated path than the embodiment shown in FIG. You can do it. In the embodiment shown in FIG. 4, the moving route is complicated as compared with the embodiment shown in FIG.

In FIG. 4, the first clamp block 112 and the second clamp block 114 are arranged side by side. The clamp blocks 112 and 114 have the same shape and a U-shaped cross section. A moving piezoelectric element 140 as a first actuator is arranged between the clamp blocks 112 and 114. With this moving piezoelectric element 140, the clamp blocks 112, 1
14 are connected. The moving piezoelectric element 140 can expand and contract in a direction parallel to the arrow L direction by applying a drive voltage from the drive control device 165.

A second groove is provided in the groove of the clamp block 112.
A piezoelectric element 116 for clamping is provided as an actuator of the. Similarly, the clamp piezoelectric element 118 as a third actuator is provided in the groove of the clamp block 114. Clamping piezoelectric element 11
One end of 6 is fixed to the inner surface of the convex portion 127 of the clamp block 112. Similarly, the clamp piezoelectric element 1
One end of 18 is fixed to the inner surface of the convex portion 129 of the clamp block 114.

The other end of the clamping piezoelectric element 116 is a free end and faces the inner surface of the convex portion 124. Similarly, the other end of the clamping piezoelectric element 118 is a free end, and the convex portion 1
It faces the inner surface of 26. These clamping piezoelectric elements 116 and 118 can also be expanded in the direction perpendicular to the arrow L direction by applying a drive voltage from the drive control device 165.

As a result, the clamping piezoelectric element 116,
By extending 118 in a direction perpendicular to the arrow L direction,
The leaf spring 128 can be clamped by one end of the clamp piezoelectric element 116 and the inner surface of the convex portion 124. Similarly, when the clamp piezoelectric element 118 extends, the other end of the clamp piezoelectric element 118 and the convex portion 126
A leaf spring 128 can be clamped between the inner surfaces of the. For example, although not shown, an object, for example, the moving plate 52 of the stage device 50 shown in FIG. 1 is fixed to one clamp block 112.

The leaf spring 128 has members 130 and 132.
It is fixed to the fixed portion 155 via. The leaf spring 128 has a predetermined complicated path having a curved shape or a curved shape, and the leaf spring 128 is a first guide means. A slider 160 as a second guide unit is arranged so as to face the leaf spring 128 that is the first guide unit. The slider 160 is similarly fixed to the fixing portion 155.

The slider 160 is formed with a guide groove 162 that matches the shape of the leaf spring 128. The guide 170 is guided in the guide groove 162. The guide 170 is provided so as to project from one clamp block 112 as shown in FIG.

The above-mentioned clamp piezoelectric elements 116 and 11
8 and the moving piezoelectric element 140 are connected to the drive control device 165.
As a result, the drive voltage is applied at a predetermined timing as in the first embodiment shown in FIG. The operation is similar to the operation of the embodiment shown in FIG. 3, but the difference in this embodiment is along the curved path direction of the leaf spring 128 and further along the curved shape of the guide groove 162. It is in a place where a complicated route can be minutely fed.

By the way, for the clamping piezoelectric element and the moving piezoelectric element in the above embodiment, for example, a piezoelectric ceramic material can be used. Further, not only the piezoelectric element but also other types of actuators can be used. As described above, the embodiment of the present invention is different from the conventional one in that two clamp blocks are prepared, the clamp blocks move together, and each clamp block is supported by the leaf spring.

On the other hand, in the conventional minute feeding device,
As described above, since the moving body or the worm that constitutes the worm insect mechanism is a mechanism that moves along the inner surface of the groove of the clamp block, the clamping piezoelectric element can be accurately located at any position in the movement range. In order to be able to clamp and unclamp, the groove width of the clamp block must be precisely machined and assembled so that it can accommodate positional displacements of the piezoelectric element of a few μm.

That is, in the conventional minute feeding device, the inner surfaces of the clamp blocks facing each other are required to have high parallelism. Moreover, in the minute feed of the stage, it is several μm.
In order to surely convey the minute displacement of the scale insect from the scale insect to the stage, the stage and the scale insect cannot be flexibly fixed, and the stage and the scale insect must be firmly fixed.

Therefore, in the conventional minute feeding device, a high degree of parallelism is required between the moving axis of the moving plate of the stage and the moving axis of the so-called worm. If this high parallelism is not satisfied, the movement of the scale insect will be hindered.

On the other hand, in the above-described preferred embodiment of the present invention, since the mechanism moves in units of two divided clamp blocks, the clamp piezoelectric element clamps the leaf spring and releases the clamp. It can be performed at the same position in each clamp block.

Therefore, in the embodiment of the present invention, as shown in FIG.
The high parallelism of the inner surfaces of the long groove of the conventional clamp block as shown in FIG. Further, since the piezoelectric element for clamping is fixed by pressing it against the leaf spring, it is easy to adjust so that clamping and unclamping can be performed accurately. In addition, even in the minute feed of the stage, an error in the parallelism between the moving axis of the moving plate of the stage and the moving axes of the two clamp blocks and the moving piezoelectric element forming the scale insect or the moving body is caused by the leaf spring. Can be absorbed by the elasticity of.
Therefore, a high degree of parallelism is not required between the two moving axes.

[0051]

As described above, according to the first and second aspects.
According to the invention, since it is possible to move each of the first support member and the second support member such as the clamp block, parallelism of the inner surface of the long groove in the clamp block which is conventionally required is not required. As a result, the minute feed mechanism can be manufactured relatively roughly and easily, and the cost can be reduced. According to the invention of claim 3, by using the leaf spring, the parallelism error between the first and second support members can be absorbed by the elastic deformation of the leaf spring. Moreover, the movement axis of the object such as the stage and the first
It is possible to absorb the error in the degree of balance between the movement axis of the second support member and the second support member by elastic deformation of the leaf spring. Therefore, the assembling is easy, and the minute feeding operation is not obstructed during the minute feeding operation. According to the inventions of claims 4 and 5, it is possible to finely feed the object in a curved line corresponding to a complicated predetermined route direction for finely feeding, and it is possible to obtain the object by using a conventional link or cam. It is possible to easily implement the complicated movement that was used. According to the invention of claim 6, by using the leaf spring, the parallelism error between the first and second support members can be absorbed by the elastic deformation of the leaf spring.
Moreover, the moving axis of the object such as the stage, the first and the second
The error in parallelism with the movement axis of the support member can be absorbed by elastic deformation of the leaf spring. Therefore, the assembling is easy, and the minute feeding is not obstructed during the minute feeding operation.

[Brief description of drawings]

FIG. 1 is a perspective view showing a preferred embodiment of a fine feeding device of the present invention.

FIG. 2 is a perspective view showing a main part of the embodiment shown in FIG.

3A and 3B are views for explaining minute movement in the embodiment of FIG.

FIG. 4 is a perspective view showing another preferred embodiment of the minute feeding device of the present invention.

5 is a perspective view showing a clamp block provided with a guide in the embodiment of FIG.

FIG. 6 is a perspective view showing a conventional minute feeding device.

FIG. 7 is a diagram showing an operation of the conventional minute feeding device of FIG.

[Explanation of symbols]

 10 Micro Feeding Device 12 Clamp Block (First Support Member) 14 Clamp Block (Second Support Member) 16 Clamping Piezoelectric Element (Second Actuator) 18 Clamping Piezoelectric Element (Third Actuator) 28 Leaf Spring ( Guide means) 40 Moving piezoelectric element (first actuator) 50 Stage device 52 Moving plate (object) of stage device 65 Drive control device 100 Micro feed device 112 Clamp block (first support member) 114 Clamp block (first) 2 Support member) 116 Clamping piezoelectric element (second actuator) 118 Clamping piezoelectric element (third actuator) 128 Leaf spring (first guide means) 140 Moving piezoelectric element (first actuator) 160 Slider (Second Guide Means) 165 Drive Control Device

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Internal reference number FI technical display location H02N 2/00 B 8525-5H

Claims (6)

[Claims] 1. A micro-feeding device for micro-feeding an object, comprising: a first support member fixed to the object; a second support member connected to the first support member; The first support member is arranged between the second support member and the first support member and the second support member are connected to each other, and the first support member is expandable / contractible in a direction in which the object is slightly fed. 1 actuator, in relation to the first support member and the second support member,
Guide means arranged in a direction in which the object is slightly fed, and a second actuator which is set in the first support member and is capable of fixing the first support member to the guide means, A third actuator which is set on the second support member and can fix the second support member to the guide means, the first actuator, the second actuator, and the third actuator. Drive control of the actuator,
And a drive control device for moving the object in a direction in which the object is to be minutely fed according to the guide means. 2. The first actuator and the second actuator
2. The micro-feeding device according to claim 1, wherein the actuator and the third actuator are piezoelectric elements. 3. The minute feeding device according to claim 1, wherein the guide means is a linear leaf spring. 4. A minute feeding device for minutely feeding an object, comprising: a first supporting member fixed to the object; a second supporting member coupled to the first supporting member; The first support member and the second support member are disposed between the first support member and the second support member to connect the first support member and the second support member, and expand and contract in correspondence with a direction in which the object is slightly fed. A possible first actuator, a first actuator arranged in association with the first support member and the second support member, and formed corresponding to a predetermined path direction in which the object is minutely fed. A guide member, a second actuator which is set to the first support member and can fix the first support member to the first guide means, and a second actuator which is set to the second support member, The second support member with respect to the first guide means And a second actuator that guides at least one of the first support member and the second support member in the predetermined path direction in which the object is minutely fed. And drivingly controlling the first actuator, the second actuator, and the third actuator,
A micro-feeding device, comprising: a drive control device for moving the object along the first guide means and the second guide means in the predetermined path direction in which the object is micro-fed. 5. The first actuator and the second actuator
5. The micro feed device according to claim 4, wherein the actuator and the third actuator are piezoelectric elements. 6. The minute feeding device according to claim 4, wherein the first guide means is a leaf spring bent in a predetermined path direction for minutely feeding the object.