JPH0622477Y2 - Automatic water supply type ultrasonic cleaning device - Google Patents

Description

[Detailed Description of the Invention] [Industrial field of application] The present invention relates to an automatic water supply type ultrasonic cleaning apparatus that enables precision cleaning in only one tank.

[Prior Art] Precision cleaning of small parts, especially cleaning of semiconductors, etc., requires precise cleaning, so cleaning in a clean cleaning liquid is always required. A multi-stage cleaning method is known. In the multi-tank cleaning method, the cleaning process is divided into multiple tanks, and ultrasonic cleaning and stirring cleaning are used as needed to finish the cleaning. The cleaning solution is supplied to the upper stage and overflows toward the lower stage one after another, and the cleaning product is successively advanced from the lower stage to the upper stage to complete the cleaning. However, in these methods, since water is usually supplied from the top, it is difficult to efficiently remove even the dirt that has settled at the bottom of the washing container. , The problem of oxidation of the object to be cleaned, which is considered to occur during the replacement of the object to be cleaned from tank to tank, the moving mechanism of the cleaning container or the object to be cleaned and the complicated over-piping mechanism, etc. It was necessary, and there was an economic problem.

[Problems to be solved by the device]

SUMMARY OF THE INVENTION An object of the present invention is to provide an automatic water supply type ultrasonic cleaning apparatus which can eliminate the above-mentioned drawbacks and can automatically perform precise cleaning in a small space.

[Means for Solving the Problems]

In order to solve the above problems, the present invention provides an ultrasonic cleaning main tank on which an ultrasonic wave generator is mounted, an internal cleaning tank which is provided in the tank and which is filled with a cleaning liquid to immerse an object to be cleaned, It has a water supply pipe for supplying the cleaning liquid to the cleaning inner tank, and a discharge structure for discharging the overflow liquid from the main tank, and the tip portion of the water supply pipe is configured to be expandable and contractable, and a solenoid valve is provided in the water supply pipe. It is characterized in that water can be automatically controlled by mounting and closing the solenoid valve in a time-sharing manner.

〔Constitution〕

FIG. 1 is a view showing an embodiment of the device of the present invention. An ultrasonic cleaning main tank 2 on which an ultrasonic wave generator 1 is mounted, an ultrasonic soundproof cover 3, and a cleaning inner tank 5 in which an object to be cleaned 4 is immersed. , A positioning plate 6 for designating the position of the cleaning inner tank 5, parts 7 to
It is composed of a water supply pipe composed of cover elevator parts 12 to 17 composed of 11.

The ultrasonic cleaning main tank 2 is partitioned by a positioning plate 6, and an internal cleaning tank 5 is installed at the partitioned location. The upper end of the cleaning inner tank 5 is installed above the partition plate 19 so that the overflow liquid of the cleaning inner tank 5 drops into the main tank 2. A water supply tip portion 18 is attached close to the bottom of the cleaning inner tank 5. The ultrasonic wave generating oscillator 1 is installed at the bottom of the main tank 2. A soundproof cover 3 is placed on the upper surface of the main tank 2 to seal the cleaning device, and the water supply pipe 12 is installed so as to penetrate the cover 3.

As the tip portion 18 of the water supply pipe is shown in FIG. 2, the movable pipe 22 having an outer diameter slightly smaller than the inner diameter of the fixed pipe is inserted into the fixed pipe 21 having the slit, and the spring pin 23 of the fixed pipe 21 is inserted. Both pipes are connected by penetrating from the slit portion, and the movable pipe 22 can be moved and adjusted within the range of the slit length.

The water supply pipe 12 is fixed to the cover support frame 8, and the water supply tip portion 18 is attached to penetrate the cover 3. The water supply path is arranged as shown in FIG. 3, and each solenoid valve 16 is connected to the fourth solenoid valve by the solenoid valve opening / closing control device 24.
As shown in the figure, it has a function of opening and closing in a time-division manner and optionally in accordance with the object to be cleaned.

In this embodiment, since the 4-branch pipe method in which 4 branch water supply terminals are provided in 1 branch pipe is adopted, the design is such that 16 simultaneous washings can be performed at one time, but even if the quantity design is made as necessary. It doesn't matter.

On the other hand, for drainage, a structure is adopted in which the water level of the ultrasonic main tank 2 reaches a certain position by the barrier plate 19 in the ultrasonic cleaning main tank 2 as shown in FIG. Has become.

To operate the device, first, the cover lock lever 11
Is released and the cover 3 is raised. Next, lock block 9
It is locked to prevent the cover 3 from falling down. Then, the cleaning inner tank 5 containing the object to be cleaned 4 is placed at a position designated by the positioning plate 6, the cover 3 is unlocked, lowered, and locked on the lock block 10 to cover. At this time, the water supply tip portion 18 touches the object to be cleaned 4 in the cleaning inner tank 5, but since it can slide freely up and down, there is no concern that the object to be cleaned 4 will be damaged or that the cover 3 cannot be covered and the lid cannot be closed. It has been resolved. Next, in the electromagnetic opening / closing device 24, the number of times each electromagnetic valve is opened / closed, the valve closing time (T ₁ ) and the valve opening time (T ₂ ) are set, and the device is operated. As a result, the apparatus automatically opened and closed the solenoid valve at the timing shown in FIG. 4 to supply water, and the cleaning liquid was ejected from the outlet of the water supply terminal portion 18 near the bottom of the inner cleaning tank 5 and was deposited on the bottom. The overflow is executed while flying the filth.
At this time, it is also possible to control the water pressure and the amount of water depending on the object to be cleaned. When the set number of times of opening and closing is reached, the device automatically stops and the operation is completed. The cleaning liquid is not necessarily water, and can be applied to all commonly used liquids by changing the material of the pipe according to the type of liquid.

[Effect of device]

As described above, according to the apparatus of the present invention, the clean cleaning liquid is jetted and supplied from a position near the bottom of the inner cleaning tank on which the object to be cleaned is placed, so that the filth deposited on the bottom of the inner cleaning tank can be efficiently overflow treated. Accurate and precise cleaning can be performed in a single tank. Also in the water supply system, the water supply pressure and the water supply time can be arbitrarily programmed according to the object to be washed and can be applied to many kinds. Furthermore, the time-division water supply system adopted in this device can minimize the supply facility capacity required for water supply, and can perform automatic, accurate, and precise cleaning without requiring special means. The practical value is extremely large.

[Brief description of drawings]

FIG. 1 is a sectional view of an embodiment of the present invention. FIG. 2 is a perspective view of the water supply tip portion of the present invention, FIG. 3 is a water supply route diagram, and FIG. 4 is a solenoid valve opening / closing program diagram. 1 ... Transducer, 2 ... Ultrasonic cleaning main tank, 3 ... Soundproof cover, 4 ... Cleaning object, 5 ... Cleaning inner tank, 6 ... Positioning plate, 7 ... Frame, 8 ... Cover Support frame, 9,
10 ... Lock block, 11 ... Cover lock lever, 12 ... Water supply pipe, 13,14 ... Valve, 15 ...
... Flowmeter, 16 ... Solenoid valve, 17 ... Water supply flexible pipe, 18 ... Water supply tip part, 19 ... Stop plate, 2
0 ... drainage port, 21 ... fixed pipe, 22 ... movable pipe, 23 ... spring pin, 24 ... solenoid valve opening / closing control device.

Continuation of the front page (56) Reference JP 62-109322 (JP, A) JP 2-154424 (JP, A) JP 63-246826 (JP, A) JP 1-264226 (JP , A) JP 64-71133 (JP, A) Actual opening 61-130390 (JP, U) Actual opening 60-194335 (JP, U) Actual opening 61-188991 (JP, U) Actual opening 53-75970 (JP, U)

Claims (1)

[Scope of utility model registration request] 1. An ultrasonic cleaning main tank on which an ultrasonic wave generator is mounted, a cleaning inner tank provided in the tank for immersing an object to be cleaned by filling the cleaning liquid, and the cleaning liquid is supplied to the cleaning inner tank. Having a water supply pipe and a drainage structure for discharging the overflow liquid from the main tank, the tip of the water supply pipe is configured to be expandable and contractable, and a solenoid valve is attached to the water supply pipe in a time-division system. An automatic water supply type ultrasonic cleaning device characterized in that automatic control water supply can be performed by opening and closing the electromagnetic valve.