JPH06223524A - Manufacture of floating magnetic head device - Google Patents

Abstract

PURPOSE:To easily and high precisely manufacture a slider of good contact- start-stop durability and to manufacture the floating magnetic head device improved in its product life. CONSTITUTION:A surface plate 11 having a polished surface 11c which is slightly cone-shaped, constituted of a slope of declivity from an outer circumferential part 11a to an inner circumferential part 11b is used for forming a slider rail having a convex face in the longitudinal direction of the slider rail on a main surface of the slider.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a floating magnetic head device having a slider rail formed on one main surface and used in a hard disk drive device, and more particularly to a slider rail. Regarding processing method.

[0002]

2. Description of the Related Art In a hard disk drive device that records or reproduces information on or from a magnetic disk such as a hard disk, in order to avoid wear and damage due to contact between the magnetic head and the surface of the magnetic disk, the magnetic head is used when starting and stopping. In contact with the magnetic disk, the magnetic head is floated from the surface of the magnetic disk by a buoyancy generated by the air flow generated on the surface of the magnetic disk rotating at high speed during recording and reproduction of information. A magnetic head device is used.

In the above contact start / stop type flying magnetic head device, an air inflow groove is formed on the surface facing the magnetic disk, slider rails are formed on both sides of the air inflow groove, and the rail surface is an air bearing. -A magnetic head element for recording and reproducing information is mounted on a slider that is a surface, and a support is mounted on the slider. Therefore, when the rotation of the magnetic disk is stopped, the slider on which the magnetic head element is mounted contacts the surface of the magnetic disk, and when the magnetic disk rotates,
The air bearing surface receives the buoyancy generated by the rotation of the air bearing surface, the slider with the magnetic head element mounted on it floats, and the support moves on the magnetic disk surface to record and reproduce information on a predetermined recording track. To do.

[0004]

As described above, in the contact-start-stop flying type magnetic head device, the slider is in contact with the surface of the magnetic disk at the time of starting and stopping, and the slider is in contact with the magnetic disk immediately after the starting operation or after the stopping operation. Immediately after that, the slider rail surface projectingly formed on the slider slides on the magnetic disk surface. At this time, since the slider rail surface and the magnetic disk surface are very smooth flat surfaces, adhesion is likely to occur between the two surfaces, the slider rail surface and the magnetic disk surface are worn, and the product life is shortened. -Stop durability is not good.

Further, the flying state of the slider is very unstable especially when it is detached from the surface of the magnetic disk or when it comes into contact with the surface of the magnetic disk, and the flying state changes drastically due to a minute impact or the like. Therefore, there is a high possibility that the slider and the magnetic disk may inadvertently contact each other, the edge of the slider rail may damage the surface of the magnetic disk, and the product life may be shortened.

Therefore, in order to solve these problems, it has been proposed to make the slider rail surface of the slider a smooth convex curved surface.

In order to manufacture such a slider in which the slider rail surface facing the magnetic disk has a convex curved surface, for example, thermal expansion and contraction due to the temperature difference of the material forming the slider can be utilized. Conceivable. That is, the temperature of the surface plate is set to a temperature lower than that of the slider, and the slider rail surface is polished, so to speak, the slider rail surface is polished flat while the slider is thermally contracted, and the slider is returned to its original state. The shape of the slider rail surface when it returns is to be a gentle convex curved surface shape.

However, when the slider rail surface is machined by such a method, the machining accuracy is determined by the set temperature, so that it is difficult to carry out highly precise machining, and the slider manufacturing process becomes complicated, so that the productivity is increased. It causes inconvenience such as not being good.

Therefore, the present invention has been proposed in view of the conventional circumstances, and proposes a processing method capable of easily and highly accurately manufacturing a slider having good contact start / stop durability. An object of the present invention is to provide a method of manufacturing a floating magnetic head device capable of manufacturing a floating magnetic head device having an improved product life.

[0010]

In order to achieve the above object, the present invention provides a slider rail formed on one main surface,
In a method of manufacturing a flying type magnetic head device having a slider, wherein the rail surface of the slider rail is a convex curved surface in the slider rail longitudinal direction, the rail surface of the slider rail is processed using a surface plate having a concave curved surface. It is characterized by doing.

[0011]

In general, in polishing with a surface plate, the shape of the surface to be polished of the surface plate greatly affects the shape of the surface to be polished of the member to be polished. For example, if the shape of the polishing surface of the platen in contact with the surface to be polished of the member to be polished is always the same, the shape of the polishing surface is transferred to the surface to be polished.

Therefore, in the present invention, a surface plate having a concave curved surface is used, and the concave curved surface is transferred to form a convex curved surface in the slider rail longitudinal direction. At this time, by appropriately designing the shape of the surface plate, it is possible to form a curved surface having a desired shape in the slider rail longitudinal direction. Further, since the slider rail surface is mechanically processed, it can be processed easily and with high accuracy.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described below with reference to the drawings. First, FIG. 1 shows a slider of a floating magnetic head device manufactured by the method of manufacturing a floating magnetic head device according to this embodiment. Rail processing is performed on one main surface 1a of the slider chip 1 to form a groove portion 4 which is an air inflow groove, and slider rails 2 and 3 are formed on both sides of the groove portion 4 as protruding portions. Further, the magnetic head 5 is provided so that its magnetic gap faces the rail surface 2a, which is the surface of one slider rail 2 facing the magnetic disk, that is, the air bearing surface. Therefore, in such a slider chip 1, the magnetic disk surface slides on the rail surfaces 2a and 3a of the slider rails 2 and 3 immediately after the start operation or the stop operation.

At this time, in the slider of the floating magnetic head device of this embodiment, as shown in FIG. 1, the rail surfaces 2a and 3a of the slider rails 2 and 3 extend in the longitudinal direction of the slider rails 2 and 3 (in the figure). A convex curved surface is formed in the forming direction of the groove portion 4 indicated by N.).

The slider as described above is manufactured by the following manufacturing method. First, as shown in FIG. 2, a block made of alumina titanium carbide (Al ₂ O ₃ —TiC) or the like is cut into a predetermined slider chip 1 size, and rail processing is performed on this block to form a groove portion of a predetermined size. 4 to form slider rails 2 and 3 on both sides
To form.

Next, the rail surfaces 2a of the slider rails 2 and 3 of the slider chip 1 thus obtained,
3a is subjected to polishing using a polishing apparatus as shown in FIG. 3, for example. The polishing apparatus includes a surface plate 11 that rotates in the direction of arrow R in the figure, and a sliding portion 6 that holds the slider chip 1 and slides on the surface plate 11 in the radial direction. The sliding portion 6 has sliding rails 7a and 7b on one main surface thereof, and a fixed portion 7 fixedly arranged along the radial direction of the surface plate 11, and the sliding rail on one main surface. 7A and 7b are formed with recesses, and a moving portion 8 that moves on the sliding rails 7a and 7b in the direction of the arrow M ₁ in the figure, and a polishing portion that is fixed to the moving portion 8 and moves with the moving portion 8 The reference plate 9 and the processing jig 10 fixed to the polishing reference plate 9. As shown in FIG. 4, a plurality of slider chips 1 are fixed on the processing jig 10 in a predetermined direction with an adhesive or the like. The processing jig 10 is fixed to the polishing reference plate 9 with bolts or the like.

In the above polishing apparatus, as shown in FIG. 5, the slider chip 1 is fixed to the processing jig 10 so that its longitudinal direction is along the tangential line of the surface plate 11 in the circumferential direction, and the fixed polishing is performed. Since the reference plate 9 moves in the direction of the arrow M ₁ in the drawing along the radial direction of the surface plate 11, the slider chip 1 rotates the polishing surface 11c of the surface plate 11 by the rotation of the surface plate 11 in the direction of the arrow R in the drawing. While being moved (swinged) in the radial direction, the polishing surface 11c of the surface plate 11 is slidably contacted in the circumferential direction for polishing.

As described above, in the polishing process using the surface plate 11, the shape of the polishing surface 11c of the surface plate 11 greatly affects the shape of the surface to be polished of the member to be polished. For example, if the shape of the polishing surface 11c of the surface plate 11 that is in contact with the surface to be polished of the member to be polished is always the same, the shape of the polishing surface 11c is transferred to the surface to be polished.

Therefore, the surface plate 1 of the polishing apparatus used in this embodiment
As shown in FIG. 6, polishing surface 11c of No. 1 is slightly mortar-shaped, and an inclined surface is formed so as to fall from outer peripheral portion 11a toward inner peripheral portion 11b. Above surface plate 11
7 shows a cross-sectional view in the radial direction of the polishing surface 1 which is an inclined surface formed from the outer peripheral portion 11a to the inner peripheral portion 11b.
Reference numeral 1c is a flat surface having a linear inclination with an inclination angle θ ₁ . Therefore, the slider chip 1 fixed to the processing jig 10 that slides on the polishing surface 11c of the surface plate 11 is attached to the surface plate 11
As shown in FIG. 8 as viewed from the circumferential direction, it can be seen that the slider chip 1 is uniformly polished in the width direction. On the other hand, when the polishing surface 11c of the surface plate 11 is viewed in the radial direction, it has a concave curved surface. Accordingly, FIG. 9 shows the slider chip 1 fixed to the processing jig 10 sliding on the surface 11c of the surface plate 11 as seen from the radial direction of the surface plate 11; It is understood that the polishing in the longitudinal direction of the slider chip 1 that is slidably contacted in the direction is performed so as to have a shape along the concave curved surface of the surface plate 11 in the circumferential direction. That is, the slider as shown in FIG. 1 is obtained by such polishing. The surface plate 7 is made of tin or the like,
During polishing, diamond slurry is sprayed or dropped as a polishing agent.

The surface plate 11 is manufactured by polishing an ordinary surface plate having a flat surface. For example, as shown in FIG. 10, the hard cutting tool 15 made of diamond or the like is linearly moved on the polishing surface 11c of the surface plate 11 rotating in the direction of arrow R in the figure to cut the polishing surface 11c. At this time, the hard cutting tool 15 is held by the linear motion unit 12 including the support 14 and the rotating portion 13, and the polishing surface 11c of the surface plate 11 is held.
Just move it up. The rotating portion 13 that constitutes the linear motion unit 12 gives a desired angle to the hard bite 15 that is held by rotating in the direction shown by the arrow M ₂ in the drawing. The rotating portion 13 has one end rotatably attached by a rotating shaft 16 and the push-up pin 17 comes into contact with the other end so that the hard bite 15 attached to the tip end comes into contact with the surface plate 11. It is designed to change the angle. Further, the linear motion unit 12 is connected to a driving device (not shown), and as shown by an arrow M ₃ in the drawing, the platen 1
It is possible to move in the radial direction of 1.
5 is moved to a desired surface plate radius position. Therefore, by adjusting the radial position of the platen of the linear motion unit 12 and the rotating position of the linear motion unit 12, the hard bite 15 is moved to the platen 11.
It is possible to slide and cut on the surface plate 11 at a desired radial position at a desired angle. Therefore, a predetermined angle is given to the linear motion unit 12, and the polishing surface 11c of the surface plate 11 is
When the polishing surface 11c of the surface plate 11 is cut by the hard cutting tool 15 while moving upward in the radial direction, the polishing surface 11c of the surface plate 11 becomes slightly like a mortar shape as shown in FIG.

The curved surface height of the slider rails 2, 3 of the slider chip 1 as shown in FIG. 1 manufactured in this way, that is, the longitudinal direction of the slider rail 2 (or slider rail 3) as shown in FIG. The curved surface height h, which is the difference in height between the curved surface vertex 2b and the curved surface starting point 2c, is determined by the inclination angle of the polishing surface 11c of the surface plate 11, the radial position of the polishing point on the surface plate, and the length of the slider tip. It is easily requested as in.

As shown in FIG. 12, the inclination angle of the polishing surface 11c of the surface plate 11 is θ ₁ , the radial position of the polishing point on the surface plate 11 is d, and the radius of the sphere in contact with the surface plate 11 at the polishing point A. Is r, the concave curved surface formed at the point A in the circumferential direction of the surface plate 11 is the same as the curved surface of the sphere contacting the surface plate 11 at the point A, and therefore the following relationship is established. sin θ ₁ = d / r Therefore, r = d / sin θ ₁ .

Further, when the slider rail surface is polished by the polishing surface constituted by such a curved surface, a convex curved surface having the same radius as the above curved surface is formed in the slider rail longitudinal direction. Therefore, the curved surface height h of the slider rail 2 as shown in FIG. 11 is obtained as follows. That is, the curved surface height h of the slider rail 2 is obtained in the same manner as the height difference h ′ between the vertex B and a point C of the curved surface having the radius r as shown in FIG. 11 is set to ½ of the slider length indicated by L in FIG. 11, and a certain point C is set to obtain a height difference h ′ between the vertex B and a certain point C. At this time, if the angle between a certain point C and the apex B is θ ₂ , the following relationship holds.

H ′ = r−rcos θ ₂ However, at this time, the following relationship also holds. θ ₂ = sin ⁻¹ (L / 2 / R) Further, as described above, the relationship of r = d / sin θ ₁ also holds. Therefore, the curved surface height h of the slider rail 2 is easily obtained by the inclination angle θ ₁ of the polishing surface 11c of the surface plate 11, the radial position d of the polishing point on the surface plate, and the radius r of the sphere in contact with the surface plate at the polishing point. To be In other words, it is possible to guide the inclination angle θ ₁ of the polishing surface 11c of the surface plate 11 from the height of the curved surface of the slider rail 2, and thereby the surface of the surface plate 11 capable of performing slider rail polishing having a desired curved surface height. It is possible to easily design the polishing surface 11c.

Therefore, the relationship between the inclination angle θ ₁ of the polishing surface 11c of the surface plate 11 and the curved surface height h of the slider rails 2 and 3 polished by the polishing surface 11c was determined by the above method.
The slider length at this time was 2.4 mm, and the calculation was performed by changing the radial position of the polishing point on the polishing surface. The results are shown in Fig. 14. In FIG. 14, the solid line indicates the radial position of 100 mm.
In the case of, the dotted line shows the case where the radial position is 150 mm, and the dashed line shows the case where the radial position is 200 mm. In this way, the curved surface height of the convex curved surface formed on the slider rail surface is easily obtained from the inclination angle θ _{1 of} the polishing surface of the surface plate, the radial position d of the polishing point on the polishing surface, and the length L of the slider. It is also possible to obtain the tilt angle of the surface plate from the curved surface height.

Next, using the above-mentioned surface plate, the slider rail surface of the slider is polished while changing the inclination angle of the polishing surface to obtain the inclination angle θ ₁ and the curved surface height h of the slider rail surface. I investigated the relationship. A plate made of tin was used as the polishing plate, 1/4 μm diamond slurry was used as the polishing material, the rotation speed of the polishing plate was 50 rpm, the radial position of the polishing point was 120 mm, and the slider length was 2.4.
A mm slider was used. The inclination angle of the polishing surface of the surface plate was changed in the range of 0 to 0.175 °. The result is shown in Figure 1.
5 shows.

As can be seen from the results shown in FIG. 15, the curved surface height h of the slider rail surface is the polishing surface inclination angle θ _{1 of the} surface plate.
Dominated by Although the curved surface height h exists even when the inclination angle θ ₁ is 0 °, this is due to the polishing sag, which exists regardless of the magnitude of the inclination angle θ ₁ . This result is almost in agreement with the previously calculated result, and by changing the inclination angle of the polishing surface of the surface plate from these results, the desired curved surface height can be set in the slider rail surface longitudinal direction of the slider. It was confirmed that it is possible to form a curved surface having. In order to improve the contact start / stop durability, it is generally said that it is preferable to form a curved surface having a curved surface height of 20 to 30 nm. In this embodiment, the curved surface as described above is formed. Is fully possible.

Further, the results of FIG. 15 have a correlation, and it was confirmed that the curved surface height of the curved surface formed by adjusting the inclination angle of the polishing surface can be controlled with high accuracy. This is because the shape of the curved surface formed on the slider rail surface is governed only by the shape of the polishing surface of the surface plate. Further, since the rail surface of the slider rail is machined by such a method, the reproducibility is very good.

Therefore, in the method of manufacturing a flying type magnetic head device having a slider in which a slider rail is formed on one main surface and the rail surface of the slider rail is a convex curved surface in the slider rail longitudinal direction, By processing the rail surface of the rail using a surface plate having a concave curved surface, and changing the inclination angle of the polishing surface of the surface plate and the radial position of the polishing point, the slider rail surface has an arbitrary curved surface height. It was confirmed that it is possible to form a curved surface with high accuracy and easily.

[0030]

As is apparent from the above description, in the present invention, the slider rail is formed on one main surface,
In a method of manufacturing a flying type magnetic head device having a slider, wherein the rail surface of the slider rail is a convex curved surface in the slider rail longitudinal direction, the rail surface of the slider rail is processed using a surface plate having a concave curved surface. Therefore, the curved surface shape of the surface plate is mechanically transferred onto the surface of the slider rail. Therefore, the slider rail surface is easily and highly accurately processed and has good reproducibility, so that the product yield can be improved and its value is very high.

In the flying magnetic head device manufactured by the method of the present invention, since the rail surface of the slider rail of the slider is a curved surface convex in the slider rail longitudinal direction, contact start Stop durability is improved, its product life is extended, and its industrial value is very high.

[Brief description of drawings]

FIG. 1 is a perspective view showing a slider of a floating magnetic head device manufactured in an example.

FIG. 2 is a perspective view showing an example of a method of manufacturing a floating magnetic head device to which the present invention is applied, in the order of steps, showing steps of manufacturing a slider chip.

FIG. 3 is a perspective view showing a polishing apparatus for polishing the slider rail surface of the slider chip.

FIG. 4 is an enlarged perspective view showing a processing jig of the polishing apparatus.

FIG. 5 is an enlarged perspective view of essential parts showing a state where a slider chip is polished by a polishing device.

FIG. 6 is a perspective view showing a surface plate of the polishing apparatus.

FIG. 7 is a cross-sectional view showing a surface plate of a polishing device.

FIG. 8 is a schematic view showing a state in which a slider chip slides on a polishing surface of a surface plate as viewed from a peripheral direction of the surface plate.

FIG. 9 is a schematic view showing a state in which a slider chip slides on a polishing surface of a surface plate as viewed from a radial direction of the surface plate.

FIG. 10 is a schematic view showing an example of a method of polishing a surface plate.

FIG. 11 is an enlarged side view of essential parts showing a slider rail of a slider manufactured in an example.

FIG. 12 is a diagram showing a relationship between an inclination angle of a polishing surface of a surface plate and a radius of a curved surface formed at a polishing point.

FIG. 13 is a diagram showing a relationship between a radius of a curved surface formed on the slider rail surface and a curved surface height.

FIG. 14 is a diagram showing the results of calculation of the relationship between the inclination angle of the polishing surface of the surface plate and the height of the curved surface formed on the slider rail surface.

FIG. 15 is a diagram showing a result of actually manufacturing and obtaining the relationship between the inclination angle of the polishing surface of the surface plate and the curved surface height of the slider rail to be formed.

[Explanation of symbols]

 1 ・ ・ ・ ・ Slider chip 2, 3 ・ ・ Slider rail 6 ・ ・ ・ ・ Sliding part 11 ・ ・ ・ Surface plate 12 ・ ・ ・ Linear unit

Claims (1)

[Claims] 1. A slider rail is formed on one main surface,
In a method of manufacturing a flying magnetic head device having a slider in which the rail surface of the slider rail is a convex curved surface in the slider rail longitudinal direction, the rail surface of the slider rail is processed using a surface plate having a concave curved surface. A method of manufacturing a floating magnetic head device, comprising: