JPH06204134A - Elevation rotary table apparatus equipped with bias electrode - Google Patents

Abstract

PURPOSE:To enable using ordinary water wherein consideration to insulating properties is unnecessary as cooling water for a rotary shaft, eliminate possibility of bias voltage leak, and simplify electric insulation structure to the rotary shaft. CONSTITUTION:In an elevatable turn table apparatus equipped with a metal table 2 retaining a body 1 to be treated, a metal rotary shaft 3 rotating the table 2, an elevating means moving the table 2 up and down, and a bias electrode 5 applying a bias voltage to the table 2, the metal rotary shaft 3 has a double pipe structure constituted of an inner pipe 31 and an outer pipe 32, and the bias electrode 5 is installed inside the inner pipe 31 so as to be insulated from the inner pipe 31. A bias voltage is applied to the table 2 via the bias electrode 5. While the table 2 is rotated by the rotary shaft 3, cooling water composed of ordinary water is supplied to the space between the inner pipe 31 and the outer pipe 32, thereby cooling the rotary shaft 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lifting / lowering rotary table device with a bias electrode, which is used in, for example, a vacuum film forming device utilizing plasma discharge, arc discharge or the like.

[0002]

2. Description of the Related Art For example, in a vacuum film forming apparatus using a plasma device, arc discharge, etc., an object to be processed which has been heated to a high temperature in a load lock chamber is conveyed to the film forming chamber and supported on a table. While rotating the table and applying a bias voltage to the table, the evaporation material from the evaporation source is deposited on the surface of the object to be processed to form a film. The bias voltage is applied to the table in order to enhance the adhesion and hardness of the film deposited on the object to be processed.

FIG. 5 shows a conventional lifting / lowering rotary table device with a bias electrode used in a vacuum film forming apparatus, in which a metal rotary shaft 3 is provided on a metal table 2 on which a workpiece 1 is supported. The pulley 36 at the base of the rotary shaft 3 is
The timing belt 38 of the drive motor 37 is connected. A metal holder 56 is provided below the rotary shaft 3 via a bearing 55, and the holder 56 is fixed to the metal holding frame 6 via an electric insulating material 57 made of Teflon or ceramic. Has been done.

The holder 56 is provided with an inlet 41A and an outlet 42A of cooling water and a terminal 58 for applying a bias voltage. The terminal 58 is electrically connected to the rotary shaft 3 through the bearing 55, and the table 2 is electrically connected to the rotary shaft 3 through the rotary shaft 3.
A bias voltage is applied to. The bottom wall 11 of the film forming chamber 10 is at earth potential. In order to electrically insulate the rotary shaft 3 and the bottom wall 11 of the film forming chamber 10, an electric insulating material 65 made of ceramic or the like is provided on the bottom wall 11, and bearings 66, 67 are provided on the electric insulating material 65. It is fixed, and the rotating shaft 3 is rotatably held by the bearings 66 and 67.

The holding frame 6 is slidably held by a rod 63 fixed to the bottom wall 11 of the film forming chamber 10, and a cylinder rod of an air cylinder 64 is connected to the lower end of the holding frame 6 to form a cylinder. 64 is fixed to a fixed frame 68, and this fixed frame 68 is fixed to the film forming chamber 10. This air cylinder 64 is installed on the table
The table 2 is lowered to a standby position below while the object 1 to be processed is conveyed. When the object 1 to be processed is positioned above the table 2, the air cylinder 6
4, the rotary shaft 3 rises, and the table 2 pushes up the object 1 to receive the object 1 to be processed. Holding frame 6
A drive motor 37 is fixed to the drive shaft 37 and moves up and down integrally with the rotary shaft 3.

When a bias voltage is applied to the rotary shaft 3, the rotary shaft 3 becomes hot. Therefore, in order to cool the rotary shaft 3, the space inside the rotary shaft 3 is divided into two as shown in FIG. A partition plate 33A is provided for
The cooling water supplied from 1A is one space 34 of the rotary shaft 3.
A is moved upward, over the upper portion of the partition plate 33A, lowered in the other space 35A, and discharged from the outlet 42A in the lower portion of the rotary shaft 3 to the outside. Since this cooling water directly contacts the rotating shaft 3 to which a voltage is applied, pure water having a high insulating property is used.

[0007]

However, in the conventional apparatus shown in FIG. 5, since pure water having a high insulating property is used as the cooling water for the rotary shaft 3, it is necessary to constantly manage the pure water, which is complicated. There was a problem. In addition, it is difficult to use a metal pipe as the cooling water pipe in order to maintain a sufficient insulating property, and there is a problem that the burden on the piping facility is large.
Further, there is a risk that the bias voltage may leak if the insulating property of the cooling water decreases. Further, the structure required to electrically insulate the rotary shaft 3 from the film forming chamber 10 is complicated, and there is a manufacturing difficulty.

The present invention has been made based on the above circumstances, and an object thereof is to make it possible to use ordinary water as cooling water which does not require consideration of insulation properties, and to prevent leakage of bias voltage. It is an object of the present invention to provide a lifting / lowering rotary table device with a bias electrode, which has no fear and can simplify an electrically insulating structure from a rotary shaft.

[0009]

SUMMARY OF THE INVENTION A lifting / lowering rotary table device with a bias electrode according to the present invention is a table for supporting an object to be processed, a rotary shaft for rotating the table, a lifting means for lifting / lowering the table, and the table. In a lifting / lowering rotary table device with a bias electrode having a bias electrode for applying a bias voltage to the inside, the rotating shaft has a double tube structure including an inner tube and an outer tube, and the bias electrode is provided inside the inner tube. The pipe is insulated from the pipe, and cooling water is supplied to the space between the inner pipe and the outer pipe.

[0010]

[Operation] The rotating shaft has a double pipe structure consisting of an inner pipe and an outer pipe,
Since the bias electrode is insulated from the inner pipe and the cooling water is supplied by utilizing the space between the inner pipe and the outer pipe, the cooling water does not come into direct contact with the bias electrode. Further, no bias voltage is applied to the rotating shaft.

[0011]

EXAMPLES Examples of the present invention will be described below. FIG. 1 shows a lifting rotary table device with a bias electrode according to an embodiment of the present invention, which is used in a vacuum film forming apparatus. A rotary shaft 3 for rotating the table 2 is provided below the metal table 2 that supports the object 1 to be processed so as to extend vertically. As shown in FIGS. 2 and 3, the rotating shaft 3 has a double pipe structure including an inner pipe 31 and an outer pipe 32 made of metal, and cooling water is provided between the inner pipe 31 and the outer pipe 32. A space is formed.

This space is divided into two by a partition plate 33,
A cooling water inlet 41 is provided in a lower portion of the rotating shaft 3 facing the space 34, and a cooling water outlet 42 is provided in a lower portion of the rotating shaft 3 facing the other space 35. A communication path is formed by a gap above the partition plate 33, and one space 34 of the rotating shaft 3 serves as an ascending path for the cooling water and the other space 35 serves as a descending path for the cooling water.

Inside the inner tube 31 of the rotary shaft 3, a bias electrode 5 made of, for example, SUS and extending vertically is provided.
1 is provided in an insulated state. That is, the upper end of the bias electrode 5 is connected to the table 2 and fixed to the rotating shaft 3 via the insulating insulator 51, and the lower end of the bias electrode 5 is fixed to the lower part of the rotating shaft 3 via the insulating bush 52. Has been done. Further, the lower end of the bias electrode 5 extends through the insulating bush 52 and is rotatably connected to the conductive plate 54 via a bearing 53. The conductive plate 54 is held by the holding frame 6, and the bias voltage is applied to the bias electrode 5 via the conductive plate 54 and the bearing 53. The bottom wall 11 of the film forming chamber 10 is at earth potential.

Insulating bush 5 at the lower end of the bias electrode 5
A vent hole (not shown) is provided at 2, and the vent hole communicates with the inside of the inner tube 31 of the rotary shaft 3 so that the atmosphere of the bias electrode 5 communicates with the atmosphere. The rotating shaft 3 and the bottom wall 11 of the film forming chamber 10 are connected by a metal bearing 61, the rotating shaft 3 and the holding frame 6 are connected by a ball bearing 62, and the rotating shaft 3 is connected to the film forming chamber 10 and the holding frame 6. It is supposed to be rotatable. A pulley 36 is provided at the base of the rotary shaft 3, and a timing belt 38 of a drive motor 37 is connected to the pulley 36. The drive motor 37 is fixed to the holding frame 6.

The holding frame 6 is slidably held by a rod 63 fixed to the bottom wall 11 of the film forming chamber 10. A cylinder rod of an air cylinder 64 is connected to the holding frame 6, and the air cylinder 64 is fixed. It is fixed to a frame 68, and this fixed frame 68 is fixed to the film forming chamber 10. The air cylinder 64 raises and lowers the table 2 with respect to the film forming chamber 10 and constitutes an elevating means. An o-ring 39 is provided for air-tight sealing when the rotary shaft 3 is lifted and lowered.
Is used. Further, the cooling water passage portion is also hermetically sealed by the O-ring 39.

Next, the entire vacuum film forming apparatus will be described. FIG. 4 shows an outline of the vacuum film forming apparatus. Reference numeral 12 is a load lock chamber, 10 is a film forming chamber, and a transfer carriage 1 for transferring the object 1 to be processed from the load lock chamber 12 to the film forming chamber 10.
3 is provided. The carriage 13 has a plurality of rollers 14.
Thus, the load lock chamber 12 is reciprocated from the film formation chamber 10 to the load lock chamber 12 and vice versa. The load lock chamber 12 has a lifting / lowering rotary table device 15
Is provided, and the object to be processed 1 is held and heated by the elevating and rotating table device 15. An evaporation source unit 16 is provided on the upper and side portions of the film forming chamber 10, and an evaporation source substance from this is used for forming a film on the object 1.

Next, the operation of the lifting rotary table device with the bias electrode according to this embodiment will be described.

The object 1 to be processed, which has been subjected to the heat treatment in the load lock chamber 12, is transferred by the transfer carriage 13 and is transferred to the film forming chamber 10.
Stand still in place. The table 2 waiting below the predetermined position is lifted by the air cylinder 64,
The table 1 pushes up the object 1 to be processed, and receives the object 1 to be processed from the carriage 13. The table 2 is further raised by the air cylinder 64 and stopped at a predetermined processing position. The rotation shaft 3 is rotated by the drive motor 37, and the object 1 to be processed on the table 2 is rotated. On the other hand, when the bias voltage is applied to the bias electrode 5, it is also supplied to the table 2. On the other hand, the cooling water consisting of ordinary water is the rotating shaft 3.
When it is supplied from the inlet 41 below the one space 34 between the inner pipe 31 and the outer pipe 32, the cooling water rises, gets over the upper end of the partition plate 33, and descends the other space 35, It flows out from the outlet 42. The rotating shaft 3 is cooled by this cooling water. In this way, the object 1 is rotated, the bias voltage is applied to the table 2, and the rotary shaft 3 is cooled by the cooling water, so that the evaporation source substance is applied to the surface of the object 1 from the evaporation source unit 16. The film is deposited and film formation is performed.

As described above, according to this embodiment, the rotary shaft 3 has a double tube structure of the inner pipe 31 and the outer pipe 32, and the bias electrode 5 is provided on the inner pipe 31 in an insulated manner. Since the cooling water is supplied using the space between the inner pipe 31 and the outer pipe 32, the cooling water does not come into direct contact with the bias electrode 5. Therefore, the cooling water is not required to have insulating properties, and ordinary water can be used. Therefore, the management of pure water, which has been conventionally required, is completely unnecessary, and a metal tube can be used as the cooling water pipe. Further, it is possible to avoid the risk of electric leakage due to poor insulation of cooling water. Further, it is not necessary to electrically insulate the rotary shaft 3 from the film forming chamber 10, and the manufacturing is structurally easy. Further, since the atmosphere of the bias electrode 5 communicates with the atmosphere through the ventilation hole and the air can freely flow in and out through the ventilation hole, the heat dissipation of the bias electrode 5 is sufficient and the cooling effect is also obtained. It gets even higher.

Actually, by using the lifting / lowering rotary table device with the bias electrode of this embodiment, the object to be processed 1 heated to 550 ° C. is supported on the table 2, and the bias of −2 kV is applied to the table 2 via the bias electrode 5. When a film was formed by applying a voltage, a good film could be formed.

[0021]

According to the present invention, the rotating shaft has a double-tube structure of an inner tube and an outer tube, and a bias electrode is insulated from the inner tube so that a space between the inner tube and the outer tube of the rotating shaft is provided. Since the cooling water is supplied using the space, the cooling water does not directly contact the bias electrode. Therefore, the cooling water is not required to have insulation properties,
It becomes possible to use ordinary water. Therefore, the management of pure water, which has been conventionally required, is completely unnecessary, and a metal tube can be used as the cooling water pipe. Further, it is possible to avoid the risk of electric leakage due to poor insulation of cooling water. Further, it is not necessary to electrically insulate the rotating shaft, and the manufacturing is structurally easy.

[Brief description of drawings]

FIG. 1 is a sectional view of a lifting / lowering rotary table device with a bias electrode according to an embodiment of the present invention.

FIG. 2 is a cross-sectional plan view of a rotating shaft.

FIG. 3 is a partially cutaway perspective view of a rotating shaft.

FIG. 4 is a schematic sectional view of a vacuum film forming apparatus.

FIG. 5 is a cross-sectional view of a conventional lifting rotary table device with a bias electrode.

FIG. 6 is a cross-sectional plan view of a conventional rotary shaft.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Object to be processed 10 Film forming chamber 11 Bottom wall of film forming chamber 12 Load lock chamber 16 Evaporation source unit 2 Table 3 Rotating shaft 31 Inner tube 32 Outer tube 33, 33A Partition plate 34, 34A One space 35, 35A Another Space 41, 41A Cooling water inlet 42, 42A Cooling water outlet 5 Bias electrode 6 Holding frame

Claims (1)

[Claims] 1. A lifting and lowering device with a bias electrode, comprising a table for supporting an object to be processed, a rotary shaft for rotating the table, a lifting and lowering means for lifting and lowering the table, and a bias electrode for applying a bias voltage to the table. In the rotary table device, the rotating shaft has a double-tube structure including an inner tube and an outer tube, and the bias electrode is provided inside the inner tube so as to be insulated from the inner tube. An elevating and lowering table device with a bias electrode, characterized in that cooling water is supplied to the space between them.